[go: up one dir, main page]

WO2008030230A3 - Focal adjustment system for mems device - Google Patents

Focal adjustment system for mems device Download PDF

Info

Publication number
WO2008030230A3
WO2008030230A3 PCT/US2006/034530 US2006034530W WO2008030230A3 WO 2008030230 A3 WO2008030230 A3 WO 2008030230A3 US 2006034530 W US2006034530 W US 2006034530W WO 2008030230 A3 WO2008030230 A3 WO 2008030230A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems device
adjustment system
focal adjustment
temperature
motion stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/034530
Other languages
French (fr)
Other versions
WO2008030230A2 (en
Inventor
Hiroshi Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optoelectronics Co Ltd
Opticon Inc
Original Assignee
Optoelectronics Co Ltd
Opticon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optoelectronics Co Ltd, Opticon Inc filed Critical Optoelectronics Co Ltd
Priority to PCT/US2006/034530 priority Critical patent/WO2008030230A2/en
Priority to DE112006004021T priority patent/DE112006004021T5/en
Publication of WO2008030230A2 publication Critical patent/WO2008030230A2/en
Anticipated expiration legal-status Critical
Publication of WO2008030230A3 publication Critical patent/WO2008030230A3/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lens Barrels (AREA)

Abstract

A MEMS architecture is disclosed which provides a motion stage upon which a lens is mounted. The device includes a temperature sensor that stores parameters. During operation, temperature is measured and the motion stage is moved to position it optimally for a given operating temperature.
PCT/US2006/034530 2006-09-06 2006-09-06 Focal adjustment system for mems device Ceased WO2008030230A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/US2006/034530 WO2008030230A2 (en) 2006-09-06 2006-09-06 Focal adjustment system for mems device
DE112006004021T DE112006004021T5 (en) 2006-09-06 2006-09-06 Focus adjustment system for MEMS device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2006/034530 WO2008030230A2 (en) 2006-09-06 2006-09-06 Focal adjustment system for mems device

Publications (2)

Publication Number Publication Date
WO2008030230A2 WO2008030230A2 (en) 2008-03-13
WO2008030230A3 true WO2008030230A3 (en) 2009-04-16

Family

ID=39157712

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/034530 Ceased WO2008030230A2 (en) 2006-09-06 2006-09-06 Focal adjustment system for mems device

Country Status (2)

Country Link
DE (1) DE112006004021T5 (en)
WO (1) WO2008030230A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4050532A (en) * 1976-06-30 1977-09-27 The Brearley Company Platform type weighing scale
US4669842A (en) * 1983-12-08 1987-06-02 Canon Kabushiki Kaisha Projection optical device
US5162855A (en) * 1990-06-13 1992-11-10 Konica Corporation Image forming apparatus having temperature sensor for estimating the off time of the fuser as related to the platen glass temperature
US6713367B2 (en) * 2001-08-28 2004-03-30 The Board Of Trustees Of The Leland Stanford Junior University Self-aligned vertical combdrive actuator and method of fabrication

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897532A (en) 1985-02-28 1990-01-30 Symbol Technologies, Inc. Portable laser diode scanning head
US5668364A (en) 1985-02-28 1997-09-16 Symbol Technologies, Inc. Target finder in electro-optical scanners

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4050532A (en) * 1976-06-30 1977-09-27 The Brearley Company Platform type weighing scale
US4669842A (en) * 1983-12-08 1987-06-02 Canon Kabushiki Kaisha Projection optical device
US5162855A (en) * 1990-06-13 1992-11-10 Konica Corporation Image forming apparatus having temperature sensor for estimating the off time of the fuser as related to the platen glass temperature
US6713367B2 (en) * 2001-08-28 2004-03-30 The Board Of Trustees Of The Leland Stanford Junior University Self-aligned vertical combdrive actuator and method of fabrication

Also Published As

Publication number Publication date
WO2008030230A2 (en) 2008-03-13
DE112006004021T5 (en) 2009-07-16

Similar Documents

Publication Publication Date Title
GB2417099B (en) Movable lens control device
WO2007127419A3 (en) System and method to counter material deposition on devices in the urinary tract
FR2911698B1 (en) DEVICE FOR CONTROLLING ELECTROMECHANICAL ACTUATOR.
EP1911393A4 (en) EYE MOVEMENT SENSOR DEVICE
WO2008060493A3 (en) Surgical retractor device and related methods
EP2240884B8 (en) Device for acquiring fingerprints on the fly
EP2074444A4 (en) ADJUSTABLE COMPACT LENS DESIGN
GB0606425D0 (en) Camera lens actuation apparatus
EP1873574A3 (en) Multi-spectral sensor system and methods
EP1899709A4 (en) Optical cavity for a gas sensor
WO2008002398A3 (en) Water soluble ophthalmic lens mold
EP2087510A4 (en) Optical element, exposure unit utilizing the same and process for device production
GB0717446D0 (en) Optical position sensor
WO2008038281A3 (en) Examination device
EP1785697B8 (en) Position sensor
GB0505036D0 (en) An optical measurement sensor
WO2009037662A3 (en) Method of illuminating a 3d object with a modified 2d image of the 3d object by means of a projector, and projector suitable for performing such a method
GB2425428B (en) Exposure control system for an image sensor
WO2009127337A3 (en) Microscope having focus-holding unit
GB0501589D0 (en) Security sensor device having optical axis adjustment capability
EP1916163A4 (en) VEHICLE CONTROL DEVICE
GB0615652D0 (en) An optical range finder
PL1902236T3 (en) Actuator with means for determining the position of an activation element
FR2902722B1 (en) PROJECTOR HAVING A SWIVELDER REFLECTOR HAVING A NUT FOR ADJUSTING THE REFLECTOR ANGULAR POSITION
ZA200709073B (en) Photothermal inspection camera having an offset adjusting device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 06802954

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 2009527332

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1120060040219

Country of ref document: DE

RET De translation (de og part 6b)

Ref document number: 112006004021

Country of ref document: DE

Date of ref document: 20090716

Kind code of ref document: P

122 Ep: pct application non-entry in european phase

Ref document number: 06802954

Country of ref document: EP

Kind code of ref document: A2