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WO2008013327A1 - Appareil pour le recyclage de la bouillie rejetée, produite lors du processus de fabrication de plaquette en silicium - Google Patents

Appareil pour le recyclage de la bouillie rejetée, produite lors du processus de fabrication de plaquette en silicium Download PDF

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Publication number
WO2008013327A1
WO2008013327A1 PCT/KR2006/002929 KR2006002929W WO2008013327A1 WO 2008013327 A1 WO2008013327 A1 WO 2008013327A1 KR 2006002929 W KR2006002929 W KR 2006002929W WO 2008013327 A1 WO2008013327 A1 WO 2008013327A1
Authority
WO
WIPO (PCT)
Prior art keywords
centrifugal separator
heater
liquid matter
rotation speed
disposed slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2006/002929
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English (en)
Inventor
Young-Chul Chang
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Individual
Original Assignee
Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN2006800537890A priority Critical patent/CN101401192B/zh
Priority to PCT/KR2006/002929 priority patent/WO2008013327A1/fr
Publication of WO2008013327A1 publication Critical patent/WO2008013327A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007—Use, recovery or regeneration of abrasive mediums
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Definitions

  • the present invention relates to an apparatus for recycling disposed slurry produced in a manufacturing process of silicon wafers, and more particularly, to an apparatus for recycling disposed slurry by effectively separating and recovering abrasive and cutting oil from the disposed slurry.
  • single crystalline silicon wafers are generally manufactured by slicing a single crystalline silicon ingot with an abrasive-coated wire saw while supplying cutting oil. Then, the wafers are polished using a polisher. Approximately 20% to 30% of the original single crystalline silicon ingot is lost as sawdust in this process.
  • Such disposed slurry which is produced in the manufacturing process of the silicon wafers, is classified as special industrial waste.
  • the disposed slurry cannot be simply burned up by fire since it contains the sawdust and the cutting oil.
  • the disposed slurry cannot also be buried under the ground because the cutting oil would cause serious soil pollution. Accordingly, the disposed slurry produced from the manufacturing process of silicon wafers is solidified with cement, and then the solidified slurry is buried under the ground.
  • a centrifuge based recycling method is widely used rather than a method for recycling slurry through solvent extraction.
  • the cutting oil can be easily separated from the slurry since the slurry is easily dissolved by water or oil.
  • the cutting oil includes emulsifying additive, which is easily transformed in a drying or distillation process. When the cutting oil is reused, the transformed emulsifying additive causes the abrasive to deposit rather than to disperse in the cutting oil.
  • the centrifuge based recycling method is carried out by two steps: In the first cen- trifugation step, abrasive is recovered by separating the slurry into a solid matter which mainly includes abrasive, and a first liquid matter, which mainly includes sawdust and cutting oil. In the second centrifugation step, the cutting oil is recovered by separating the first liquid matter, which is obtained from the first centrifugation step, into a second liquid matter, which mainly includes the cutting oil, and the sawdust.
  • the disposed slurry is heated at a normal temperature or a temperature slightly higher than the normal temperature, for example, about 30 0 C ⁇ 15 0 C prior to the first centrifugation step.
  • this targets only on smoothly mixing the disposed slurry with the cutting oil. That is, the heating has been regarded only as a supplementary way for improving the efficiency of adding the cutting oil.
  • the conventional method for recycling slurry by centrifuging the slurry after adding the cutting oil has the following shortcomings.
  • the present invention has been made to solve the foregoing problems with the prior art, and therefore an object of the present invention is to provide an apparatus for recycling disposed slurry which can raise the recycling efficiency of disposed slurry, as an alternative to the prior art in which cutting oil is added for the purpose of dilution.
  • Another object of the present invention is to provide an apparatus for recycling disposed slurry which can minimize process time and process cost and make a simple and compact structure.
  • a further object of the present invention is to provide an apparatus for recycling disposed slurry which can have a simple structure that requires minimum installation cost.
  • the invention provides an apparatus for recycling disposed slurry producedin a manufacturing process of silicon wafers.
  • the apparatus includes a first heater for heating the disposed slurryat a temperature ranging from 6O 0 C to a boiling point; a first centrifugal separator for rotating the disposed slurry, heated by the first heater, at a rotation speed ranging from 1200rpm to 1500rpm in order to separate into a solid matter and a first liquid matter via centrifugation; a second heater for heating the first liquid matter, separated by the first centrifugal separator, at a temperature ranging from 5O 0 C to a boiling point; and a second centrifugal separator for rotating the first liquid matter, heated by the second heater, at a rotation speed of at least 2800rpm in order to separate into sawdust and a second liquid matter via centrifugation.
  • the first heater heats the disposed slurry at a temperature ranging from
  • the apparatus can further include a return line for returning the second liquid matter, separated by the second centrifugal separator, to the second centrifugal separator so that the second centrifugal separator repeats the centrifugation at least twice.
  • the return line can feed the second liquid matter to the second heater so that the second liquid matter is heated in the second heater before entering the second centrifugal separator, or the apparatus can further include a third heater on the return line, the third heater heating the second liquid matter at a temperature ranging from 50 0 C to a boiling point.
  • the second centrifugal separator rotates at a uniform rotation speed or an increasing rotation speed while repeating the centrifugation.
  • the apparatus can further include a recycling unit for mixing the solid matter, which is separated by the first centrifugal separator, and the second liquid matter, which is separated by the second centrifugal separator, thereby producing recycled slurry.
  • a recycling unit for mixing the solid matter, which is separated by the first centrifugal separator, and the second liquid matter, which is separated by the second centrifugal separator, thereby producing recycled slurry.
  • the apparatus for recycling disposed slurry achievesexcellent recycling efficiency by adjusting viscosity through the heating of disposed slurry and controlling the rotation speed of the centrifugal separators, instead of adding cutting oil for the purpose of dilution.
  • the present invention does not increase the amount of slurry to be processed, and thus can minimize process time and process cost, and make a simple and compact structure.
  • the apparatus for recycling disposed slurry of the present invention can have a simple structure that requires minimum installation cost. That is, the present invention can make the apparatus for recycling disposed slurry have high efficiency of recycling the disposed slurry using a simple operation principle and structure.
  • FIG. 1 is a diagram illustrating a process for separating abrasive, sawdust and cutting oil from disposed slurry and recycling according to an exemplary embodiment of the present invention
  • FIG. 2 is a conceptual view illustrating an apparatus for recycling disposed slurry, which carries out the process shown in FIG. 1
  • FIG. 3 is a reference view illustrating an equation for calculating the processing capacity of a centrifugal separator
  • FIG. 4 is a graph showing changes in the oil content of a solid matter which is separated through a first centrifugation, according to variations in temperature and rotation speed; [29] FIG.
  • FIG. 5 is a graph showing changes in the sawdust (Si) content of a solid matter which is separated through a first centrifugation, according to variations in temperature and rotation speed;
  • FIG. 6 is a graph showing changes in the abrasive (SiC) content of a solid matter which is separated through a first centrifugation, according to variations in temperature and rotation speed;
  • FIG. 7 is a graph showing changes in the density of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed lOOOrpm; [32] FIG.
  • FIG. 8 is a graph showing changes in the particle size of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed lOOOrpm;
  • FIG. 9 is a graph showing changes in the density of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed 1200rpm;
  • FIG. 10 is a graph showing changes in the particle size of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed 1200rpm;
  • FIG. 11 is a graph showing changes in the density of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed 1500rpm; [36] FIG.
  • FIG. 12 is a graph showing changes in the particle size of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed 1500rpm;
  • FIG. 13 is a graph showing changes in the oil content of a second liquid matter which is separated through a second centrifugation, according to variations in temperature and rotation speed;
  • FIG. 14 is a graph showing changes in the sawdust (Si) content of a second liquid matter which is separated through a second centrifugation, according to variations in temperature and rotation speed;
  • FIG 15 is a graph showing changes in the abrasive (SiC) content of a second liquid matter which is separated through a second centrifugation, according to variations in temperature and rotation speed;and
  • FIG. 16 is a graph showing changes in the density of a second liquid matter which is separated through a second centrifugation, according to variations in temperature and the number of second centrifugation.
  • FIG. 1 is a diagram illustrating a process for separating and recycling abrasive, sawdust and cutting oil from disposed slurry according to an exemplary embodiment of the present invention.
  • two centrifugation steps are carried out.
  • the first centrifugation step is performed to separate the disposed slurry into a solid matter which mainly includes abrasive made of SiC, and a first liquid matter, which mainly includes cutting oil.
  • the second centrifugation step is carried out at a high speed to remove fine Si sawdust from the first liquid matter, thereby recycling cutting oil, which has a density similar to that of new oil, such as 0.89g/cc.
  • FIG. 2 is a conceptual view illustrating an apparatus for recycling disposed slurry which carries out the process shown in FIG. 1.
  • Disposed slurry which has entered a tank lorry or a drum 1, is fed to a storage tank
  • the slurry in the storage tank 3 is stirred to be uniform.
  • the storage tank 3 heats the slurryat a predetermined temperature to lower the viscosity thereof. Heating is performed so that the temperature is maintained at a predetermined range, preferably, from 6O 0 C to a boiling point, and more preferably, from 60 0 C to 90 0 C.
  • the storage tank 3 acts as a first heater.
  • the first heater can be embodied separately from the storage tank 3.
  • the heated slurry is introduced into a first centrifugal separator 5.
  • the first centrifugal separator5 is run at a rotation speed ranging from 1200rpm to 1500rpm, thereby separating the slurry into a solid matter which mainly includes SiC abrasive, and a first liquid matter, which mainly includes Si sawdust and cutting oil.
  • the process efficiency of the first centrifugal separator excessively drops, thereby it may be impossible to run a second centrifugal separator 11. That is, as the efficiency of the first centrifugation is lowered, a large amount of abrasive enters the second centrifugal separator, thereby causing, for example, a breakdown of the second centrifugal separator that is running a high speed.
  • the amount of the disposed slurryto be processed is not increased since cutting oil is not added to the slurry. Therefore, it does not increase process time, process cost or apparatus size.
  • the solid matter is fed to a storage tank 15 via a storage tank 7, and the first liquid matteris fed to a storage tank 9.
  • the storage tank 9 heats the first liquid matter, which is centrifuged by the first centrifugal separator 5, at a temperature ranging from 5O 0 C to a boiling point in order to lower the viscosity thereof.
  • the storage tank 9 acts as a second heater.
  • the second heater can be embodied separately from the storage tank 9.
  • the second centrifugal separatorl 1 is run at a high speed of 2800rpm or more, thereby separating the first liquid matter again into sawdust and a second liquid matter.
  • the sawdust mainly includes Si sawdust and the second liquid matter mainly includes cutting oil.
  • the second liquid matter is fed to a second storage tank 13.
  • the second liquid matter is returned from the storage tank 13 to the second centrifugal separator 11.
  • the second storage tank 13 Prior to the returning, the second storage tank 13 heats the second liquid matterat a temperature ranging from 50 0 C to a boiling point in order to lower the viscosity thereof.
  • the storage tank 13 acts as a third heater.
  • the third heater can be embodied separately from the storage tank 13. It is also possible to return cutting oil to an upstream point of the second heater so that the second heater heats cutting oil.
  • These procedures of returning and centrifugation are performed once or more.Preferably, the second centrifugal separator 11 repeats the centrifugation twice or more.
  • the rotation speed of the second centrifugal separator 11 is preferably increased or maintained the same while the centrifugation step is being repeated.
  • the centrifuged liquid matter is fed through the storage tank 13 to a recycling tank 15.
  • FIG. 3 is a reference view illustrating an equation for calculating the processing capacity of a centrifugal separator.
  • a centrifugal force, a buoyant force, and a frictional force are applied to particles as shown in Eq. 1.
  • m- ⁇ dt F e - F 1 * - F d
  • v can be expressed as dRldt because it denotes a radial velocity from the center. Therefore, it may be expressed as Eq.5. [73] dR _ r 2a(p — Po] ⁇ w 2 R
  • a time required for moving a fine grain from a starting point R to a predetermined radius R can be calculated through Eq.7.
  • Eq. 7 if the retention time of Eq. 9 is applied into Eq. 7 as the time required for centrifugation, Eq. 10 can be obtained. [84]
  • Eq. 10 is simplified based on the capacity of the centrifugal separator, it can be expressed as below Eq. 11.
  • R , R and L are terms related to the volume of the centrifugal separator, and t, a, p,
  • P o and ⁇ are terms related to the properties of particles and liquid, ⁇ is a term related to the driving condition of the centrifugal separator.
  • the processing capacity of a centrifugal separator can increase by enlarging the volume of the centrifugal separator or accelerating the rotation speed of the centrifugal separator.
  • the most effective method for increasing the processing capacity is to reduce the viscosity of liquid.
  • the viscosity of the liquid may be reduced by adding solvent into the liquid or by increasing the temperature of the liquid.
  • the viscosity of the liquid is reduced by adding the solvent into the liquid, the apparent viscosity can be reduced and the processing capacity of the centrifugal separator can increase.
  • the dilution is not matched with the object of the centrifugation since the object of the centrifugation is the concentration of the particles.
  • the liquid has to be diluted with a solvent before centrifuging the liquid, the volume of the disposed sludge increases. Consequently, the total processing time for centrifuging the disposed sludge increases.
  • a method of increasing a temperature can reduce the viscosity of the liquid without increasing the volume of the disposed sludge.
  • the method of increasing the temperature has higher efficiency compared to the method of adding the solvent.
  • the viscosity of the disposed sludge is reduced by increasing the temperature of the sludge.
  • the present invention has also been focused on a method of running the centrifugal separatorat the optimum rotation speed in order to enlargethe processing capacity for the slurry.
  • Such a method of reducing the viscosity of the disposed sludge is matched with the object of the present invention for increasing the recycling efficiency.
  • the density of the solid matter is 2.04g/cc or more
  • the particle size of the solid matter is 4.2D or more
  • the density of the second liquid matter is 0.93g/cc or less.
  • SiC is not sufficiently separated and a large amount of sawdust and cutting oil are mixed into the solid matter. In this case, cutting is not performed properly, thereby causing wafer warping, which is hazardous in the semiconductor industry where precision is the key factor.
  • Wafer qualities e.g., surface roughness, surface waviness and flatness of wafers
  • FIGS. 4 to 6 are graphs showing changes in the oil, sawdust (Si) and abrasive (SiC) contents of a solid matter which is separated through a first centrifugation, according to variations in temperature and rotation speed.
  • Si sawdust
  • SiC abrasive
  • SiC recycling is most efficient in a temperature range from 6O 0 C to 9O 0 C. While a slight rise in content is observed in a temperature range higher than 9O 0 C, it is not efficient when the cost of recovered SiC is compared with the cost of energy for maintaining the temperature.
  • the SiC recovering result is most efficient at the rotation speed ranging from 1200rpm to 1500rpm and increase in content is rarely observable in a rotation speed range greater than 1500rpm. Accordingly, the rotation speed ranging from 1200rpm to 1500rpm is regarded optimal when the cost of recovered SiC is compared with the cost of energy for raising the rotation speed.
  • FIGS. 7 and 8 are graphs showing changes in the density and the particle size of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed lOOOrpm.
  • FIGS. 9 and 10 are graphs showing changes in the density and the particle size of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed 1200rpm.
  • FIGS. 11 and 12 are graphs showing changes in the density and the particle size of a solid matter which is separated through a first centrifugation, according to variations in temperature at a rotation speed 1500rpm.
  • composition of a second liquid matter which is separated by the second centrifugal separator is analyzed while changing the temperature of a first liquid matter which is separated by the first centrifugal separator, and the rotation speed of the second centrifugal separator.
  • Tables 4 to 7 report the experimental results, which are obtained by running the second centrifugal separator at rotation speeds 2600rpm, 2800rpm, 3000rpm and 3200rpm, respectively.
  • FIGS. 13 to 15 are graphs showing changes in the oil, sawdust (Si) and abrasive (SiC) contents of a second liquid matter which is separated through a second cen- trifugation, according to variations in temperature and rotation speed.
  • Table 8 is a graph showing changes in the density of a second liquid matter which is separated through a second centrifugation, according to variations in temperature and the number of repeating centrifugation by the second centrifugal separator.
  • FIG. 16 is a graph showing changes in the density of a second liquid matter which is separated through a second centrifugation, according to variations in temperature and the number of second centrifugation.
  • the density of the second liquid matter shows a large difference from the target density at a normal temperature, but is close to the target density at 5O 0 CAs the centrifugation is repeated, the density of the second liquid matter drops to a value below the target density.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Centrifugal Separators (AREA)
  • Treatment Of Sludge (AREA)

Abstract

L'invention concerne un appareil pour le recyclage d'une bouillie rejetée produite au cours du processus de fabrication de plaquettes en silicium et, plus spécifiquement, un appareil pour le recyclage d'une bouillie rejetée par séparation et récupération efficaces d'abrasif et d'huile de coupe de la bouillie rejetée. L'appareil pour le recyclage d'une bouillie rejetée produite au cours du processus de fabrication de plaquettes en silicium comprend un premier dispositif de chauffage servant à chauffer la bouillie rejetée à une température comprise entre 60°C et un point d'ébullition, un premier séparateur centrifuge servant à faire tourner la boue rejetée chauffée par le premier dispositif de chauffage, à une vitesse de rotation allant de 1200 T/M à 1500 T/M en vue de la séparer en matières solides et premières matières liquides par centrifugation, un deuxième dispositif de chauffage servant à chauffer les premières matières liquides séparées par le premier séparateur centrifuge à une température allant de 5O°C à un point d'ébullition, et un second séparateur centrifuge conçu pour faire tourner les premières matières liquides chauffées par le deuxième dispositif de chauffage à une vitesse de rotation allant de 2800 T/M au moins en vue de les séparer en sciure et secondes matières liquides via centrifugation.
PCT/KR2006/002929 2006-07-25 2006-07-25 Appareil pour le recyclage de la bouillie rejetée, produite lors du processus de fabrication de plaquette en silicium Ceased WO2008013327A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2006800537890A CN101401192B (zh) 2006-07-25 2006-07-25 对硅晶片制造工艺中产生的使用后浆料进行再循环的设备
PCT/KR2006/002929 WO2008013327A1 (fr) 2006-07-25 2006-07-25 Appareil pour le recyclage de la bouillie rejetée, produite lors du processus de fabrication de plaquette en silicium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2006/002929 WO2008013327A1 (fr) 2006-07-25 2006-07-25 Appareil pour le recyclage de la bouillie rejetée, produite lors du processus de fabrication de plaquette en silicium

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Publication Number Publication Date
WO2008013327A1 true WO2008013327A1 (fr) 2008-01-31

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WO (1) WO2008013327A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011026473A1 (fr) * 2009-09-02 2011-03-10 Guntram Krettek Procédé et dispositif de retraitement de boues d'usinage usagées
WO2011061039A1 (fr) * 2009-11-20 2011-05-26 Erwin Junker Maschinenfabrik Gmbh Procédé pour séparer de l'huile de meulage de poussières de meulage; station de séparation pour la mise en œuvre du procédé et installation technologique
WO2011064170A1 (fr) 2009-11-24 2011-06-03 Messer Group Gmbh Procédé et dispositif pour traiter des poussières de meulage contenant du si/sic
CN102435530A (zh) * 2011-09-19 2012-05-02 张云新 太阳能多晶硅片切割废液中碳化硅质量含量的分析方法
CN114621756A (zh) * 2022-03-28 2022-06-14 南昌大学 一种利用回收硅锯屑粉制备Mn4+激活氟化物红色荧光粉的方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101786692B (zh) * 2010-03-22 2012-07-25 浙江矽盛电子有限公司 一种切割硅片后的砂浆的回收利用方法

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EP1142672A1 (fr) * 2000-04-06 2001-10-10 Nec Corporation Dispositif de recyclage de suspension de polissage
KR20030005575A (ko) * 2001-07-09 2003-01-23 (주)풍남반도체테크 반도체 웨이퍼 제조공정에서 발생하는 폐슬러리 재생방법및 그 재생시스템
JP2003340719A (ja) * 2002-05-24 2003-12-02 Sharp Corp スラリ再生方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1142672A1 (fr) * 2000-04-06 2001-10-10 Nec Corporation Dispositif de recyclage de suspension de polissage
KR20030005575A (ko) * 2001-07-09 2003-01-23 (주)풍남반도체테크 반도체 웨이퍼 제조공정에서 발생하는 폐슬러리 재생방법및 그 재생시스템
JP2003340719A (ja) * 2002-05-24 2003-12-02 Sharp Corp スラリ再生方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011026473A1 (fr) * 2009-09-02 2011-03-10 Guntram Krettek Procédé et dispositif de retraitement de boues d'usinage usagées
CN102574297A (zh) * 2009-09-02 2012-07-11 贡特拉姆·克雷泰克 用于回收用过的加工料浆的方法和装置
WO2011061039A1 (fr) * 2009-11-20 2011-05-26 Erwin Junker Maschinenfabrik Gmbh Procédé pour séparer de l'huile de meulage de poussières de meulage; station de séparation pour la mise en œuvre du procédé et installation technologique
CN102712077A (zh) * 2009-11-20 2012-10-03 埃尓温·容克尓机械制造有限公司 用于从磨削油泥中分离研磨油的方法、用于实施该方法的分离站以及工艺流程设备
JP2013511396A (ja) * 2009-11-20 2013-04-04 エルビン・ユンカー・マシーネンファブリーク・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 研削スラリーから研削オイルを分離する方法；前記方法を実行するための分離ステーションおよび処理プラント
CN102712077B (zh) * 2009-11-20 2015-02-11 埃尓温·容克尓机械制造有限公司 用于从磨削油泥中分离研磨油的方法、用于实施该方法的分离站以及工艺流程设备
WO2011064170A1 (fr) 2009-11-24 2011-06-03 Messer Group Gmbh Procédé et dispositif pour traiter des poussières de meulage contenant du si/sic
DE102009054348A1 (de) 2009-11-24 2011-06-30 Coenen, Wolfgang, Dipl.-Ing., 28879 Verfahren und Vorrichtung zum Behandeln von Si/SiC-haltigen Schleifschlämmen
CN102435530A (zh) * 2011-09-19 2012-05-02 张云新 太阳能多晶硅片切割废液中碳化硅质量含量的分析方法
CN102435530B (zh) * 2011-09-19 2013-05-29 张云新 太阳能多晶硅片切割废液中碳化硅质量含量的分析方法
CN114621756A (zh) * 2022-03-28 2022-06-14 南昌大学 一种利用回收硅锯屑粉制备Mn4+激活氟化物红色荧光粉的方法

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Publication number Publication date
CN101401192A (zh) 2009-04-01
CN101401192B (zh) 2010-07-28

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