[go: up one dir, main page]

WO2009001504A1 - 多関節型座標測定装置のパラメータ校正方法 - Google Patents

多関節型座標測定装置のパラメータ校正方法 Download PDF

Info

Publication number
WO2009001504A1
WO2009001504A1 PCT/JP2008/001308 JP2008001308W WO2009001504A1 WO 2009001504 A1 WO2009001504 A1 WO 2009001504A1 JP 2008001308 W JP2008001308 W JP 2008001308W WO 2009001504 A1 WO2009001504 A1 WO 2009001504A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
measuring arm
calibration
operating
measuring apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001308
Other languages
English (en)
French (fr)
Inventor
Fumikazu Ebara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kosaka Laboratory Ltd
Original Assignee
Kosaka Laboratory Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kosaka Laboratory Ltd filed Critical Kosaka Laboratory Ltd
Priority to US12/666,877 priority Critical patent/US8468869B2/en
Publication of WO2009001504A1 publication Critical patent/WO2009001504A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Manipulator (AREA)

Abstract

　本発明の多関節型座標測定装置のパラメータ校正方法では、まず、二つの小球（２２）を有する標準器（２０Ａ）を測定アーム（２）の操作空間内に設置し、測定アーム（２）を操作してプローブ（３）をそれらの小球（２２）に近づけて複数のアーム姿勢で小球（２２）の各々の空間座標を測定し、その測定結果に基づいて一次校正パラメータについてのパラメータ校正処理を行う。つぎに、一つの小球（２２）を有する標準器（２０Ｃ）を測定アーム（２）の操作空間内に設置し、測定アーム（２）を操作してプローブ（３）をその小球（２２）に近づけて複数のアーム姿勢で小球（２２）の空間座標を測定し、その測定結果に基づいて二次校正パラメータについてのパラメータ校正処理を行う。このようなパラメータ校正方法により、測定アームのパラメータの校正作業に要する手間や時間を削減することができる。  
PCT/JP2008/001308 2007-06-28 2008-05-26 多関節型座標測定装置のパラメータ校正方法 Ceased WO2009001504A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/666,877 US8468869B2 (en) 2007-06-28 2008-05-26 Method for calibrating parameter of articulated coordinate measuring apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-169973 2007-06-28
JP2007169973A JP5153228B2 (ja) 2007-06-28 2007-06-28 多関節型座標測定装置のパラメータ校正方法

Publications (1)

Publication Number Publication Date
WO2009001504A1 true WO2009001504A1 (ja) 2008-12-31

Family

ID=40185332

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001308 Ceased WO2009001504A1 (ja) 2007-06-28 2008-05-26 多関節型座標測定装置のパラメータ校正方法

Country Status (3)

Country Link
US (1) US8468869B2 (ja)
JP (1) JP5153228B2 (ja)
WO (1) WO2009001504A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104897093A (zh) * 2015-06-24 2015-09-09 中国航天空气动力技术研究院 虎克铰的精度测量方法

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0525306D0 (en) 2005-12-13 2006-01-18 Renishaw Plc Method of machine tool calibration
JP2010169635A (ja) * 2009-01-26 2010-08-05 Nikon Corp 形状測定装置
US7905027B2 (en) * 2009-07-01 2011-03-15 Hexagon Metrology, Inc. Method and apparatus for probe tip diameter calibration
EP2290486A1 (en) * 2009-08-28 2011-03-02 Renishaw plc Machine tool calibration method
KR101366413B1 (ko) * 2012-11-28 2014-02-25 에스티엑스조선해양 주식회사 파이프 조정관 형상 측정을 위한 포터블 다관절 계측장치
CN103278116A (zh) * 2013-05-07 2013-09-04 九江精密测试技术研究所 一种六自由度关节式坐标测量机标定方法
CN105247319B (zh) * 2013-05-27 2018-07-10 卡尔蔡司工业测量技术有限公司 用于校准坐标测量仪的装置和方法
CN104655167B (zh) * 2013-11-20 2017-02-01 北京信息科技大学 关节式坐标测量机的角度编码器偏心及结构参数标定方法
JP6226716B2 (ja) * 2013-11-22 2017-11-08 株式会社ミツトヨ アーム型三次元測定機及びアーム型三次元測定機における撓み補正方法
CN106052607B (zh) * 2016-06-28 2019-03-12 天津大学 多传感器测量机坐标统一和精度检定的标准器及使用方法
CN106092008B (zh) * 2016-06-28 2019-03-12 天津大学 高精度复合式测量机的坐标统一标定器及标定方法
CN109416237B (zh) * 2016-07-01 2021-05-18 株式会社三丰 用于向用于坐标测量机的可拆卸探头提供电力的电力传输构造
DE102016216902A1 (de) * 2016-09-06 2018-03-08 Deckel Maho Pfronten Gmbh Werkzeugmaschine zur spanenden Bearbeitung eines Werkstücks sowie Spindelträgerbaugruppe zum Einsatz an einer derartigen Werkzeugmaschine
DE102017105170A1 (de) 2017-03-10 2018-09-13 Carl Zeiss Industrielle Messtechnik Gmbh Halterung für mehrere Prüfnormale zur Kalibrierung eines Messsystems
KR102204895B1 (ko) * 2019-06-14 2021-01-19 (주)대호테크 성형 장치의 측정 장치 및 측정 방법
KR102040715B1 (ko) * 2019-10-11 2019-11-07 우정엔지니어링 주식회사 연결 엘리먼트의 치수 계측 시스템 및 방법
JP7521830B2 (ja) * 2020-12-16 2024-07-24 国立研究開発法人産業技術総合研究所 接触又は接続状態の判定方法及び情報処理装置
CN114983598B (zh) * 2022-06-01 2024-10-25 苏州微创畅行机器人有限公司 末端工具更换装置、手术机器人、更换方法及控制设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6228808A (ja) * 1985-07-31 1987-02-06 Fujitsu Ltd ロボツト座標系の較正方法
JPH01321183A (ja) * 1988-06-21 1989-12-27 Fujitsu Ltd ロボットの原点校正方法
JPH07501755A (ja) * 1991-12-10 1995-02-23 アセア　ブラウン　ボベリ　アクチボラグ 産業用ロボットの運動軸の較正方法及び装置
JP2004264135A (ja) * 2003-02-28 2004-09-24 Kosaka Laboratory Ltd 多関節型座標測定装置
JP2005157784A (ja) * 2003-11-26 2005-06-16 Tokyo Denki Univ 小型アーティファクトを用いた運動機構の校正方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6228802A (ja) * 1985-07-31 1987-02-06 Toshiba Corp 負荷制御装置
US5430948A (en) * 1993-07-12 1995-07-11 Vander Wal, Iii; H. James Coordinate measuring machine certification system
JP3005681B1 (ja) * 1998-12-17 2000-01-31 工業技術院長 Ｃｍｍ校正ゲージ及びｃｍｍの校正方法
JP3905771B2 (ja) * 2001-03-02 2007-04-18 株式会社ミツトヨ 測定機の校正方法及び装置
US7640674B2 (en) * 2008-05-05 2010-01-05 Hexagon Metrology, Inc. Systems and methods for calibrating a portable coordinate measurement machine

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6228808A (ja) * 1985-07-31 1987-02-06 Fujitsu Ltd ロボツト座標系の較正方法
JPH01321183A (ja) * 1988-06-21 1989-12-27 Fujitsu Ltd ロボットの原点校正方法
JPH07501755A (ja) * 1991-12-10 1995-02-23 アセア　ブラウン　ボベリ　アクチボラグ 産業用ロボットの運動軸の較正方法及び装置
JP2004264135A (ja) * 2003-02-28 2004-09-24 Kosaka Laboratory Ltd 多関節型座標測定装置
JP2005157784A (ja) * 2003-11-26 2005-06-16 Tokyo Denki Univ 小型アーティファクトを用いた運動機構の校正方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104897093A (zh) * 2015-06-24 2015-09-09 中国航天空气动力技术研究院 虎克铰的精度测量方法

Also Published As

Publication number Publication date
JP2009008523A (ja) 2009-01-15
JP5153228B2 (ja) 2013-02-27
US8468869B2 (en) 2013-06-25
US20100206040A1 (en) 2010-08-19

Similar Documents

Publication Publication Date Title
WO2009001504A1 (ja) 多関節型座標測定装置のパラメータ校正方法
WO2010143837A3 (ko) 로봇 캘리브레이션 장치 및 그 방법
WO2019243449A3 (en) Method and measurement environment, apparatus to be tested
US7712224B2 (en) Validating the error map of CMM using calibrated probe
CN201094011Y (zh) 一种厚度测量装置
WO2008113783A3 (en) A method and an apparatus for compensating for geometrical errors between work objects and a holding device
ATE481647T1 (de) Verfahren und system zur verfolgung der streuparameter-prüfsystemkalibrierung
AU2003292386A1 (en) Workpiece inspection method
EP2275871A3 (en) Position Calibration of Alignment Heads in a Multi-Head Alignment System
WO2012016534A3 (zh) 加工中心多轴联动变位加载装置及静刚度分布的检测方法
EP2477469A3 (en) Suitability determination method for determination standard value and method for specifying optimum value thereof, inspection system for substrate on which components are mounted, simulation method at production site, and simulation system
WO2006107985A3 (en) Method for accurate high-resolution measurements of aspheric surfaces
EP1528355A3 (en) Dynamic artefact comparison
RU2014107813A (ru) Способ калибровки и программирования робота
WO2008139832A1 (ja) 放射効率測定装置および放射効率測定方法
TW200739782A (en) Damage assessment of a wafer using optical metrology
EP2444789A3 (en) Hardness test method and program
WO2006010108A3 (en) Methods and apparatus for low distortion parameter measurements
CN102419282A (zh) 将现场里氏硬度转换为布氏硬度对比标块的制作方法
CA2820732A1 (en) Method and apparatus for scanning an object
EP1995554A3 (en) Two-dimensional lattice calibrating device, two-dimensional lattice calibrating method, two-dimensional lattice calibrating program and recording medium
WO2008021907A3 (en) Calibrated s-parameter measurements of probes
CN205262672U (zh) 手动式扭矩扳手检定仪
TW201716899A (zh) 校正方法與校正設備
CN102435156A (zh) 一种大型筒柱状工件尺寸和几何误差测量方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08763908

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 12666877

Country of ref document: US

122 Ep: pct application non-entry in european phase

Ref document number: 08763908

Country of ref document: EP

Kind code of ref document: A1