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WO2008126437A1 - 超音波検査装置 - Google Patents

超音波検査装置 Download PDF

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Publication number
WO2008126437A1
WO2008126437A1 PCT/JP2008/050973 JP2008050973W WO2008126437A1 WO 2008126437 A1 WO2008126437 A1 WO 2008126437A1 JP 2008050973 W JP2008050973 W JP 2008050973W WO 2008126437 A1 WO2008126437 A1 WO 2008126437A1
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
ultrasonic wave
ultrasonic
volume
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/050973
Other languages
English (en)
French (fr)
Inventor
Masayuki Takeishi
Masanori Shimazaki
Masahiro Yui
Tomoyuki Hirayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to CN2008800013771A priority Critical patent/CN101622534B/zh
Priority to KR1020097012442A priority patent/KR101127001B1/ko
Priority to US12/517,234 priority patent/US8276452B2/en
Priority to EP08703801.4A priority patent/EP2131191B1/en
Publication of WO2008126437A1 publication Critical patent/WO2008126437A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2418Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K15/00Acoustics not otherwise provided for
    • G10K15/04Sound-producing devices
    • G10K15/046Sound-producing devices using optical excitation, e.g. laser bundle
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00Transducers other than those covered by groups H04R9/00 - H04R21/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/26Scanned objects
    • G01N2291/263Surfaces
    • G01N2291/2634Surfaces cylindrical from outside

Landscapes

  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Optics & Photonics (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

 レーザ光を用いて装置の小型化を図るとともに被検体の劣化、変形を防止し、かつ、広範囲に良好な検査を行いない得る超音波検査装置を提供する。レーザ光を発射するレーザ装置(5)およびレーザ装置(5)が発射するレーザ光を照射され、超音波Cを発生する送信ダイヤフラム(39)を有する体積検査用超音波送信部(17)を備え、体積検査用超音波送信部(17)の送信ダイヤフラム(39)が発生する超音波(C)を被検体に照射して体積検査を行う超音波検査装置(1)を提供する。また、表面検査用超音波送信部(19)を追加して備え、体積検査および表面検査という性格の異なる検査、すなわち、ハイブリッドな検査を行なえる超音波検査装置(1)を提供する。
PCT/JP2008/050973 2007-03-30 2008-01-24 超音波検査装置 Ceased WO2008126437A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2008800013771A CN101622534B (zh) 2007-03-30 2008-01-24 超声波检查装置
KR1020097012442A KR101127001B1 (ko) 2007-03-30 2008-01-24 초음파 검사 장치
US12/517,234 US8276452B2 (en) 2007-03-30 2008-01-24 Ultrasonic inspection apparatus
EP08703801.4A EP2131191B1 (en) 2007-03-30 2008-01-24 Ultrasonic inspection equipment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007092515A JP5134277B2 (ja) 2007-03-30 2007-03-30 超音波検査装置
JP2007-092515 2007-03-30

Publications (1)

Publication Number Publication Date
WO2008126437A1 true WO2008126437A1 (ja) 2008-10-23

Family

ID=39863596

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050973 Ceased WO2008126437A1 (ja) 2007-03-30 2008-01-24 超音波検査装置

Country Status (7)

Country Link
US (1) US8276452B2 (ja)
EP (1) EP2131191B1 (ja)
JP (1) JP5134277B2 (ja)
KR (1) KR101127001B1 (ja)
CN (1) CN101622534B (ja)
RU (1) RU2422815C2 (ja)
WO (1) WO2008126437A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2081231A2 (en) 2008-01-15 2009-07-22 Yokogawa Electric Corporation Semiconductor device with an extended base region
WO2011008559A1 (en) 2009-06-29 2011-01-20 University Of Massachusetts Lowell Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
WO2012112890A2 (en) * 2011-02-17 2012-08-23 University Of Massachusetts Photoacoustic probe
JP5863345B2 (ja) * 2011-09-08 2016-02-16 キヤノン株式会社 被検体情報取得装置および被検体情報取得方法
CN104807886B (zh) * 2015-05-08 2018-01-30 北京新联铁集团股份有限公司 激光超声探伤方法
CN104807885B (zh) * 2015-05-08 2018-03-23 北京新联铁集团股份有限公司 火车车轮激光超声无损伤探伤方法
US9933393B2 (en) 2015-12-09 2018-04-03 The Boeing Company Apparatuses, methods, and systems for inspecting a composite end portion of a part

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10288607A (ja) * 1997-04-15 1998-10-27 Mitsubishi Heavy Ind Ltd 超音波センサ
JP2984390B2 (ja) * 1991-03-01 1999-11-29 三菱重工業株式会社 超音波発生方法
JP2000028589A (ja) 1998-07-10 2000-01-28 Toshiba Corp 3次元超音波画像化装置
JP2002017723A (ja) * 2000-05-02 2002-01-22 Fuji Photo Film Co Ltd 超音波用探触子及びそれを用いた超音波診断装置
JP2005043139A (ja) 2003-07-25 2005-02-17 Toshiba Corp レーザー超音波検査装置および検査方法
JP2005175919A (ja) * 2003-12-11 2005-06-30 Mitsubishi Heavy Ind Ltd 超音波受信センサ及び超音波受信装置
JP2005253751A (ja) * 2004-03-12 2005-09-22 Fuji Photo Film Co Ltd 超音波用探触子及び超音波診断装置

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US4137991A (en) * 1976-11-23 1979-02-06 International Business Machines Corporation Clamped acoustic elastic wave generator
SU853524A1 (ru) * 1979-06-18 1981-08-07 Ордена Трудового Красного Знамениинститут Физики Ah Белорусской Ccp Дефектоскоп
US4512197A (en) * 1983-09-01 1985-04-23 The United States Of America As Represented By The Secretary Of The Navy Apparatus for generating a focusable and scannable ultrasonic beam for non-destructive examination
SU1516796A2 (ru) * 1988-02-01 1989-10-23 Московский институт радиотехники, электроники и автоматики Акустический приемник
US5457997A (en) * 1991-11-22 1995-10-17 Doryokuro Kakunenryo Kaihatsu Jigyodan Laser ultrasonic detection method and apparatus therefor
JPH07306188A (ja) * 1994-05-11 1995-11-21 Mitsubishi Heavy Ind Ltd 受信用トランスデューサ
US5615675A (en) * 1996-04-19 1997-04-01 Regents Of The University Of Michigan Method and system for 3-D acoustic microscopy using short pulse excitation and 3-D acoustic microscope for use therein
JP3477330B2 (ja) * 1996-10-30 2003-12-10 三菱重工業株式会社 超音波発生装置
KR100674520B1 (ko) * 1997-12-19 2007-01-26 버나드 슈 레이저 초음파 접합 완성도 평가 시스템 및 방법
JPH11326580A (ja) 1998-05-15 1999-11-26 Toshiba Corp シュラウド自動検査装置
US6633384B1 (en) * 1998-06-30 2003-10-14 Lockheed Martin Corporation Method and apparatus for ultrasonic laser testing
CN1252468C (zh) 2000-05-02 2006-04-19 富士胶片株式会社 超声波探头及使用其的超声波诊断装置
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EP1462799B1 (en) * 2001-11-14 2011-01-19 Kabushiki Kaisha Toshiba Ultrasonograph with calculation of ultrasonic wave refraction
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JP4412180B2 (ja) * 2005-01-19 2010-02-10 トヨタ自動車株式会社 レーザー超音波探傷法、及びレーザー超音波探傷装置
JP5260130B2 (ja) * 2007-08-10 2013-08-14 三菱重工業株式会社 超音波検査装置、超音波検査方法および原子力プラントの非破壊検査方法
JP5811639B2 (ja) 2010-07-09 2015-11-11 大日本印刷株式会社 太陽電池モジュール

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2984390B2 (ja) * 1991-03-01 1999-11-29 三菱重工業株式会社 超音波発生方法
JPH10288607A (ja) * 1997-04-15 1998-10-27 Mitsubishi Heavy Ind Ltd 超音波センサ
JP2000028589A (ja) 1998-07-10 2000-01-28 Toshiba Corp 3次元超音波画像化装置
JP2002017723A (ja) * 2000-05-02 2002-01-22 Fuji Photo Film Co Ltd 超音波用探触子及びそれを用いた超音波診断装置
JP2005043139A (ja) 2003-07-25 2005-02-17 Toshiba Corp レーザー超音波検査装置および検査方法
JP2005175919A (ja) * 2003-12-11 2005-06-30 Mitsubishi Heavy Ind Ltd 超音波受信センサ及び超音波受信装置
JP2005253751A (ja) * 2004-03-12 2005-09-22 Fuji Photo Film Co Ltd 超音波用探触子及び超音波診断装置

Also Published As

Publication number Publication date
US8276452B2 (en) 2012-10-02
EP2131191A1 (en) 2009-12-09
EP2131191B1 (en) 2016-10-26
CN101622534B (zh) 2012-07-04
CN101622534A (zh) 2010-01-06
US20100058871A1 (en) 2010-03-11
JP2008249557A (ja) 2008-10-16
JP5134277B2 (ja) 2013-01-30
KR20090096460A (ko) 2009-09-10
RU2422815C2 (ru) 2011-06-27
EP2131191A4 (en) 2014-12-17
RU2009122649A (ru) 2011-05-10
KR101127001B1 (ko) 2012-07-10

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