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WO2008142753A1 - トレイ格納装置、電子部品試験装置及びトレイ格納方法 - Google Patents

トレイ格納装置、電子部品試験装置及びトレイ格納方法 Download PDF

Info

Publication number
WO2008142753A1
WO2008142753A1 PCT/JP2007/060211 JP2007060211W WO2008142753A1 WO 2008142753 A1 WO2008142753 A1 WO 2008142753A1 JP 2007060211 W JP2007060211 W JP 2007060211W WO 2008142753 A1 WO2008142753 A1 WO 2008142753A1
Authority
WO
WIPO (PCT)
Prior art keywords
storing
trays
tray
electronic part
stockers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/060211
Other languages
English (en)
French (fr)
Inventor
Hiroki Ikeda
Yoshinari Kogure
Tsuyoshi Yamashita
Hiroyuki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP2009515023A priority Critical patent/JP5282032B2/ja
Priority to PCT/JP2007/060211 priority patent/WO2008142753A1/ja
Priority to TW097113778A priority patent/TW200911658A/zh
Publication of WO2008142753A1 publication Critical patent/WO2008142753A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

　トレイ格納装置（１００）は、ＩＣデバイスを収容するカスタマトレイ（ＫＳＴ）を搬送する搬入出ユニット（１２０）と、搬入出ユニット（１２０）により搬送されたカスタマトレイ（ＫＳＴ）を格納する３６個のストッカ（１６１）から構成されるストッカ群（１６４）と、を備え、ストッカ群（１６４）を構成する３６個のストッカ（１６１）は、Ｘ方向に９個、そして、Ｚ方向に４個ずつ並んだマトリクス状に配列されている。
PCT/JP2007/060211 2007-05-18 2007-05-18 トレイ格納装置、電子部品試験装置及びトレイ格納方法 Ceased WO2008142753A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009515023A JP5282032B2 (ja) 2007-05-18 2007-05-18 トレイ格納装置、電子部品試験装置及びトレイ格納方法
PCT/JP2007/060211 WO2008142753A1 (ja) 2007-05-18 2007-05-18 トレイ格納装置、電子部品試験装置及びトレイ格納方法
TW097113778A TW200911658A (en) 2007-05-18 2008-04-16 Means for storing trays, electronic part tester and tray-storing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/060211 WO2008142753A1 (ja) 2007-05-18 2007-05-18 トレイ格納装置、電子部品試験装置及びトレイ格納方法

Publications (1)

Publication Number Publication Date
WO2008142753A1 true WO2008142753A1 (ja) 2008-11-27

Family

ID=40031480

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/060211 Ceased WO2008142753A1 (ja) 2007-05-18 2007-05-18 トレイ格納装置、電子部品試験装置及びトレイ格納方法

Country Status (3)

Country Link
JP (1) JP5282032B2 (ja)
TW (1) TW200911658A (ja)
WO (1) WO2008142753A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010223588A (ja) * 2009-03-19 2010-10-07 Yamaha Motor Co Ltd ホットエアブロー機構および部品移載装置
TWI800330B (zh) * 2022-03-25 2023-04-21 鴻勁精密股份有限公司 置盤裝置及作業機
JP2025036333A (ja) * 2023-08-31 2025-03-14 アテコ・インコーポレイテッド 半導体デバイス移送ユニット及び半導体デバイス移送ユニットを含む半導体デバイスに対する工程を実行するチャンバ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI779892B (zh) * 2021-10-20 2022-10-01 鴻勁精密股份有限公司 承盤模組、置料裝置及作業機

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11190757A (ja) * 1997-12-26 1999-07-13 Ando Electric Co Ltd テストバーンインボードハンドラ
JP2000513101A (ja) * 1996-07-31 2000-10-03 アセコ コーポレイション 自動半導体部品ハンドラー
JP2001356144A (ja) * 2000-06-13 2001-12-26 Advantest Corp 電子部品試験装置
JP2007064991A (ja) * 2006-12-13 2007-03-15 Advantest Corp 電子部品試験装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989982A (ja) * 1995-09-28 1997-04-04 Toshiba Corp Ｉｃハンドラ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000513101A (ja) * 1996-07-31 2000-10-03 アセコ コーポレイション 自動半導体部品ハンドラー
JPH11190757A (ja) * 1997-12-26 1999-07-13 Ando Electric Co Ltd テストバーンインボードハンドラ
JP2001356144A (ja) * 2000-06-13 2001-12-26 Advantest Corp 電子部品試験装置
JP2007064991A (ja) * 2006-12-13 2007-03-15 Advantest Corp 電子部品試験装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010223588A (ja) * 2009-03-19 2010-10-07 Yamaha Motor Co Ltd ホットエアブロー機構および部品移載装置
TWI800330B (zh) * 2022-03-25 2023-04-21 鴻勁精密股份有限公司 置盤裝置及作業機
JP2025036333A (ja) * 2023-08-31 2025-03-14 アテコ・インコーポレイテッド 半導体デバイス移送ユニット及び半導体デバイス移送ユニットを含む半導体デバイスに対する工程を実行するチャンバ

Also Published As

Publication number Publication date
JP5282032B2 (ja) 2013-09-04
TWI350810B (ja) 2011-10-21
JPWO2008142753A1 (ja) 2010-08-05
TW200911658A (en) 2009-03-16

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