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WO2008120788A1 - ヒータ内蔵バルブ - Google Patents

ヒータ内蔵バルブ Download PDF

Info

Publication number
WO2008120788A1
WO2008120788A1 PCT/JP2008/056452 JP2008056452W WO2008120788A1 WO 2008120788 A1 WO2008120788 A1 WO 2008120788A1 JP 2008056452 W JP2008056452 W JP 2008056452W WO 2008120788 A1 WO2008120788 A1 WO 2008120788A1
Authority
WO
WIPO (PCT)
Prior art keywords
compressed air
air introduction
introduction chamber
piston
built
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/056452
Other languages
English (en)
French (fr)
Inventor
Tsuyoshi Tanikawa
Michio Yamaji
Tadayuki Yakushijin
Hiroshi Fukuchi
Keisuke Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to CN2008800106808A priority Critical patent/CN101663525B/zh
Priority to US12/450,504 priority patent/US8443830B2/en
Priority to JP2009507550A priority patent/JP4923105B2/ja
Priority to KR1020097021790A priority patent/KR101124138B1/ko
Publication of WO2008120788A1 publication Critical patent/WO2008120788A1/ja
Priority to IL20105809A priority patent/IL201058A/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00Means in or on valves for heating or cooling
    • F16K49/002Electric heating means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00Spindle sealings
    • F16K41/10Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00Means in or on valves for heating or cooling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/6416With heating or cooling of the system
    • Y10T137/6606With electric heating element

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Sealing Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

 200°Cを超える高温条件下においても使用することができるヒータ内蔵バルブを提供する。  ピストン駆動手段7は、ピストン6を下方に移動させるための上側圧縮空気導入室24と、ピストン6を上方に移動させるための下側圧縮空気導入室25とを有している。ピストンシール手段8は、上側圧縮空気導入室24をシールする上側ベローズ29と、下側圧縮空気導入室25をシールする下側ベローズ30とを有している。
PCT/JP2008/056452 2007-04-02 2008-04-01 ヒータ内蔵バルブ Ceased WO2008120788A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2008800106808A CN101663525B (zh) 2007-04-02 2008-04-01 内置有加热器的阀
US12/450,504 US8443830B2 (en) 2007-04-02 2008-04-01 Heater built-in valve
JP2009507550A JP4923105B2 (ja) 2007-04-02 2008-04-01 ヒータ内蔵バルブ
KR1020097021790A KR101124138B1 (ko) 2007-04-02 2008-04-01 히터 내장 밸브
IL20105809A IL201058A (en) 2007-04-02 2009-09-21 Valve with built-in heater

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007096680 2007-04-02
JP2007-096680 2007-04-02

Publications (1)

Publication Number Publication Date
WO2008120788A1 true WO2008120788A1 (ja) 2008-10-09

Family

ID=39808368

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/056452 Ceased WO2008120788A1 (ja) 2007-04-02 2008-04-01 ヒータ内蔵バルブ

Country Status (7)

Country Link
US (1) US8443830B2 (ja)
JP (1) JP4923105B2 (ja)
KR (1) KR101124138B1 (ja)
CN (1) CN101663525B (ja)
IL (1) IL201058A (ja)
TW (1) TW200848646A (ja)
WO (1) WO2008120788A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010106935A1 (ja) * 2009-03-17 2010-09-23 株式会社フジキン 調整弁装置
WO2011055688A1 (ja) * 2009-11-09 2011-05-12 株式会社フジキン 調整弁装置
KR20140050557A (ko) * 2012-10-19 2014-04-29 도쿄엘렉트론가부시키가이샤 파이프 조인트
JP2017518467A (ja) * 2014-05-21 2017-07-06 サフラン エアークラフト エンジンズ 低減された重量を有する改良された流れ制御装置
CN111255946A (zh) * 2020-03-05 2020-06-09 江苏徐工工程机械研究院有限公司 一种自主加热智能保温的高温熔盐阀
KR20230090365A (ko) * 2020-11-27 2023-06-21 가부시키가이샤 후지킨 밸브

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9010353B2 (en) * 2011-08-04 2015-04-21 Weatherford Technology Holdings, Llc Gas lift valve having edge-welded bellows and captive sliding seal
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP2015224749A (ja) * 2014-05-29 2015-12-14 株式会社東芝 蒸気弁駆動装置、蒸気弁
KR101595217B1 (ko) * 2014-09-16 2016-02-17 프리시스 주식회사 고정히터블럭이 구비된 앵글밸브
US20170292633A1 (en) * 2016-04-11 2017-10-12 Mks Instruments, Inc. Actively cooled vacuum isolation valve
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7054502B2 (ja) * 2017-09-29 2022-04-14 株式会社フジキン ヒータ内蔵バルブ
TWI667442B (zh) * 2018-08-01 2019-08-01 群光電能科技股份有限公司 閥、膨脹閥及其步進控制方法
TWI686556B (zh) * 2019-02-26 2020-03-01 日揚科技股份有限公司 加熱閘閥
JP7313169B2 (ja) * 2019-03-19 2023-07-24 株式会社キッツエスシーティー 真空ベローズホットバルブ
CN113202967B (zh) * 2021-04-30 2022-10-04 中国空气动力研究与发展中心设备设计与测试技术研究所 一种用于低温风洞的超低温开关阀
KR20240140375A (ko) * 2023-03-16 2024-09-24 현대자동차주식회사 극저온 액체 저장장치
CN117090948B (zh) * 2023-10-19 2023-12-26 泰州市百冠泵阀科技有限公司 一种机械式真空液位控制阀
DE102024001577A1 (de) 2024-05-15 2025-11-20 Vat Holding Ag Gaseinlassventil mit balgantrieb

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370611U (ja) * 1989-11-14 1991-07-16
JPH03234988A (ja) * 1990-02-05 1991-10-18 Jun Taga バルブ
JPH05187324A (ja) * 1992-01-14 1993-07-27 Keihin Seiki Mfg Co Ltd 気化器における回転軸
JPH061753U (ja) * 1992-06-08 1994-01-14 石川島播磨重工業株式会社 推薬弁
JPH11153235A (ja) * 1997-09-22 1999-06-08 Smc Corp スムースベントバルブ
JP2004156720A (ja) * 2002-11-07 2004-06-03 Smc Corp ヒーター付きポペット弁
JP2006105206A (ja) * 2004-10-01 2006-04-20 Smc Corp 真空流量調整弁

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2399402A (en) * 1941-04-08 1946-04-30 Bendix Aviat Corp Electrical connecting and radioshielding means
US2822418A (en) * 1952-12-05 1958-02-04 George M Dinnick Connector for tubular conduits
US3322142A (en) * 1964-08-25 1967-05-30 Cash A W Co Valve for low temperature service
US3902695A (en) * 1973-12-13 1975-09-02 Us Energy Valve for cryogenic service
US4240610A (en) * 1979-05-23 1980-12-23 Eg & G Sealol, Inc. High pressure bellows assembly
JPS57144361A (en) * 1981-02-27 1982-09-06 Toshiba Corp Valve mechanism for low temperature
JPH0370611A (ja) 1989-08-11 1991-03-26 Mazda Motor Corp 車両のサスペンション装置
US5230364A (en) * 1991-04-06 1993-07-27 Vickers, Incorporated Pressure relief valve
JP3268836B2 (ja) 1992-04-22 2002-03-25 シチズン時計株式会社 エステル誘導体を含有する液晶組成物
JPH07198063A (ja) 1993-12-28 1995-08-01 Benkan Corp Cvd装置の真空排気弁
US5915410A (en) * 1996-02-01 1999-06-29 Zajac; John Pneumatically operated positive shutoff throttle valve
JP3915083B2 (ja) * 1998-05-20 2007-05-16 Smc株式会社 高真空バルブ
JP3502597B2 (ja) * 2000-07-07 2004-03-02 Smc株式会社 二方弁
US6394418B1 (en) * 2000-11-14 2002-05-28 Abb, Inc. Bellows actuator for pressure and flow control
JP3778866B2 (ja) * 2002-03-20 2006-05-24 Smc株式会社 ヒーター付き真空バルブ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370611U (ja) * 1989-11-14 1991-07-16
JPH03234988A (ja) * 1990-02-05 1991-10-18 Jun Taga バルブ
JPH05187324A (ja) * 1992-01-14 1993-07-27 Keihin Seiki Mfg Co Ltd 気化器における回転軸
JPH061753U (ja) * 1992-06-08 1994-01-14 石川島播磨重工業株式会社 推薬弁
JPH11153235A (ja) * 1997-09-22 1999-06-08 Smc Corp スムースベントバルブ
JP2004156720A (ja) * 2002-11-07 2004-06-03 Smc Corp ヒーター付きポペット弁
JP2006105206A (ja) * 2004-10-01 2006-04-20 Smc Corp 真空流量調整弁

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010106935A1 (ja) * 2009-03-17 2010-09-23 株式会社フジキン 調整弁装置
JP2010216577A (ja) * 2009-03-17 2010-09-30 Fujikin Inc 調整弁装置
CN102365484A (zh) * 2009-03-17 2012-02-29 株式会社富士金 调整阀装置
WO2011055688A1 (ja) * 2009-11-09 2011-05-12 株式会社フジキン 調整弁装置
KR20140050557A (ko) * 2012-10-19 2014-04-29 도쿄엘렉트론가부시키가이샤 파이프 조인트
JP2014084886A (ja) * 2012-10-19 2014-05-12 Tokyo Electron Ltd 管継手
US9371946B2 (en) 2012-10-19 2016-06-21 Tokyo Electron Limited Pipe joint
KR102150524B1 (ko) * 2012-10-19 2020-09-01 도쿄엘렉트론가부시키가이샤 파이프 조인트
JP2017518467A (ja) * 2014-05-21 2017-07-06 サフラン エアークラフト エンジンズ 低減された重量を有する改良された流れ制御装置
CN111255946A (zh) * 2020-03-05 2020-06-09 江苏徐工工程机械研究院有限公司 一种自主加热智能保温的高温熔盐阀
KR20230090365A (ko) * 2020-11-27 2023-06-21 가부시키가이샤 후지킨 밸브
KR102729924B1 (ko) 2020-11-27 2024-11-13 가부시키가이샤 후지킨 밸브

Also Published As

Publication number Publication date
KR20090125829A (ko) 2009-12-07
CN101663525B (zh) 2011-11-30
KR101124138B1 (ko) 2012-03-21
JP4923105B2 (ja) 2012-04-25
TW200848646A (en) 2008-12-16
JPWO2008120788A1 (ja) 2010-07-15
US8443830B2 (en) 2013-05-21
US20100193717A1 (en) 2010-08-05
IL201058A (en) 2013-09-30
IL201058A0 (en) 2010-05-17
CN101663525A (zh) 2010-03-03

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