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WO2008025491A1 - Sonde, en particulier de microscopie optique à balayage en champ proche - Google Patents

Sonde, en particulier de microscopie optique à balayage en champ proche Download PDF

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Publication number
WO2008025491A1
WO2008025491A1 PCT/EP2007/007452 EP2007007452W WO2008025491A1 WO 2008025491 A1 WO2008025491 A1 WO 2008025491A1 EP 2007007452 W EP2007007452 W EP 2007007452W WO 2008025491 A1 WO2008025491 A1 WO 2008025491A1
Authority
WO
WIPO (PCT)
Prior art keywords
slot
metal
metal tip
probe according
excitation light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/007452
Other languages
German (de)
English (en)
Inventor
Nader Issa
Reinhard Guckenberger
Fritz Keilmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften
Publication of WO2008025491A1 publication Critical patent/WO2008025491A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

Definitions

  • the invention relates to a probe, in particular for optical scanning field microscopy.
  • optical near-fields are in the optical Rasternahfeldmikroskop (SNOM: S ⁇ canning Near-field Optical Microscope) utilized.
  • excitation light is focused onto a metal tip, so that surface plasmon polarites (OPP) are excited and propagated on the mantle surface of the metal tip, resulting in light focusing at the end of the metal tip.
  • OPP surface plasmon polarites
  • the excitation light is passed through a small metal aperture and thus greatly limited in space.
  • the advantage of this is that the excitation light no longer passes directly into the sample space and therefore does not lead to a disturbing background signal.
  • much light is lost in the metal aperture when the aperture diameter of the metal aperture is much smaller than the wavelength of the light is, so that the optical resolution is in practice worse than in the apertureless optical scanning near-field microscopy.
  • the above-mentioned surface plasmon polaritons are coupled electronic / electromagnetic vibrations that can propagate along a metal surface.
  • the above-mentioned focusing effect of such surface plasmon polaritons (OPP) is so far only partially understood and accordingly the subject of intensive research.
  • the optical excitation of the TMOPP mode is to be improved here, which leads to the focusing of light at the foremost end of the metal tip.
  • the excitation side is separated from the sample side by a metal screen, the metal screen preventing the excitation light incident from the excitation side from reaching the sample side and forming a disturbing background signal there.
  • the probe according to the invention has a metal tip, on the lateral surface of which surface plasmon polaritons are capable of propagation and at whose end a light focusing takes place, as already explained in the introduction to the prior art.
  • the metal screen has at least one slot in order to couple the excitation light coming from the excitation side onto the lateral surface of the metal tip and thereby excite the surface plasmon polaritons on the lateral surface of the metal tip.
  • the slot in the metal screen is annular and coaxially surrounds the metal tip on the outside thereof. This means that the symmetry axis of the metal tip is aligned with the central axis of the annular slot.
  • the invention is not limited to embodiments in which the central axis of the slot and the axis of symmetry of the metal tip are aligned.
  • the metal tip of the probe and the interior of the annular slot are formed einstuckig, so that the annular slot between the lateral surface of the metal tip and a corresponding hole in the metal shield is formed.
  • this metal tip facing the excitation light is conically shaped.
  • regular flat-top structures which are concentric in the rotationally symmetrical case.
  • the annular slot in the metal screen has a rounded outer edge in order to radiate the OPP components running on this side of the slots into the
  • the outer slot flank of the annular slot in the metal screen is rounded on the side facing the sample chamber.
  • the annular slot in the metal screen adjoins with its inner edge directly on the lateral surface of the metal tip, so that the inner diameter of the annular slot at this point is substantially equal to the outer diameter of the metal tip.
  • the inner edge of the annular slot is thus without any attachment in the lateral surface of the metal tip. This is advantageous in order to maximize the coupling of the surface plasmon polyps from the annular slot to the TMOPP mode on the surface of the metal tip.
  • the annular slot is circular, i. rotationally symmetric.
  • the annular slot and / or the metal tip are elliptical in cross-section or have the shape of a regular polygon. Accordingly, then the symmetry of the polarization of the excitation light to choose.
  • the symmetry of the metal tip need not be identical to the symmetry of the slot in the metal screen.
  • the decisive factor is only a good coupling to the then modified TMOPP mode of the metal tip.
  • the slot in the metal screen has a slot width less than half the wavelength of the excitation light to minimize propagation of the excitation light and propagation of OPP modes other than the desired TMOPP mode through the slots hold.
  • the slot in the metal screen preferably has a slot depth which amounts to at least several penetration depths of the excitation light so that all unwanted OPP modes are sufficiently attenuated, as well as the excitation light itself. Slit depths of about 100 nm are typically sufficient for visible and infrared light.
  • the metal tip and / or the metal screen consist of a non-metallic carrier, which is coated on its surface with a Metallschxcht, the carrier preferably consists of a dielectric.
  • the metal layer applied to the non-metallic carrier should have a sufficient layer thickness of at least 20 nm.
  • the slot is filled in the metal screen with a dielectric.
  • the metal shield for shielding the sample side from the excitation side is planar in one exemplary embodiment.
  • the metal screen it is not necessary within the scope of the invention for the metal screen to be planar. Rather, in the context of the invention, for example, also has the possibility that the metal screen is conical and runs from the excitation side to the sample side.
  • the metal screen and / or the metal tip in each case have a twofold or higher symmetry with respect to the central axis of the metal tip, which also includes a rotational symmetry.
  • the excitation light is radially polarized and is focused with optical lenses perpendicular to the annular slot in the metal screen. This means that the radially polarized excitation light is incident parallel to the central axis of the annular slot in the metal screen on the annular slot, resulting in optimum excitation of the radially symmetric OPP mode in the annular slot.
  • the excitation light is linearly polarized, for which purpose the invention provides two variants, which are described below.
  • the central axis of the annular slot is offset relative to the axis of symmetry of the metal tip, wherein the slot consists only of two opposing slot segments.
  • the axial offset between the central axis of the slot and the axis of symmetry of the metal tip should in this case be dimensioned such that the surface plasmon polaritons generated in the opposite slot segments interfere constructively there after their propagation to the end of the metal tip.
  • the excitation light is directed at a certain coupling angle at an angle to the central axis of the slot onto the opposing slot segments.
  • the coupling angle is in this case so large that the phase position of the radial components of the surface plasmon polaritons of the opposite slot segments is substantially equal.
  • the invention also encompasses protection for a scanning near-field optical microscope with the probe according to the invention described above.
  • the invention also encompasses the novel use of such a probe in a scanning near-field optical microscope.
  • FIG. 1 shows a cross-sectional view of a probe according to the invention with a metal tip and a metal shield for shielding the sample side from the excitation side, wherein the metal shield is planar-shaped,
  • FIG. 2 shows a modification of the probe according to FIG. 1, wherein the metal screen is conically shaped
  • FIG. 3 shows a modification of the probe according to FIG. 2, wherein a region of the metal shield within the annular slot has a metal tip pointing to the excitation side,
  • FIG. 4 shows a modification of the embodiment according to FIG. 2, wherein the metal screen is conically curved
  • FIG. 5 shows a modification of the probe according to FIG. 3, wherein the outer slot flanks of the annular slot in the metal screen on the sample side are rounded off
  • Figure 6 shows a modification of the embodiment of Figure 4, wherein the annular slot is arranged eccentrically with respect to the metal tip, as well as
  • Figure 7 is a plan view of the annular slot in the embodiment of Figure 6 from the direction of the central axis of the metal tip.
  • FIG. 1 shows a cross-sectional view of a probe according to the invention, which can be used, for example, for optical scanning field microscopy.
  • the probe consists essentially of a metal tip 1 and a metal shield 2, both made of metal.
  • the metal screen 2 serves to shield a sample side 3 from an excitation side 4, wherein on the sample side 3 is a sample to be examined microscopically, while from the excitation side 4 radially polarized excitation light 5 impinges at right angles on the metal screen 2.
  • annular slot 6 coaxially surrounding the metal tip 1, the inner diameter of the annular slot 6 being equal to the outer diameter of the metal tip 1 at the base thereof.
  • the incident on the slot 6 radially polarized excitation light 5 leads in the annular slot 6 to excite a radially symmetric OPP mode 7, which in turn excites on the conical surface of the metal tip 1 a TMOPP mode 8, which extends to one end 9 of the metal tip 1 spread out and there ensures a light focusing.
  • a circular disk-shaped inner part 10 which is part of the Metal tip 1 is, ie, the metal tip 1 and the inner part 10 are formed einstuckig.
  • the annular slot 6 in the metal screen 2 in this case has a slot width d, which is smaller than half the light wavelength of the excitation light. 5
  • the metal shield 4 in the region of the annular slot 6 has a thickness which amounts to at least a plurality of penetration depths of the excitation light 5. This is advantageous because unwanted OPP modes and the excitation light 5 itself are sufficiently attenuated.
  • the exemplary embodiment according to FIG. 2 corresponds largely to the one described above and shown in FIG.
  • a special feature of this exemplary embodiment is that the metal screen 2 is not planar, but tapers conically from the excitation side 4 to the sample side 3, wherein the entire probe is also rotationally symmetrical in this case.
  • the exemplary embodiment according to FIG. 3 corresponds largely to the exemplary embodiment described above and shown in FIG. 2, so that reference is made to the above description to avoid repetition, the same reference numerals being used for corresponding details.
  • a special feature of this exemplary embodiment is that the inner part 10 of the annular slot 6 on the Stimulation page 4 is also conically shaped and there forms another metal tip 11. As a result, the excitation of the OPP mode 7 in the annular slot 6 of the metal screen 2 is improved.
  • the exemplary embodiment according to FIG. 4 corresponds largely to the exemplary embodiment described above and shown in FIG. 2, so that reference is made to the above description to avoid repetition.
  • a special feature of this exemplary embodiment is that the metal screen 2 is curved and thus also has no sectionwise planar partial surfaces.
  • FIG. 5 corresponds largely to the exemplary embodiment described above and illustrated in FIG. 3, so that reference is made to the above description to avoid repetition, the same reference numerals being used for corresponding details.
  • a special feature of this exemplary embodiment is that the outer slot flank of the annular slot 6 in the metal screen 2 on the sample side 3 is rounded. As a result, the radiation of the OPP components running on this side of the slot 6 on the sample side 3 is advantageously reduced.
  • FIGS. 6 and 7 is largely identical to the exemplary embodiment described above and illustrated in FIG. 4, so that reference is made to the above description to avoid repetition, the same reference numerals being used for corresponding details.
  • the annular slot 6 in the metal screen 2 in this case has a central axis 12, while the metal tip 1 has a different central axis 13.
  • the peculiarity of this exemplary embodiment consists in the fact that the central axis 12 of the annular slot 6 is offset relative to the central axis 13 of the metal tip 1.
  • annular slot 6 is interrupted in the metal shield 2 in the circumferential direction and has only two slot segments 14, 15 which face each other with respect to the central axis 12.
  • the excitation light 5 is linearly polarized in the direction of a polarization direction 16, the polarization direction 16 being oriented from the one slot segment 14 to the opposite slot segment 15.
  • the use of linearly polarized excitation light 5 is advantageous because linearly polarized excitation light 5 is much easier to generate than radially polarized light.
  • the axial offset between the central axes 12, 13 is in this case selected so that the surface plasmon pola ⁇ tones generated in the opposite slot segments 14, 15 interfere constructively there after their propagation to the end 9 of the metal tip 1.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Polarising Elements (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

La présente invention concerne une sonde, en particulier de microscopie optique à balayage en champ proche, comprenant : une pointe métallique (1) à la surface périphérique de laquelle des plasmons-polaritons de surface (8) peuvent se propager, et à l'extrémité de laquelle a lieu une focalisation lumineuse; un côté excitation (4) qui se trouve à l'arrière de la pointe métallique (1) et par lequel est introduite la lumière d'excitation (5) qui excite les plasmons-polaritons de surface (8) sur la surface périphérique de la pointe métallique (1); et un côté échantillon (3) qui se trouve à l'avant de la pointe métallique (1) et sur lequel se trouve un échantillon. Selon l'invention, entre le côté échantillon (3) et le côté excitation (4) se trouve un écran métallique (2) qui protège le côté échantillon (3) du côté excitation (4). Cet écran métallique (2) présente au moins une fente (6) qui sert à envoyer la lumière d'excitation (5) en provenance du côté excitation (4), sur la surface périphérique de la pointe métallique (1), et ainsi à exciter les plasmons-polaritons de surface (8) qui se trouvent sur la surface périphérique de la pointe métallique.
PCT/EP2007/007452 2006-08-26 2007-08-24 Sonde, en particulier de microscopie optique à balayage en champ proche Ceased WO2008025491A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006040057.7 2006-08-26
DE102006040057A DE102006040057A1 (de) 2006-08-26 2006-08-26 Vorrichtung zur nanometrischen Fokussierung von Licht unter Ausnutzung von Oberflächen-Plasmon-Polaritonen

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WO2008025491A1 true WO2008025491A1 (fr) 2008-03-06

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WO (1) WO2008025491A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2570239C1 (ru) * 2014-07-14 2015-12-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Башкирский государственный университет" Способ измерения энергетических спектров квазичастиц в конденсированной среде
CN106324753A (zh) * 2016-08-18 2017-01-11 东南大学 一种光聚焦结构
US10088424B2 (en) 2016-08-24 2018-10-02 Industrial Technology Research Institute Tapered optical needle

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202010013458U1 (de) 2010-09-23 2010-12-30 Eberhard-Karls-Universität Tübingen Sonde für aperturlose Nahfeldmikroskopie und/oder für Ramanspektroskopie
CN103837709B (zh) * 2014-03-04 2016-03-30 国家纳米科学中心 一种表面等离子体激元增强针尖及针尖增强方法
US10768363B1 (en) * 2019-10-23 2020-09-08 King Saud University Plasmonic infrared optical antenna

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050161594A1 (en) * 2004-01-02 2005-07-28 Hollingsworth Russell E. Plasmon enhanced near-field optical probes
WO2005121748A1 (fr) * 2004-06-11 2005-12-22 Gifu University Guide d'ondes optiques

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US20050161594A1 (en) * 2004-01-02 2005-07-28 Hollingsworth Russell E. Plasmon enhanced near-field optical probes
WO2005121748A1 (fr) * 2004-06-11 2005-12-22 Gifu University Guide d'ondes optiques
EP1757920A1 (fr) * 2004-06-11 2007-02-28 Gifu University Guide d'ondes optiques

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Title
FISCHER U C ET AL: "The concept of a coaxial tip as a probe for scanning near field optical microscopy and steps towards a realisation", ULTRAMICROSCOPY NETHERLANDS, vol. 42-44, July 1992 (1992-07-01), pages 393 - 398, XP002456329, ISSN: 0304-3991 *
FREY H G ET AL: "High-resolution imaging of single fluorescent molecules with the optical near-field of a metal tip", PHYSICAL REVIEW LETTERS APS USA, vol. 93, no. 20, 12 November 2004 (2004-11-12), pages 200801/1 - 4, XP002456331, ISSN: 0031-9007 *
FREY HEINRICH G ET AL: "Enhancing the resolution of scanning near-field optical microscopy by a metal tip grown on an aperture probe", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 81, no. 26, 23 December 2002 (2002-12-23), pages 5030 - 5032, XP012032892, ISSN: 0003-6951 *
MATSUMOTO T ET AL: "Fabrication of a near-field optical fiber probe with a nanometric metallized protrusion", OPTICAL REVIEW OPT. SOC. JAPAN JAPAN, vol. 5, no. 6, November 1998 (1998-11-01), pages 369 - 373, XP002456330, ISSN: 1340-6000 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2570239C1 (ru) * 2014-07-14 2015-12-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Башкирский государственный университет" Способ измерения энергетических спектров квазичастиц в конденсированной среде
CN106324753A (zh) * 2016-08-18 2017-01-11 东南大学 一种光聚焦结构
US10088424B2 (en) 2016-08-24 2018-10-02 Industrial Technology Research Institute Tapered optical needle

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