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WO2009060973A1 - Needle diamond, cantilever using the diamond, and photomask-correcting or cell-operating probe - Google Patents

Needle diamond, cantilever using the diamond, and photomask-correcting or cell-operating probe Download PDF

Info

Publication number
WO2009060973A1
WO2009060973A1 PCT/JP2008/070423 JP2008070423W WO2009060973A1 WO 2009060973 A1 WO2009060973 A1 WO 2009060973A1 JP 2008070423 W JP2008070423 W JP 2008070423W WO 2009060973 A1 WO2009060973 A1 WO 2009060973A1
Authority
WO
WIPO (PCT)
Prior art keywords
diamond
needle
photomask
cantilever
correcting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/070423
Other languages
French (fr)
Japanese (ja)
Inventor
Kouji Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Namiki Precision Jewel Co Ltd
Original Assignee
Namiki Precision Jewel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Namiki Precision Jewel Co Ltd filed Critical Namiki Precision Jewel Co Ltd
Priority to JP2009540109A priority Critical patent/JPWO2009060973A1/en
Publication of WO2009060973A1 publication Critical patent/WO2009060973A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/62—Whiskers or needles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

Provided are a needle diamond having a straight shape or a counter-taper shape, which has been difficult to manufacture by a dry etching or with a converging ion beam, a method for manufacturing the needle diamond, a cantilever using the needle diamond, and a photomask-correcting or cell-operating diamond probe. The needle diamond manufacturing method comprises of forming a metal film (2) on a diamond substrate (1), forming a recess in the metal film (2) to expose the diamond substrate surface partially, and then performing a thermochemical treatment. By selecting the film thickness of the metal film (2) suitably, it is possible to manufacture either a needle diamond (1a) having a straight shape or a needle diamond (1b) having a counter-taper shape, in which an angle (α) made by a needle side face is 0 degrees to 10 degrees.
PCT/JP2008/070423 2007-11-10 2008-11-10 Needle diamond, cantilever using the diamond, and photomask-correcting or cell-operating probe Ceased WO2009060973A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009540109A JPWO2009060973A1 (en) 2007-11-10 2008-11-10 Needle-shaped diamond, cantilever using it, probe for photomask correction or cell manipulation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007292658 2007-11-10
JP2007-292658 2007-11-10

Publications (1)

Publication Number Publication Date
WO2009060973A1 true WO2009060973A1 (en) 2009-05-14

Family

ID=40625855

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070423 Ceased WO2009060973A1 (en) 2007-11-10 2008-11-10 Needle diamond, cantilever using the diamond, and photomask-correcting or cell-operating probe

Country Status (2)

Country Link
JP (1) JPWO2009060973A1 (en)
WO (1) WO2009060973A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018030750A (en) * 2016-08-23 2018-03-01 並木精密宝石株式会社 Crystal substrate with Ni thin film

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02239190A (en) * 1989-03-10 1990-09-21 Idemitsu Petrochem Co Ltd Diamond coating member and its production
JP2000001392A (en) * 1998-06-12 2000-01-07 Univ Tokyo Method for producing needle-shaped diamond array structure
JP2002226290A (en) * 2000-11-29 2002-08-14 Japan Fine Ceramics Center Method for producing diamond processed body, and diamond processed body
JP2005258285A (en) * 2004-03-15 2005-09-22 Sii Nanotechnology Inc Processing probe
WO2007040283A1 (en) * 2005-10-06 2007-04-12 Namiki Seimitsu Houseki Kabushiki Kaisha Probe and cantilever

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02239190A (en) * 1989-03-10 1990-09-21 Idemitsu Petrochem Co Ltd Diamond coating member and its production
JP2000001392A (en) * 1998-06-12 2000-01-07 Univ Tokyo Method for producing needle-shaped diamond array structure
JP2002226290A (en) * 2000-11-29 2002-08-14 Japan Fine Ceramics Center Method for producing diamond processed body, and diamond processed body
JP2005258285A (en) * 2004-03-15 2005-09-22 Sii Nanotechnology Inc Processing probe
WO2007040283A1 (en) * 2005-10-06 2007-04-12 Namiki Seimitsu Houseki Kabushiki Kaisha Probe and cantilever

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018030750A (en) * 2016-08-23 2018-03-01 並木精密宝石株式会社 Crystal substrate with Ni thin film

Also Published As

Publication number Publication date
JPWO2009060973A1 (en) 2011-03-24

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