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WO2008143257A1 - Levitation transportation device - Google Patents

Levitation transportation device Download PDF

Info

Publication number
WO2008143257A1
WO2008143257A1 PCT/JP2008/059243 JP2008059243W WO2008143257A1 WO 2008143257 A1 WO2008143257 A1 WO 2008143257A1 JP 2008059243 W JP2008059243 W JP 2008059243W WO 2008143257 A1 WO2008143257 A1 WO 2008143257A1
Authority
WO
WIPO (PCT)
Prior art keywords
workpiece
stage
jet
transportation
levitated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/059243
Other languages
French (fr)
Japanese (ja)
Inventor
Akira Uehara
Masayuki Toda
Masaru Umeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Watanabe Shoko KK
M Watanabe and Co Ltd
Original Assignee
Watanabe Shoko KK
M Watanabe and Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Watanabe Shoko KK, M Watanabe and Co Ltd filed Critical Watanabe Shoko KK
Publication of WO2008143257A1 publication Critical patent/WO2008143257A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

A levitation transportation device that do not damage a workpiece and that can easily cope with a large-sized workpiece or a thin workpiece. A workpiece processing stage (300) is placed below a transportation surface of a transportation route along which a workpiece is levitated and transported by pressurized gas jetted in a predetermined direction. Above the workpiece processing stage (300) is placed a slide jet table (403) forming a part of the transportation route in an advanceable and retreatable manner. Further, the stage (300) has a jet section for jetting the pressurized gas upward from a gap in the jet table (403). When a workpiece is levitated and transported to above the stage (300), the jet table (403) located above the stage (300) receives the workpiece while causing it to levitate, retreats from above the stage (300), and delivers the workpiece to the stage (300) by operation of the jet section. When processing by the stage (300) is completed, the workpiece is levitated to a position above the transportation surface by operation of the jet section. After that, the jet table (403) receives the workpiece while causing it to levitate and then delivers it to the transportation route.
PCT/JP2008/059243 2007-05-22 2008-05-20 Levitation transportation device Ceased WO2008143257A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007135978A JP5336707B2 (en) 2007-05-22 2007-05-22 Levitation transfer device
JP2007-135978 2007-05-22

Publications (1)

Publication Number Publication Date
WO2008143257A1 true WO2008143257A1 (en) 2008-11-27

Family

ID=40031953

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059243 Ceased WO2008143257A1 (en) 2007-05-22 2008-05-20 Levitation transportation device

Country Status (2)

Country Link
JP (1) JP5336707B2 (en)
WO (1) WO2008143257A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010117255A1 (en) * 2009-04-09 2010-10-14 Universiti Putra Malaysia (Upm) Monogastric animal feed

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101903921B1 (en) * 2011-08-09 2018-10-02 카티바, 인크. Face-down printing apparatus and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000062951A (en) * 1998-08-19 2000-02-29 Daiichi Shisetsu Kogyo Kk Conveying apparatus
JP2002521289A (en) * 1998-07-21 2002-07-16 ネトラ システム Pneumatic conveyor for conveying suspended articles, and method of releasing, decelerating or stopping articles or giving rhythm to articles
JP2005154059A (en) * 2003-11-25 2005-06-16 Watanabe Shoko:Kk Floating conveying device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002521289A (en) * 1998-07-21 2002-07-16 ネトラ システム Pneumatic conveyor for conveying suspended articles, and method of releasing, decelerating or stopping articles or giving rhythm to articles
JP2000062951A (en) * 1998-08-19 2000-02-29 Daiichi Shisetsu Kogyo Kk Conveying apparatus
JP2005154059A (en) * 2003-11-25 2005-06-16 Watanabe Shoko:Kk Floating conveying device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010117255A1 (en) * 2009-04-09 2010-10-14 Universiti Putra Malaysia (Upm) Monogastric animal feed
US9271518B2 (en) 2009-04-09 2016-03-01 Universiti Putra Malaysia (Upm) Monogastric animal feed

Also Published As

Publication number Publication date
JP5336707B2 (en) 2013-11-06
JP2008290814A (en) 2008-12-04

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