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WO2009096346A1 - Générateur d'ondes ultrasonores, et appareil pourvu de ce générateur - Google Patents

Générateur d'ondes ultrasonores, et appareil pourvu de ce générateur Download PDF

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Publication number
WO2009096346A1
WO2009096346A1 PCT/JP2009/051152 JP2009051152W WO2009096346A1 WO 2009096346 A1 WO2009096346 A1 WO 2009096346A1 JP 2009051152 W JP2009051152 W JP 2009051152W WO 2009096346 A1 WO2009096346 A1 WO 2009096346A1
Authority
WO
WIPO (PCT)
Prior art keywords
frequency
ultrasonic
ultrasonic generator
voltage threshold
interval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2009/051152
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English (en)
Japanese (ja)
Inventor
Susumu Fujiwara
Sota Komae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of WO2009096346A1 publication Critical patent/WO2009096346A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207Driving circuits
    • B06B1/0223Driving circuits for generating signals continuous in time
    • B06B1/0238Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B06B1/0261Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken from a transducer or electrode connected to the driving transducer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653Details
    • B05B17/0669Excitation frequencies

Definitions

  • the present invention relates to an ultrasonic generator that generates ultrasonic waves, and more particularly to an ultrasonic generator that can appropriately detect and oscillate an optimum resonance frequency, and equipment that includes the ultrasonic generator.
  • ultrasonic generators that generate ultrasonic waves.
  • disturbance for example, water droplet adhesion on the device surface, temperature rise of the vibrator accompanying vibration (ultrasonic oscillation) of the vibrator, dust adhesion on the vibration face, surface material aging, etc.
  • the resonance frequency (initial value) necessary for excitation may change due to changes.
  • the required ultrasonic frequency oscillation that was initially planned and the sound pressure level associated with the oscillation cannot be obtained. Therefore, techniques for solving such problems have been proposed.
  • a ripple voltage generation circuit, an oscillation circuit whose frequency is changed by the ripple voltage by applying the ripple voltage, an output whose frequency is changed from the oscillation circuit, and a half-wave voltage from the rectifier are input.
  • An “ultrasonic oscillation circuit comprising an output circuit that applies an output in which a pulse output is superimposed on a half-wave voltage to an ultrasonic transducer” is disclosed (for example, see Patent Document 1).
  • the ultrasonic oscillation circuit described in Patent Document 1 has a circuit configuration that reproduces only one frequency in accordance with the element characteristics of the ultrasonic wave. Therefore, in order to cope with frequency fluctuations, the circuit configuration has a number of resonance circuits. For this reason, there is a problem in that it cannot keep up with fluctuations in the resonance frequency that change as appropriate due to disturbance. In addition, a number of resonance circuits have to be mounted, which causes a problem that the circuit configuration becomes complicated. Furthermore, there has been a problem that the cost is increased as the circuit configuration becomes complicated.
  • the present invention has been made to solve the above-described problems. Even when the resonance frequency of an ultrasonic wave changes due to a disturbance, the optimum resonance frequency necessary for excitation is appropriately detected and the optimum resonance frequency is obtained. It is an object of the present invention to provide an ultrasonic generator capable of oscillating the ultrasonic wave and an equipment provided with the ultrasonic generator.
  • An ultrasonic generator is an ultrasonic generator that generates an ultrasonic wave by driving an ultrasonic transducer, and sets a maximum voltage threshold in advance and performs a frequency sweep at a first frequency interval. After that, a frequency sweep is performed at least once at a second frequency interval narrower than the first frequency interval, a resonance frequency that is maximum near the maximum voltage threshold is detected, and an ultrasonic transducer is detected at the resonance frequency. It is characterized by driving.
  • the ultrasonic generator According to the ultrasonic generator according to the present invention, the fluctuation of the predetermined maximum voltage threshold that is set in advance is monitored at any time, the resonance frequency is optimized in accordance with the fluctuation of the maximum voltage threshold, and the resonance that generates the maximum voltage threshold is achieved.
  • the ultrasonic transducer can be driven at a frequency, and an ultrasonic wave at the maximum resonance frequency can be stably generated.
  • the equipment according to the present invention includes the ultrasonic generator having such an effect, it has the same effect.
  • FIG. 3 is an explanatory diagram for explaining the ultrasonic generator according to the first embodiment. It is explanatory drawing for demonstrating the function of the control part of an ultrasonic generator. It is a flowchart which shows the flow of the process for optimizing a resonant frequency. It is the graph which designed the frequency sweep.
  • FIG. 6 is an explanatory diagram for explaining an ultrasonic atomizer according to a second embodiment. 6 is an explanatory diagram for explaining an ultrasonic generator according to Embodiment 3.
  • FIG. 6 is an explanatory diagram for explaining an ultrasonic atomizer according to a second embodiment. 6 is an explanatory diagram for explaining an ultrasonic generator according to Embodiment 3.
  • FIG. 1 is an explanatory diagram for explaining an ultrasonic generator 100 according to Embodiment 1 of the present invention.
  • FIG. 2 is an explanatory diagram for explaining the function of the control unit 15 of the ultrasonic generator 100. Based on FIG.1 and FIG.2, the ultrasonic generator 100b is demonstrated in detail. 1 and 2 also show a schematic configuration of the ultrasonic generator 100. FIG. In addition, in the following drawings including FIG. 1, the relationship of the size of each component may be different from the actual one.
  • the ultrasonic generator 100 applies a pulse voltage to an ultrasonic vibrator composed of a piezoelectric element such as PZT (lead zirconate titanate) and oscillates the vibrator to generate ultrasonic waves. ing.
  • the ultrasonic generator 100 includes a vibrator (ultrasonic vibrator) 10, a horn 11, and a diaphragm 12.
  • the vibrator 10 is provided with a piezoelectric element, and is oscillated by applying a pulse voltage via a positive electrode terminal and a negative electrode terminal (not shown). That is, the vibrator 10 has a function of oscillating a sound wave (ultrasonic wave) in a predetermined frequency range (generally around 40 kHz) when a pulse voltage is applied.
  • the horn 11 is configured such that both end faces are open and an acoustic path is formed therein, and the vibrator 10 is disposed at one end thereof.
  • the horn 11 is preferably formed in a truncated cone shape and is gradually reduced in diameter from the vibrator 10 side toward the diaphragm 12 side.
  • the diaphragm 12 is attached so as to block the other end of the horn 11 (the end opposite to the end where the vibrator 10 is disposed) and resonates with the oscillation (vibration) of the vibrator 10. It has a function to generate ultrasonic waves that are resonance waves. 1 and 2 show an example in which the horn 11 and the diaphragm 12 are provided, but an ultrasonic wave can be generated by the oscillation of the vibrator 10 without them.
  • the control unit 15 includes a frequency oscillation unit (pulse oscillation unit) 16, an oscillation control unit 17, and a frequency sweep 18.
  • the control unit 15 has a function of detecting a voltage variation of the vibrator 10 and oscillating the vibrator 10 by sweeping a pulse voltage at a predetermined necessary frequency interval.
  • the frequency oscillating unit 16 has a function of periodically and repeatedly transmitting a pulse voltage
  • the oscillation control unit 17 monitors the voltage fluctuation of the diaphragm 10 and transmits the voltage information to the frequency sweep 18.
  • the frequency sweep 18 has a function of detecting a voltage fluctuation based on the voltage information of the oscillation control unit 17 and transmitting a command for sweeping the pulse voltage at a predetermined frequency interval to the frequency oscillation unit 16. Yes.
  • a circuit configuration is provided in which a step-up transformer 13 and an amplifying unit 14 are provided between the control unit 15 and the vibrator 10.
  • the step-up transformer 13 has a function of stepping up the pulse voltage transmitted from the frequency oscillating unit 16.
  • the amplifying unit 14 has a function of amplifying the pulse voltage boosted by the step-up transformer 13. 1 and 2 show an example in which the step-up transformer 13 and the amplifying unit 14 are provided, but an ultrasonic wave can be generated by oscillating the vibrator 10 without these.
  • a pulse voltage having a predetermined frequency is periodically and repeatedly transmitted from the frequency oscillating unit 16 of the control unit 15.
  • This pulse voltage is boosted by the step-up transformer 13, amplified by the amplification unit 14, and then transmitted to the vibrator 10.
  • the vibrator 10 oscillates a sound wave in a predetermined frequency range.
  • the diaphragm 12 resonates via the horn 11 due to the oscillation of the vibrator 10, and ultrasonic waves are emitted by this resonance.
  • the oscillation control unit 17 of the control unit 15 monitors the voltage fluctuation of the resonance frequency generated in the diaphragm 10 and transmits the voltage information to the frequency sweep 18.
  • the frequency sweep 18 that has received the voltage information detects whether or not the voltage has fluctuated, and when the voltage fluctuates, transmits a command for sweeping the pulse voltage at a predetermined interval to the frequency oscillating unit 16.
  • the frequency oscillating unit 16 oscillates the vibrator 10 by sweeping the pulse voltage at the specified required frequency interval. That is, the ultrasonic generator 100 can appropriately change the frequency interval of the pulse voltage applied to the vibrator 10 by the voltage fluctuation of the vibrator 10.
  • FIG. 3 is a flowchart showing a processing flow for optimizing the resonance frequency.
  • FIG. 4 is a graph illustrating the frequency sweep. Based on FIG.3 and FIG.4, the optimization of the resonant frequency which is the characteristic matter of the ultrasonic generator 100 which concerns on this Embodiment 1 is demonstrated in detail.
  • the horizontal axis represents frequency (f) and the vertical axis represents sharpness (Q). This sharpness is the same as the voltage value (V).
  • the sharpness indicates a tendency of acoustic characteristics representing a resonance state of the diaphragm 12 due to the oscillation of the vibrator 10, and when a certain resonance phenomenon occurs, the sharpness tends to have a steep peak.
  • the resonance frequency required for excitation may change due to disturbance. Therefore, the ultrasonic generator 100 executes a series of processes shown below for optimizing the resonance frequency of the generated ultrasonic waves.
  • the resonance frequency at the “maximum voltage threshold (for example, set to 12 V or the like)” arbitrarily set in advance is detected. That is, as a first stage, frequency sweep is performed at a predetermined frequency interval (first frequency interval: for example, 5 Hz interval), and the existence range of the resonance frequency that becomes maximum near the maximum voltage threshold is roughly detected and determined ( Step S101).
  • Arrows A and B in FIG. 4 indicate frequency sweeps, and a resonance frequency indicated by a broken line indicates a change state with a predetermined frequency sweep interval (Fs).
  • a frequency sweep at a predetermined frequency interval (second frequency interval: for example, a 0.1 Hz interval) is performed at least once within the existence range determined in the first stage, near the maximum voltage threshold value.
  • the maximum resonance frequency (solid line resonance frequency shown in FIG. 4) is finely detected (step S102). In this way, the resonance frequency at which a predetermined maximum voltage threshold value set in advance is detected.
  • the first stage frequency sweep and the second stage frequency sweep are set to be performed at predetermined time intervals (for example, the first stage frequency sweep and the second stage frequency sweep are combined for one minute). Further, the second-stage frequency sweep may be repeatedly executed for a time until an optimum resonance frequency is detected.
  • the second frequency interval is a frequency interval narrower than the first frequency interval.
  • the pulse voltage of the resonance frequency detected here is transmitted from the frequency oscillating unit 16 to the step-up transformer 13 and transmitted to the vibrator 10 through the amplifying part 14 to drive the vibrator 10 (step S103). That is, the ultrasonic generator 100 can detect the maximum resonance frequency by monitoring the maximum voltage threshold, and can drive the vibrator 10 with the pulse voltage of the maximum resonance frequency. -ing After that, when the state of the surface of the ultrasonic element (the surface of the diaphragm 12 in FIGS. 1 and 2) changes due to disturbance, the resonance frequency also changes accordingly.
  • the frequency sweep 18 detects the fluctuation of the maximum voltage threshold based on the voltage information of the maximum voltage threshold of the oscillation control unit 17 (step S104). If the maximum voltage threshold has not changed (step S104; NO), since the resonance frequency has not changed, the vibrator 10 is driven with the pulse voltage as it is, and the monitoring of the change in the maximum voltage threshold is continued.
  • step S104 if the maximum voltage threshold fluctuates (step S104; YES), the resonance frequency is also changed, so that the resonance frequency is optimized. That is, as in the above operation, as the first stage, frequency sweep is performed at the first frequency interval, and the resonance frequency that is maximum near the maximum voltage threshold is roughly detected (step S105). Next, as a second stage, frequency sweep is performed at least once at the second frequency interval, and the resonance frequency that is maximum near the maximum voltage threshold is detected in detail (step S106). That is, the ultrasonic generator 100 can maintain the resonance frequency that becomes the maximum voltage threshold by monitoring the maximum voltage threshold.
  • the pulse voltage of the resonance frequency detected here is transmitted from the frequency oscillating unit 16 to the step-up transformer 13, and is transmitted to the vibrator 10 through the amplifying part 14, and the vibrator 10 is re-driven (step S107).
  • the driving state of the vibrator 10 can be kept optimal. Therefore, the ultrasonic generator 100 does not complicate the circuit configuration, and monitors the fluctuation of the resonance frequency that changes appropriately due to disturbance by the change of the maximum voltage threshold, optimizes the resonance frequency as needed, and optimizes the resonance. It is possible to always generate ultrasonic waves having a frequency. That is, it is possible to stably generate ultrasonic waves at the maximum resonance frequency. Note that the case where the frequency sweep is executed in two stages has been described as an example, but the present invention is not limited to this.
  • FIG. 5 is an explanatory diagram for explaining an ultrasonic atomizer 200 according to Embodiment 2 of the present invention.
  • the ultrasonic atomizer 200 which is an example of the equipment provided with the ultrasonic generator 100 is demonstrated.
  • the ultrasonic atomizer 200 atomizes a liquid such as water or medicine (hereinafter simply referred to as source water 23) by generating ultrasonic waves, and atomized liquid (hereinafter simply referred to as the atomized liquid 24). Can be sprayed and supplied to a desired place.
  • the ultrasonic atomizer 200 is provided with an atomization tank 21 and a blower fan 25 in addition to the ultrasonic generator 100.
  • the atomizing tank 21 is provided with a water outlet 22 for supplying the source water 23 to the surface of the diaphragm 12.
  • the liquid outlet of the water flow port 22 is disposed in the vicinity of the surface of the diaphragm 12.
  • the atomizing tank 21 may be provided with a flow rate control device configured by a valve device or the like so that a predetermined amount of source water 23 can be supplied to the surface of the diaphragm 12.
  • the ultrasonic atomizer 200 atomizes the source water 23 by ultrasonic waves, sprays the atomized liquid 24 from the diaphragm 12, and places the atomized liquid 24 on the ultrasonic vibration wave to obtain a predetermined spray distance. It is something that can be done.
  • the resonance frequency can be optimized at any time, and the ultrasonic wave with the optimized resonance frequency can always be generated. That is, it is possible to stably generate ultrasonic waves at the maximum resonance frequency. Therefore, it is possible to stabilize the supply amount of the atomized liquid 24 to be sprayed to a desired place, and to effectively prevent the atomized liquid 24 from being sprayed due to a disturbance. ing.
  • the ultrasonic atomizer 200 is illustrated and described as an example of the equipment including the ultrasonic generator 100.
  • the ultrasonic generator 100 is installed in facilities other than the ultrasonic atomizer 200.
  • Equipment can also be provided in equipment that uses ultrasonic waves, such as an air conditioner, an air cleaner, an ultrasonic processing device, an ultrasonic bonding device, a distance measuring sensor, an ultrasonic cleaning device, and an ultrasonic beauty device. Therefore, these equipments can also optimize the resonance frequency as needed and always generate ultrasonic waves with the optimized resonance frequency. That is, it is possible to stably generate ultrasonic waves at the maximum resonance frequency.
  • Embodiment 3 FIG.
  • the stable operation means of the ultrasonic vibrator has been described.
  • voltage generation due to the piezoelectric effect cannot be generated due to the life or failure of the ultrasonic vibrator
  • unstable operation is caused.
  • Become. 6 is an explanatory diagram for explaining the ultrasonic generator 100 according to the third embodiment.
  • the oscillation control unit 17 detects the voltage fluctuation of the ultrasonic vibrator 10, and the ultrasonic vibrator 10.
  • ON-OFF circuit soft SW

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

La présente invention concerne, d'une part un générateur d'ultrasons capable de détecter de façon appropriée une fréquence de résonnance optimale pour des vibrations, même si la fréquence de résonnance ultrasonore est modifiée par des perturbations, de façon à faire osciller les ondes ultrasonores de la fréquence de résonance optimale, et d'autre part un appareil équipé de ce générateur d'ultrasons. Ce générateur d'ultrasons (100) se caractérise, d'une part en ce qu'on définit un seuil de tenson maximale pour effectuer un balayage de fréquences à un premier intervalle de fréquences, puis au moins un balayage de fréquences à un second intervalle de fréquences plus étroit que le premier, et d'autre part en ce qu'on détecte une fréquence de résonnance devant devenir le maximum proche du seuil de tension maximale, de façon à actionner un vibreur (13) avec cette fréquence de résonnance.
PCT/JP2009/051152 2008-01-31 2009-01-26 Générateur d'ondes ultrasonores, et appareil pourvu de ce générateur Ceased WO2009096346A1 (fr)

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JP2008-021446 2008-01-31
JP2008021446 2008-01-31

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CN102274053A (zh) * 2011-05-19 2011-12-14 天津迈达医学科技有限公司 一种用于白内障超声乳化仪中超声手柄的调谐方法
CN105772312A (zh) * 2016-05-05 2016-07-20 深圳市尚进电子科技有限公司 一种超声波雾化片扫频电路及方法
US20190209790A1 (en) * 2016-09-27 2019-07-11 Omron Healthcare Co., Ltd. Ultrasonic vibrator driving apparatus and mesh nebulizer
EP3834949A1 (fr) * 2019-12-15 2021-06-16 Shaheen Innovations Holding Limited Systèmes à générateur ultrasonique et méthodes
US11131000B1 (en) 2020-06-01 2021-09-28 Shaheen Innovations Holding Limited Infectious disease screening device
US11181451B1 (en) 2020-06-01 2021-11-23 Shaheen Innovations Holding Limited Infectious disease screening system
US20210379611A1 (en) * 2018-11-08 2021-12-09 Beijing Naura Microelectronics Equipment Co., Ltd. Spray device and cleaning apparatus
CN114024466A (zh) * 2021-11-05 2022-02-08 河南智领医疗设备有限公司 一种理疗用超声驱动方法和超声治疗仪
US11254979B2 (en) 2020-06-01 2022-02-22 Shaheen Innovations Holding Limited Systems and devices for infectious disease screening
JP2022154819A (ja) * 2021-03-30 2022-10-13 株式会社ディスコ 保護膜形成装置および保護膜形成方法
US11571022B2 (en) 2019-12-15 2023-02-07 Shaheen Innovations Holding Limited Nicotine delivery device
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US11911559B2 (en) 2019-12-15 2024-02-27 Shaheen Innovations Holding Limited Ultrasonic mist inhaler
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Publication number Priority date Publication date Assignee Title
CN102274053A (zh) * 2011-05-19 2011-12-14 天津迈达医学科技有限公司 一种用于白内障超声乳化仪中超声手柄的调谐方法
CN105772312A (zh) * 2016-05-05 2016-07-20 深圳市尚进电子科技有限公司 一种超声波雾化片扫频电路及方法
US20190209790A1 (en) * 2016-09-27 2019-07-11 Omron Healthcare Co., Ltd. Ultrasonic vibrator driving apparatus and mesh nebulizer
US11752279B2 (en) * 2016-09-27 2023-09-12 Omron Healthcare Co., Ltd. Ultrasonic vibrator driving apparatus and mesh nebulizer
US11504727B2 (en) * 2018-11-08 2022-11-22 Beijing Naura Microelectronics Equipment Co., Ltd. Spray device and cleaning apparatus
US20210379611A1 (en) * 2018-11-08 2021-12-09 Beijing Naura Microelectronics Equipment Co., Ltd. Spray device and cleaning apparatus
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US11832646B2 (en) 2019-12-15 2023-12-05 Shaheen Innovations Holding Limited Nicotine delivery device with identification arrangement
EP3834949A1 (fr) * 2019-12-15 2021-06-16 Shaheen Innovations Holding Limited Systèmes à générateur ultrasonique et méthodes
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US11911559B2 (en) 2019-12-15 2024-02-27 Shaheen Innovations Holding Limited Ultrasonic mist inhaler
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US11944120B2 (en) 2019-12-15 2024-04-02 Shaheen Innovations Holding Limited Ultrasonic mist inhaler with capillary retainer
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US12023438B2 (en) 2019-12-15 2024-07-02 Shaheen Innovations Holding Limited Mist inhaler devices
US11667979B2 (en) 2020-06-01 2023-06-06 Shaheen Innovations Holding Limited Infectious disease screening device
US11385148B2 (en) 2020-06-01 2022-07-12 Shaheen Innovations Holding Limited Infectious disease screening system
US11274352B2 (en) 2020-06-01 2022-03-15 Shaheen Innovations Holding Limited Infectious disease screening device
US11254979B2 (en) 2020-06-01 2022-02-22 Shaheen Innovations Holding Limited Systems and devices for infectious disease screening
US11131000B1 (en) 2020-06-01 2021-09-28 Shaheen Innovations Holding Limited Infectious disease screening device
US11181451B1 (en) 2020-06-01 2021-11-23 Shaheen Innovations Holding Limited Infectious disease screening system
US11440012B2 (en) 2020-06-01 2022-09-13 Shaheen Innovations Holding Limited Systems and devices for infectious disease screening
US11959146B2 (en) 2020-06-01 2024-04-16 Shaheen Innovations Holding Limited Infectious disease screening device
US11946844B2 (en) 2020-06-01 2024-04-02 Shaheen Innovations Holding Limited Infectious disease screening system
JP7682002B2 (ja) 2021-03-30 2025-05-23 株式会社ディスコ 保護膜形成装置
JP2022154819A (ja) * 2021-03-30 2022-10-13 株式会社ディスコ 保護膜形成装置および保護膜形成方法
CN114024466A (zh) * 2021-11-05 2022-02-08 河南智领医疗设备有限公司 一种理疗用超声驱动方法和超声治疗仪
CN114024466B (zh) * 2021-11-05 2023-12-12 河南智领医疗设备有限公司 一种理疗用超声驱动方法和超声治疗仪
US11665483B1 (en) 2021-12-15 2023-05-30 Shaheen Innovations Holding Limited Apparatus for transmitting ultrasonic waves

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