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WO2009047120A3 - Beschleunigungssensor - Google Patents

Beschleunigungssensor Download PDF

Info

Publication number
WO2009047120A3
WO2009047120A3 PCT/EP2008/062765 EP2008062765W WO2009047120A3 WO 2009047120 A3 WO2009047120 A3 WO 2009047120A3 EP 2008062765 W EP2008062765 W EP 2008062765W WO 2009047120 A3 WO2009047120 A3 WO 2009047120A3
Authority
WO
WIPO (PCT)
Prior art keywords
web
acceleration sensor
seismic mass
substrate
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/062765
Other languages
English (en)
French (fr)
Other versions
WO2009047120A2 (de
Inventor
Dirk Rehle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to CN2008801102240A priority Critical patent/CN101903778B/zh
Priority to US12/680,715 priority patent/US8516890B2/en
Priority to EP08804670A priority patent/EP2195664A2/de
Publication of WO2009047120A2 publication Critical patent/WO2009047120A2/de
Publication of WO2009047120A3 publication Critical patent/WO2009047120A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

Die Erfindung geht aus von einem Beschleunigungssensor mit einem Substrat, wenigstens einem Steg (1, 12, 13) und einer seismischen Masse (9), wobei der Steg (1, 12, 13) und die seismische Masse (9) über einer Ebene des Substrats angeordnet sind. Dabei ist die seismische Masse (9) wenigstens an zwei Seiten des Stegs (1, 12, 13) angeordnet, und federnd an dem Steg (1, 12, 13) aufgehängt. Der Steg (1, 12, 13) ist mittels wenigstens einer Verankerung (41, 42) an dem Substrat verankert. Der Kern der Erfindung besteht darin, daß die wenigstens eine Verankerung (41, 42) außerhalb des Massenschwerpunktes (10) der seismischen Masse (9) angeordnet ist.
PCT/EP2008/062765 2007-10-05 2008-09-24 Beschleunigungssensor Ceased WO2009047120A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008801102240A CN101903778B (zh) 2007-10-05 2008-09-24 加速度传感器
US12/680,715 US8516890B2 (en) 2007-10-05 2008-09-24 Acceleration sensor having substrate, web, and seismic mass
EP08804670A EP2195664A2 (de) 2007-10-05 2008-09-24 Beschleunigungssensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007047592.8A DE102007047592B4 (de) 2007-10-05 2007-10-05 Beschleunigungssensor
DE102007047592.8 2007-10-05

Publications (2)

Publication Number Publication Date
WO2009047120A2 WO2009047120A2 (de) 2009-04-16
WO2009047120A3 true WO2009047120A3 (de) 2009-06-25

Family

ID=40418107

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/062765 Ceased WO2009047120A2 (de) 2007-10-05 2008-09-24 Beschleunigungssensor

Country Status (6)

Country Link
US (1) US8516890B2 (de)
EP (1) EP2195664A2 (de)
CN (1) CN101903778B (de)
DE (1) DE102007047592B4 (de)
TW (1) TWI438431B (de)
WO (1) WO2009047120A2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008001863A1 (de) 2008-05-19 2009-11-26 Robert Bosch Gmbh Beschleunigungssensor mit umgreifender seismischer Masse
DE102009026476A1 (de) * 2009-05-26 2010-12-02 Robert Bosch Gmbh Mikromechanische Struktur
US8138007B2 (en) * 2009-08-26 2012-03-20 Freescale Semiconductor, Inc. MEMS device with stress isolation and method of fabrication
GB201020722D0 (en) 2010-12-07 2011-01-19 Atlantic Inertial Systems Ltd Accelerometer
GB2523320A (en) * 2014-02-19 2015-08-26 Atlantic Inertial Systems Ltd Accelerometers
US10324107B2 (en) 2014-04-28 2019-06-18 Hitachi Automotive Systems, Ltd. Acceleration detection device
JP6657626B2 (ja) * 2015-07-10 2020-03-04 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6558110B2 (ja) 2015-07-10 2019-08-14 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
CN107782916B (zh) * 2016-08-27 2021-07-09 深迪半导体(绍兴)有限公司 一种三轴加速计
JP6866623B2 (ja) * 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6866624B2 (ja) 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6822200B2 (ja) * 2017-02-17 2021-01-27 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6816603B2 (ja) * 2017-03-27 2021-01-20 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP2018179575A (ja) 2017-04-05 2018-11-15 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
GB2565295A (en) * 2017-08-07 2019-02-13 Atlantic Inertial Systems Ltd Accelerometer
JP6922552B2 (ja) 2017-08-25 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器、携帯型電子機器および移動体
JP6922562B2 (ja) 2017-08-31 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、携帯型電子機器、電子機器および移動体
JP6922594B2 (ja) 2017-09-22 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器、携帯型電子機器および移動体
JP7188311B2 (ja) * 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059465A1 (en) * 2000-02-11 2001-08-16 Motorola, Inc. Acceleration sensor and method of manufacture
EP1591793A1 (de) * 2004-04-27 2005-11-02 Delphi Technologies, Inc. Zwei-achsen Beschleunigungssensor
EP1626283A1 (de) * 2004-08-13 2006-02-15 STMicroelectronics S.r.l. Mikroelektromechanische Struktur, insbesondere Beschleunigungssensor, mit verbesserter Unempfindlichkeit gegenüber thermischen und mechanischen Spannungen

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19500800A1 (de) 1994-06-16 1995-12-21 Bosch Gmbh Robert Beschleunigungssensor
DE4432837B4 (de) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
US5635640A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
DE19523895A1 (de) 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
DE19539946C2 (de) 1995-10-26 2002-03-28 Linde Gas Ag Verfahren und Vorrichtung zur integrierten Entsorgung von Filterstäuben in thermischen Behandlungsanlagen
DE19639946B4 (de) * 1996-09-27 2006-09-21 Robert Bosch Gmbh Mikromechanisches Bauelement
US6070464A (en) * 1997-09-05 2000-06-06 Motorola, Inc. Sensing structure comprising a movable mass and a self-test structure
US6230567B1 (en) 1999-08-03 2001-05-15 The Charles Stark Draper Laboratory, Inc. Low thermal strain flexure support for a micromechanical device
DE69938658D1 (de) 1999-09-10 2008-06-19 St Microelectronics Srl Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur
US6393913B1 (en) * 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
US6845670B1 (en) * 2003-07-08 2005-01-25 Freescale Semiconductor, Inc. Single proof mass, 3 axis MEMS transducer
DE602004023082D1 (de) * 2004-09-22 2009-10-22 St Microelectronics Srl Mikro-Elektromechanische Struktur mit Selbstkompensation von durch thermomechanische Spannungen hervorgerufenen thermischen Driften
US7121141B2 (en) * 2005-01-28 2006-10-17 Freescale Semiconductor, Inc. Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area
DE102006033636B4 (de) 2006-07-20 2022-08-11 Robert Bosch Gmbh Beschleunigungssensor
DE102006059928A1 (de) * 2006-12-19 2008-08-21 Robert Bosch Gmbh Beschleunigungssensor mit Kammelektroden
DE102008001863A1 (de) * 2008-05-19 2009-11-26 Robert Bosch Gmbh Beschleunigungssensor mit umgreifender seismischer Masse

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059465A1 (en) * 2000-02-11 2001-08-16 Motorola, Inc. Acceleration sensor and method of manufacture
EP1591793A1 (de) * 2004-04-27 2005-11-02 Delphi Technologies, Inc. Zwei-achsen Beschleunigungssensor
EP1626283A1 (de) * 2004-08-13 2006-02-15 STMicroelectronics S.r.l. Mikroelektromechanische Struktur, insbesondere Beschleunigungssensor, mit verbesserter Unempfindlichkeit gegenüber thermischen und mechanischen Spannungen

Also Published As

Publication number Publication date
WO2009047120A2 (de) 2009-04-16
TWI438431B (zh) 2014-05-21
DE102007047592B4 (de) 2022-01-05
DE102007047592A1 (de) 2009-04-09
CN101903778B (zh) 2013-01-09
TW200925606A (en) 2009-06-16
US8516890B2 (en) 2013-08-27
US20100212423A1 (en) 2010-08-26
EP2195664A2 (de) 2010-06-16
CN101903778A (zh) 2010-12-01

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