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WO2009044675A1 - 有機ｅｌ素子、有機ｅｌ素子製造方法 - Google Patents

有機ｅｌ素子、有機ｅｌ素子製造方法 Download PDF

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Publication number
WO2009044675A1
WO2009044675A1 PCT/JP2008/067450 JP2008067450W WO2009044675A1 WO 2009044675 A1 WO2009044675 A1 WO 2009044675A1 JP 2008067450 W JP2008067450 W JP 2008067450W WO 2009044675 A1 WO2009044675 A1 WO 2009044675A1
Authority
WO
WIPO (PCT)
Prior art keywords
electron
organic
thin film
layer
cathode electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/067450
Other languages
English (en)
French (fr)
Inventor
Toshio Negishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2009536031A priority Critical patent/JPWO2009044675A1/ja
Priority to EP08836756A priority patent/EP2197059A4/en
Priority to CN200880110615A priority patent/CN101816081A/zh
Publication of WO2009044675A1 publication Critical patent/WO2009044675A1/ja
Priority to US12/731,385 priority patent/US8147287B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/17—Carrier injection layers
    • H10K50/171—Electron injection layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/82—Cathodes
    • H10K50/828—Transparent cathodes, e.g. comprising thin metal layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/302—Details of OLEDs of OLED structures
    • H10K2102/3023—Direction of light emission
    • H10K2102/3026—Top emission

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

　緻密でステップカバレッジ性の高いカソード電極層を電子注入層上に形成する。電子輸送性材料と電子注入性材料を共蒸着し、電子輸送性の有機薄膜中に電子注入性材料の微粒子が分散された電子注入層２６を形成し、その表面に、スパッタリング法によってＭｇＡｇ合金層から成るカソード電極層２７を形成する。有機薄膜の表面に分散された電子注入性材料の微粒子は、下部が有機薄膜中に埋没しているので、スパッタリング粒子が衝突しても剥離せず、スパッタリング粒子によって形成されるカソード電極層２７と上部で接触する。
PCT/JP2008/067450 2007-10-02 2008-09-26 有機ｅｌ素子、有機ｅｌ素子製造方法 Ceased WO2009044675A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009536031A JPWO2009044675A1 (ja) 2007-10-02 2008-09-26 有機ｅｌ素子、有機ｅｌ素子製造方法
EP08836756A EP2197059A4 (en) 2007-10-02 2008-09-26 ORGANIC EL ELEMENT AND MANUFACTURING METHOD FOR ORGANIC EL ELEMENT
CN200880110615A CN101816081A (zh) 2007-10-02 2008-09-26 有机电致发光元件、有机电致发光元件制造方法
US12/731,385 US8147287B2 (en) 2007-10-02 2010-03-25 Organic EL element and a method for manufacturing the organic EL element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-258773 2007-10-02
JP2007258773 2007-10-02

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/731,385 Continuation US8147287B2 (en) 2007-10-02 2010-03-25 Organic EL element and a method for manufacturing the organic EL element

Publications (1)

Publication Number Publication Date
WO2009044675A1 true WO2009044675A1 (ja) 2009-04-09

Family

ID=40526104

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067450 Ceased WO2009044675A1 (ja) 2007-10-02 2008-09-26 有機ｅｌ素子、有機ｅｌ素子製造方法

Country Status (7)

Country Link
US (1) US8147287B2 (ja)
EP (1) EP2197059A4 (ja)
JP (1) JPWO2009044675A1 (ja)
KR (1) KR20100065174A (ja)
CN (1) CN101816081A (ja)
TW (1) TW200948189A (ja)
WO (1) WO2009044675A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011016347A1 (ja) * 2009-08-03 2011-02-10 株式会社アルバック 有機ｅｌ装置及び有機ｅｌ装置の電極形成方法並びに有機ｅｌ照明装置及び有機ｅｌ照明装置の製造方法
JP2022177474A (ja) * 2021-05-18 2022-12-01 株式会社アルバック 有機発光素子、成膜方法、及び成膜装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102593373A (zh) * 2012-03-21 2012-07-18 四川虹视显示技术有限公司 一种oled复合透明阴极结构及其制备方法
CN104769149B (zh) 2012-11-06 2018-05-22 Oti领英有限公司 用于在表面上沉积导电覆层的方法
CN105280680B (zh) * 2014-07-03 2018-10-12 乐金显示有限公司 有机发光二极管显示装置及其制造方法
CN105870353B (zh) * 2016-04-14 2018-04-27 京东方科技集团股份有限公司 有机电致发光器件及其制作方法、显示装置
JP2018032601A (ja) * 2016-08-26 2018-03-01 株式会社神戸製鋼所 反射電極およびＡｌ合金スパッタリングターゲット
US10679783B2 (en) 2017-08-04 2020-06-09 Pulse Electronics, Inc. Network transformer apparatus and methods of making and using the same
CN108539033A (zh) * 2018-05-10 2018-09-14 京东方科技集团股份有限公司 一种有机电致发光器件及其制备方法
US20240341116A1 (en) * 2023-03-24 2024-10-10 Samsung Display Co., Ltd. Light-emitting device, and electronic apparatus and electronic equipment, each including the light-emitting device

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10140344A (ja) * 1996-11-08 1998-05-26 Ulvac Japan Ltd 有機薄膜表面への導電性薄膜形成方法、有機ｅｌ素子
JP2000113976A (ja) * 1998-10-07 2000-04-21 Tdk Corp 有機ｅｌ素子
JP2001217074A (ja) 2000-02-01 2001-08-10 Toyota Motor Corp 有機ｅｌ素子の製造方法
JP2004022176A (ja) * 2002-06-12 2004-01-22 Dainippon Printing Co Ltd エレクトロルミネッセント素子
JP2004327414A (ja) 2003-03-06 2004-11-18 Fuji Electric Holdings Co Ltd 有機ｅｌ素子およびその製造方法
JP2005332803A (ja) * 2004-04-22 2005-12-02 Canon Inc 有機電子素子の製造方法および製造装置
JP2005340225A (ja) * 2005-08-11 2005-12-08 Ulvac Japan Ltd 有機ｅｌ素子
JP2006066553A (ja) * 2004-08-25 2006-03-09 Fuji Electric Holdings Co Ltd 有機ｅｌ素子およびその製造方法
JP2006157022A (ja) * 2004-12-01 2006-06-15 Au Optronics Corp 有機ｅｌダイオード及び有機ｅｌダイオードの効率改善方法
JP2006344497A (ja) 2005-06-09 2006-12-21 Rohm Co Ltd 有機ｅｌ素子、これを用いた有機ｅｌ表示装置、および有機ｅｌ素子の製造方法
JP2007157349A (ja) * 2005-11-30 2007-06-21 Tokyo Kogei Univ カラー表示装置およびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6559594B2 (en) * 2000-02-03 2003-05-06 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
SG138467A1 (en) * 2000-12-28 2008-01-28 Semiconductor Energy Lab Luminescent device
TWI321966B (en) * 2005-03-25 2010-03-11 Au Optronics Corp Organic electro-luminescence device and method of manufacturing the same
US8906517B2 (en) * 2005-04-04 2014-12-09 Sony Corporation Organic electroluminescence device
JP2010044118A (ja) * 2008-08-08 2010-02-25 Sony Corp 表示装置およびその製造方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10140344A (ja) * 1996-11-08 1998-05-26 Ulvac Japan Ltd 有機薄膜表面への導電性薄膜形成方法、有機ｅｌ素子
JP2000113976A (ja) * 1998-10-07 2000-04-21 Tdk Corp 有機ｅｌ素子
JP2001217074A (ja) 2000-02-01 2001-08-10 Toyota Motor Corp 有機ｅｌ素子の製造方法
JP2004022176A (ja) * 2002-06-12 2004-01-22 Dainippon Printing Co Ltd エレクトロルミネッセント素子
JP2004327414A (ja) 2003-03-06 2004-11-18 Fuji Electric Holdings Co Ltd 有機ｅｌ素子およびその製造方法
JP2005332803A (ja) * 2004-04-22 2005-12-02 Canon Inc 有機電子素子の製造方法および製造装置
JP2006066553A (ja) * 2004-08-25 2006-03-09 Fuji Electric Holdings Co Ltd 有機ｅｌ素子およびその製造方法
JP2006157022A (ja) * 2004-12-01 2006-06-15 Au Optronics Corp 有機ｅｌダイオード及び有機ｅｌダイオードの効率改善方法
JP2006344497A (ja) 2005-06-09 2006-12-21 Rohm Co Ltd 有機ｅｌ素子、これを用いた有機ｅｌ表示装置、および有機ｅｌ素子の製造方法
JP2005340225A (ja) * 2005-08-11 2005-12-08 Ulvac Japan Ltd 有機ｅｌ素子
JP2007157349A (ja) * 2005-11-30 2007-06-21 Tokyo Kogei Univ カラー表示装置およびその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2197059A4

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011016347A1 (ja) * 2009-08-03 2011-02-10 株式会社アルバック 有機ｅｌ装置及び有機ｅｌ装置の電極形成方法並びに有機ｅｌ照明装置及び有機ｅｌ照明装置の製造方法
JPWO2011016347A1 (ja) * 2009-08-03 2013-01-10 株式会社アルバック 有機ｅｌ装置及び有機ｅｌ装置の電極形成方法並びに有機ｅｌ照明装置及び有機ｅｌ照明装置の製造方法
JP2022177474A (ja) * 2021-05-18 2022-12-01 株式会社アルバック 有機発光素子、成膜方法、及び成膜装置
JP7636963B2 (ja) 2021-05-18 2025-02-27 株式会社アルバック 有機発光素子、成膜方法、及び成膜装置

Also Published As

Publication number Publication date
US20100176391A1 (en) 2010-07-15
CN101816081A (zh) 2010-08-25
EP2197059A1 (en) 2010-06-16
TW200948189A (en) 2009-11-16
US8147287B2 (en) 2012-04-03
JPWO2009044675A1 (ja) 2011-02-10
EP2197059A4 (en) 2012-08-08
KR20100065174A (ko) 2010-06-15

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