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WO2008123357A1 - プラズマ発生体及び反応装置 - Google Patents

プラズマ発生体及び反応装置 Download PDF

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Publication number
WO2008123357A1
WO2008123357A1 PCT/JP2008/055876 JP2008055876W WO2008123357A1 WO 2008123357 A1 WO2008123357 A1 WO 2008123357A1 JP 2008055876 W JP2008055876 W JP 2008055876W WO 2008123357 A1 WO2008123357 A1 WO 2008123357A1
Authority
WO
WIPO (PCT)
Prior art keywords
plasma generating
generating body
reaction apparatus
electrodes
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/055876
Other languages
English (en)
French (fr)
Inventor
Yuichiro Ishizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to KR1020097021966A priority Critical patent/KR101117144B1/ko
Priority to JP2009509163A priority patent/JP4973959B2/ja
Priority to US12/594,167 priority patent/US8349266B2/en
Priority to EP08722915.9A priority patent/EP2139301B1/en
Publication of WO2008123357A1 publication Critical patent/WO2008123357A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/0892—Electric or magnetic treatment, e.g. dissociation of noxious components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/008—Details of the reactor or of the particulate material; Processes to increase or to retard the rate of reaction
    • B01J8/0085—Details of the reactor or of the particulate material; Processes to increase or to retard the rate of reaction promoting uninterrupted fluid flow, e.g. by filtering out particles in front of the catalyst layer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
    • C01B3/32—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air
    • C01B3/34—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents
    • C01B3/342—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents with the aid of electrical means, electromagnetic or mechanical vibrations, or particle radiations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
    • B01J2219/0813—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes employing four electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824—Details relating to the shape of the electrodes
    • B01J2219/0835—Details relating to the shape of the electrodes substantially flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0837—Details relating to the material of the electrodes
    • B01J2219/0841—Metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/08—Methods of heating or cooling
    • C01B2203/0805—Methods of heating the process for making hydrogen or synthesis gas
    • C01B2203/0861—Methods of heating the process for making hydrogen or synthesis gas by plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N2240/00—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being
    • F01N2240/28—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being a plasma reactor

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

　プラズマの発生効率を低下させることなく、熱応力による破壊を防ぐことが可能なプラズマ発生体を提供する。プラズマ発生体１は、放電空間５が設けられた基体３と、基体３において、放電空間５を挟んで設けられた電極対９とを有し、電極対９の少なくとも一方の電極７は、電極対９の対向方向において互いに異なる位置に設けられた複数の電極層１５を有する。
PCT/JP2008/055876 2007-03-30 2008-03-27 プラズマ発生体及び反応装置 Ceased WO2008123357A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020097021966A KR101117144B1 (ko) 2007-03-30 2008-03-27 플라즈마 발생체 및 반응 장치
JP2009509163A JP4973959B2 (ja) 2007-03-30 2008-03-27 プラズマ発生体及び反応装置
US12/594,167 US8349266B2 (en) 2007-03-30 2008-03-27 Plasma generator and reaction apparatus
EP08722915.9A EP2139301B1 (en) 2007-03-30 2008-03-27 Plasma generating body and reaction apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007090847 2007-03-30
JP2007-090847 2007-03-30

Publications (1)

Publication Number Publication Date
WO2008123357A1 true WO2008123357A1 (ja) 2008-10-16

Family

ID=39830846

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055876 Ceased WO2008123357A1 (ja) 2007-03-30 2008-03-27 プラズマ発生体及び反応装置

Country Status (5)

Country Link
US (1) US8349266B2 (ja)
EP (1) EP2139301B1 (ja)
JP (1) JP4973959B2 (ja)
KR (1) KR101117144B1 (ja)
WO (1) WO2008123357A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013530489A (ja) * 2010-04-30 2013-07-25 エージーシー グラス ユーロップ Ｄｂｄプラズマ法のための電極
JPWO2013161423A1 (ja) * 2012-04-26 2015-12-24 株式会社日立国際電気 排ガス処理装置、排ガス処理システム、排ガス処理システムの制御方法、制御プログラム、及び筒状管。
JP2018206494A (ja) * 2017-05-31 2018-12-27 日本特殊陶業株式会社 プラズマリアクタ
CN111163578A (zh) * 2018-11-08 2020-05-15 中国石油化工股份有限公司 电极片、电极板、电极块和等离子发生器
JP2020118125A (ja) * 2019-01-25 2020-08-06 ダイハツ工業株式会社 プラズマリアクター
JP2021182902A (ja) * 2020-05-22 2021-12-02 リ, チャン フンLEE, Chang Hoon 切り花の保管システム及び方法
JP2022072142A (ja) * 2020-10-29 2022-05-17 日本特殊陶業株式会社 オゾン発生装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9447205B2 (en) * 2012-11-19 2016-09-20 Ut-Battelle, Llc Atmospheric pressure plasma processing of polymeric materials utilizing close proximity indirect exposure
JP5999368B2 (ja) * 2013-09-02 2016-09-28 株式会社デンソー ガス改質装置、排気浄化システム、空気清浄機
CN106714434B (zh) * 2015-07-17 2024-04-09 核工业西南物理研究院 成对电极共面放电等离子体发生装置
KR102109360B1 (ko) * 2019-12-16 2020-05-13 주식회사 원일공기정화 고효율 플라즈마 탈취기

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001193442A (ja) * 2000-01-12 2001-07-17 Denso Corp 内燃機関の排ガス浄化装置
JP2002129947A (ja) * 2000-10-19 2002-05-09 Denso Corp 内燃機関の排気浄化装置
JP2002221027A (ja) 2001-01-25 2002-08-09 Denso Corp 内燃機関の排気浄化装置
WO2004114729A1 (ja) * 2003-06-20 2004-12-29 Ngk Insulators, Ltd. プラズマ発生電極及びプラズマ発生装置、並びに排気ガス浄化装置
JP2005203362A (ja) * 2003-12-19 2005-07-28 Ngk Insulators Ltd プラズマ発生電極及びプラズマ反応器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494493A (en) * 1978-01-11 1979-07-26 Hitachi Ltd Electrode for ozonizer
JP4863743B2 (ja) * 2006-03-24 2012-01-25 日本碍子株式会社 プラズマ発生電極、プラズマ反応器及び排ガス浄化装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001193442A (ja) * 2000-01-12 2001-07-17 Denso Corp 内燃機関の排ガス浄化装置
JP2002129947A (ja) * 2000-10-19 2002-05-09 Denso Corp 内燃機関の排気浄化装置
JP2002221027A (ja) 2001-01-25 2002-08-09 Denso Corp 内燃機関の排気浄化装置
WO2004114729A1 (ja) * 2003-06-20 2004-12-29 Ngk Insulators, Ltd. プラズマ発生電極及びプラズマ発生装置、並びに排気ガス浄化装置
JP2005203362A (ja) * 2003-12-19 2005-07-28 Ngk Insulators Ltd プラズマ発生電極及びプラズマ反応器

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2139301A4

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013530489A (ja) * 2010-04-30 2013-07-25 エージーシー グラス ユーロップ Ｄｂｄプラズマ法のための電極
JPWO2013161423A1 (ja) * 2012-04-26 2015-12-24 株式会社日立国際電気 排ガス処理装置、排ガス処理システム、排ガス処理システムの制御方法、制御プログラム、及び筒状管。
JP2018206494A (ja) * 2017-05-31 2018-12-27 日本特殊陶業株式会社 プラズマリアクタ
CN111163578A (zh) * 2018-11-08 2020-05-15 中国石油化工股份有限公司 电极片、电极板、电极块和等离子发生器
JP2020118125A (ja) * 2019-01-25 2020-08-06 ダイハツ工業株式会社 プラズマリアクター
JP7258577B2 (ja) 2019-01-25 2023-04-17 ダイハツ工業株式会社 プラズマリアクター
JP2021182902A (ja) * 2020-05-22 2021-12-02 リ, チャン フンLEE, Chang Hoon 切り花の保管システム及び方法
JP7080509B2 (ja) 2020-05-22 2022-06-06 フン リ，チャン 切り花の保管システム及び方法
JP2022072142A (ja) * 2020-10-29 2022-05-17 日本特殊陶業株式会社 オゾン発生装置

Also Published As

Publication number Publication date
KR101117144B1 (ko) 2012-05-31
EP2139301A4 (en) 2014-08-13
EP2139301A1 (en) 2009-12-30
KR20090123965A (ko) 2009-12-02
JPWO2008123357A1 (ja) 2010-07-15
US20100135867A1 (en) 2010-06-03
JP4973959B2 (ja) 2012-07-11
US8349266B2 (en) 2013-01-08
EP2139301B1 (en) 2018-06-27

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