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WO2008136084A1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

Info

Publication number
WO2008136084A1
WO2008136084A1 PCT/JP2007/058740 JP2007058740W WO2008136084A1 WO 2008136084 A1 WO2008136084 A1 WO 2008136084A1 JP 2007058740 W JP2007058740 W JP 2007058740W WO 2008136084 A1 WO2008136084 A1 WO 2008136084A1
Authority
WO
WIPO (PCT)
Prior art keywords
turbo
molecular pump
rotation axis
vane
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/058740
Other languages
English (en)
Japanese (ja)
Inventor
Kouta Oishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to PCT/JP2007/058740 priority Critical patent/WO2008136084A1/fr
Priority to JP2009512818A priority patent/JP5141684B2/ja
Publication of WO2008136084A1 publication Critical patent/WO2008136084A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe turbomoléculaire qui comprend une aube rotative à plusieurs étages, avec des pales s'étendant radialement à partir d'un corps rotatif, et une aube fixe avec des pales disposées radialement par rapport à l'axe de rotation du corps rotatif, lesquelles sont disposées de façon alternée l'une à l'autre. La hauteur de la pale installée sur l'aube rotative dans la direction de l'axe de rotation diminue en direction de la périphérie externe du rotor.
PCT/JP2007/058740 2007-04-23 2007-04-23 Pompe turbomoléculaire Ceased WO2008136084A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/058740 WO2008136084A1 (fr) 2007-04-23 2007-04-23 Pompe turbomoléculaire
JP2009512818A JP5141684B2 (ja) 2007-04-23 2007-04-23 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/058740 WO2008136084A1 (fr) 2007-04-23 2007-04-23 Pompe turbomoléculaire

Publications (1)

Publication Number Publication Date
WO2008136084A1 true WO2008136084A1 (fr) 2008-11-13

Family

ID=39943207

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/058740 Ceased WO2008136084A1 (fr) 2007-04-23 2007-04-23 Pompe turbomoléculaire

Country Status (2)

Country Link
JP (1) JP5141684B2 (fr)
WO (1) WO2008136084A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010025002A (ja) * 2008-07-22 2010-02-04 Osaka Vacuum Ltd ターボ分子ポンプ
JP2020122429A (ja) * 2019-01-30 2020-08-13 株式会社島津製作所 ターボ分子ポンプ
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades
GB2618348A (en) * 2022-05-04 2023-11-08 Edwards Ltd Rotor blade for a turbomolecular vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH1089284A (ja) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd ターボ分子ポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941699A (ja) * 1982-08-31 1984-03-07 Shimadzu Corp 改良されたタ−ボ式真空ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH1089284A (ja) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd ターボ分子ポンプ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010025002A (ja) * 2008-07-22 2010-02-04 Osaka Vacuum Ltd ターボ分子ポンプ
JP2020122429A (ja) * 2019-01-30 2020-08-13 株式会社島津製作所 ターボ分子ポンプ
JP7052752B2 (ja) 2019-01-30 2022-04-12 株式会社島津製作所 ターボ分子ポンプ
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades
GB2618348A (en) * 2022-05-04 2023-11-08 Edwards Ltd Rotor blade for a turbomolecular vacuum pump
WO2023214169A1 (fr) * 2022-05-04 2023-11-09 Edwards Limited Pale de rotor pour pompe à vide turbomoléculaire
GB2618348B (en) * 2022-05-04 2024-05-29 Edwards Ltd Rotor blade for a turbomolecular vacuum pump

Also Published As

Publication number Publication date
JPWO2008136084A1 (ja) 2010-07-29
JP5141684B2 (ja) 2013-02-13

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