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WO2009011235A1 - 焼結シリコンウエハ - Google Patents

焼結シリコンウエハ Download PDF

Info

Publication number
WO2009011235A1
WO2009011235A1 PCT/JP2008/062174 JP2008062174W WO2009011235A1 WO 2009011235 A1 WO2009011235 A1 WO 2009011235A1 JP 2008062174 W JP2008062174 W JP 2008062174W WO 2009011235 A1 WO2009011235 A1 WO 2009011235A1
Authority
WO
WIPO (PCT)
Prior art keywords
silicon wafer
sintered silicon
volume ratio
sintered
average
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/062174
Other languages
English (en)
French (fr)
Inventor
Ryo Suzuki
Hiroshi Takamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mining Holdings Inc
Original Assignee
Nippon Mining and Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining and Metals Co Ltd filed Critical Nippon Mining and Metals Co Ltd
Priority to US12/522,959 priority Critical patent/US20100016144A1/en
Priority to EP08777889A priority patent/EP2169707A4/en
Priority to KR1020097013670A priority patent/KR101107543B1/ko
Priority to JP2008555957A priority patent/JP4323562B2/ja
Publication of WO2009011235A1 publication Critical patent/WO2009011235A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Products (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)

Abstract

 焼結シリコンウエハであって、当該ウエハに含まれるシリコン酸化物の体積比率が０．０１％以上、０．２％以下、シリコン炭化物の体積比率が０．０１％以上、０．１５％以下、金属ケイ化物の体積比率が０．００６％以下である焼結シリコンウエハ。及び直径が４００ｍｍ以上の焼結シリコンウエハであって、当該焼結シリコンウエハから複数の試験試料を採取して測定した、下記（１）～（３）の機械的特性を有する上記１～３のいずれかに記載の焼結シリコンウエハ。（１）３点曲げ法による抗折力の平均値が２０ｋｇｆ／ｍｍ２～５０ｋｇｆ／ｍｍ２、（２）引張り強度の平均値が５ｋｇｆ／ｍｍ２～２０ｋｇｆ／ｍｍ２、（３）ビッカース硬度の平均値がＨｖ８００～Ｈｖ１２００。大型の円盤状焼結シリコンウエハにおいても、一定の強度を備えた焼結体ウエハであり、単結晶シリコンの機械的物性に類似した焼結シリコンウエハを提供することにある。　
PCT/JP2008/062174 2007-07-13 2008-07-04 焼結シリコンウエハ Ceased WO2009011235A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/522,959 US20100016144A1 (en) 2007-07-13 2008-07-04 Sintered Silicon Wafer
EP08777889A EP2169707A4 (en) 2007-07-13 2008-07-04 SINTERED SILICON WAFER
KR1020097013670A KR101107543B1 (ko) 2007-07-13 2008-07-04 소결 실리콘 웨이퍼
JP2008555957A JP4323562B2 (ja) 2007-07-13 2008-07-04 焼結シリコンウエハ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007184758 2007-07-13
JP2007-184758 2007-07-13

Publications (1)

Publication Number Publication Date
WO2009011235A1 true WO2009011235A1 (ja) 2009-01-22

Family

ID=40259573

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062174 Ceased WO2009011235A1 (ja) 2007-07-13 2008-07-04 焼結シリコンウエハ

Country Status (7)

Country Link
US (1) US20100016144A1 (ja)
EP (1) EP2169707A4 (ja)
JP (1) JP4323562B2 (ja)
KR (1) KR101107543B1 (ja)
CN (1) CN101611469A (ja)
TW (1) TWI438310B (ja)
WO (1) WO2009011235A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8236428B2 (en) 2008-07-10 2012-08-07 Jx Nippon Mining & Metals Corporation Hybrid silicon wafer and method for manufacturing same

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009011234A1 (ja) * 2007-07-13 2009-01-22 Nippon Mining & Metals Co., Ltd. 焼結シリコンウエハ
KR101382657B1 (ko) 2009-11-06 2014-04-07 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 하이브리드 실리콘 웨이퍼
EP2497848A4 (en) 2009-11-06 2014-08-06 Jx Nippon Mining & Metals Corp HYBRID SILICON WAFER
US8252422B2 (en) 2010-07-08 2012-08-28 Jx Nippon Mining & Metals Corporation Hybrid silicon wafer and method of producing the same
US8647747B2 (en) 2010-07-08 2014-02-11 Jx Nippon Mining & Metals Corporation Hybrid silicon wafer and method of producing the same
KR101356303B1 (ko) 2011-03-15 2014-01-28 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 다결정 실리콘 웨이퍼
WO2013115289A1 (ja) 2012-02-01 2013-08-08 Jx日鉱日石金属株式会社 多結晶シリコンスパッタリングターゲット
JP5826915B2 (ja) 2012-03-12 2015-12-02 Jx日鉱日石金属株式会社 多結晶シリコンウエハ
JP6502399B2 (ja) * 2017-02-06 2019-04-17 Ｊｘ金属株式会社 単結晶シリコンスパッタリングターゲット
JP6546953B2 (ja) 2017-03-31 2019-07-17 Ｊｘ金属株式会社 スパッタリングターゲット−バッキングプレート接合体及びその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3342898B2 (ja) 1991-11-26 2002-11-11 株式会社東芝 硅素焼結体およびこれを用いて形成したウェハ保持用ボード、スパッタリングターゲットおよびシリコンウェハ
JP2003286023A (ja) * 2002-03-27 2003-10-07 Tdk Corp シリコン焼結体の製造方法およびシリコン焼結体
JP2004284929A (ja) * 2003-03-25 2004-10-14 Nikko Materials Co Ltd シリコン焼結体の製造方法
JP3819863B2 (ja) 2003-03-25 2006-09-13 日鉱金属株式会社 シリコン焼結体及びその製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4040849A (en) * 1976-01-06 1977-08-09 General Electric Company Polycrystalline silicon articles by sintering
US4921026A (en) * 1988-06-01 1990-05-01 Union Carbide Chemicals And Plastics Company Inc. Polycrystalline silicon capable of yielding long lifetime single crystalline silicon
JP2794382B2 (ja) * 1993-05-07 1998-09-03 株式会社ジャパンエナジー スパッタリング用シリサイドターゲット及びその製造方法
US5770324A (en) * 1997-03-03 1998-06-23 Saint-Gobain Industrial Ceramics, Inc. Method of using a hot pressed silicon carbide dummy wafer
CN101405846B (zh) * 2006-08-28 2010-09-29 国立大学法人名古屋大学 等离子体氧化处理方法及装置
CN101687709B (zh) * 2007-07-13 2013-02-13 Jx日矿日石金属株式会社 烧结硅晶片
WO2009011234A1 (ja) * 2007-07-13 2009-01-22 Nippon Mining & Metals Co., Ltd. 焼結シリコンウエハ
EP2299474B1 (en) * 2008-07-10 2013-01-23 JX Nippon Mining & Metals Corporation Hybrid silicon wafer and method for manufacturing same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3342898B2 (ja) 1991-11-26 2002-11-11 株式会社東芝 硅素焼結体およびこれを用いて形成したウェハ保持用ボード、スパッタリングターゲットおよびシリコンウェハ
JP2003286023A (ja) * 2002-03-27 2003-10-07 Tdk Corp シリコン焼結体の製造方法およびシリコン焼結体
JP2004284929A (ja) * 2003-03-25 2004-10-14 Nikko Materials Co Ltd シリコン焼結体の製造方法
JP3819863B2 (ja) 2003-03-25 2006-09-13 日鉱金属株式会社 シリコン焼結体及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2169707A4

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8236428B2 (en) 2008-07-10 2012-08-07 Jx Nippon Mining & Metals Corporation Hybrid silicon wafer and method for manufacturing same

Also Published As

Publication number Publication date
CN101611469A (zh) 2009-12-23
EP2169707A4 (en) 2012-11-21
EP2169707A1 (en) 2010-03-31
JP4323562B2 (ja) 2009-09-02
TW200907120A (en) 2009-02-16
JPWO2009011235A1 (ja) 2010-09-16
KR20090096486A (ko) 2009-09-10
KR101107543B1 (ko) 2012-01-31
US20100016144A1 (en) 2010-01-21
TWI438310B (zh) 2014-05-21

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