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WO2009089946A3 - Mikromechanisches bauteil und herstellungsverfahren für ein mikromechanisches bauteil - Google Patents

Mikromechanisches bauteil und herstellungsverfahren für ein mikromechanisches bauteil Download PDF

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Publication number
WO2009089946A3
WO2009089946A3 PCT/EP2008/065572 EP2008065572W WO2009089946A3 WO 2009089946 A3 WO2009089946 A3 WO 2009089946A3 EP 2008065572 W EP2008065572 W EP 2008065572W WO 2009089946 A3 WO2009089946 A3 WO 2009089946A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromechanical component
membrane
active element
producing
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/065572
Other languages
English (en)
French (fr)
Other versions
WO2009089946A2 (de
Inventor
Hubert Benzel
Christoph Schelling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of WO2009089946A2 publication Critical patent/WO2009089946A2/de
Publication of WO2009089946A3 publication Critical patent/WO2009089946A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Die Erfindung betrifft ein mikromechanisches Bauteil (10) mit einer Halterung (12) mit einer an einer Oberfläche der Halterung (12) ausgebildeten Aussparung (14); einer Membran (16), welche die Aussparung (14) zumindest teilweise abdeckt; mindestens einem auf der Membran (16) angeordneten Aktivelement (24) mit Spannungsanschlüssen; wobei das Aktivelement (24) dazu ausgebildet ist, bei Anlegen einer Spannung an das Aktivelement (24) seine räumliche Ausdehnung zu variieren und die Membran (16) zu verformen; und einem auf der Membran (16) angeordneten Mikroelement (22), welches über ein Verformen der Membran (16) durch Anlegen der Spannung an das Aktivelement (24) verstellbar ist. Des Weiteren betrifft die Erfindung ein Herstellungsverfahren für ein mikromechanisches Bauteil (10) und ein Verfahren zum Betreiben eines mikromechanischen Bauteils (10).
PCT/EP2008/065572 2008-01-16 2008-11-14 Mikromechanisches bauteil und herstellungsverfahren für ein mikromechanisches bauteil Ceased WO2009089946A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008004639.6 2008-01-16
DE200810004639 DE102008004639A1 (de) 2008-01-16 2008-01-16 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil

Publications (2)

Publication Number Publication Date
WO2009089946A2 WO2009089946A2 (de) 2009-07-23
WO2009089946A3 true WO2009089946A3 (de) 2010-01-21

Family

ID=40785784

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/065572 Ceased WO2009089946A2 (de) 2008-01-16 2008-11-14 Mikromechanisches bauteil und herstellungsverfahren für ein mikromechanisches bauteil

Country Status (2)

Country Link
DE (1) DE102008004639A1 (de)
WO (1) WO2009089946A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013217111A1 (de) * 2013-08-28 2015-03-19 Robert Bosch Gmbh Mikromechanisches Bauteil und Verfahren zur Herstellung eines mikromechanischen Bauteils
DE102016014001B4 (de) * 2016-11-23 2020-11-12 Blickfeld GmbH MEMS Scanmodul für einen Lichtscanner mit mindestens zwei Stützelementen
DE102020208290A1 (de) 2020-07-02 2022-01-05 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Vorrichtung
FR3123341A1 (fr) * 2021-05-31 2022-12-02 Commissariat A L'energie Atomique Et Aux Energies Alternatives Microsystème électromécanique

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6178033B1 (en) * 1999-03-28 2001-01-23 Lucent Technologies Micromechanical membrane tilt-mirror switch
US6384952B1 (en) * 1997-03-27 2002-05-07 Mems Optical Inc. Vertical comb drive actuated deformable mirror device and method
WO2006086029A2 (en) * 2004-11-19 2006-08-17 Trustees Of Boston University Mems based retroreflector
US20070002009A1 (en) * 2003-10-07 2007-01-04 Pasch Nicholas F Micro-electromechanical display backplane and improvements thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272262A (en) 1989-06-21 1993-12-21 City Of Hope Method for the production of catalytic RNA in bacteria
US5083857A (en) 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US6483962B1 (en) 2000-05-24 2002-11-19 Vlad J. Novotny Optical cross connect switching array system with optical feedback
US6522454B2 (en) 2000-09-29 2003-02-18 Texas Instruments Incorporated Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio
KR100939017B1 (ko) 2002-05-17 2010-01-26 마이크로비젼, 인코퍼레이티드 한 디멘션에서 이미지 빔을 스윕하고 다른 디멘션에서이미지 빔을 양방향으로 스윕하는 장치 및 방법
US7203394B2 (en) 2003-07-15 2007-04-10 Rosemount Aerospace Inc. Micro mirror arrays and microstructures with solderable connection sites

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US6384952B1 (en) * 1997-03-27 2002-05-07 Mems Optical Inc. Vertical comb drive actuated deformable mirror device and method
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6178033B1 (en) * 1999-03-28 2001-01-23 Lucent Technologies Micromechanical membrane tilt-mirror switch
US20070002009A1 (en) * 2003-10-07 2007-01-04 Pasch Nicholas F Micro-electromechanical display backplane and improvements thereof
WO2006086029A2 (en) * 2004-11-19 2006-08-17 Trustees Of Boston University Mems based retroreflector

Also Published As

Publication number Publication date
DE102008004639A1 (de) 2009-07-23
WO2009089946A2 (de) 2009-07-23

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