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WO2009041362A1 - 論理素子 - Google Patents

論理素子 Download PDF

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Publication number
WO2009041362A1
WO2009041362A1 PCT/JP2008/066989 JP2008066989W WO2009041362A1 WO 2009041362 A1 WO2009041362 A1 WO 2009041362A1 JP 2008066989 W JP2008066989 W JP 2008066989W WO 2009041362 A1 WO2009041362 A1 WO 2009041362A1
Authority
WO
WIPO (PCT)
Prior art keywords
logical element
substrate
supporting
supporting section
sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/066989
Other languages
English (en)
French (fr)
Inventor
Hiroshi Yamaguchi
Imran Mahboob
Hajime Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2009534305A priority Critical patent/JP5006402B2/ja
Priority to CN200880107598.7A priority patent/CN101803191B/zh
Priority to EP08832849.7A priority patent/EP2178212B1/en
Priority to US12/678,737 priority patent/US8159307B2/en
Publication of WO2009041362A1 publication Critical patent/WO2009041362A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/19—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using non-linear reactive devices in resonant circuits
    • G11C11/20—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using non-linear reactive devices in resonant circuits using parametrons
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C19/00—Digital stores in which the information is moved stepwise, e.g. shift registers
    • G11C19/12—Digital stores in which the information is moved stepwise, e.g. shift registers using non-linear reactive devices in resonant circuits, e.g. parametrons; magnetic amplifiers with overcritical feedback
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/02—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components
    • H03K19/16—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using saturable magnetic devices
    • H03K19/162—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using saturable magnetic devices using parametrons
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computing Systems (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Logic Circuits (AREA)
  • Micromachines (AREA)
  • Measurement Of Radiation (AREA)
  • Measuring Fluid Pressure (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Gyroscopes (AREA)

Abstract

　論理素子（１００）は、支持部（１０６）およびこれらに両端が支持された梁（１０７）が形成されているようにしたものである。梁（１０７）は、この下面が基板（１０１）の表面より離間し、梁（１０７）と基板（１０１）との対向面の間に空間を形成している。また、一方の支持部（１０５）の上には、励振電極（１０８）が形成され、他方の支持部（１０６）の上には、振動検出電極（１１０）が形成されている。
PCT/JP2008/066989 2007-09-27 2008-09-19 論理素子 Ceased WO2009041362A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009534305A JP5006402B2 (ja) 2007-09-27 2008-09-19 論理素子
CN200880107598.7A CN101803191B (zh) 2007-09-27 2008-09-19 逻辑元件
EP08832849.7A EP2178212B1 (en) 2007-09-27 2008-09-19 Logical element
US12/678,737 US8159307B2 (en) 2007-09-27 2008-09-19 Logical element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-251116 2007-09-27
JP2007251116 2007-09-27

Publications (1)

Publication Number Publication Date
WO2009041362A1 true WO2009041362A1 (ja) 2009-04-02

Family

ID=40511247

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/066989 Ceased WO2009041362A1 (ja) 2007-09-27 2008-09-19 論理素子

Country Status (5)

Country Link
US (1) US8159307B2 (ja)
EP (1) EP2178212B1 (ja)
JP (1) JP5006402B2 (ja)
CN (1) CN101803191B (ja)
WO (1) WO2009041362A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011234271A (ja) * 2010-04-30 2011-11-17 Nippon Telegr & Teleph Corp <Ntt> 演算装置
JP2013074594A (ja) * 2011-09-29 2013-04-22 Nippon Telegr & Teleph Corp <Ntt> 微小機械振動子および微小機械振動子の制御方法
JP2014039152A (ja) * 2012-08-16 2014-02-27 Nippon Telegr & Teleph Corp <Ntt> 機械振動子およびその製造方法
JP2015046754A (ja) * 2013-08-28 2015-03-12 日本電信電話株式会社 機械共振器の作製方法
JP2015207032A (ja) * 2014-04-17 2015-11-19 日本電信電話株式会社 演算装置および演算方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5563191B2 (ja) * 2007-11-30 2014-07-30 日本電信電話株式会社 半導体微細機械素子及びその製造方法
JP5720152B2 (ja) * 2010-09-06 2015-05-20 富士通株式会社 振動子の作製方法、振動子および発振器
TWI519066B (zh) * 2012-06-28 2016-01-21 清華大學 微機電共振器及其訊號處理方法以及製造方法
JP7620853B2 (ja) * 2020-05-15 2025-01-24 パナソニックＩｐマネジメント株式会社 Ｍｅｍｓ共振器を用いた共振型センサおよび共振型センサの検出方法
KR20230126935A (ko) * 2022-02-24 2023-08-31 삼성전자주식회사 전기기계적 로직-인-메모리 소자

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4220422Y1 (ja) * 1963-12-14 1967-11-28 Yaskawa Denki Seisakusho Kk
JP2005123828A (ja) * 2003-10-15 2005-05-12 Seiko Epson Corp 音叉型圧電振動片及び圧電デバイス
JP2005197946A (ja) * 2004-01-06 2005-07-21 Seiko Epson Corp 音叉型水晶振動子
JP2006238001A (ja) * 2005-02-24 2006-09-07 Seiko Epson Corp 圧電振動片および圧電デバイス
JP2007235937A (ja) * 2006-01-31 2007-09-13 Matsushita Electric Ind Co Ltd パラメトリック共振器およびこれを用いたフィルタ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993962A (en) * 1975-08-18 1976-11-23 The United States Of America As Represented By The Secretary Of The Air Force Low noise parametric varactor diode crystal oscillator
WO2002080360A1 (en) * 2001-03-30 2002-10-10 California Institute Of Technology Pattern-aligned carbon nanotube growth and tunable resonator apparatus
US7068125B2 (en) * 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7352608B2 (en) * 2004-05-24 2008-04-01 Trustees Of Boston University Controllable nanomechanical memory element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4220422Y1 (ja) * 1963-12-14 1967-11-28 Yaskawa Denki Seisakusho Kk
JP2005123828A (ja) * 2003-10-15 2005-05-12 Seiko Epson Corp 音叉型圧電振動片及び圧電デバイス
JP2005197946A (ja) * 2004-01-06 2005-07-21 Seiko Epson Corp 音叉型水晶振動子
JP2006238001A (ja) * 2005-02-24 2006-09-07 Seiko Epson Corp 圧電振動片および圧電デバイス
JP2007235937A (ja) * 2006-01-31 2007-09-13 Matsushita Electric Ind Co Ltd パラメトリック共振器およびこれを用いたフィルタ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
E. GOTO: "The Parametron, a Digital Computing Element which Utilizes Parametric Oscillation", PROCEEDINGS OF THE IRE, vol. 47, 1959, pages 1309 - 1316

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011234271A (ja) * 2010-04-30 2011-11-17 Nippon Telegr & Teleph Corp <Ntt> 演算装置
JP2013074594A (ja) * 2011-09-29 2013-04-22 Nippon Telegr & Teleph Corp <Ntt> 微小機械振動子および微小機械振動子の制御方法
JP2014039152A (ja) * 2012-08-16 2014-02-27 Nippon Telegr & Teleph Corp <Ntt> 機械振動子およびその製造方法
JP2015046754A (ja) * 2013-08-28 2015-03-12 日本電信電話株式会社 機械共振器の作製方法
JP2015207032A (ja) * 2014-04-17 2015-11-19 日本電信電話株式会社 演算装置および演算方法

Also Published As

Publication number Publication date
EP2178212B1 (en) 2015-11-11
CN101803191B (zh) 2013-05-29
US8159307B2 (en) 2012-04-17
CN101803191A (zh) 2010-08-11
EP2178212A1 (en) 2010-04-21
US20100201420A1 (en) 2010-08-12
JPWO2009041362A1 (ja) 2011-01-27
JP5006402B2 (ja) 2012-08-22
EP2178212A4 (en) 2010-10-06

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