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WO2009001830A1 - 力学量センサおよびその製造方法 - Google Patents

力学量センサおよびその製造方法 Download PDF

Info

Publication number
WO2009001830A1
WO2009001830A1 PCT/JP2008/061485 JP2008061485W WO2009001830A1 WO 2009001830 A1 WO2009001830 A1 WO 2009001830A1 JP 2008061485 W JP2008061485 W JP 2008061485W WO 2009001830 A1 WO2009001830 A1 WO 2009001830A1
Authority
WO
WIPO (PCT)
Prior art keywords
section
movable
quantity sensor
mechanical quantity
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/061485
Other languages
English (en)
French (fr)
Inventor
Akio Morii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to US12/528,052 priority Critical patent/US8250918B2/en
Priority to EP08765817.5A priority patent/EP2161539B1/en
Publication of WO2009001830A1 publication Critical patent/WO2009001830A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)

Abstract

　力学量センサが、開口を有する固定部と、この開口内に配置され、かつ前記固定部に対して変位する変位部と、前記固定部と前記変位部とを接続する接続部とを有する第１の構造体と、前記変位部に接合される重量部と、前記固定部に接合される台座とを有し、前記第１の構造体に積層配置される第２の構造体と、前記重量部との対向面に配置される駆動用電極及び検出用電極を有し、前記台座に接続されて前記第２の構造体に積層配置される基体とを具備し、前記第２の構造体が、前記第２の基体と対向する前記重量部の面上であって、前記駆動用電極及び前記検出用電極の配置されていない領域と対応する領域に配置される凹部を有する。
PCT/JP2008/061485 2007-06-26 2008-06-24 力学量センサおよびその製造方法 Ceased WO2009001830A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/528,052 US8250918B2 (en) 2007-06-26 2008-06-24 Mechanical quantity sensor and method of manufacturing the same
EP08765817.5A EP2161539B1 (en) 2007-06-26 2008-06-24 Mechanical quantity sensor and its manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007167834A JP2009008438A (ja) 2007-06-26 2007-06-26 角速度センサおよびその製造方法
JP2007-167834 2007-06-26

Publications (1)

Publication Number Publication Date
WO2009001830A1 true WO2009001830A1 (ja) 2008-12-31

Family

ID=40185644

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061485 Ceased WO2009001830A1 (ja) 2007-06-26 2008-06-24 力学量センサおよびその製造方法

Country Status (4)

Country Link
US (1) US8250918B2 (ja)
EP (1) EP2161539B1 (ja)
JP (1) JP2009008438A (ja)
WO (1) WO2009001830A1 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE531775C2 (sv) * 2006-04-26 2009-08-04 Nems Ab Anordning och komponent för parallell detektion i realtid av individuella nanomekaniska rörelser hos en samling/array av individuella och oberoende oscillerande balkar
WO2008078770A1 (ja) * 2006-12-27 2008-07-03 Dai Nippon Printing Co., Ltd. 力学量センサおよびその製造方法
JP4924238B2 (ja) * 2007-06-26 2012-04-25 大日本印刷株式会社 角速度センサの製造方法
JP2009008438A (ja) * 2007-06-26 2009-01-15 Dainippon Printing Co Ltd 角速度センサおよびその製造方法
JP5724342B2 (ja) 2009-12-10 2015-05-27 大日本印刷株式会社 パターン配置方法並びにシリコンウェハ及び半導体デバイスの製造方法
JP2014126495A (ja) * 2012-12-27 2014-07-07 Seiko Epson Corp センサー、電子機器、および移動体
JP6661941B2 (ja) * 2015-09-29 2020-03-11 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、センサーデバイス、電子機器および移動体

Citations (9)

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JPH10270719A (ja) * 1997-03-26 1998-10-09 Mitsubishi Materials Corp 半導体慣性センサ及びその製造方法
JP2004245753A (ja) * 2003-02-17 2004-09-02 Anelva Corp 静電容量型圧力センサ及びその製造方法
JP2005091030A (ja) * 2003-09-12 2005-04-07 Matsushita Electric Works Ltd 静電容量型加速度センサ
JP2005127745A (ja) * 2003-10-21 2005-05-19 Hitachi Metals Ltd 集積回路付加速度センサー
JP2005249454A (ja) * 2004-03-02 2005-09-15 Mitsubishi Electric Corp 容量型加速度センサ
JP2005265565A (ja) * 2004-03-18 2005-09-29 Sony Corp 容量検出型センサの製造方法および容量検出型センサ
JP2006226770A (ja) * 2005-02-16 2006-08-31 Seiko Instruments Inc 力学量センサ
JP2007047069A (ja) * 2005-08-11 2007-02-22 Seiko Instruments Inc 力学量センサ及び電子機器並びに力学量センサの製造方法
JP2007057469A (ja) * 2005-08-26 2007-03-08 Seiko Instruments Inc 力学量センサ及び力学量センサの製造方法

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US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
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JP2563071Y2 (ja) * 1991-12-09 1998-02-18 オムロン株式会社 加速度センサ
JPH06268237A (ja) * 1993-03-10 1994-09-22 Nissan Motor Co Ltd 半導体加速度センサ
JPH06265573A (ja) * 1993-03-16 1994-09-22 Hitachi Ltd 加速度センサ
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JP4994098B2 (ja) * 2007-04-25 2012-08-08 株式会社リコー 半導体センサ及びその製造方法
JP4924238B2 (ja) * 2007-06-26 2012-04-25 大日本印刷株式会社 角速度センサの製造方法
JP2009008438A (ja) * 2007-06-26 2009-01-15 Dainippon Printing Co Ltd 角速度センサおよびその製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270719A (ja) * 1997-03-26 1998-10-09 Mitsubishi Materials Corp 半導体慣性センサ及びその製造方法
JP2004245753A (ja) * 2003-02-17 2004-09-02 Anelva Corp 静電容量型圧力センサ及びその製造方法
JP2005091030A (ja) * 2003-09-12 2005-04-07 Matsushita Electric Works Ltd 静電容量型加速度センサ
JP2005127745A (ja) * 2003-10-21 2005-05-19 Hitachi Metals Ltd 集積回路付加速度センサー
JP2005249454A (ja) * 2004-03-02 2005-09-15 Mitsubishi Electric Corp 容量型加速度センサ
JP2005265565A (ja) * 2004-03-18 2005-09-29 Sony Corp 容量検出型センサの製造方法および容量検出型センサ
JP2006226770A (ja) * 2005-02-16 2006-08-31 Seiko Instruments Inc 力学量センサ
JP2007047069A (ja) * 2005-08-11 2007-02-22 Seiko Instruments Inc 力学量センサ及び電子機器並びに力学量センサの製造方法
JP2007057469A (ja) * 2005-08-26 2007-03-08 Seiko Instruments Inc 力学量センサ及び力学量センサの製造方法

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Title
See also references of EP2161539A4 *

Also Published As

Publication number Publication date
EP2161539A4 (en) 2012-05-30
JP2009008438A (ja) 2009-01-15
US8250918B2 (en) 2012-08-28
US20100139400A1 (en) 2010-06-10
EP2161539B1 (en) 2013-11-06
EP2161539A1 (en) 2010-03-10

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