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WO2009048114A1 - ガス精製方法 - Google Patents

ガス精製方法 Download PDF

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Publication number
WO2009048114A1
WO2009048114A1 PCT/JP2008/068398 JP2008068398W WO2009048114A1 WO 2009048114 A1 WO2009048114 A1 WO 2009048114A1 JP 2008068398 W JP2008068398 W JP 2008068398W WO 2009048114 A1 WO2009048114 A1 WO 2009048114A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
ultra
semiconductor material
purification method
purity semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/068398
Other languages
English (en)
French (fr)
Inventor
Yuzuru Miyazawa
Yoshihiko Kobayashi
Kenji Haraya
Miki Yoshimune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Nippon Sanso Holdings Corp
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Nippon Sanso Holdings Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST, Nippon Sanso Holdings Corp filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to US12/682,329 priority Critical patent/US8357228B2/en
Priority to EP08837162A priority patent/EP2208522A4/en
Priority to KR1020107007714A priority patent/KR101196867B1/ko
Priority to CN2008801108340A priority patent/CN101820971B/zh
Priority to JP2009537029A priority patent/JP5516951B2/ja
Publication of WO2009048114A1 publication Critical patent/WO2009048114A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/02—Hollow fibre modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/06—Tubular membrane modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/04—Tubular membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/08—Hollow fibre membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/021—Carbon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
    • C01B3/04—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by decomposition of inorganic compounds, e.g. ammonia
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
    • C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
    • C01C1/00—Ammonia; Compounds thereof
    • C01C1/02—Preparation, purification or separation of ammonia
    • C01C1/024—Purification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0405—Purification by membrane separation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0045—Oxygen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0051—Carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0062—Water
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Artificial Filaments (AREA)
  • Inorganic Fibers (AREA)
  • Treating Waste Gases (AREA)

Abstract

　本発明のガス精製方法は、１０ｐｐｍ以下の不純物を含む水素化物ガス、ハロゲン化水素ガス、及びハロゲンガスからなる群から選択される少なくとも１種を分子ふるい作用を持つ炭素膜を用いて精製する。本発明は、使用済みガスを回収して再び超高純度の半導体材料ガスとして利用する回収装置や、超高純度の半導体材料ガスを製造又は充填する装置又は設備に適用することができる。
PCT/JP2008/068398 2007-10-12 2008-10-09 ガス精製方法 Ceased WO2009048114A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US12/682,329 US8357228B2 (en) 2007-10-12 2008-10-09 Gas purification method
EP08837162A EP2208522A4 (en) 2007-10-12 2008-10-09 GAS CLEANING PROCESS
KR1020107007714A KR101196867B1 (ko) 2007-10-12 2008-10-09 가스 정제 방법
CN2008801108340A CN101820971B (zh) 2007-10-12 2008-10-09 气体精制方法
JP2009537029A JP5516951B2 (ja) 2007-10-12 2008-10-09 ガス精製方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-266495 2007-10-12
JP2007266495 2007-10-12
JP2008-238357 2008-09-17
JP2008238357 2008-09-17

Publications (1)

Publication Number Publication Date
WO2009048114A1 true WO2009048114A1 (ja) 2009-04-16

Family

ID=40549257

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068398 Ceased WO2009048114A1 (ja) 2007-10-12 2008-10-09 ガス精製方法

Country Status (7)

Country Link
US (1) US8357228B2 (ja)
EP (1) EP2208522A4 (ja)
JP (1) JP5516951B2 (ja)
KR (1) KR101196867B1 (ja)
CN (1) CN101820971B (ja)
TW (1) TWI458540B (ja)
WO (1) WO2009048114A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011136002A1 (ja) * 2010-04-26 2011-11-03 大陽日酸株式会社 気体分離装置の運転方法
JP2011230036A (ja) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp 気体分離装置の運転方法
JP2011230037A (ja) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp 残存ガスの回収方法
JP2011230035A (ja) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp ガス分離方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5339324B2 (ja) * 2007-08-02 2013-11-13 独立行政法人産業技術総合研究所 中空糸炭素膜とその製造方法
US10843127B2 (en) 2017-11-15 2020-11-24 Generon Igs, Inc. Compact membrane module system for gas separation
US11660565B2 (en) 2017-11-15 2023-05-30 Generon Igs, Inc. Compact membrane module system for gas separation

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07171330A (ja) 1993-09-17 1995-07-11 L'air Liquide 膜によるガス状水素化物またはガス状水素化物の混合物の分離方法
JP2615265B2 (ja) 1989-09-19 1997-05-28 アドバンスド、シリコン、マテリアルズ、インコーポレイテッド 半透膜によるガス分離
JPH10297910A (ja) * 1997-04-25 1998-11-10 Showa Denko Kk 六フッ化硫黄の精製方法
JPH10298118A (ja) * 1997-01-16 1998-11-10 L'air Liquide ペルフルオロ化合物ガスの分離および回収のための改良された方法および装置
JPH11118752A (ja) * 1997-10-16 1999-04-30 Mitsubishi Electric Corp ガス検出装置
JP2002308608A (ja) 2001-04-10 2002-10-23 Nippon Chem Ind Co Ltd 高濃度ホスフィンガスの製造方法
JP2003037104A (ja) 2001-07-26 2003-02-07 Daikin Ind Ltd ドライエッチング装置へのテトラフルオロエチレンガス供給装置及び供給方法
JP3433226B2 (ja) 2000-11-02 2003-08-04 独立行政法人産業技術総合研究所 塩素ガス分離膜
JP2004339187A (ja) * 2003-03-18 2004-12-02 Nippon Sanso Corp パーフルオロ化合物の精製方法及び成膜方法
JP2005060225A (ja) 2003-08-13 2005-03-10 Boc Group Inc:The アンモニアを濃縮するための方法及び装置
JP2005154203A (ja) 2003-11-26 2005-06-16 Daikin Ind Ltd 二フッ化カルボニルの精製方法
JP2007266495A (ja) 2006-03-29 2007-10-11 Kurita Water Ind Ltd 洗浄システム
JP2008238357A (ja) 2007-03-28 2008-10-09 Kyocera Corp 真空チャック、真空吸着装置、吸着方法、および真空チャックの水分保持率管理方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2688751B2 (ja) * 1988-02-29 1997-12-10 三菱レイヨン株式会社 中空炭素膜繊維の製造方法
JPH0724743B2 (ja) * 1991-04-24 1995-03-22 工業技術院長 分子篩炭素膜の製造方法
US5637544A (en) * 1991-06-06 1997-06-10 Arizona Board Of Regents On Behalf Of The University Of Arizona Reactive membrane for filtration and purification of gases of impurities and method utilizing the same
US5288304A (en) 1993-03-30 1994-02-22 The University Of Texas System Composite carbon fluid separation membranes
JP3390444B2 (ja) 1993-07-27 2003-03-24 ザ・ユニバーシティ・オブ・アリゾナ 不純物を含むガスを濾過および精製するための反応性膜およびそれを使用する方法
WO1999036159A1 (en) 1998-01-16 1999-07-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and system for separation and recovery of perfluorocompound gases
DE19849216A1 (de) * 1998-10-26 2000-04-27 Andreas Noack Verfahren und Vorrichtung zur Trennung von Fluidgemischen (Thermomembranverfahren)
US6395066B1 (en) 1999-03-05 2002-05-28 Ube Industries, Ltd. Partially carbonized asymmetric hollow fiber separation membrane, process for its production, and gas separation method
US6921428B2 (en) * 2001-01-25 2005-07-26 Ube Industries, Ltd. Device and method for separating and collecting halide gas
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JP2006231095A (ja) * 2005-02-21 2006-09-07 National Institute Of Advanced Industrial & Technology 炭化膜及びその製造法

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2615265B2 (ja) 1989-09-19 1997-05-28 アドバンスド、シリコン、マテリアルズ、インコーポレイテッド 半透膜によるガス分離
JPH07171330A (ja) 1993-09-17 1995-07-11 L'air Liquide 膜によるガス状水素化物またはガス状水素化物の混合物の分離方法
JPH10298118A (ja) * 1997-01-16 1998-11-10 L'air Liquide ペルフルオロ化合物ガスの分離および回収のための改良された方法および装置
JPH10297910A (ja) * 1997-04-25 1998-11-10 Showa Denko Kk 六フッ化硫黄の精製方法
JPH11118752A (ja) * 1997-10-16 1999-04-30 Mitsubishi Electric Corp ガス検出装置
JP3433226B2 (ja) 2000-11-02 2003-08-04 独立行政法人産業技術総合研究所 塩素ガス分離膜
JP2002308608A (ja) 2001-04-10 2002-10-23 Nippon Chem Ind Co Ltd 高濃度ホスフィンガスの製造方法
JP2003037104A (ja) 2001-07-26 2003-02-07 Daikin Ind Ltd ドライエッチング装置へのテトラフルオロエチレンガス供給装置及び供給方法
JP2004339187A (ja) * 2003-03-18 2004-12-02 Nippon Sanso Corp パーフルオロ化合物の精製方法及び成膜方法
JP2005060225A (ja) 2003-08-13 2005-03-10 Boc Group Inc:The アンモニアを濃縮するための方法及び装置
JP2005154203A (ja) 2003-11-26 2005-06-16 Daikin Ind Ltd 二フッ化カルボニルの精製方法
JP2007266495A (ja) 2006-03-29 2007-10-11 Kurita Water Ind Ltd 洗浄システム
JP2008238357A (ja) 2007-03-28 2008-10-09 Kyocera Corp 真空チャック、真空吸着装置、吸着方法、および真空チャックの水分保持率管理方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011136002A1 (ja) * 2010-04-26 2011-11-03 大陽日酸株式会社 気体分離装置の運転方法
JP2011230036A (ja) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp 気体分離装置の運転方法
JP2011230037A (ja) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp 残存ガスの回収方法
JP2011230035A (ja) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp ガス分離方法
CN102858431A (zh) * 2010-04-26 2013-01-02 大阳日酸株式会社 气体分离装置的运转方法

Also Published As

Publication number Publication date
CN101820971B (zh) 2013-11-06
EP2208522A1 (en) 2010-07-21
TW200924835A (en) 2009-06-16
KR20100056553A (ko) 2010-05-27
JP5516951B2 (ja) 2014-06-11
KR101196867B1 (ko) 2012-11-01
US20100206164A1 (en) 2010-08-19
CN101820971A (zh) 2010-09-01
TWI458540B (zh) 2014-11-01
EP2208522A4 (en) 2011-03-30
JPWO2009048114A1 (ja) 2011-02-24
US8357228B2 (en) 2013-01-22

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