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WO2008120456A1 - 超音波アクチュエータ装置 - Google Patents

超音波アクチュエータ装置 Download PDF

Info

Publication number
WO2008120456A1
WO2008120456A1 PCT/JP2008/000608 JP2008000608W WO2008120456A1 WO 2008120456 A1 WO2008120456 A1 WO 2008120456A1 JP 2008000608 W JP2008000608 W JP 2008000608W WO 2008120456 A1 WO2008120456 A1 WO 2008120456A1
Authority
WO
WIPO (PCT)
Prior art keywords
frequency
piezoelectric element
drive
ultrasonic actuator
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/000608
Other languages
English (en)
French (fr)
Inventor
Yusuke Adachi
Hideaki Mukae
Masaru Higashionji
Eiichi Nagaoka
Kenichi Honjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008534211A priority Critical patent/JP4209464B2/ja
Publication of WO2008120456A1 publication Critical patent/WO2008120456A1/ja
Priority to US12/469,212 priority patent/US7737604B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　本発明は、圧電素子を有し、屈曲振動及び縦振動を行うアクチュエータ本体を備えた超音波アクチュエータ装置に関するものである。 　駆動電力の適正化を図りつつ、出力の制御範囲が大きい超音波アクチュエータを提供する。 　超音波アクチュエータ装置は、圧電素子（５０）を有するアクチュエータ本体（５）と、駆動周波数を設定する制御回路（１５０）と、駆動周波数の駆動電圧をアクチュエータ本体（５）に印加する電源（１９１，１９２）と、圧電素子（５０）の反共振周波数と共振周波数との差に関するデータを記憶しておくメモリ（１７０）とを備えている。制御回路（５０）は、圧電素子（５０）の電流値が極小値になる基準周波数とメモリ（１７０）に記憶されたデータとに基づいて、駆動周波数の制御範囲をその下限値が圧電素子（５０）を流れる電流値が極大値となる周波数以上となるように定めて、制御範囲内で駆動周波数を設定する。
PCT/JP2008/000608 2007-03-16 2008-03-17 超音波アクチュエータ装置 Ceased WO2008120456A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008534211A JP4209464B2 (ja) 2007-03-16 2008-03-17 超音波アクチュエータ装置
US12/469,212 US7737604B2 (en) 2007-03-16 2009-05-20 Ultrasonic actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007068326 2007-03-16
JP2007-068326 2007-03-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/469,212 Continuation US7737604B2 (en) 2007-03-16 2009-05-20 Ultrasonic actuator

Publications (1)

Publication Number Publication Date
WO2008120456A1 true WO2008120456A1 (ja) 2008-10-09

Family

ID=39808042

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000608 Ceased WO2008120456A1 (ja) 2007-03-16 2008-03-17 超音波アクチュエータ装置

Country Status (3)

Country Link
US (1) US7737604B2 (ja)
JP (1) JP4209464B2 (ja)
WO (1) WO2008120456A1 (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126354A1 (ja) * 2007-03-15 2008-10-23 Panasonic Corporation 超音波アクチュエータ
WO2008120454A1 (ja) * 2007-03-16 2008-10-09 Panasonic Corporation 振動型アクチュエータの制御装置
JP5246919B2 (ja) * 2008-04-24 2013-07-24 オリンパス株式会社 リニア駆動型超音波モータ
JP4851555B2 (ja) * 2008-05-13 2012-01-11 株式会社デンソー 力学量センサおよびその製造方法
JP2010051056A (ja) * 2008-08-19 2010-03-04 Fujinon Corp 駆動装置及び光学装置
KR101653826B1 (ko) * 2009-06-29 2016-09-02 삼성전자주식회사 초음파 모터 및 그 제조 방법
JP5791343B2 (ja) * 2010-05-31 2015-10-07 キヤノン株式会社 振動型モータの制御方法および振動型モータの駆動装置
JP5506552B2 (ja) * 2010-06-07 2014-05-28 キヤノン株式会社 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
JP5884303B2 (ja) 2011-06-07 2016-03-15 セイコーエプソン株式会社 圧電アクチュエーター、ロボットハンド、及びロボット
JP5799596B2 (ja) * 2011-06-10 2015-10-28 セイコーエプソン株式会社 圧電アクチュエーター、ロボットハンド、及びロボット
HUE032837T2 (hu) * 2011-07-19 2017-11-28 Mauser-Werke Oberndorf Maschb Gmbh Utánállító rendszer
WO2015055153A1 (zh) * 2013-10-18 2015-04-23 上海交通大学 压电陶瓷平面电机及其驱动方法
EP2960522A1 (en) * 2014-06-27 2015-12-30 Alcatel Lucent Apparatus and method for operating an oscillation blade device and a system comprising the apparatus
JP6592993B2 (ja) * 2015-07-07 2019-10-23 セイコーエプソン株式会社 圧電駆動装置及びロボット
JP6576225B2 (ja) * 2015-11-27 2019-09-18 クラリオン株式会社 車両用報知装置および車両用報知方法
DE102016110124B4 (de) * 2016-06-01 2018-07-19 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
EP3435535A1 (en) 2017-07-25 2019-01-30 Physik Instrumente (PI) GmbH & Co. Kg Method for closed-loop motion control of an ultrasonic motor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6356177A (ja) * 1986-08-26 1988-03-10 Matsushita Electric Ind Co Ltd 超音波モ−タ駆動方法
JPH03239168A (ja) * 1990-02-14 1991-10-24 Nikon Corp 超音波モータ駆動装置
JPH06315283A (ja) * 1993-04-27 1994-11-08 Olympus Optical Co Ltd 超音波モータの駆動回路
JP2006304490A (ja) * 2005-04-20 2006-11-02 Seiko Epson Corp 圧電アクチュエータの駆動方法、圧電アクチュエータの駆動装置、電子機器、圧電アクチュエータの駆動装置の制御プログラム、および記録媒体

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR900007413B1 (ko) * 1986-08-26 1990-10-08 마쯔시다덴기산교 가부시기가이샤 초음파 모우터구동 방법
JPH0322871A (ja) 1989-06-16 1991-01-31 Nissan Motor Co Ltd 超音波モータ駆動装置
DE69111481T2 (de) * 1990-02-14 1996-01-18 Nippon Kogaku Kk Antriebsvorrichtung für einen Ultraschallwellenmotor.
JP3453838B2 (ja) 1994-03-23 2003-10-06 株式会社ニコン 超音波モータ
EP0674350B1 (en) * 1994-03-23 2000-05-31 Nikon Corporation Ultrasonic motor
JP4442965B2 (ja) * 1999-11-01 2010-03-31 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器
JP2002112563A (ja) * 2000-09-29 2002-04-12 Minolta Co Ltd アクチュエータの駆動方法および装置
US6633234B2 (en) * 2000-10-20 2003-10-14 Ethicon Endo-Surgery, Inc. Method for detecting blade breakage using rate and/or impedance information
JP2002359983A (ja) 2001-05-31 2002-12-13 Nidec Copal Corp 超音波モータ制御回路
JP2004304963A (ja) 2003-03-31 2004-10-28 Seiko Epson Corp 圧電アクチュエータ
JP2005185085A (ja) 2003-11-27 2005-07-07 Olympus Corp 超音波アクチュエータ駆動装置及び超音波アクチュエータ駆動方法
US7287965B2 (en) * 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
JP2006115583A (ja) 2004-10-13 2006-04-27 Canon Inc 超音波モータの制御装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6356177A (ja) * 1986-08-26 1988-03-10 Matsushita Electric Ind Co Ltd 超音波モ−タ駆動方法
JPH03239168A (ja) * 1990-02-14 1991-10-24 Nikon Corp 超音波モータ駆動装置
JPH06315283A (ja) * 1993-04-27 1994-11-08 Olympus Optical Co Ltd 超音波モータの駆動回路
JP2006304490A (ja) * 2005-04-20 2006-11-02 Seiko Epson Corp 圧電アクチュエータの駆動方法、圧電アクチュエータの駆動装置、電子機器、圧電アクチュエータの駆動装置の制御プログラム、および記録媒体

Also Published As

Publication number Publication date
JPWO2008120456A1 (ja) 2010-07-15
US7737604B2 (en) 2010-06-15
US20090224630A1 (en) 2009-09-10
JP4209464B2 (ja) 2009-01-14

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