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WO2008151597A1 - Ensemble capteur fonctionnant par induction et procédé pour influencer le comportement de mesure d'une bobine de mesure - Google Patents

Ensemble capteur fonctionnant par induction et procédé pour influencer le comportement de mesure d'une bobine de mesure Download PDF

Info

Publication number
WO2008151597A1
WO2008151597A1 PCT/DE2008/000879 DE2008000879W WO2008151597A1 WO 2008151597 A1 WO2008151597 A1 WO 2008151597A1 DE 2008000879 W DE2008000879 W DE 2008000879W WO 2008151597 A1 WO2008151597 A1 WO 2008151597A1
Authority
WO
WIPO (PCT)
Prior art keywords
coil
sensor arrangement
measuring
voltage
arrangement according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2008/000879
Other languages
German (de)
English (en)
Inventor
Franz Hrubes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Messtechnik GmbH and Co KG
Original Assignee
Micro Epsilon Messtechnik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Epsilon Messtechnik GmbH and Co KG filed Critical Micro Epsilon Messtechnik GmbH and Co KG
Publication of WO2008151597A1 publication Critical patent/WO2008151597A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/026—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring length of cable, band or the like, which has been paid out, e.g. from a reel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element

Definitions

  • an electromagnetic field is generated by a coil, which induces eddy currents in a conductive object located in the measuring range of the sensor.
  • eddy currents affect the impedance of the coil (Lenz's rule).
  • both the real and the imaginary part of the impedance of the coil is changed as a function of the distance of the coil to the object. This change is used as a measurement signal and allows conclusions about the distance of the coil to the object.
  • a disadvantage of such coils is that they react sensitively to acting magnetic fields. Additional magnetic fields change the permeability of the core, which in turn affects the coil impedance. Therefore, these coils can not be used in environments in which magnetic fields are present (for example, in electric motors, lifting magnets or the like).
  • the permeability of the core especially at negative temperatures and temperatures above 100 0 C, strongly dependent on the temperature of the core. The maximum achievable manufacturing tolerances of several percent in the permeability and the mechanical dimensions continue to have a negative impact.
  • Coils with larger diameters are difficult or impossible to realize because the production of the cores is difficult and extremely expensive.
  • arrangements are known in which a plurality of coils are arranged one above the other and serve a coil for the detection of an error signal. Such a system is shown in DE 33 36 783 A1.
  • the measuring coil and the further coil are configured such that their winding axes are substantially parallel to each other.
  • the two winding axes substantially coincide, whereby the two coils are formed coaxially. It is essentially irrelevant how the two coils are constructed.
  • the coils may be formed by a wire winding.
  • a conductor track applied to a carrier could form a coil. For this purpose, a number of embodiments is known from practice.
  • the measuring coil and the further coil could be designed such that the field of the further coil amplifies or reduces the field of the measuring coil.
  • a suitable structural design of the coils can be used.
  • the amplification factor and the phase position the superposition of the individual fields can be changed. Fixed gain factors and phase shifts can be used as well as customizable ones.
  • the oscillator could be designed to be free-swinging.
  • the oscillator could be formed by a resonant circuit, which contains, among other things, the measuring coil. This would reduce the frequency emitted by the oscillator to change the impedance of the measuring coil. This embodiment is used, for example, in a detection of impedance changes application.
  • the sensor arrangement could be designed in such a way that the measuring coil, in conjunction with the further coil, both serves to generate an electromagnetic field and realizes a detection of the conductive materials. This is achieved in particular by measuring the impedance or its change as a function of conductive materials in the measuring range of the sensor arrangement. For this purpose, various methods are known from practice.
  • the detection coil could in turn have a further coil which is arranged around the detection coil. This would further increase the spatial resolution of the sensor array.
  • the emission characteristic of the sensor arrangement is controlled by applying a further coil arranged around the measuring coil with a voltage derived from the supply voltage of the measuring coil.
  • a further coil arranged around the measuring coil with a voltage derived from the supply voltage of the measuring coil.
  • an amplifier and / or a phase shifter are used. It should be ensured that influencing the characteristics of the other coil as little or no influence on the supply voltage of the measuring coil takes.
  • FIG. 10 shows a sensor arrangement according to the invention, which has a separate exciter and detection coil
  • the quality of the measuring coil 2 is not reduced, as for example in the case of a metal-shielded sensor, and thus, with the same coil diameter of the measuring coil 2, the same detection distance results as with an unshielded standard measuring coil.
  • suitable values of the coils and suitable settings of the amplitude and phase relationships a significantly better spatial resolution of the measurement can be achieved.
  • FIG. 4 the distance diagrams in FIG. 4 are obtained with a sensor arrangement 1 according to the invention. It can be clearly seen that a considerable improvement of the spatial resolution can be achieved even with a relatively large measuring distance. In addition, the width in the diagram corresponds much better to the actual diameter of the lid.
  • FIG. 2 The circuit corresponds essentially to that of FIG. 2, but the tap is located for the derivation of the supply voltage U 2 for the further coil 3 immediately after the oscillator 4 before the coupling impedance. 5

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

L'invention concerne un ensemble capteur fonctionnant par induction et comprenant une bobine de mesure (2), un oscillateur (4) alimentant la bobine de mesure (2) en tension alternative. L'invention vise à améliorer le comportement de mesure des ensembles capteurs et à réduire leur sensibilité aux approches par les côtés. A cet effet, la bobine de mesure (2) est entourée d'une autre bobine (3) qui est reliée à un amplificateur (6) servant à l'alimenter avec une tension (U2) dérivée de la tension alternative de l'oscillateur (4, 8). L'invention concerne également un procédé correspondant.
PCT/DE2008/000879 2007-06-13 2008-05-27 Ensemble capteur fonctionnant par induction et procédé pour influencer le comportement de mesure d'une bobine de mesure Ceased WO2008151597A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007027822.7 2007-06-13
DE102007027822A DE102007027822B4 (de) 2007-06-13 2007-06-13 Induktiv arbeitende Sensoranordnung und Verfahren zum Beeinflussen des Messverhaltens einer Messspule

Publications (1)

Publication Number Publication Date
WO2008151597A1 true WO2008151597A1 (fr) 2008-12-18

Family

ID=39816616

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/000879 Ceased WO2008151597A1 (fr) 2007-06-13 2008-05-27 Ensemble capteur fonctionnant par induction et procédé pour influencer le comportement de mesure d'une bobine de mesure

Country Status (2)

Country Link
DE (1) DE102007027822B4 (fr)
WO (1) WO2008151597A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8704513B2 (en) 2011-02-16 2014-04-22 Olympus Ndt Inc. Shielded eddy current coils and methods for forming same on printed circuit boards
CN104266665B (zh) * 2014-09-17 2016-09-28 上海兰宝传感科技股份有限公司 电感式传感器
EP3968520B1 (fr) 2020-09-10 2022-08-31 Sick Ag Capteur permettant de détecter un objet et procédé d'évaluation d'un signal de capteur

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3197693A (en) * 1960-10-04 1965-07-27 Hugo L Libby Nondestructive eddy current subsurface testing device providing compensation for variation in probe-to-specimen spacing and surface irregularities
DE3336783A1 (de) * 1982-10-22 1984-04-26 Atomic Energy of Canada Ltd., Ottawa, Ontario Wirbelstromsonde mit unterscheidung zwischen fehler/rausch-signal
DE3410547A1 (de) * 1984-03-22 1985-09-26 Institut Dr. Friedrich Förster Prüfgerätebau GmbH & Co KG, 7410 Reutlingen Pruefgeraet zum untersuchen elektrisch leitender pruefteile
WO2000037881A2 (fr) * 1998-12-18 2000-06-29 Micro-Epsilon Messtechnik Gmbh & Co. Kg Procede pour faire fonctionner un capteur a courants de foucault et capteur de courants de foucault
JP2006308480A (ja) * 2005-04-28 2006-11-09 Sumida Corporation 金属球検知センサ及びそれに用いられるコイルの製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH656702A5 (en) * 1979-11-30 1986-07-15 Schmall Karl Heinz Arrangement for compensating disturbing radiation of electromagnetic radio-frequency oscillations in contactless scanning devices
JPS57200803A (en) * 1981-06-05 1982-12-09 Nippon Steel Corp Eddy current type displacement gage
DE68928063T2 (de) * 1988-01-22 1997-11-06 Data Instruments Inc., Acton, Mass. Weggeber mit gegenüberliegenden Spulen für verbesserte Linearität und Temperaturkompensation
DE3840532A1 (de) * 1988-12-01 1990-06-07 Pepperl & Fuchs Verfahren zur induktiven erzeugung eines elektrischen messsignals zur bestimmung des weges und/oder der position im raum und/oder von materialeigenschaften eines pruefkoerpers und nach diesem verfahren aufgebauter naeherungssensor und verwendung desselben als naeherherungsschalter
DE4031252C1 (en) * 1990-10-04 1991-10-31 Werner Turck Gmbh & Co Kg, 5884 Halver, De Inductive proximity switch - detects coil induced voltage difference which is fed to input of oscillator amplifier
DE19523519A1 (de) * 1995-06-30 1997-01-02 Juergen Rohmann Sensor für die Wirbelstrom-Werkstoffprüfung
AU2002333765A1 (en) * 2002-08-30 2004-03-19 Fev Motorentechnik Gmbh Sensor assembly for detecting the movement of a controlling element, which has a short overall length and which is displaced back and forth by an actuator
GB2435518B (en) * 2006-02-28 2009-11-18 Alexy Davison Karenowska Position sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3197693A (en) * 1960-10-04 1965-07-27 Hugo L Libby Nondestructive eddy current subsurface testing device providing compensation for variation in probe-to-specimen spacing and surface irregularities
DE3336783A1 (de) * 1982-10-22 1984-04-26 Atomic Energy of Canada Ltd., Ottawa, Ontario Wirbelstromsonde mit unterscheidung zwischen fehler/rausch-signal
DE3410547A1 (de) * 1984-03-22 1985-09-26 Institut Dr. Friedrich Förster Prüfgerätebau GmbH & Co KG, 7410 Reutlingen Pruefgeraet zum untersuchen elektrisch leitender pruefteile
WO2000037881A2 (fr) * 1998-12-18 2000-06-29 Micro-Epsilon Messtechnik Gmbh & Co. Kg Procede pour faire fonctionner un capteur a courants de foucault et capteur de courants de foucault
JP2006308480A (ja) * 2005-04-28 2006-11-09 Sumida Corporation 金属球検知センサ及びそれに用いられるコイルの製造方法

Also Published As

Publication number Publication date
DE102007027822B4 (de) 2013-12-12
DE102007027822A1 (de) 2008-12-18

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