WO2008005325A2

WO2008005325A2 - Wafer carrier docking station

Info

Publication number: WO2008005325A2
Application number: PCT/US2007/015111
Authority: WO
Inventors: Barry Gregerson; James M. Anderson
Original assignee: Entegris Inc
Current assignee: Entegris Inc
Priority date: 2006-06-30
Filing date: 2007-06-28
Publication date: 2008-01-10
Anticipated expiration: 2008-12-30
Also published as: TW200807609A; WO2008005325A3

Abstract

An docking station for charging a rechargeable battery on a container such as a front opening unitary pod (FOUP) and/or coupling instrumentation on the container with a remote monitor. The docking station is configured to support and align a container having an instrumentation module that monitors the wafer carrier. The instrumentation module may be powered by a rechargeable battery through an interface with couplings such as inductive couplings or electrical contacts for engaging with the charging contacts on the docking station. A contact switch may enable power to be provided to the charging circuit only when the container is present on the docking station. The battery may be aligned with the contacts on the docking station using kinematic couplings on the container. Light sources such as light emitting diodes (LEDs) may indicate the status of the charging unit.

Description

WAFER CARRIER DOCKING STATION

Related Application

The present application claims the benefit of U.S. Provisional Application No. 60/817,800, filed June 30, 2006, which is incorporated herein in its entirety by reference.

Field of the Invention

The present invention is generally applicable to the field of docking stations. More specifically, the invention is directed to the field of interfacing with microenvironments having on-board microprocessors or sensors.

Background of the Invention

A variety of portable microenvironments utilized in the transport and storage of semiconductor wafers and substrates have evolved to include a system for continuous or periodic monitoring of conditions (e.g. temperature, pressure, humidity and/or static charge) inside or immediately outside the microenvironment. An example is disclosed in U.S. Patent No. 6,591,162 to Martin. Some on-board systems may include a microprocessor for monitoring and digitization of instrumentation signals, storage capability for logging the data, and a radio frequency (RF) transmitter that relays the information to a central processing station. Power is usually supplied by a battery that is often rechargeable. The microenvironments include but are not limited to front-opening unified pods (FOUPs), front-opening shipping boxes (FOSBs) or standard mechanical interface pods (SMIF pods). In the parlance of the semiconductor industry, containers that include such on-board systems may be referred to as "smart" containers (e.g. "smart FOUPs").

Containers may reside in inventory for a period of months for engineering and testing. During such extended period, there may be a need to keep the battery above a threshold charge in order to maintain monitoring and transmission of microenvironment data. On the other hand, short term storage (e.g. on the order of a few hours or days) of smart containers offers an opportunity to charge the batteries. In the context of storage systems, fabrication facilities often use a "stocker" that comprises an array or matrix of storage cells within which the microenvironments are placed. Stockers can be relatively complex and expensive structures, adapted to accommodate robotic manipulators in clean room environments. As smart containers are relatively new to the semiconductor industry, many existing stockers are not equipped to maintain or accommodate smart containers. Replacement of existing stockers with new stockers that are compatible with smart containers may be an expensive proposition that inhibit adoption of smart container technology.

One challenge is accomplishing an accurate and repeatable charging interface between the smart container and a charging means on the stocker that does not complicate the logistics of material handling and transfer through a wafer fabrication process. A number of stocker systems utilize conveyor rail flanges on the container for locating the microenvironment within the stocker. Placement by conveyor rail lacks the repeatability required for reliable coupling between the smart container and the charger.

Another challenge is reliable transmittal of the microenvironment data. Some existing stockers are not compatible with RF transmission because of the materials of construction. Often, the remoteness of stockers to a central processing station also exacerbates the problem of reliable transmission.

Semiconductor fabrication facilities would benefit from a system that enables ready and reliable connection with chargers or data acquisition/storage devices and that overcomes the problem of unreliable RF data transmission, preferably without the need to replace existing stockers.

Summary of the Invention

In certain embodiments of the invention, a rechargeable battery interface on the smart container mates with a docking station through terminal contacts rather than through electrical wiring to provide ready mounting / dismounting of the portable device to the docking station, and to eliminate dangling electrical cords that may hinder the use or performance of the portable device. Alignment of contact terminals and selective energization of the charging source contact terminations may also be provided. Some embodiments of the invention include a docking station having a base that is configured to support and accept a smart container equipped with kinematic couplings, such as a smart FOUP. The kinematic couplings may align power terminals on the smart container for reliable and repeatable coupling with a recharging interface on the charging staion.

Various embodiments of the invention may include an interface for transfer of data from the monitoring instrumentation therethrough. The mode of transfer may be by via electrical contacts, by transfer across an inductive coupling, by fiber optic coupling, or by other interfacing techniques available to the artisan. The stocker may be outfitted to include cabling appropriate for the type of interface for transfer of the data to a central processing station. Transferring data in this way may negate the need for monitoring signals by RF transmission while the smart carrier is stored in the stocker.

Structurally, these functions are accomplished in one embodiment by a station comprising a base plate having a top surface and at least one edge, a plurality of kinematic coupling pins extending from the top surface, and an interface module mounted to the base plate near the edge. The interface module may have an exposed surface accessible from the top surface of the base plate. In battery charging applications, the interface module may include a transformer that converts an AC power source to a DC power source, at least one terminal contact extending upward from the exposed surface and operatively coupled to the DC power source. Alternatively, a single remote transformer may supply a plurality of docking stations with DC power. A contact switch may be operatively connected between at least one of the terminal contacts and the DC power source to energize the terminal when the contact switch is closed.

In another embodiment, a docking station for recharging at least one rechargeable battery on a wafer carrier comprises a base plate including kinematic coupling pins arranged for engagement with a plurality of kinematic couplings on the wafer carrier. An interface module may be operatively coupled with the base plate and including a power converter The power converter may be operatively coupled with a pair of charger terminal contacts configured to operatively couple the at least one rechargeable battery to provide the electrical current for recharging. The pair of charger terminal contacts may be operatively coupled to the rechargeable battery when the kinematic couplings of the wafer carrier are engaged with the kinematic coupling pins of the base plate. The contacts may be spring biased. A contact switch may also be configured to enable flow of the electrical current to the rechargeable battery when the kinematic couplings of the wafer carrier are engaged with the kinematic coupling pins of the base plate. Light emitting diodes operatively configured for indicating a status of said docking station may also be visible from an exposed surface of the interface module.

Another embodiment comprises a wafer carrier including at least one rechargeable battery operatively coupled thereto, the wafer carrier having kinematic couplings, the at least one rechargeable battery including at least one electrical receiving coupling adapted to receive electrical current for recharging the at least one rechargeable battery. A a base plate including kinematic coupling pins may be arranged for engagement with the kinematic couplings of the wafer carrier. An interface module may be operatively coupled with the base plate and include a power converter operatively coupled with at least one electrical source coupling, the at least one electrical source coupling arranged to operatively couple with the at least one electrical receiving coupling to provide electrical current for recharging the at least one rechargeable battery. The at least one electrical source coupling and the at least one electrical receiving coupling may be operatively aligned when the kinematic couplings of the wafer carrier are engaged with the kinematic coupling pins of the base plate. The at least one electrical source coupling may include a first pair of charger terminal contacts and the at least one electrical receiving coupling may include a second pair of charger terminal contacts. Either one of the first pair of charger terminal contacts and the second pair of charger terminal contacts may be spring biased. The wafer carrier system may also be mounted within a stocker.

Certain embodiments of the invention include a wafer carrier including an instrumentation module for monitoring conditions within or proximate the wafer carrier, the wafer carrier having kinematic couplings. A docking station with an interface module adapted to transmit data to or receive data from the instrumentation module may have kinematic coupling pins arranged for engagement with the kinematic couplings of the wafer carrier. The interface module and the instrumentation module may be operatively coupled when the kinematic couplings of the wafer carrier are engaged with the kinematic coupling pins of the docking station. The interface module may be operatively coupled with a data bus for transmission of data to or from the interface module. The data bus may be operatively coupled with a remote computer. The instrumentation module may include a microprocessor adapted to transmit data to or receive data from the interface module. Moreover, the system may include at least one rechargeable battery operative Iy coupled with the microprocessor, the at least one rechargeable battery including at least one electrical receiving coupling adapted to receive electrical current for recharging the at least one rechargeable battery. The interface module may be configured for inductive coupling with a carrier-side coil operatively coupled to the instrumentation module and a stationary- side coil operatively coupled to the interface module, the inductive coupling made operative when the kinematic couplings of the wafer carrier are engaged with the kinematic coupling pins of the base plate. The docking station may stand alone or be mounted to a stocker.

An advantage of various embodiments of the invention is the ability to recharge the batteries of smart carriers while they are in inventory.

Another advantage of certain embodiments of the invention is the ability to retrofit existing stocker facilities with docking stations for accommodation of smart carriers, thereby eliminating the need to replace entire stocker structures.

Another advantage of various embodiments of the invention is the ability to monitor smart carriers without resorting to radio frequency links.

Brief Description of the Drawings

FIG. 1 is a perspective view of a docking station in an embodiment of the invention;

FIG. IA is a partial sectional view of the docking station of FIG. 1 ;

FIG. 2 is a perspective view of the docking station of FIG. 1 with a smart FOUP placed thereon in an embodiment of the invention;

FIG. 3 is an electrical schematic of a wafer carrier system in an embodiment of the invention;

FIG. 4 is a schematic of a rechargeable battery inductively coupled to a docking station in an embodiment of the invention; and FIG. 5 is a schematic of a docking station having an inductively coupled charging and data transfer interface in an embodiment of the invention.

Detailed Description of the Embodiments

Referring to the figures, an embodiment of a smart container 10 and a charging or docking station 12 is depicted. An example of a smart container, specifically a smart

FOUP, is disclosed in U.S. Patent 6,901,971, issued to Speasl, et al. and assigned to

Entegris, Inc., assignee of the present application, the disclosure of which is hereby incorporated by reference in its entirety except for express definitions of terms defined therein. The docking station 12 may comprise a base plate 14 having a width 16, an overall length 18, an upper surface 20 and a perimeter portion 22. A trio of kinematic coupling pins 24, 26 and 28 extend upward from the upper surface 20.

A charging or interface module 30 having an exposed face 31 is mounted to the base plate 14. The base plate 14 may be shaped to correspond approximately to the plan view or "footprint" of the smart container 10. The base plate 14 may include a projecting portion 32 that extends substantially beyond the footprint of the smart container 10.

In one configuration, the interface module 30 includes a power converter such as a direct current (DC) power source 33 having positive (+) and negative (-) hookups (FIG. 3). The DC power source 33 may be in the form of an AC to DC power supply that is operatively coupled with an AC power source. The DC power source 33 may be operatively coupled to electrical source couplings such as a pair of charger terminal contacts 34 and 36. The electrical circuit (FIG. 3) may further include a contact switch 38. The terminal contacts 34 and 36 may be biased with biasing springs 39, such as depicted in FIG. IA. The embodiment of FIG. 1 also depicts the exposed face 31 of the interface module 30 as being substantially flush with the upper surface 20 of the base plate 14.

The interface module 30 may also include a light source or sources, such as the pair of light emitting diodes (LEDs) 40 and 42 depicted in FIG. 1. The interface module 30 may be operatively coupled with the base plate 14 so that the light sources 40, 42 are positioned in the projecting portion 32 of the base plate 14. The LEDs 40 and 42 may be configured to indicate the status of the docking station 12 in a variety of ways. One light may be configured to emit red only when there is current flowing through the terminal contacts 34 and 36. The second light may be configured to emit green when the contact switch 38 is closed, yet there is not current flowing through the terminal contacts 34 and 36. The control of the LEDs 40 and 42 may be performed through relay circuits that are controlled by a microprocessor (not depicted).

The base plate may be made of a metal, such as steel, aluminum or magnesium, or an electrically conducting composite. Where an oxidizing metal is utilized for the base material, the base plate may be coated with a protective coating such as a polymer powder coating, an anodized coating, a plating or paint to inhibit oxidation.

The smart container 10 includes an instrumentation module 44 powered by a rechargeable battery 46. A number of sensors (not depicted) are included with the instrumentation module 44 to monitor the environmental conditions within the smart container 10. The parameters monitored may include, but are not limited to temperature, pressure, humidity and static charge. The sensors may communicate to a wafer fabrication control center via radio frequency (RF) transmission (not depicted).

The smart container 10 is equipped with kinematic couplings (not depicted) on the underside that are in alignment with the kinematic coupling pins 24, 26 and 28. The smart container 10 is thus suspended over the upper surface 20 of the base plate 14.

The docking station 12 may be a stand-alone unit that plugs into a wall outlet (not depicted) to supply the AC to DC transformer. The docking station 12 may also include feet 45 to elevate the base plate 14. Alternatively, a plurality docking stations 12 may be hard wired in a stocking arrangement for storage of inventory in multiple smart containers 10. The docking station may be dimensioned to retrofit existing stocker. Representative and non-limiting dimensions for the base plate 14 are 15.25-in. for the width 16, 15.5-in. for the length 18, 0.5-in for the thickness, and 0.512-in. for the height of the kinematic coupling pins 24, 26 and 28 extending above the base plate 14.

In operation, when the smart container 10 is placed upon the kinematic coupling pins 24, 26 and 28 of the docking station 12, the underside of the smart container 10 engages the contact switch 38 causing it to close, thereby completing the circuit that energizes the terminal contacts 34 and 36 for charging the battery 46. The LEDs 40 and 42 may remain exposed when the smart container 10 is in place on the docking station 12. When the docking station is unoccupied, the contact switch 38 remains in a normally open configuration, and the terminal contacts 34 and 36 are not energized. This arrangement prevents inadvertent shorting of the terminal contacts 34 and 36 which could damage the interface module 30.

The smart container 10 may be equipped with standard kinematic couplings that engage with the kinematic coupling pins 24, 26 and 28 and orients the smart container 10 so that the terminal contacts 34 and 36 are in alignment with the contacts of the rechargeable battery 46. The kinematic couplings may negate the need for a separate alignment structure.

The base plate 14 is made preferably of an electrical conductor to enable discharge of static dissipative potential to ground. The width 16 of the base plate 14 may be dimensioned to cooperate with standard or conventional stock racks that presently house FOUPs in existing fabrication environments. In so adapting the docking station 12 to the appropriate width, the kinematic coupling system employed by the docking station 12 may be utilized and supported by existing infrastructure without need for modification of that infrastructure.

The smart container 10 substantially covers the docking station 12. The projecting portion 32 remains uncovered, thereby leaving the light sources 40 and 42 exposed and visible. This enables personnel to check the charging status of the smart container 10.

The exposed surface 31 may be substantially flush with the upper surface 20 of the base plate 14, or register above or below the upper surface 20. The kinematic coupling pins 24, 26 and 28 suspend the smart container 10 over the upper surface 20. Hence, in order for the contact switch 38 to be operational, the position of the exposed face 31 relative to the upper surface 20 is a function of the height of the kinematic coupling pins 24, 26 and 28, the depth of the kinematic couplings, and the vertical position of the engaging portion of the smart container 10 relative to the interface between the kinematic coupling pins 24, 26 and 28 and the kinematic couplings. Terminal contacts 34 and 36 that are spring biased may comply with the placement of the smart container 10 and mitigate concerns that the smart container 10 is being supported by the contacts rather than the kinematic coupling pins 24, 26. The biasing springs 39 may further provide a reliable contact pressure at the terminal contacts 34, 36. The spring biasing of terminal contacts 34 and 36 may also provide a degree of lateral movement that accommodates some degree of misalignment.

Referring to FIG. 4, an inductive charger coupling 50 including a source or stationary-side coil 52 contained within the interface module 30 inductively coupled to a pickup or carrier-side coil 54 is depicted in an embodiment of the invention. An example of an inductive coupling arrangement is provided by United States Patent No. 5,959,433 to Rohde, the disclosure of which is hereby incorporated by reference other than any express definitions of terms specifically defined therein. The carrier-side coil 54 may be included within the housing of the rechargeable battery 46, which may also include a rectifier 56 and other conditioning circuitry 58 for DC charging the cells 60 of the rechargeable battery 46.

Functionally, some inductive chargers, such as depicted in FIG. 4, are configured to charge across planar interfaces. Thus, the inductive charger coupling 50 may enable charging of the rechargeable battery 46 without substantially altering the profile of the docking station 12. It is understood that other inductive coupling configurations, such as the stationary-side coil 52 being located in a post that mates with a recess for coaxial alignment with the carrier-side coil 54 (not depicted), may be incorporated within the scope of the invention. The embodiment depicted in FIG. 4 also eliminates moving parts in making the contact, and enables hermetic seal of the components to inhibit contamination that may lead to failure of the various components.

Referring to FIG. 5, a combined power / data transmission system 70 is depicted in an embodiment of the invention. United States Patent No. 4,806,928 to Veneruso discloses an apparatus for electromagnetic coupling of both power and data signals, the disclosure of which is hereby incorporated by reference other than any express definitions of terms specifically defined therein. Veneruso provides a non-limiting example of how such a system may be implemented. The instrumentation module 44 may include a microprocessor 72 operatively coupled to analog-to-digital (A/D) converters 74 that digitize the signals received from a plurality of instrumentation 76 monitoring various parameters within a microenvironment 77. The microprocessor 72 may also be operatively coupled to receive data (e.g. instructions) from a receiver demodulator 78 and to transmit data via a transmitter driver 80. The receiver demodulator 78 and the transmitter driver 80 may be coupled to the carrier-side coil 54 using transmission lines 82 that are also used to charge the cells 60 of the rechargeable battery 46.

In the depicted embodiment, the stationary-side coil 52 is operatively coupled with an AC source 84 and a bi-directional modulator / demodulator 86. The bi-directional modulator / demodulator 86 may receive data from a remote computer 88 across a data bus 90 and modulate the data for transmission between the carrier-side coil 54 and the stationary-side coil 52 and through the transmission lines 82 for reception by the receiver demodulator 78 and subsequent communication with the microprocessor 72. To transmit data from the instrumentation 76 to the remote computer 88, the microprocessor 72 may operate the transmitter driver 80 to send a modulated signal back through the transmission lines 82, across the stationary-side coil 52 and the carrier-side coil 54 interface to the bidirectional modulator / demodulator 86, which demodulates the signal for transmission across the data bus 90 to the remote computer 88.

The embodiment of FIG. 5 depicts a single microenvironment 77 being monitored.

A plurality of microenvironments (not depicted) may also be configured for transfer of power and data, such as would be encountered in a stocker facility. The data bus 90 may be configured for polling of multiple microenvironments through utilization of an IEEE- 488 General Purpose Interface Bus or other interface busses suited for polling multiple devices.

Other embodiments of the invention may incorporate alternative configurations for transmitting data across the smart container / docking station interface. For example, separate transmission lines could be utilized instead of a shared arrangement with the power transmission. The separate lines could still utilize inductive coupling across the interface, or could use other connections such as analog contact, digital contact (e.g. serial transmission lines), infrared coupling or fiber optic coupling. An analog cable with conductors for various of the instrumentation signals may be used instead of the data bus 50.

Functionally, the power / data transmission system 70 provides ready coupling of the rechargeable battery 46 to a charging source, and may also provide data transmission from the microenvironment to a central processing data bank without the need for a RF link.

The above embodiments are not to be construed as limiting the claimed invention. Skilled artisans will recognize other configurations and embodiments that are still within the spirit of the claimed invention. For example, various figures and discussion herein are directed to FOUP wafer containers, but may be readily adapted to standard mechanical interface pods (SMIFs) or other wafer or reticle containers and still be within the scope of the invention.

References to relative terms such as upper and lower, front and back, left and right, or the like, are intended for convenience of description and are not contemplated to limit the invention, or its components, to any specific orientation. All dimensions depicted in the figures may vary with a potential design and the intended use of a specific embodiment of this invention without departing from the scope thereof.

Each of the additional figures and methods disclosed herein may be used separately, or in conjunction with other features and methods, to provide improved devices, systems and methods for making and using the same. Therefore, combinations of features and methods disclosed herein may not be necessary to practice the invention in its broadest sense and are instead disclosed merely to particularly describe representative embodiments of the invention.

For purposes of interpreting the claims for the present invention, it is expressly intended that the provisions of Section 1 12, sixth paragraph of 35 U.S.C. are not to be invoked unless the specific terms "means for" or "step for" are recited in the subject claim.

Claims

ClaimsWhat is claimed is:

1. A docking station for recharging at least one rechargeable battery on a wafer carrier, comprising:

a base plate including kinematic coupling pins arranged for engagement with a plurality of kinematic couplings on said wafer carrier;

an interface module operatively coupled with said base plate and including a power converter, said power converter being operatively coupled with a pair of charger terminal contacts, said pair of charger terminal contacts being configured to operatively couple said at least one rechargeable battery to provide said electrical current for recharging,

wherein said pair of charger terminal contacts are operatively coupled to said rechargeable battery when said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said base plate.

2. The docking station of claim 1 further comprising a contact switch configured to enable flow of said electrical current to said rechargeable battery when said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said base plate.

3. The docking station of claim 1 wherein said charger terminal contacts are spring biased.

4. The docking station of claim 1 further comprising light emitting diodes visible from an exposed surface of said interface module, said light emitting diodes being operatively configured for indicating a status of said docking station.

5. A wafer carrier system comprising:

a wafer carrier including at least one rechargeable battery operatively coupled thereto, said wafer carrier having kinematic couplings, said at least one rechargeable battery including at least one electrical receiving coupling adapted to receive electrical current for recharging said at least one rechargeable battery; a base plate including kinematic coupling pins arranged for engagement with said kinematic couplings of said wafer carrier;

an interface module operatively coupled with said base plate and including a power converter operatively coupled with at least one electrical source coupling, said at least one electrical source coupling arranged to operatively couple with said at least one electrical receiving coupling to provide said electrical current for recharging said at least one rechargeable battery,

wherein said at least one electrical source coupling and said at least one electrical receiving coupling are operatively aligned when said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said base plate.

6. The wafer carrier system of claim 5 further comprising a contact switch configured to enable flow of said electrical current to said at least one electrical source coupling when said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said base plate.

7. The wafer carrier system of claim 5 wherein said wafer carrier is a front opening unified pod.

8. The wafer carrier system of claim 5 wherein said at least one electrical source coupling include a first pair of charger terminal contacts and said at least one electrical receiving coupling include a second pair of charger terminal contacts.

9. The wafer carrier system of claim 8 wherein at least one of said first pair of charger terminal contacts and said second pair of charger terminal contacts are spring biased.

10. The wafer carrier system of claim 5 wherein said base plate is mounted within a stocker.

11. A method of recharging a rechargeable battery pack on a wafer carrier, comprising

selecting a wafer carrier having said rechargeable battery pack operatively coupled thereto, said wafer carrier including kinematic couplings, said rechargeable battery pack including at least one electrical receiving coupling adapted to receive electrical current for recharging said rechargeable battery pack;

selecting a docking station including a base plate having kinematic coupling pins arranged for engagement with said kinematic couplings of said wafer carrier, said docking station including a interface module operatively coupled with said base plate and including a power converter operatively coupled with at least one electrical source coupling, said at least one electrical source coupling arranged to operatively couple with said at least one electrical receiving coupling to provide said electrical current for recharging said rechargeable battery pack, wherein said at least one electrical source coupling and said at least one electrical receiving coupling are operatively aligned when said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said base plate; and

placing said wafer carrier on said docking station so that said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said base plate.

12. A wafer carrier system comprising:

a wafer carrier including an instrumentation module for monitoring conditions within or proximate said wafer carrier, said wafer carrier having kinematic couplings;

a docking station including an interface module and kinematic coupling pins, said kinematic coupling pins arranged for engagement with said kinematic couplings of said wafer carrier, said interface module adapted to transmit data to or receive data from said instrumentation module,

wherein said interface module and said instrumentation module are operatively coupled when said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said docking station.

13. The wafer carrier system of claim 12 wherein said interface module is operatively coupled with a data bus for transmission of data to or from said interface module.

14. The wafer carrier system of claim 13 wherein said data bus is operatively coupled with a remote computer.

15. The wafer carrier system of claim 12 wherein said instrumentation module includes a microprocessor adapted to transmit data to or receive data from said interface module.

16. The wafer carrier system of claim 15 further comprising at least one rechargeable battery operatively coupled with said microprocessor, said at least one rechargeable battery including at least one electrical receiving coupling adapted to receive electrical current for recharging said at least one rechargeable battery.

17. The wafer carrier system of claim 15 wherein said interface module includes a carrier-side coil operatively coupled to said instrumentation module and a stationary-side coil operatively coupled to said interface module, said carrier-side coil and said stationary- side coil being inductively coupled when said kinematic couplings of said wafer carrier are engaged with said kinematic coupling pins of said base plate.

18. The wafer carrier system of claim 12 wherein said docking station is mounted to a stocker.