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WO2008146640A1 - 流体機器ユニット構造 - Google Patents

流体機器ユニット構造 Download PDF

Info

Publication number
WO2008146640A1
WO2008146640A1 PCT/JP2008/059138 JP2008059138W WO2008146640A1 WO 2008146640 A1 WO2008146640 A1 WO 2008146640A1 JP 2008059138 W JP2008059138 W JP 2008059138W WO 2008146640 A1 WO2008146640 A1 WO 2008146640A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
chemical liquid
device unit
unit structure
fluid device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/059138
Other languages
English (en)
French (fr)
Inventor
Hiroki Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surpass Industry Co Ltd
Original Assignee
Surpass Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surpass Industry Co Ltd filed Critical Surpass Industry Co Ltd
Priority to US12/600,336 priority Critical patent/US8707992B2/en
Priority to EP08764346.6A priority patent/EP2149730B1/en
Priority to KR1020097024053A priority patent/KR101425009B1/ko
Publication of WO2008146640A1 publication Critical patent/WO2008146640A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/06—Construction of housing; Use of materials therefor of taps or cocks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L17/00—Joints with packing adapted to sealing by fluid pressure
    • F16L17/06—Joints with packing adapted to sealing by fluid pressure with sealing rings arranged between the end surfaces of the pipes or flanges or arranged in recesses in the pipe ends or flanges
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

薬液循環と水循環とを行いつつ必要に応じて薬液を取り出す用途等に適し、薬液等の流体が凝固しにくいコンパクトな流体機器ユニット構造を提供する。流路を介して接続される複数の流体機器類をベース部材１０に集積して一体化する流体機器ユニット構造ＦＵにおいて、薬液循環を行う第１薬液流出流路を形成して隣接する空気圧操作弁２０Ａと手動操作弁３０Ａとの間を連結する連結流路１５が流体機器類の軸中心からオフセットされている。
PCT/JP2008/059138 2007-05-25 2008-05-19 流体機器ユニット構造 Ceased WO2008146640A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/600,336 US8707992B2 (en) 2007-05-25 2008-05-19 Fluid apparatus unit structure
EP08764346.6A EP2149730B1 (en) 2007-05-25 2008-05-19 Fluid device unit structure
KR1020097024053A KR101425009B1 (ko) 2007-05-25 2008-05-19 유체기기 유니트 구조

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007139286A JP2008291941A (ja) 2007-05-25 2007-05-25 流体機器ユニット構造
JP2007-139286 2007-05-25

Publications (1)

Publication Number Publication Date
WO2008146640A1 true WO2008146640A1 (ja) 2008-12-04

Family

ID=40166873

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059138 Ceased WO2008146640A1 (ja) 2007-05-25 2008-05-19 流体機器ユニット構造

Country Status (5)

Country Link
US (1) US8707992B2 (ja)
EP (1) EP2149730B1 (ja)
JP (1) JP2008291941A (ja)
KR (1) KR101425009B1 (ja)
WO (1) WO2008146640A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10073071B2 (en) 2010-06-07 2018-09-11 David Deng Heating system
US9200802B2 (en) 2011-04-08 2015-12-01 David Deng Dual fuel heater with selector valve
US10222057B2 (en) 2011-04-08 2019-03-05 David Deng Dual fuel heater with selector valve
US9739389B2 (en) 2011-04-08 2017-08-22 David Deng Heating system
CN102506198B (zh) 2011-10-20 2013-05-22 南京普鲁卡姆电器有限公司 双气源燃气自适应主控阀
JP6539482B2 (ja) * 2015-04-15 2019-07-03 株式会社フジキン 遮断開放器
JP6751552B2 (ja) 2015-06-04 2020-09-09 サーパス工業株式会社 流体機器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164183U (ja) * 1984-04-09 1985-10-31 本田技研工業株式会社 流量制御弁
JP2000120903A (ja) 1998-10-09 2000-04-28 Ckd Corp 薬液用流体機器の連結構造
JP2003185039A (ja) * 2001-12-12 2003-07-03 Asahi Organic Chem Ind Co Ltd マニホールドバルブ
JP2005114090A (ja) * 2003-10-09 2005-04-28 Ckd Corp 流体制御弁

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3311120A (en) * 1964-07-06 1967-03-28 Palmisano Rocco Richard Fluid vortex oscillator
US3461897A (en) * 1965-12-17 1969-08-19 Aviat Electric Ltd Vortex vent fluid diode
US3494372A (en) * 1968-02-15 1970-02-10 Bendix Corp Laminated vortex amplifier with a pickoff formed in one lamina
JPH06117559A (ja) 1992-10-08 1994-04-26 Hitachi Ltd バルブ構造
US5277224A (en) * 1993-03-02 1994-01-11 Century Industries Inc. Five valve manifold for use with a pressure sensing apparatus
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
JP3650859B2 (ja) * 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
US5906223A (en) * 1996-09-16 1999-05-25 Itt Industries, Inc. Chromatography valve assembly
US5823228A (en) * 1997-02-05 1998-10-20 Keystone International Holdings Corp. Valve manifold
JP3997338B2 (ja) * 1997-02-14 2007-10-24 忠弘 大見 流体制御装置
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
JP4077998B2 (ja) * 1999-09-09 2008-04-23 シーケーディ株式会社 プロセスガス供給ユニット
US6832628B2 (en) * 2000-10-11 2004-12-21 Flowmatrix, Inc. Variable pressure regulated flow controllers
JP2002349797A (ja) * 2001-05-23 2002-12-04 Fujikin Inc 流体制御装置
US20050072481A1 (en) * 2001-12-06 2005-04-07 Toshihiro Hanada Manifold valve
JP4021721B2 (ja) 2002-07-30 2007-12-12 アプライド マテリアルズ インコーポレイテッド 液体供給構造
US7418978B2 (en) * 2004-01-30 2008-09-02 Applied Materials, Inc. Methods and apparatus for providing fluid to a semiconductor device processing apparatus
JP4260697B2 (ja) * 2004-06-29 2009-04-30 三菱電機株式会社 電磁弁
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164183U (ja) * 1984-04-09 1985-10-31 本田技研工業株式会社 流量制御弁
JP2000120903A (ja) 1998-10-09 2000-04-28 Ckd Corp 薬液用流体機器の連結構造
JP2003185039A (ja) * 2001-12-12 2003-07-03 Asahi Organic Chem Ind Co Ltd マニホールドバルブ
JP2005114090A (ja) * 2003-10-09 2005-04-28 Ckd Corp 流体制御弁

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2149730A4

Also Published As

Publication number Publication date
EP2149730A4 (en) 2017-06-21
KR20100027106A (ko) 2010-03-10
JP2008291941A (ja) 2008-12-04
EP2149730B1 (en) 2020-11-04
US20100163125A1 (en) 2010-07-01
US8707992B2 (en) 2014-04-29
EP2149730A1 (en) 2010-02-03
KR101425009B1 (ko) 2014-08-13

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