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WO2008018923A3 - Fabrication of isolated nanostructures and/or arrays of nanostructures - Google Patents

Fabrication of isolated nanostructures and/or arrays of nanostructures Download PDF

Info

Publication number
WO2008018923A3
WO2008018923A3 PCT/US2007/007101 US2007007101W WO2008018923A3 WO 2008018923 A3 WO2008018923 A3 WO 2008018923A3 US 2007007101 W US2007007101 W US 2007007101W WO 2008018923 A3 WO2008018923 A3 WO 2008018923A3
Authority
WO
WIPO (PCT)
Prior art keywords
nanostructures
isolated
encapsulating material
deposited material
variety
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/007101
Other languages
French (fr)
Other versions
WO2008018923A2 (en
Inventor
Qiaobing Xu
Jiming Bao
Federico Capasso
George M Whitesides
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harvard University
Original Assignee
Harvard University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harvard University filed Critical Harvard University
Publication of WO2008018923A2 publication Critical patent/WO2008018923A2/en
Publication of WO2008018923A3 publication Critical patent/WO2008018923A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B17/00—Methods preventing fouling
    • B08B17/02—Preventing deposition of fouling or of dust
    • B08B17/06—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement
    • B08B17/065—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement the surface having a microscopic surface pattern to achieve the same effect as a lotus flower
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Laminated Bodies (AREA)

Abstract

Methods for fabricating nanostructures and articles associated therewith are described. In some embodiments, an isolated nanostructure (e.g., a metal nanowire) or an array of nanostructures can be fabricated by depositing a material (e.g., a metal) on a surface having a plurality of protrusions or indentations. At least a portion of the deposited material may be embedded in an encapsulating material, and the encapsulating material can be cut, for instance, to form a thin slice that includes the deposited material at least partially embedded therein. In some instances, the slice can be positioned on a surface in a desired arrangement. The encapsulating material can be removed from the surface to form one or more isolated nanostructures of the deposited material. Advantageously, dimensions of the nanostructures can be controlled to, e.g., 15 run, to form nanostructures having a variety of shapes and geometries (e.g., wires, rings, and cylinders). Nanostructures can also be formed in a variety of materials, including metals, ceramics, and polymers. In addition, nanostructures can also be fabricated over large areas (e.g., greater than 1 mm2). In some cases, these nanostructures are positioned in association with other components, e.g., to form a functional component of a device.
PCT/US2007/007101 2006-03-22 2007-03-22 Fabrication of isolated nanostructures and/or arrays of nanostructures Ceased WO2008018923A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US78467606P 2006-03-22 2006-03-22
US60/784,676 2006-03-22

Publications (2)

Publication Number Publication Date
WO2008018923A2 WO2008018923A2 (en) 2008-02-14
WO2008018923A3 true WO2008018923A3 (en) 2008-07-10

Family

ID=38984555

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/007101 Ceased WO2008018923A2 (en) 2006-03-22 2007-03-22 Fabrication of isolated nanostructures and/or arrays of nanostructures

Country Status (1)

Country Link
WO (1) WO2008018923A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11198314B2 (en) 2013-05-10 2021-12-14 Nanotech Security Corp. Nanostructure array diffractive optics for RGB and CMYK color displays

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057518A (en) * 2007-09-03 2009-03-19 Institute Of Physical & Chemical Research Anisotropic film and method for producing anisotropic film
EP2144297A1 (en) * 2008-07-07 2010-01-13 Technische Universiteit Delft Solar device and method of generating electric power
KR101378117B1 (en) 2012-06-26 2014-03-26 인텔렉추얼디스커버리 주식회사 Biosensor using nanoring array based on surface enhanced raman scattering method, and producing the same
US20150185156A1 (en) * 2012-07-31 2015-07-02 Northwestern University Dispersible Surface-Enhanced Raman Scattering Nanosheets
WO2014028380A2 (en) * 2012-08-13 2014-02-20 President And Fellows Of Harvard College Multispectral imaging using silicon nanowires
US9631291B2 (en) 2013-01-29 2017-04-25 Hewlett-Packard Development Company, L.P. Controlling dimensions of nanowires
AU2014262357B2 (en) * 2013-05-09 2018-05-17 Idit Technologies Corp. Nanostructure array diffractive optics for motion and animation display
DE102013017018A1 (en) * 2013-10-14 2015-04-16 Siegert Thinfilm Technology Gmbh Process for producing a structure and in particular a structure produced by this process
US10725373B1 (en) * 2016-10-21 2020-07-28 Iowa State University Research Foundation, Inc. Nano-patterning methods including: (1) patterning of nanophotonic structures at optical fiber tip for refractive index sensing and (2) plasmonic crystal incorporating graphene oxide gas sensor for detection of volatile organic compounds
CN111948267B (en) * 2020-08-20 2023-07-18 哈尔滨工业大学 A method for preparing electrochemical nanodot array electrodes using ultralong nanowires
WO2025022240A2 (en) * 2023-07-21 2025-01-30 3M Innovative Properties Company Filmless, chemically differentiated, nanostructured substrate on a rigid substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003096123A1 (en) * 2002-05-08 2003-11-20 Agency For Science, Technology And Research Reversal imprint technique
WO2004024836A2 (en) * 2002-09-13 2004-03-25 Jds Uniphase Corporation Alignable diffractive pigment flakes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003096123A1 (en) * 2002-05-08 2003-11-20 Agency For Science, Technology And Research Reversal imprint technique
WO2004024836A2 (en) * 2002-09-13 2004-03-25 Jds Uniphase Corporation Alignable diffractive pigment flakes

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Q. XU, B. D. GATES, G. M. WHITESIDES: "Fabrication of metal structures with nanometer-scale lateral dimensions by sectioning using a microtome", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 126, 1 August 2004 (2004-08-01), pages 1332 - 1333, XP002468450 *
QIAOBING XU ET AL: "Fabrication of high-aspect-ratio metallic nanostructures using nanoskiving", NANO LETTERS AMERICAN CHEM. SOC USA, vol. 6, no. 9, July 2006 (2006-07-01), pages 2163 - 2165, XP002468449, ISSN: 1530-6984 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11198314B2 (en) 2013-05-10 2021-12-14 Nanotech Security Corp. Nanostructure array diffractive optics for RGB and CMYK color displays

Also Published As

Publication number Publication date
WO2008018923A2 (en) 2008-02-14

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