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WO2008111251A1 - レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法 - Google Patents

レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法 Download PDF

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Publication number
WO2008111251A1
WO2008111251A1 PCT/JP2007/069052 JP2007069052W WO2008111251A1 WO 2008111251 A1 WO2008111251 A1 WO 2008111251A1 JP 2007069052 W JP2007069052 W JP 2007069052W WO 2008111251 A1 WO2008111251 A1 WO 2008111251A1
Authority
WO
WIPO (PCT)
Prior art keywords
resist composition
electronic device
resist pattern
liquid immersion
manufacturing electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/069052
Other languages
English (en)
French (fr)
Inventor
Miwa Kozawa
Koji Nozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2009503878A priority Critical patent/JP5110077B2/ja
Publication of WO2008111251A1 publication Critical patent/WO2008111251A1/ja
Priority to US12/557,211 priority patent/US8652751B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

　液浸露光技術において、前記液浸媒体への溶出を抑制し、性能低下がなく、微細なレジストパターンを形成可能なレジスト組成物、それを用いたレジストパターンの形成方法、及び電子デバイスの製造方法を提供することを目的とする。 　本発明のレジスト組成物は、液浸露光用であって、置換基で置換されていてもよいアルカリ可溶性基を少なくとも有するケイ素化合物と、酸脱離基で置換されていてもよいアルカリ可溶性基を有する樹脂と、を少なくとも含む。
PCT/JP2007/069052 2007-03-14 2007-09-28 レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法 Ceased WO2008111251A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009503878A JP5110077B2 (ja) 2007-03-14 2007-09-28 レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法
US12/557,211 US8652751B2 (en) 2007-03-14 2009-09-10 Resist composition, method for forming resist pattern, and method for producing electronic device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/055145 WO2008111203A1 (ja) 2007-03-14 2007-03-14 レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法
JPPCT/JP2007/055145 2007-03-14

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/557,211 Continuation US8652751B2 (en) 2007-03-14 2009-09-10 Resist composition, method for forming resist pattern, and method for producing electronic device

Publications (1)

Publication Number Publication Date
WO2008111251A1 true WO2008111251A1 (ja) 2008-09-18

Family

ID=39759154

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2007/055145 Ceased WO2008111203A1 (ja) 2007-03-14 2007-03-14 レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法
PCT/JP2007/069052 Ceased WO2008111251A1 (ja) 2007-03-14 2007-09-28 レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/055145 Ceased WO2008111203A1 (ja) 2007-03-14 2007-03-14 レジスト組成物、レジストパターンの形成方法、及び電子デバイスの製造方法

Country Status (2)

Country Link
US (1) US8652751B2 (ja)
WO (2) WO2008111203A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011102975A (ja) * 2009-10-15 2011-05-26 Fujifilm Corp 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法
JP2015118385A (ja) * 2015-01-15 2015-06-25 Jsr株式会社 液浸露光用感放射線性樹脂組成物、硬化パターン形成方法及び硬化パターン

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120428510B (zh) * 2025-07-10 2025-08-29 华芯程(杭州)科技有限公司 一种刻蚀偏差校正方法、装置、设备及存储介质

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000221686A (ja) * 1999-01-27 2000-08-11 Internatl Business Mach Corp <Ibm> レジスト組成物、および基板上にパタ―ン形成したレジスト層を形成する方法
JP2000221685A (ja) * 1999-01-28 2000-08-11 Fuji Photo Film Co Ltd ポジ型シリコーン含有感光性組成物
WO2004076535A1 (ja) * 2003-02-26 2004-09-10 Tokyo Ohka Kogyo Co., Ltd. シルセスキオキサン樹脂、ポジ型レジスト組成物、レジスト積層体及びレジストパターン形成方法
JP2005134456A (ja) * 2003-10-28 2005-05-26 Jsr Corp 感放射線性樹脂組成物
JP2005221714A (ja) * 2004-02-05 2005-08-18 Shin Etsu Chem Co Ltd レジスト材料及びパターン形成方法
JP2005234326A (ja) * 2004-02-20 2005-09-02 Fuji Photo Film Co Ltd 液浸露光用レジスト組成物及びそれを用いたパターン形成方法
JP2006133712A (ja) * 2004-10-08 2006-05-25 Fuji Photo Film Co Ltd ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP2006309245A (ja) * 2005-05-01 2006-11-09 Rohm & Haas Electronic Materials Llc 液浸リソグラフィーのための組成物および方法
JP2007016177A (ja) * 2005-07-08 2007-01-25 Fujitsu Ltd シリカ系被膜形成用材料、シリカ系被膜及びその製造方法、多層配線及びその製造方法、並びに、半導体装置及びその製造方法
JP2007086528A (ja) * 2005-09-22 2007-04-05 Fujifilm Corp 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000076531A (ko) 1999-01-28 2000-12-26 무네유키 가코우 포지티브형 실리콘 함유의 감광성 조성물
JP4270708B2 (ja) * 1999-04-23 2009-06-03 富士通株式会社 ケイ素含有ポリマ、その製造方法、それを用いたレジスト組成物、パターン形成方法および電子デバイスの製造方法
JP4198631B2 (ja) * 2004-04-28 2008-12-17 富士通マイクロエレクトロニクス株式会社 絶縁膜形成方法及び半導体装置
JP2006301524A (ja) 2005-04-25 2006-11-02 Tokyo Ohka Kogyo Co Ltd 保護膜形成用材料およびこれを用いたレジストパターン形成方法
JP4739150B2 (ja) * 2006-08-30 2011-08-03 富士通株式会社 レジストカバー膜形成材料、レジストパターンの形成方法、電子デバイス及びその製造方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000221686A (ja) * 1999-01-27 2000-08-11 Internatl Business Mach Corp <Ibm> レジスト組成物、および基板上にパタ―ン形成したレジスト層を形成する方法
JP2000221685A (ja) * 1999-01-28 2000-08-11 Fuji Photo Film Co Ltd ポジ型シリコーン含有感光性組成物
WO2004076535A1 (ja) * 2003-02-26 2004-09-10 Tokyo Ohka Kogyo Co., Ltd. シルセスキオキサン樹脂、ポジ型レジスト組成物、レジスト積層体及びレジストパターン形成方法
JP2005134456A (ja) * 2003-10-28 2005-05-26 Jsr Corp 感放射線性樹脂組成物
JP2005221714A (ja) * 2004-02-05 2005-08-18 Shin Etsu Chem Co Ltd レジスト材料及びパターン形成方法
JP2005234326A (ja) * 2004-02-20 2005-09-02 Fuji Photo Film Co Ltd 液浸露光用レジスト組成物及びそれを用いたパターン形成方法
JP2006133712A (ja) * 2004-10-08 2006-05-25 Fuji Photo Film Co Ltd ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP2006309245A (ja) * 2005-05-01 2006-11-09 Rohm & Haas Electronic Materials Llc 液浸リソグラフィーのための組成物および方法
JP2007016177A (ja) * 2005-07-08 2007-01-25 Fujitsu Ltd シリカ系被膜形成用材料、シリカ系被膜及びその製造方法、多層配線及びその製造方法、並びに、半導体装置及びその製造方法
JP2007086528A (ja) * 2005-09-22 2007-04-05 Fujifilm Corp 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011102975A (ja) * 2009-10-15 2011-05-26 Fujifilm Corp 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法
US9152048B2 (en) 2009-10-15 2015-10-06 Fujifilm Corporation Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
JP2015118385A (ja) * 2015-01-15 2015-06-25 Jsr株式会社 液浸露光用感放射線性樹脂組成物、硬化パターン形成方法及び硬化パターン

Also Published As

Publication number Publication date
WO2008111203A1 (ja) 2008-09-18
US8652751B2 (en) 2014-02-18
US20100047711A1 (en) 2010-02-25

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