WO2009001564A1 - 半導体素子の実装構造体及びその製造方法、半導体素子の実装方法、並びに加圧ツール - Google Patents
半導体素子の実装構造体及びその製造方法、半導体素子の実装方法、並びに加圧ツール Download PDFInfo
- Publication number
- WO2009001564A1 WO2009001564A1 PCT/JP2008/001669 JP2008001669W WO2009001564A1 WO 2009001564 A1 WO2009001564 A1 WO 2009001564A1 JP 2008001669 W JP2008001669 W JP 2008001669W WO 2009001564 A1 WO2009001564 A1 WO 2009001564A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor element
- element mounting
- semiconductor chip
- mounting structure
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B5/00—Presses characterised by the use of pressing means other than those mentioned in the preceding groups
- B30B5/02—Presses characterised by the use of pressing means other than those mentioned in the preceding groups wherein the pressing means is in the form of a flexible element, e.g. diaphragm, urged by fluid pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/90—Methods for connecting semiconductor or solid state bodies using means for bonding not being attached to, or not being formed on, the body surface to be connected, e.g. pressure contacts using springs or clips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05568—Disposition the whole external layer protruding from the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05573—Single external layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/75252—Means for applying energy, e.g. heating means in the upper part of the bonding apparatus, e.g. in the bonding head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75302—Shape
- H01L2224/75303—Shape of the pressing surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75314—Auxiliary members on the pressing surface
- H01L2224/75315—Elastomer inlay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75754—Guiding structures
- H01L2224/75756—Guiding structures in the upper part of the bonding apparatus, e.g. in the bonding head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
- H01L2924/1816—Exposing the passive side of the semiconductor or solid-state body
- H01L2924/18161—Exposing the passive side of the semiconductor or solid-state body of a flip chip
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008800220112A CN101689516B (zh) | 2007-06-28 | 2008-06-26 | 半导体元件的安装构造体的制造方法及加压工具 |
| JP2009520355A JP5084829B2 (ja) | 2007-06-28 | 2008-06-26 | 半導体素子の実装構造体の製造方法、半導体素子の実装方法、及び加圧ツール |
| US12/666,860 US8264079B2 (en) | 2007-06-28 | 2008-06-26 | Semiconductor device mounted structure and its manufacturing method, semiconductor device mounting method, and pressing tool |
| US13/567,112 US8426965B2 (en) | 2007-06-28 | 2012-08-06 | Semiconductor device mounted structure and its manufacturing method, semiconductor device mounting method, and pressing tool |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007169975 | 2007-06-28 | ||
| JP2007-169975 | 2007-06-28 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/666,860 A-371-Of-International US8264079B2 (en) | 2007-06-28 | 2008-06-26 | Semiconductor device mounted structure and its manufacturing method, semiconductor device mounting method, and pressing tool |
| US13/567,112 Division US8426965B2 (en) | 2007-06-28 | 2012-08-06 | Semiconductor device mounted structure and its manufacturing method, semiconductor device mounting method, and pressing tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2009001564A1 true WO2009001564A1 (ja) | 2008-12-31 |
Family
ID=40185389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2008/001669 Ceased WO2009001564A1 (ja) | 2007-06-28 | 2008-06-26 | 半導体素子の実装構造体及びその製造方法、半導体素子の実装方法、並びに加圧ツール |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8264079B2 (ja) |
| JP (1) | JP5084829B2 (ja) |
| CN (1) | CN101689516B (ja) |
| WO (1) | WO2009001564A1 (ja) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054867A (ja) * | 2009-09-04 | 2011-03-17 | Lintec Corp | Icチップの接続構造、icインレット及びicタグ |
| US20120222808A1 (en) * | 2009-11-20 | 2012-09-06 | Sony Chemical & Information Device Corporation | Mounting device and method for manufacturing electronic module |
| JP2012168708A (ja) * | 2011-02-14 | 2012-09-06 | Lintec Corp | Icタグ |
| JP2013514664A (ja) * | 2009-12-29 | 2013-04-25 | インテル コーポレイション | リセス埋込ダイを備えるコアレスパッケージ |
| JP2013522917A (ja) * | 2010-04-06 | 2013-06-13 | インテル コーポレイション | コアレスパッケージを備えた電磁干渉シールド用の金属充填ダイバックサイドフィルムの形成方法 |
| JP2014239170A (ja) * | 2013-06-10 | 2014-12-18 | 三菱電機株式会社 | 電力用半導体装置の製造方法および電力用半導体装置 |
| WO2015107758A1 (ja) * | 2014-01-14 | 2015-07-23 | アピックヤマダ株式会社 | 樹脂モールド金型および樹脂モールド方法 |
| JP2015179829A (ja) * | 2014-02-26 | 2015-10-08 | 日東電工株式会社 | 電子部品パッケージの製造方法 |
| WO2020090205A1 (ja) * | 2018-10-30 | 2020-05-07 | 日立化成株式会社 | 半導体装置及びその製造方法 |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8148210B1 (en) * | 2010-09-13 | 2012-04-03 | Infineon Technologies Ag | Method for fabricating a semiconductor chip panel |
| JP5614217B2 (ja) * | 2010-10-07 | 2014-10-29 | デクセリアルズ株式会社 | マルチチップ実装用緩衝フィルム |
| KR101795370B1 (ko) * | 2011-07-28 | 2017-11-08 | 삼성전자주식회사 | 발광디바이스의 제조방법 |
| US8680681B2 (en) * | 2011-08-26 | 2014-03-25 | Globalfoundries Inc. | Bond pad configurations for controlling semiconductor chip package interactions |
| CN102968199B (zh) * | 2011-09-01 | 2016-03-30 | 宸鸿科技(厦门)有限公司 | 触控面板及其制作方法及触控显示装置 |
| JP5870261B2 (ja) * | 2011-10-03 | 2016-02-24 | パナソニックIpマネジメント株式会社 | 半導体素子の実装方法 |
| US9949380B2 (en) * | 2015-02-27 | 2018-04-17 | Panasonic Intellectual Property Management Co., Ltd. | Manufacturing method of electronic component, electronic component, and manufacturing apparatus of electronic component |
| DE102015112023B3 (de) * | 2015-07-23 | 2016-09-01 | Infineon Technologies Ag | Verfahren zum positionieren eines halbleiterchips auf einem träger und verfahren zum stoffschlüssigen verbinden eines halbleiterchips mit einem träger |
| CN107403784B (zh) * | 2016-05-19 | 2020-04-24 | 胡川 | 线路板制作方法及结构 |
| KR20170139924A (ko) * | 2016-06-10 | 2017-12-20 | 엘지전자 주식회사 | 투명 발광다이오드 필름 |
| KR102694680B1 (ko) * | 2016-08-01 | 2024-08-14 | 삼성디스플레이 주식회사 | 전자 소자, 이의 실장 방법 및 이를 포함하는 표시 장치의 제조 방법 |
| US11024595B2 (en) | 2017-06-16 | 2021-06-01 | Micron Technology, Inc. | Thermocompression bond tips and related apparatus and methods |
| JP7087099B2 (ja) * | 2018-10-05 | 2022-06-20 | 株式会社東芝 | 半導体パッケージ |
| JP2021048205A (ja) | 2019-09-17 | 2021-03-25 | キオクシア株式会社 | 半導体装置の製造方法 |
| JP7441030B2 (ja) | 2019-10-31 | 2024-02-29 | キヤノン株式会社 | 電子モジュールの製造方法、光学モジュールの製造方法、電子モジュール、光学モジュール及び機器 |
| KR102774046B1 (ko) * | 2020-03-04 | 2025-02-27 | 티디케이가부시기가이샤 | 소자 어레이의 가압 장치, 제조 장치 및 제조 방법 |
| US20230154820A1 (en) * | 2020-04-10 | 2023-05-18 | Mitsubishi Electric Corporation | Power semiconductor device and power conversion device |
| FR3109466B1 (fr) | 2020-04-16 | 2024-05-17 | St Microelectronics Grenoble 2 | Dispositif de support d’une puce électronique et procédé de fabrication correspondant |
| JP7355709B2 (ja) * | 2020-05-29 | 2023-10-03 | 株式会社 日立パワーデバイス | 接合治具および半導体装置の製造方法 |
| KR20220083438A (ko) * | 2020-12-11 | 2022-06-20 | 삼성전자주식회사 | 반도체 패키지 |
| JP7569247B2 (ja) * | 2021-03-12 | 2024-10-17 | キオクシア株式会社 | 半導体製造装置 |
| CN113346005B (zh) * | 2021-06-17 | 2024-07-02 | 太原工业学院 | 夹芯式薄膜传感器真空环境压合装置及方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09289221A (ja) * | 1996-04-22 | 1997-11-04 | Nec Corp | ベアチップ実装構造及び製造方法 |
| JP2002359264A (ja) * | 2001-05-31 | 2002-12-13 | Sony Corp | フリップチップ実装方法及び装置、半導体装置 |
| JP2003109988A (ja) * | 2001-09-28 | 2003-04-11 | Matsushita Electric Ind Co Ltd | 装着ツール及びicチップの装着方法 |
| JP2004087670A (ja) * | 2002-08-26 | 2004-03-18 | Matsushita Electric Ind Co Ltd | 絶縁性封止樹脂のフィレット及び電子部品の装着方法 |
| JP2007324413A (ja) * | 2006-06-01 | 2007-12-13 | Sony Chemical & Information Device Corp | 熱圧着ヘッド及びこれを用いた実装装置 |
| JP2008028039A (ja) * | 2006-07-19 | 2008-02-07 | Sony Chemical & Information Device Corp | 熱圧着ヘッドを用いた実装方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0766326A (ja) | 1993-08-30 | 1995-03-10 | Nippondenso Co Ltd | 半導体装置 |
| KR100438256B1 (ko) * | 1995-12-18 | 2004-08-25 | 마츠시타 덴끼 산교 가부시키가이샤 | 반도체장치 및 그 제조방법 |
| SG80077A1 (en) * | 1998-10-19 | 2001-04-17 | Sony Corp | Semiconductor integrated circuit card manufacturing method, and semiconductor integrated circuit card |
| JP3364455B2 (ja) | 1999-02-12 | 2003-01-08 | 日本特殊陶業株式会社 | 半導体装置の製造方法 |
| JP2001135658A (ja) * | 1999-11-08 | 2001-05-18 | Towa Corp | 電子部品の組立方法及び組立装置 |
| JP3702961B2 (ja) * | 2002-10-04 | 2005-10-05 | 東洋通信機株式会社 | 表面実装型sawデバイスの製造方法 |
| DE10297837B4 (de) * | 2002-12-16 | 2019-05-09 | Sumitomo Heavy Industries, Ltd. | Verfahren zum Befestigen einer Kühlmaschine und Befestigungsvorrichtung dafür |
| JP3921459B2 (ja) | 2003-07-11 | 2007-05-30 | ソニーケミカル&インフォメーションデバイス株式会社 | 電気部品の実装方法及び実装装置 |
| US7033864B2 (en) | 2004-09-03 | 2006-04-25 | Texas Instruments Incorporated | Grooved substrates for uniform underfilling solder ball assembled electronic devices |
-
2008
- 2008-06-26 US US12/666,860 patent/US8264079B2/en not_active Expired - Fee Related
- 2008-06-26 CN CN2008800220112A patent/CN101689516B/zh not_active Expired - Fee Related
- 2008-06-26 JP JP2009520355A patent/JP5084829B2/ja not_active Expired - Fee Related
- 2008-06-26 WO PCT/JP2008/001669 patent/WO2009001564A1/ja not_active Ceased
-
2012
- 2012-08-06 US US13/567,112 patent/US8426965B2/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09289221A (ja) * | 1996-04-22 | 1997-11-04 | Nec Corp | ベアチップ実装構造及び製造方法 |
| JP2002359264A (ja) * | 2001-05-31 | 2002-12-13 | Sony Corp | フリップチップ実装方法及び装置、半導体装置 |
| JP2003109988A (ja) * | 2001-09-28 | 2003-04-11 | Matsushita Electric Ind Co Ltd | 装着ツール及びicチップの装着方法 |
| JP2004087670A (ja) * | 2002-08-26 | 2004-03-18 | Matsushita Electric Ind Co Ltd | 絶縁性封止樹脂のフィレット及び電子部品の装着方法 |
| JP2007324413A (ja) * | 2006-06-01 | 2007-12-13 | Sony Chemical & Information Device Corp | 熱圧着ヘッド及びこれを用いた実装装置 |
| JP2008028039A (ja) * | 2006-07-19 | 2008-02-07 | Sony Chemical & Information Device Corp | 熱圧着ヘッドを用いた実装方法 |
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054867A (ja) * | 2009-09-04 | 2011-03-17 | Lintec Corp | Icチップの接続構造、icインレット及びicタグ |
| US20120222808A1 (en) * | 2009-11-20 | 2012-09-06 | Sony Chemical & Information Device Corporation | Mounting device and method for manufacturing electronic module |
| US10541232B2 (en) | 2009-12-29 | 2020-01-21 | Intel Corporation | Recessed and embedded die coreless package |
| US9553075B2 (en) | 2009-12-29 | 2017-01-24 | Intel Corporation | Recessed and embedded die coreless package |
| JP2014027303A (ja) * | 2009-12-29 | 2014-02-06 | Intel Corp | リセス埋込ダイを備えるコアレスパッケージ |
| US8742561B2 (en) | 2009-12-29 | 2014-06-03 | Intel Corporation | Recessed and embedded die coreless package |
| JP2013514664A (ja) * | 2009-12-29 | 2013-04-25 | インテル コーポレイション | リセス埋込ダイを備えるコアレスパッケージ |
| US10163863B2 (en) | 2009-12-29 | 2018-12-25 | Intel Corporation | Recessed and embedded die coreless package |
| US9147669B2 (en) | 2009-12-29 | 2015-09-29 | Intel Corporation | Recessed and embedded die coreless package |
| JP2013522917A (ja) * | 2010-04-06 | 2013-06-13 | インテル コーポレイション | コアレスパッケージを備えた電磁干渉シールド用の金属充填ダイバックサイドフィルムの形成方法 |
| JP2012168708A (ja) * | 2011-02-14 | 2012-09-06 | Lintec Corp | Icタグ |
| JP2014239170A (ja) * | 2013-06-10 | 2014-12-18 | 三菱電機株式会社 | 電力用半導体装置の製造方法および電力用半導体装置 |
| JPWO2015107758A1 (ja) * | 2014-01-14 | 2017-03-23 | アピックヤマダ株式会社 | 樹脂モールド金型および樹脂モールド方法 |
| WO2015107758A1 (ja) * | 2014-01-14 | 2015-07-23 | アピックヤマダ株式会社 | 樹脂モールド金型および樹脂モールド方法 |
| TWI645952B (zh) * | 2014-01-14 | 2019-01-01 | 山田尖端科技股份有限公司 | Resin molding metal mold and resin molding method |
| JP2015179829A (ja) * | 2014-02-26 | 2015-10-08 | 日東電工株式会社 | 電子部品パッケージの製造方法 |
| WO2020090205A1 (ja) * | 2018-10-30 | 2020-05-07 | 日立化成株式会社 | 半導体装置及びその製造方法 |
| WO2020090000A1 (ja) * | 2018-10-30 | 2020-05-07 | 日立化成株式会社 | 半導体装置及びその製造方法 |
| CN112703583A (zh) * | 2018-10-30 | 2021-04-23 | 昭和电工材料株式会社 | 半导体装置及其制造方法 |
| JPWO2020090205A1 (ja) * | 2018-10-30 | 2021-10-07 | 昭和電工マテリアルズ株式会社 | 半導体装置及びその製造方法 |
| JP7342879B2 (ja) | 2018-10-30 | 2023-09-12 | 株式会社レゾナック | 半導体装置の製造方法 |
| TWI820200B (zh) * | 2018-10-30 | 2023-11-01 | 日商力森諾科股份有限公司 | 半導體裝置及其製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5084829B2 (ja) | 2012-11-28 |
| CN101689516B (zh) | 2011-09-14 |
| CN101689516A (zh) | 2010-03-31 |
| JPWO2009001564A1 (ja) | 2010-08-26 |
| US20120298310A1 (en) | 2012-11-29 |
| US20100181667A1 (en) | 2010-07-22 |
| US8426965B2 (en) | 2013-04-23 |
| US8264079B2 (en) | 2012-09-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2009001564A1 (ja) | 半導体素子の実装構造体及びその製造方法、半導体素子の実装方法、並びに加圧ツール | |
| WO2008136352A1 (ja) | 半導体ウエハーの接合方法および半導体装置の製造方法 | |
| WO2008123172A1 (ja) | ヒートスプレッダモジュール、ヒートシンク及びそれらの製法 | |
| TW200625572A (en) | Three dimensional package structure of semiconductor chip embedded in substrate and method for fabricating the same | |
| CN101952960B (zh) | 低温加压烧结的方法 | |
| TW200503235A (en) | Semiconductor device and method of manufacturing semiconductor device | |
| WO2009060686A1 (ja) | 検査用粘着シート | |
| WO2008078746A1 (ja) | 半導体素子の実装構造体及び半導体素子の実装方法 | |
| JP2014175425A5 (ja) | ||
| JP2017505998A5 (ja) | ||
| US9870947B1 (en) | Method for collective (wafer-scale) fabrication of electronic devices and electronic device | |
| TW200741934A (en) | Wafer-shaped measuring apparatus and method for manufacturing the same | |
| JP2011522407A5 (ja) | ||
| TW200727446A (en) | Stack type semiconductor device manufacturing method and stack type electronic component manufacturing method | |
| JP2013239660A5 (ja) | ||
| TW200518249A (en) | Bonding structure with buffer layer and method of forming the same | |
| WO2009015984A3 (de) | Waferfügeverfahren mit senterschritt, waferverbund sowie chip | |
| US7846780B2 (en) | Flip-chip package covered with tape | |
| TW200717668A (en) | Semiconductor device, method for manufacturing such semiconductor device and substrate for such semiconductor device | |
| WO2009060687A1 (ja) | 粘着シート及びそれを用いた半導体装置の製造方法 | |
| WO2009041465A1 (ja) | 半導体圧力センサ | |
| JP5035265B2 (ja) | 電子部品実装構造体の製造方法 | |
| CN207637784U (zh) | 一种焊线固定接合半导体封装结构 | |
| WO2008122959A3 (en) | Package, method of manufacturing a package and frame | |
| JP5609452B2 (ja) | 複合基板の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WWE | Wipo information: entry into national phase |
Ref document number: 200880022011.2 Country of ref document: CN |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08776739 Country of ref document: EP Kind code of ref document: A1 |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 2009520355 Country of ref document: JP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 12666860 Country of ref document: US |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 08776739 Country of ref document: EP Kind code of ref document: A1 |