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WO2008004634A1 - Method for anodically oxidizing aluminum alloy and power supply for anodically oxidizing aluminum alloy - Google Patents

Method for anodically oxidizing aluminum alloy and power supply for anodically oxidizing aluminum alloy Download PDF

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Publication number
WO2008004634A1
WO2008004634A1 PCT/JP2007/063501 JP2007063501W WO2008004634A1 WO 2008004634 A1 WO2008004634 A1 WO 2008004634A1 JP 2007063501 W JP2007063501 W JP 2007063501W WO 2008004634 A1 WO2008004634 A1 WO 2008004634A1
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Prior art keywords
aluminum alloy
short
pulse
anodizing
time
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PCT/JP2007/063501
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French (fr)
Japanese (ja)
Inventor
Hiromichi Odajima
Kazuo Hayashi
Yuji Koyama
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IDX Co Ltd
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IDX Co Ltd
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Priority to EP07768250A priority Critical patent/EP2045367A1/en
Priority to JP2008523736A priority patent/JPWO2008004634A1/en
Publication of WO2008004634A1 publication Critical patent/WO2008004634A1/en
Anticipated expiration legal-status Critical
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/024Anodisation under pulsed or modulated current or potential

Definitions

  • the present invention relates to an aluminum alloy anodizing method and an aluminum alloy anodizing power source.
  • aluminum alloys are anodized in an aqueous solution bath of sulfuric acid, oxalic acid, phosphoric acid, etc. for the purpose of improving the hardness, wear resistance, corrosion resistance, and coloring of the surface of the aluminum alloy, An oxide film is formed on the surface.
  • This anodized film is composed of a dense barrier layer and a porous porous layer, and the composition is A10.
  • a pulse electrolysis method including a current inversion method is better than a direct current method. It is said that.
  • Metal Surface Technology, 39, p. 512 (1988) in an acid bath, an anodic oxidation by a current reversal method in which a negative current is intermittently applied, and an oxidation voltage lower than that by a direct current method. It has been reported that an oxide film can be formed at high speed.
  • the AC component does not include a negative component and the AC component is a DC component in the AC / DC superimposition method in which a DC is applied to an AC.
  • the AC component is a DC component in the AC / DC superimposition method in which a DC is applied to an AC.
  • / 0 or more Included electrolysis conditions, excellent moreover corrosion in heat resistance good aluminum anodic oxide film has been shown to be capable of forming the aluminum alloy surface.
  • the preferred current density is as low as 0.:! To 2 A / dm 2. At this current density, the film formation rate is slow, and there is a problem in productivity and cost.
  • this method also has the problem that an AC power source and a DC power source are required and the power supply system becomes complicated.
  • JP 2004-35930 A discloses a method of improving the deposition rate of an aluminum anodized film from the viewpoint of productivity in a sulfuric acid aqueous solution bath of 200 to 5000 Hz (preferably 600 to 2000 Hz).
  • a method is proposed in which a current in which a direct current is superimposed on a sinusoidal high-frequency current is applied.
  • aluminum alloy ADC 12 JIS H5302 was electrolyzed by superimposing a 19.8 V DC voltage on a sine wave with a frequency of 1000 Hz and a voltage of ⁇ 20 V in a 10% sulfuric acid aqueous solution at 17 ° C.
  • An anodic oxide film of 22 ⁇ m was obtained in 20 minutes (growth rate 1. l / im / min).
  • JP-A-2006-83467 for the purpose of improving corrosion resistance and impact resistance, the cells of the anodized film grow in a random direction with respect to the surface of the aluminum or aluminum alloy, and the orientation is improved.
  • a method for forming an anodic oxide film having no electrode is shown. As a specific method, an alloy containing impurities such as silicon is used, and a positive voltage is applied. The process of removing the charge is repeated, and one positive voltage application is 25 to 100 / s (frequency is 5 to 20 KHz). In the process of removing charges, the positive application is temporarily stopped and a short circuit of the pole or a negative voltage is applied.
  • the present invention has been made in view of the above problems, and the problem to be solved by the present invention is to suppress negative current when anodizing an aluminum alloy using a pulse electrolysis method.
  • Aluminum alloy anodizing method and aluminum alloy anodizing method that can increase the film deposition rate and improve productivity without causing “film burnt” defects by preventing or reducing the flow. It is to provide a power source for the vehicle.
  • an aluminum alloy that can further increase the film formation rate and improve the productivity by setting the frequency at which the maximum current flows when a pulse voltage is applied.
  • the purpose is to provide an anodizing method and a power source for anodizing aluminum alloy.
  • the present invention provides the following invention.
  • anode and anode for anodization are applied when no pulse voltage is applied after applying a positive nores voltage.
  • an aluminum alloy anodic oxidation method characterized by short-circuiting an oxidation cathode with a short-circuiting time of 15 or less.
  • the short circuit time is not less than 1 ⁇ s and not more than 15 / s.
  • Aluminum alloy anodizing method is not less than 1 ⁇ s and not more than 15 / s.
  • an aluminum alloy anodic oxidation characterized by having a pulse power generation section for generating a pulse power for short-circuiting a terminal connected to the anode for anodization and a terminal connected to the cathode for anodization with a short-circuiting time of 15 / s or less For power supply.
  • the pulse power generator generates a waveform force S pulse voltage application time ( ⁇ ), dead time (
  • short-circuit time ( ⁇ ) is generated in the order of pulse power, and d S
  • the power source for anodizing an aluminum alloy according to any one of [7] to [9].
  • anodic oxide film on the surface of an aluminum alloy using pulse power when forming an anodic oxide film on the surface of an aluminum alloy using pulse power, it is possible to achieve a very short short-circuit time when no pulse voltage is applied after applying a positive pulse voltage. Since the anode for anodic oxidation and the cathode for anodic oxidation are short-circuited, the film formation rate can be reduced without causing negative film current to occur, or by preventing the current from flowing. It is possible to provide an aluminum alloy anodizing method and an aluminum alloy anodizing power source that can improve productivity and productivity.
  • the present invention by setting the frequency at which a large current can flow when a no-less voltage is applied, in addition to the effect caused by the short circuit between the anode for anodization and the cathode for anodization, it is possible to further increase the frequency. It is possible to provide an aluminum alloy anodizing method and an aluminum alloy anodizing power source capable of increasing the deposition rate and improving the productivity.
  • FIG. 1 is a diagram for explaining the relationship between the film growth rate and the effective current density in an aluminum alloy anodizing method using pulse power.
  • FIG. 2 is a diagram for explaining the configuration of a power source and an electrolytic cell used for anodizing of an aluminum alloy according to the present invention.
  • FIG. 3 is a diagram for explaining pulse setting conditions and actual voltage / current waveforms corresponding thereto.
  • FIG. 4 is a diagram for explaining a steady state of film growth by anodization.
  • FIG. 5 is a diagram for explaining the relationship between the current waveform and frequency of pulse power used in the present invention.
  • FIG. 6 is a table for explaining the experimental results of Examples and Comparative Examples of the present invention.
  • FIG. 7 is a diagram for explaining a relationship between a short circuit time and a negative current according to the present invention.
  • the present inventors have short-circuited the anode for anodization and the cathode for anodization when a pulse voltage is not applied after applying a positive pulse voltage, and a negative current (when a pulse is applied). and the electric current) flowing in the opposite direction, the [alpha] 1 3+ and ⁇ 2 ion concentration gradient of one layer in the barrier formed at the pulse voltage is applied to discharge the electric double layer relaxation and the solid-liquid interface, the following Roh ⁇ It has been found that a large current can flow when applying a low voltage. However, as described above, the force S has a problem that the magnitude of the negative current is larger than the magnitude of the positive current when the pulse voltage is applied, and this point was further investigated.
  • the present inventors have found that the anode can be used only for a very short time when no pulse voltage is applied after the positive pulse voltage is applied.
  • the anode for oxidation and the cathode for anodization are short-circuited, unexpectedly, the negative current is suppressed and reduced, or the defect of “film burn” that does not flow negative current occurs without causing the next positive
  • a large current can be passed by applying a pulse voltage of.
  • making the applied panelless voltage within a specific frequency range can greatly contribute to the improvement of the film growth rate. The present invention has been made based on such knowledge.
  • a short-circuit time of 15 ⁇ s or less between the anodic oxidation anode and the anodic oxidation cathode when pulse voltage is applied and no pulse voltage is applied after positive pulse voltage is applied. It is characterized by short-circuiting.
  • the short-circuiting time is preferably 1 ⁇ s or more and 15 as or less than force S, more preferably 1 ⁇ s or more and 5 ⁇ s or less, and particularly preferably 1 ⁇ s or more and 3 ⁇ s or less. .
  • the preferred range of the short-circuiting time varies depending on the type of aluminum alloy to be treated and the conductivity, but if it is within the above range, the negative current can be greatly reduced to suppress the negative current or the next current that does not flow. Since a large current can be applied by applying a positive pulse voltage, the film generated by the negative current is not reduced. In addition, the growth rate of the film can be greatly improved without causing “film burn” defects. Up to now, in order to prevent the occurrence of defects called “film burn” and increase the film growth rate,
  • the cycle of the waveform of the pulse power is expressed by the pulse voltage application time (T),
  • the pulse voltage application time (T) should be about 20 to 100 ⁇ s.
  • the preferred dead time ( ⁇ ) is about 5-10 / is.
  • the frequency of the pulse power is preferably 8 to 35 KHz, more preferably 10 to 30 KHz.
  • the frequency is within the above range, it becomes possible to form a film by supplying an amount of electricity that further improves the growth rate of the film. The growth rate can be improved.
  • FIG. 2 shows the configuration of the power source and the electrolytic cell used for the aluminum alloy anodization of the present invention.
  • Power supply P is sequencer 10, positive side DC power source 11, repetition frequency generator 12, positive side pulse generator circuit 13 , short side pulse generator circuit 14, positive side chopper gate amplifier (GA) 25, short side chopper gate amplifier (GA ) 26, a positive chopper switch 15, a backflow prevention diode (D) 16, and a short-circuit current control circuit 17, and its output terminal 18 is connected to the anode 20 and the cathode 21 in the electrolytic cell 19. Further, a positive output voltmeter (E) 22, an electrolytic cell voltmeter 23) and an electrolytic cell ammeter (A) 24 are attached. 27 is the power
  • the sequencer 10 repeats the frequency generator 12, the positive pulse generator 13, the short pulse generator 14, and the positive pulse generator in order to make the pulse power waveform used in the present invention into a predetermined shape.
  • Side DC power supply 11 is controlled.
  • the positive side DC power supply 11 generates the DC power necessary for applying the positive pulse voltage or the positive pulse current set by the sequencer 10.
  • the repetitive frequency generator 12 generates a reference repetitive frequency necessary for generating the pulse power and supplies it to the positive side panelless generating circuit 13 and the short circuit side pulse generating circuit 14.
  • the positive side pulse generation circuit 13 generates a pulse having a time width of T
  • the short-circuit side pulse generation circuit 14 generates a noise having a time width of T.
  • the dead time (T) is set by the sequencer 10.
  • the side chopper gate amplifier (GA) 25 plays a role of amplifying the pulse signal of the pulse generation circuit 13 to a level at which the positive side chopper switch 15 can reliably operate according to the pulse width signal determined by the positive side pulse generation circuit 13.
  • the short-circuit side chopper gate amplifier 26 plays a role of amplifying the pulse signal of the short-circuit pulse generation circuit 14 to a level at which the short-circuit current control circuit 17 can reliably operate according to the pulse width signal determined by the short-circuit pulse generation circuit 14.
  • the positive chopper switch 15 performs the role of supplying the electric power from the positive DC power supply 11 to the electrolytic cell in a pulsed manner in accordance with the panel width signal determined by the positive pulse generating circuit 13.
  • the reverse current prevention diode 16 prevents reverse power from flowing to the positive DC power supply 11 side.
  • the short-circuit current control circuit 17 short-circuits the output terminals 18 of the anode 20 and the cathode 21 for a short-circuit time T when no pulse voltage is applied after applying a positive no-relay voltage.
  • Anodization was performed under the following conditions using the power source shown in FIG.
  • A1100P material was used as a representative of good conductivity.
  • the size of the test piece at this time was 50 mm ⁇ 50 mm XI ⁇ 5 mm (0.53 dm 2 ).
  • ADC12 material was used as a representative of poor conductivity.
  • the size of the test piece at this time was 50 mm ⁇ 50 mm ⁇ 3.0 mm (0.56 dm 2 ).
  • the electrolytic cell had an electrolyte volume of about 2001, liquid circulation and micro-explosive agitation, and cooling with a plate heat exchanger.
  • the cathode bar was lead and the cathode plate was carbon.
  • the bath composition was a free sulfuric acid concentration of about 150 g / l and a bath temperature of 10 ° C.
  • Anodizing current density was carried out varied variously to 20A / dm 2.
  • After anodizing treatment it was washed with running well water for about 2 minutes and subjected to forced drying with warm air.
  • FIG. 3 shows a pulse setting condition and an actual voltage 'current waveform corresponding to the pulse setting condition.
  • T is the pulse voltage application time
  • T is the pulse voltage zero and the electrodes are short-circuited
  • the dead time required for the operation to be performed (becomes an open circuit state during this period), and ⁇ is the short circuit time.
  • the voltage waveform rises according to the T setting, falls slightly during T, and reaches zero during T.
  • a large negative current flows instantaneously at the moment of entering + d s, but then returns to zero immediately, hardly flows during T, the negative current increases after ⁇ elapses, and then begins to decrease after reaching a maximum value.
  • Fig. 4 (a) is an enlarged view of the barrier layer in the entire anodized film structure shown in Fig. 4 (c)). That is, an anode aluminum alloy and a cathode carbon are arranged with the electrolyte in between, A1 is oxidized to A10 at the anode, and H + ions are returned at the cathode.
  • Al O which is the knoWn layer constituent material
  • the charges move in the form of Al 3+ and 0 2 _ in the NOR layer, but the transport number of Af + is about 40% and the transport number of O 2 is about 60%.
  • the transport number of Al 3+ decreases as the temperature decreases and the oxidation current density increases, that is, the growth rate of the film increases.
  • the Af + concentration in the barrier layer is higher on the barrier layer ZA1 interface side and lower on the barrier layer Z electrolyte interface side (Fig. 4 (b) (A)).
  • the 02_ concentration in the barrier layer is lower on the non-layer / A1 interface side and higher on the non-layer / electrolyte interface side (Figs. 4 (b) and (B)).
  • O in OZ electrolyte interface 2 - would to diffuse the Al side and the electrolyte side.
  • the short-circuit time is less, preferably 1 to 5 xs, more preferably 1 By setting the length to about 3 ⁇ s, the generated film is not reduced by a negative current, so that the film growth rate can be improved.
  • the short-circuit time is set to the following, preferably:! To 15 zs, more preferably 1 to 10 xs. The growth rate can be improved.
  • the film growth rate is proportional to the effective current density. It has been found that the decrease in effective current due to the negative current at the time of short circuit can be reduced by extremely shortening the short circuit time as described above, and as a result, the film growth rate can be greatly improved. The film growth rate can be further improved by optimizing the film thickness.
  • FIG. 5 shows details of the current waveform of FIG. Figure 5 (a) shows the case where the frequency is small (T is large)
  • Fig. 5 (b) shows the case where the frequency is large (T force M, dice). However, Fig. 5 (b)
  • T is 2 ⁇ s, and the negative current almost flows.
  • the frequency f of the pulse is
  • i means the i-th of multiple frequencies to be tried for optimization.
  • the quantity of electricity Q used for anodization is the integrated value S of the current waveform in Fig. 5.
  • Anodization was performed under the following conditions using the power source shown in FIG.
  • an Al 1 OOP material was used as a representative of good conductivity.
  • the size of the test piece at this time was 50 mm ⁇ 50 mm ⁇ 1.5 mm (0.53 dm 2 ).
  • the electrolytic cell had an electrolyte volume of approximately 2001, liquid circulation, micro-explosion agitation, and cooling by a plate heat exchanger.
  • the cathode bar was lead and the cathode plate was carbon.
  • the bath composition was a free sulfuric acid concentration of about 150 g / l and a bath temperature of 10 ° C.
  • Anodizing current density was carried out varied variously to 20A / dm 2. In addition, after anodizing, it was washed with running well water for about 2 minutes and forced-dried with warm air.
  • the short-circuit time 15 is set to about 15 ⁇ s or less, the negative current can be suppressed and reduced or hardly flow.
  • Negative current hardly flows when the short-circuit time is 2 ⁇ s, but it increases rapidly as the short-circuit time increases to 10, 20, and 40 ⁇ s, but it is acceptable up to about 10 ⁇ s. When s was exceeded, it increased considerably.

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Abstract

A method for anodically oxidizing an aluminum alloy is provided for forming an anodically oxidized film on the surface of the aluminum alloy by using pulse power. An anodically oxidizing anode and an anodically oxidizing cathode are short-circuited for a short-circuiting time of 15μs or shorter when a pulse voltage is not applied after a positive pulse voltage is applied. Furthermore, the cycle of waveform of the pulse power has a pulse voltage application time (T+), a dead time (Td) and a short-circuiting time (Ts) in this order. Thus, a film forming speed and productivity are improved by suppressing a negative current or by preventing the negative current from flowing.

Description

明 細 書  Specification

アルミニウム合金陽極酸化方法およびアルミニウム合金陽極酸化用電源 技術分野  Aluminum alloy anodizing method and power source for anodizing aluminum alloy

[0001] 本発明はアルミニウム合金陽極酸化方法およびアルミニウム合金陽極酸化用電源 に関する。  The present invention relates to an aluminum alloy anodizing method and an aluminum alloy anodizing power source.

背景技術  Background art

[0002] 従来から、アルミニウム合金表面の硬度ゃ耐磨耗性、耐食性の向上及び着色を目 的として、硫酸、蓚酸、燐酸等の水溶液浴中でアルミニウム合金を陽極酸化し、該ァ ノレミニゥム合金の表面に酸化皮膜を形成することが行われている。この陽極酸化皮 膜は、緻密なバリヤ一層と多孔質のポーラス層で構成されており、組成は A1〇であ  [0002] Conventionally, aluminum alloys are anodized in an aqueous solution bath of sulfuric acid, oxalic acid, phosphoric acid, etc. for the purpose of improving the hardness, wear resistance, corrosion resistance, and coloring of the surface of the aluminum alloy, An oxide film is formed on the surface. This anodized film is composed of a dense barrier layer and a porous porous layer, and the composition is A10.

2 3 る。  2 3

[0003] 希望する特性の皮膜を得るため、電力の印加方法としては、直流法、電流反転法、 交直重畳法、パルス波形法等が報告されている(金属表面技術、 、 P. 512 (1988 )、近畿アルミニウム表面処理研究会誌、 No. 1334, p. 1 (1988)、特開 2000— 28 2294号公報、特開 2004— 35930号公報)。  [0003] In order to obtain a film having a desired characteristic, a DC method, a current inversion method, an AC / DC superposition method, a pulse waveform method, and the like have been reported as methods for applying electric power (Metal Surface Technology, P. 512 (1988)). ), Kinki Aluminum Surface Treatment Research Journal, No. 1334, p. 1 (1988), JP 2000-28 2294, JP 2004-35930).

[0004] 直流法で高い成膜速度を得るために、大電流を流すべく高電圧を印加すると、前 記バリヤ一層で発生するジュール熱の発熱量が大きくなり、「皮膜焼け」と呼ばれる酸 化皮膜に欠陥が発生する。したがって、直流法では、特に多量の Si、 Cu、 Fe等を含 み電流の流れ難いアルミニウム铸造材及びアルミニウムダイカスト材に対して短時間 で厚い陽極酸化皮膜を形成することは困難であった。  [0004] When a high voltage is applied to flow a large current in order to obtain a high film formation rate by the direct current method, the amount of Joule heat generated in the barrier layer increases, and this is called oxidation of the film. Defects occur in the film. Therefore, with the direct current method, it was difficult to form a thick anodic oxide film in a short time on aluminum forging materials and aluminum die casting materials that contain a large amount of Si, Cu, Fe, etc., and are difficult to flow current.

[0005] これに対し、所望の酸化皮膜を「皮膜焼け」と呼ばれる欠陥を発生させることなく生 産性良く短時間に形成するには、直流法よりも電流反転法を含むパルス電解法が良 レ、と言われている。例えば、前記文献、金属表面技術、 39, p. 512 (1988)には、硫 酸浴において、間歇的に負電流を流す電流反転法による陽極酸化で、直流法による 陽極酸化よりも低い酸化電圧において高速で酸化皮膜が形成できることが報告され ている。また、前記文献、近畿アルミニウム表面処理研究会誌、 No. 1334、 p. 1 (19 88)では、ァノレミニゥム A1080P IIS H4100)を 20°Cの 20Wt%硫酸 + lOg/1蓚 酸浴中で、電流反転法により、周波数 13. 3Hz、電流密度 4A/dm2、 duty95%の 条件で 65分電解を行い、 92 μ ΐηのアルミニウム陽極酸化皮膜を得ている(1 · 4 /i m /min)。し力し、これらの方法は数 10Hzオーダの周波数の電圧印加であり、特に合 金元素の多レ、アルミニウムダイカスト材におレ、ては成膜速度を早くできないとレ、う問 題があった。また、正電圧、負電圧を印加しなければならず、用いる電源がバイポー ラで構造が複雑になるという問題があった。 [0005] On the other hand, in order to form a desired oxide film in a short time with good productivity without causing defects called "film burn", a pulse electrolysis method including a current inversion method is better than a direct current method. It is said that. For example, in the above-mentioned document, Metal Surface Technology, 39, p. 512 (1988), in an acid bath, an anodic oxidation by a current reversal method in which a negative current is intermittently applied, and an oxidation voltage lower than that by a direct current method. It has been reported that an oxide film can be formed at high speed. In addition, according to the above literature, Kinki Aluminum Surface Treatment Study Group, No. 1334, p. 1 (11988), Anoleminium A1080P IIS H4100) was added to 20 Wt% sulfuric acid + lOg / 1g at 20 ° C. In an acid bath, electrolysis was performed for 65 minutes under the conditions of a frequency of 13.3 Hz, a current density of 4 A / dm 2 and a duty of 95% by a current reversal method to obtain an aluminum anodized film of 92 μΐη (1 · 4 / im / min). However, these methods apply voltage with a frequency on the order of several tens of Hz, and there is a problem that the film formation speed cannot be increased particularly for a large amount of alloying elements and aluminum die casting materials. It was. In addition, a positive voltage and a negative voltage must be applied, and there is a problem that the power supply used is bipolar and the structure becomes complicated.

[0006] 特開 2000— 282294号公報には、交流に直流を印加した交直重畳法で交流成分 が負成分を含まず且つ交流成分が直流成分の 5。/0以上含まれる電解条件で、耐熱 性に優れしかも耐食性も良好なアルミニウム陽極酸化皮膜がアルミニウム合金表面 に形成できることが示されている。しかし、好適とされる電流密度は 0.:!〜 2A/dm2 と低ぐこの電流密度では成膜速度は遅ぐ生産性並びにコスト上に問題があった。 さらにこの方法においても、交流電源と直流電源が必要で電源系が複雑になるという 問題があった。 [0006] In Japanese Patent Application Laid-Open No. 2000-282294, the AC component does not include a negative component and the AC component is a DC component in the AC / DC superimposition method in which a DC is applied to an AC. / 0 or more Included electrolysis conditions, excellent moreover corrosion in heat resistance good aluminum anodic oxide film has been shown to be capable of forming the aluminum alloy surface. However, the preferred current density is as low as 0.:! To 2 A / dm 2. At this current density, the film formation rate is slow, and there is a problem in productivity and cost. Furthermore, this method also has the problem that an AC power source and a DC power source are required and the power supply system becomes complicated.

[0007] また、特開 2004— 35930号公報は、生産性の観点からアルミニウム陽極酸化皮 膜の成膜速度を向上させる方法として、硫酸水溶液浴中で 200〜5000Hz (好ましく は 600〜2000Hz)の正弦波高周波電流に直流電流を重畳した電流を通電する方 法を提案している。即ち、アルミニウム合金 ADC 12 JIS H5302)を、 17°Cの 10% の硫酸水溶液中で、周波数が 1000Hzで電圧が ± 20Vの正弦波の高周波に 19. 8 Vの直流電圧を重畳させ、電解処理時間 20分で 22 μ mの陽極酸化膜を得てレ、る ( 成長速度 1. l /i m/min)。なお、電解開始 5分後の電流密度は 13. 8A/dm2であ つたと報告されている。しかしながら、周波数が 200〜5000Hzに限定されておりか つ実際に使用されているのが正弦波であるため、単位時間内に流せる電流が矩形 波より少ないと言う問題を残している。また、交流電源と直流電源が必要で電源系が 複雑になるという問題があった。 [0007] Further, JP 2004-35930 A discloses a method of improving the deposition rate of an aluminum anodized film from the viewpoint of productivity in a sulfuric acid aqueous solution bath of 200 to 5000 Hz (preferably 600 to 2000 Hz). A method is proposed in which a current in which a direct current is superimposed on a sinusoidal high-frequency current is applied. In other words, aluminum alloy ADC 12 JIS H5302) was electrolyzed by superimposing a 19.8 V DC voltage on a sine wave with a frequency of 1000 Hz and a voltage of ± 20 V in a 10% sulfuric acid aqueous solution at 17 ° C. An anodic oxide film of 22 μm was obtained in 20 minutes (growth rate 1. l / im / min). It has been reported that the current density 5 minutes after the start of electrolysis was 13.8 A / dm 2 . However, since the frequency is limited to 200 to 5000 Hz and the sine wave is actually used, there is a problem that the current that can be flowed in a unit time is less than that of the rectangular wave. In addition, there is a problem that the power supply system becomes complicated because an AC power supply and a DC power supply are necessary.

[0008] また、特開 2006— 83467号公報には、耐食性、耐衝撃性向上を目的として、陽極 酸化皮膜のセルがアルミニウム又はアルミニウム合金の表面に対してランダムな方向 に成長し、配向性を持たない陽極酸化皮膜の形成方法が示されている。具体的な方 法として、シリコンなどの不純物を含んだ合金を用レ、、プラス電圧を印加する工程と 電荷を除去する工程とを繰返し、 1回のプラス電圧印加が 25〜: 100 / s (周波数とし て 5〜20KHz)とするものである。電荷を除去する工程では、一旦、プラス印加をや め、極の短絡、もしくはマイナス電圧を印加する。マイナス電圧を印加する場合、ブラ ス電圧の印加時間と同じ時間だけ印加することが示されている。ここで電荷を除去す る理由は、電荷がたまると実質的に抵抗が大きくなり、一定電流値を得ようとすると高 い電圧を印加することが必要となり、その結果、前述した「皮膜焼け」と称される欠陥 が発生するためである。 [0008] In addition, in JP-A-2006-83467, for the purpose of improving corrosion resistance and impact resistance, the cells of the anodized film grow in a random direction with respect to the surface of the aluminum or aluminum alloy, and the orientation is improved. A method for forming an anodic oxide film having no electrode is shown. As a specific method, an alloy containing impurities such as silicon is used, and a positive voltage is applied. The process of removing the charge is repeated, and one positive voltage application is 25 to 100 / s (frequency is 5 to 20 KHz). In the process of removing charges, the positive application is temporarily stopped and a short circuit of the pole or a negative voltage is applied. When a negative voltage is applied, it is shown that the negative voltage is applied for the same time as the brass voltage. The reason for removing the charge here is that the resistance increases substantially as the charge accumulates, and it is necessary to apply a high voltage to obtain a constant current value. This is because of a defect called “.

[0009] し力、しながら、この方法では、マイナス電圧を印加した場合、生成した皮膜が解けて 減じられ、皮膜の成長速度を向上させる妨げとなってしまう。また、極の短絡を行った 場合においても、大きな負電流密度の負電流が流れることがわかった。例えば、ある 陽極酸化条件下で正電流密度 18 A/dm2のとき負電流密度は 12. 8 A/dm2であ つた。そのため、皮膜の成長速度を向上させるためには、改善の余地があった。 発明の開示 However, in this method, when a negative voltage is applied, the generated film is dissolved and reduced, which hinders the improvement of the film growth rate. It was also found that a negative current with a large negative current density flows even when the pole is short-circuited. For example, when the positive current density is 18 A / dm 2 under certain anodizing conditions, the negative current density is 12.8 A / dm 2 . Therefore, there is room for improvement in order to increase the growth rate of the film. Disclosure of the invention

[0010] 本発明は上記の問題点に鑑みてなされたものであり、本発明が解決しょうとする課 題は、パルス電解法を用いてアルミニウム合金を陽極酸化させる際に、負電流を抑 制して低減させる力、、あるいは流さないようにして、「皮膜焼け」の欠陥を発生させず に、皮膜の成膜速度を高め生産性を向上できるアルミニウム合金陽極酸化方法およ びアルミニウム合金陽極酸化用電源を提供することにある。  [0010] The present invention has been made in view of the above problems, and the problem to be solved by the present invention is to suppress negative current when anodizing an aluminum alloy using a pulse electrolysis method. Aluminum alloy anodizing method and aluminum alloy anodizing method that can increase the film deposition rate and improve productivity without causing “film burnt” defects by preventing or reducing the flow. It is to provide a power source for the vehicle.

また、本発明が解決しょうとする他の課題は、パルス電圧印加時に最大の電流が流 れる周波数を設定することによつても、皮膜の成膜速度をより一層高め生産性を向上 できるアルミニウム合金陽極酸化方法およびアルミニウム合金陽極酸化用電源を提 供することにある。  In addition, another problem to be solved by the present invention is that an aluminum alloy that can further increase the film formation rate and improve the productivity by setting the frequency at which the maximum current flows when a pulse voltage is applied. The purpose is to provide an anodizing method and a power source for anodizing aluminum alloy.

[0011] 本発明は、上記目的を達成するために、下記の発明を提供する。  In order to achieve the above object, the present invention provides the following invention.

〔 1〕パルス電力を用レ、、アルミニウム合金の表面に陽極酸化皮膜を形成するアルミ ニゥム合金陽極酸化方法において、正のノ^レス電圧印加後のパルス電圧不印加時 に陽極酸化用陽極と陽極酸化用陰極とを 15 以下の短絡時間で短絡することを特 徴とするアルミニウム合金陽極酸化方法を提供する。  [1] In an aluminum alloy anodizing method in which pulse power is applied and an anodized film is formed on the surface of the aluminum alloy, the anode and anode for anodization are applied when no pulse voltage is applied after applying a positive nores voltage. Provided is an aluminum alloy anodic oxidation method characterized by short-circuiting an oxidation cathode with a short-circuiting time of 15 or less.

〔2〕前記短絡時間が 1 μ s以上 15 / s以下であることを特徴とする上記〔1〕に記載 のアルミニウム合金陽極酸化方法。 [2] The short circuit time is not less than 1 μs and not more than 15 / s. Aluminum alloy anodizing method.

〔3〕前記短絡時間が 1 μ s以上 5 / s以下であることを特徴とする上記〔1〕に記載の アルミニウム合金陽極酸化方法。  [3] The aluminum alloy anodizing method according to [1], wherein the short-circuiting time is 1 μs or more and 5 / s or less.

〔4〕前記パルス電力の波形のサイクル力 パルス電圧印加時間 (T )、デッドタイム  [4] Cycle power of the pulse power waveform Pulse voltage application time (T), dead time

+  +

(T )、短絡時間 (T )の順に構成されてレ、ることを特徴とする上記〔1〕、 [2]または〔3 d s  (1), [2] or [3 d s], characterized in that they are configured in the order of (T) and short-circuit time (T).

〕に記載のアルミニウム合金陽極酸化方法。  ] The aluminum alloy anodizing method as described in the above.

〔5〕前記パルス電力の周波数が 8〜35KHzであることを特徴とする上記〔1〕から〔4 〕のレ、ずれかに記載のアルミニウム合金陽極酸化方法。  [5] The aluminum alloy anodizing method according to any one of [1] to [4] above, wherein the frequency of the pulse power is 8 to 35 KHz.

〔6〕前記パルス電力の周波数が 10〜30KHzであることを特徴とする上記〔1〕から〔 4]のレ、ずれかに記載のアルミニウム合金陽極酸化方法。  [6] The aluminum alloy anodizing method according to any one of [1] to [4] above, wherein the frequency of the pulse power is 10 to 30 KHz.

〔7〕パルス電力を用レ、、アルミニウム合金の表面に陽極酸化皮膜を形成するアルミ ニゥム合金陽極酸化方法に用いるアルミニウム合金陽極酸化用電源において、正の パルス電圧印加後のパルス電圧不印加時に、陽極酸化用陽極に接続する端子と陽 極酸化用陰極に接続する端子とを 15 / s以下の短絡時間で短絡させるパルス電力 を発生するパルス電力発生部を有することを特徴とするアルミニウム合金陽極酸化用 電源。  [7] In an aluminum alloy anodizing power source used in an aluminum alloy anodizing method for forming an anodized film on the surface of an aluminum alloy using pulse power, when no pulse voltage is applied after applying a positive pulse voltage, An aluminum alloy anodic oxidation characterized by having a pulse power generation section for generating a pulse power for short-circuiting a terminal connected to the anode for anodization and a terminal connected to the cathode for anodization with a short-circuiting time of 15 / s or less For power supply.

〔8〕前記パルス電力発生部が、前記短絡時間が 1 μ s以上 15 μ s以下であるパルス 電力を発生することを特徴とする上記〔7〕に記載のアルミニウム合金陽極酸化用電 源。  [8] The aluminum alloy anodic oxidation power source according to [7], wherein the pulse power generation unit generates pulse power having the short circuit time of 1 μs to 15 μs.

〔9〕前記パルス電力発生部が、前記短絡時間が 1 μ s以上 5 μ s以下であるパルス 電力を発生することを特徴とする上記〔7〕に記載のアルミニウム合金陽極酸化用電 源。  [9] The aluminum alloy anodic oxidation power source according to [7], wherein the pulse power generation unit generates pulse power having the short circuit time of 1 μs to 5 μs.

〔10〕前記パルス電力発生部が、波形力 Sパルス電圧印加時間 (Τ )、デッドタイム(  [10] The pulse power generator generates a waveform force S pulse voltage application time (Τ), dead time (

+  +

Τ )、短絡時間 (Τ )の順に構成されているパルス電力を発生することを特徴とする上 d S  S), short-circuit time (Τ) is generated in the order of pulse power, and d S

記〔7〕から〔9〕のレ、ずれかに記載のアルミニウム合金陽極酸化用電源。 The power source for anodizing an aluminum alloy according to any one of [7] to [9].

〔11〕前記パルス電力発生部が、周波数が 8〜35KHzであるパルス電力を発生す ることを特徴とする上記〔7〕から〔10〕のいずれかに記載のアルミニウム合金陽極酸化 用電源。 〔12〕前記パルス電力発生部が、周波数が 10〜 30KHzであるパルス電力を発生 することを特徴とする上記〔7〕から〔10〕のいずれかに記載のアルミニウム合金陽極酸 化用電源。 [11] The aluminum alloy anodizing power source according to any one of [7] to [10], wherein the pulse power generation unit generates pulse power having a frequency of 8 to 35 KHz. [12] The aluminum alloy anodic oxidation power source according to any one of [7] to [10], wherein the pulse power generation unit generates pulse power having a frequency of 10 to 30 KHz.

[0012] 本発明によれば、パルス電力を用レ、、アルミニウム合金の表面に陽極酸化皮膜を 形成するに際し、正のパルス電圧印加後のパルス電圧不印加時に非常に短時間の 短絡時間での陽極酸化用陽極と陽極酸化用陰極を短絡させるようにしたので、負電 流を抑制して低減させる力、、あるいは流さないようにして、「皮膜焼け」の欠陥を発生 させずに、成膜速度を高め生産性を向上できるアルミニウム合金陽極酸化方法およ びアルミニウム合金陽極酸化用電源を提供することが可能となる。また、本発明によ れば、ノ^レス電圧印加時に大電流を流すことのできる周波数に設定することにより、 上記の陽極酸化用陽極と陽極酸化用陰極との短絡による効果に加え、より一層成膜 速度を高め生産性を向上できるアルミニウム合金陽極酸化方法およびアルミニウム 合金陽極酸化用電源を提供することが可能となる。  [0012] According to the present invention, when forming an anodic oxide film on the surface of an aluminum alloy using pulse power, it is possible to achieve a very short short-circuit time when no pulse voltage is applied after applying a positive pulse voltage. Since the anode for anodic oxidation and the cathode for anodic oxidation are short-circuited, the film formation rate can be reduced without causing negative film current to occur, or by preventing the current from flowing. It is possible to provide an aluminum alloy anodizing method and an aluminum alloy anodizing power source that can improve productivity and productivity. Further, according to the present invention, by setting the frequency at which a large current can flow when a no-less voltage is applied, in addition to the effect caused by the short circuit between the anode for anodization and the cathode for anodization, it is possible to further increase the frequency. It is possible to provide an aluminum alloy anodizing method and an aluminum alloy anodizing power source capable of increasing the deposition rate and improving the productivity.

図面の簡単な説明  Brief Description of Drawings

[0013] [図 1]図 1は、パルス電力によるアルミニウム合金陽極酸化法における皮膜成長速度 と実効電流密度との関係を説明する図である。ここで実効電流密度とは、パルス電圧 印加時の正電流密度からパルス不印加時に流れる負電流密度の差である(実効電 流密度 =正電流密度一負電流密度)。  FIG. 1 is a diagram for explaining the relationship between the film growth rate and the effective current density in an aluminum alloy anodizing method using pulse power. Here, the effective current density is the difference between the positive current density when a pulse voltage is applied and the negative current density that flows when no pulse is applied (effective current density = positive current density minus negative current density).

[図 2]図 2は、本発明のアルミニウム合金陽極酸化に用いる電源および電解槽の構成 を説明する図である。  FIG. 2 is a diagram for explaining the configuration of a power source and an electrolytic cell used for anodizing of an aluminum alloy according to the present invention.

[図 3]図 3は、パルス設定条件およびそれに対応する実際の電圧 ·電流波形を説明す る図である。  FIG. 3 is a diagram for explaining pulse setting conditions and actual voltage / current waveforms corresponding thereto.

[図 4]図 4は、陽極酸化による皮膜成長定常状態を説明する図である。  FIG. 4 is a diagram for explaining a steady state of film growth by anodization.

[図 5]図 5は、本発明で用いるパルス電力の電流波形と周波数との関係を説明する図 である。  FIG. 5 is a diagram for explaining the relationship between the current waveform and frequency of pulse power used in the present invention.

[図 6]図 6は、本発明の実施例と比較例の実験結果を説明する表である。  FIG. 6 is a table for explaining the experimental results of Examples and Comparative Examples of the present invention.

[図 7]図 7は、本発明の短絡時間と負電流との関係を説明する図である。  FIG. 7 is a diagram for explaining a relationship between a short circuit time and a negative current according to the present invention.

発明を実施するための最良の形態 [0014] 以下、本発明について詳細に説明する。 BEST MODE FOR CARRYING OUT THE INVENTION [0014] Hereinafter, the present invention will be described in detail.

本発明者らは、成膜速度を向上させることを目的として、正のパルス電圧印加後の パルス電圧不印加時に陽極酸化用陽極と陽極酸化用陰極とを短絡し、負電流 (パル ス印加時と逆方向に流れる電流)を流すと、パルス電圧印加時に形成されたバリヤ一 層内の Α13+や〇2 イオン濃度勾配を緩和および固液界面の電気二重層を放電し、 次のノ^レス電圧印加時に大電流を流すことができることを見出した。ところ力 S、上記し たように、パルス電圧印加時の正電流の大きさに対して、負電流の大きさがと大きい という問題があり、この点について、さらに検討を行った。 For the purpose of improving the deposition rate, the present inventors have short-circuited the anode for anodization and the cathode for anodization when a pulse voltage is not applied after applying a positive pulse voltage, and a negative current (when a pulse is applied). and the electric current) flowing in the opposite direction, the [alpha] 1 3+ and 〇 2 ion concentration gradient of one layer in the barrier formed at the pulse voltage is applied to discharge the electric double layer relaxation and the solid-liquid interface, the following Roh ^ It has been found that a large current can flow when applying a low voltage. However, as described above, the force S has a problem that the magnitude of the negative current is larger than the magnitude of the positive current when the pulse voltage is applied, and this point was further investigated.

[0015] 本発明者らは、パルス電力によるアルミニウム合金陽極酸化法においてパルス電 圧不印加時に陽極酸化用陽極と陽極酸化用陰極とを短絡する手法を用いた場合、 皮膜成長速度は実効電流密度に比例することを見出した(図 1)。しかしながら、実効 電流密度を大きくしょうとすると、負電流も大きくなるという相反する問題があった。  [0015] In the aluminum alloy anodic oxidation method using pulsed power, the present inventors have used the technique of short-circuiting the anodic oxidation anode and the anodic oxidation cathode when no pulse voltage is applied. (Fig. 1). However, when trying to increase the effective current density, there was a conflicting problem that the negative current also increased.

[0016] そこで、本発明者らは、生産性向上のため、さらなる皮膜成長速度の向上方法を追 及した結果、正のパルス電圧印加後のパルス電圧不印加時に、非常に短時間だけ、 陽極酸化用陽極と陽極酸化用陰極とを短絡させると、意外にも、負電流を抑制して 低減させるか、あるいは負電流を流すことなぐ「皮膜焼け」の欠陥を発生させずに、 次の正のパルス電圧印加で大電流を流すことができることを見出した。また、印加パ ノレス電圧を特定の周波数範囲内の値とすることによつても、皮膜成長速度の向上に 大きく寄与できることも見出した。本発明は、このような知見に基づいてなされたもの である。  [0016] Therefore, as a result of pursuing a method for further increasing the film growth rate in order to improve productivity, the present inventors have found that the anode can be used only for a very short time when no pulse voltage is applied after the positive pulse voltage is applied. When the anode for oxidation and the cathode for anodization are short-circuited, unexpectedly, the negative current is suppressed and reduced, or the defect of “film burn” that does not flow negative current occurs without causing the next positive It was found that a large current can be passed by applying a pulse voltage of. It was also found that making the applied panelless voltage within a specific frequency range can greatly contribute to the improvement of the film growth rate. The present invention has been made based on such knowledge.

[0017] 本発明のアルミニウム合金陽極酸化方法では、パルス電力を用い、正のパルス電 圧印加後のパルス電圧不印加時に陽極酸化用陽極と陽極酸化用陰極とを 15 μ s以 下の短絡時間で短絡することを特徴とする。短絡時間は、 1 μ s以上 15 a s以下であ ること力 Sより好ましく、 1 μ s以上 5 μ s以下であることがさらに好ましぐ 1 μ s以上 3 μ s 以下であることが特に好ましい。短絡時間は、処理対象とするアルミニウム合金の種 類や導電性によって好ましい範囲が異なるが、上記の範囲であると、負電流を大幅 に低減させて抑制する力 あるいは負電流を流すことなぐ次の正のパルス電圧印加 で大電流を流すことができるため、負電流により生成した皮膜が減じられることなぐ かつ「皮膜焼け」の欠陥を発生させずに、皮膜の成長速度を大幅に向上させることが 可能となる。これまで、「皮膜焼け」と称される欠陥の発生を防止しかつ皮膜成長速度 を高めるためには、次の正パ [0017] In the aluminum alloy anodic oxidation method of the present invention, a short-circuit time of 15 μs or less between the anodic oxidation anode and the anodic oxidation cathode when pulse voltage is applied and no pulse voltage is applied after positive pulse voltage is applied. It is characterized by short-circuiting. The short-circuiting time is preferably 1 μs or more and 15 as or less than force S, more preferably 1 μs or more and 5 μs or less, and particularly preferably 1 μs or more and 3 μs or less. . The preferred range of the short-circuiting time varies depending on the type of aluminum alloy to be treated and the conductivity, but if it is within the above range, the negative current can be greatly reduced to suppress the negative current or the next current that does not flow. Since a large current can be applied by applying a positive pulse voltage, the film generated by the negative current is not reduced. In addition, the growth rate of the film can be greatly improved without causing “film burn” defects. Up to now, in order to prevent the occurrence of defects called “film burn” and increase the film growth rate,

ノレス電圧印加の前に短絡又は負電圧印加を行って系にたまっている電荷をすベて 除去することが必要であると考えられていた。ところ力 本発明者らが、鋭意検討を重 ねたところ、酸化皮膜を形成中のバリヤ一層界面部分 (Al/Al O界面、 Al O /電  It was considered necessary to remove all charges accumulated in the system by applying a short circuit or negative voltage before applying the Norres voltage. However, the inventors made extensive studies and found that the barrier layer interface part (Al / AlO interface, AlO / electric interface) during the formation of the oxide film was formed.

2 3 2 3 解液界面)だけの電荷を除去すれば、実質的に電気抵抗が低下した状態を実現す ること力 sでき、次の正パルス電圧印加の際に良好な皮膜形成に必要な大きな電流を 流せることがわかった。このようにすると、大きな負電流により、生成した膜を溶かして 減ずることなぐ皮膜の成長速度を大幅に向上させることができることがわかった。  (2 3 2 3) (resolved liquid interface) can be used to achieve a state in which the electrical resistance is substantially reduced, which is necessary for the formation of a good film when the next positive pulse voltage is applied. It was found that a large current can flow. In this way, it was found that the growth rate of the film can be significantly improved by melting the generated film and reducing it with a large negative current.

[0018] また、本発明では、パルス電力の波形のサイクルを、パルス電圧印加時間(T )、  [0018] Further, in the present invention, the cycle of the waveform of the pulse power is expressed by the pulse voltage application time (T),

+ デッドタイム (T )、短絡時間 (T )の順に構成されたものとすることが望ましい。この場  + It is desirable that the dead time (T) and the short circuit time (T) are configured in this order. This place

d  d

合、成膜速度の向上のためには、パルス電圧印加時間(T )は 20〜: 100 μ s程度が  In order to improve the deposition rate, the pulse voltage application time (T) should be about 20 to 100 μs.

+  +

好ましぐデッドタイム(Τ )は 5〜10 /i s程度がこのましい。  The preferred dead time (Τ) is about 5-10 / is.

d  d

[0019] また、本発明では、パルス電力の周波数が 8〜35KHzであることが好ましぐ 10〜 30KHzであることがより好ましい。周波数が上記範囲であると、皮膜の成長速度をよ り向上させる電気量を供給して皮膜形成が行えるようになり、上記の極短時間の短絡 の効果とぁレ、まって、より一層皮膜成長速度を向上させることが可能となる。  In the present invention, the frequency of the pulse power is preferably 8 to 35 KHz, more preferably 10 to 30 KHz. When the frequency is within the above range, it becomes possible to form a film by supplying an amount of electricity that further improves the growth rate of the film. The growth rate can be improved.

[0020] 図 2に、本発明のアルミニウム合金陽極酸化に用いた電源および電解槽の構成を 示す。電源 Pは、シーケンサ 10、正側直流電源 11、繰返し周波数発生器 12、正側 パルス発生回路 13、短絡側パルス発生回路 14、正側チョッパーゲートアンプ (GA) 25、短絡側チョッパーゲートアンプ(GA) 26、正側チョッパースィッチ 15、逆流防止 ダイオード (D ) 16、短絡電流制御回路 17より構成され、その出力端子 18は電解槽 19中の陽極 20、陰極 21に接続されている。また正側出力電圧計 (E ) 22、電解槽 電圧計 )23および電解槽電流計 (A ) 24が取り付けられている。なお、 27は電 FIG. 2 shows the configuration of the power source and the electrolytic cell used for the aluminum alloy anodization of the present invention. Power supply P is sequencer 10, positive side DC power source 11, repetition frequency generator 12, positive side pulse generator circuit 13 , short side pulse generator circuit 14, positive side chopper gate amplifier (GA) 25, short side chopper gate amplifier (GA ) 26, a positive chopper switch 15, a backflow prevention diode (D) 16, and a short-circuit current control circuit 17, and its output terminal 18 is connected to the anode 20 and the cathode 21 in the electrolytic cell 19. Further, a positive output voltmeter (E) 22, an electrolytic cell voltmeter 23) and an electrolytic cell ammeter (A) 24 are attached. 27 is the power

B B  B B

解液である。  It is a solution.

[0021] シーケンサ 10は、本発明で用いるパルス電力の波形を所定形状にするため、繰返 し周波数発生器 12、正側パルス発生回路 13、短絡側パルス発生回路 14および正 側直流電源 11を制御する。正側直流電源 11は、シーケンサ 10により設定された正 パルス電圧印加もしくは正パルス電流印加に必要な直流電力を発生する。繰返し周 波数発生器 12は、パルス電力発生に必要な基準繰返し周波数を発生して、正側パ ノレス発生回路 13および短絡側パルス発生回路 14に供給する。正側パルス発生回 路 13は、 T の時間幅のパルスを発生し、短絡側パルス発生回路 14は、 Tの時間幅 のノ^レスを発生する。デッドタイム (T )はあらカ^めシーケンサ 10で設定される。正 The sequencer 10 repeats the frequency generator 12, the positive pulse generator 13, the short pulse generator 14, and the positive pulse generator in order to make the pulse power waveform used in the present invention into a predetermined shape. Side DC power supply 11 is controlled. The positive side DC power supply 11 generates the DC power necessary for applying the positive pulse voltage or the positive pulse current set by the sequencer 10. The repetitive frequency generator 12 generates a reference repetitive frequency necessary for generating the pulse power and supplies it to the positive side panelless generating circuit 13 and the short circuit side pulse generating circuit 14. The positive side pulse generation circuit 13 generates a pulse having a time width of T, and the short-circuit side pulse generation circuit 14 generates a noise having a time width of T. The dead time (T) is set by the sequencer 10. Positive

d  d

側チョッパーゲートアンプ(GA) 25は、正側チョッパースィッチ 15が正側パルス発生 回路 13で決定されたパルス幅信号に従って確実に動作できるレベルまでパルス発 生回路 13のパルス信号を増幅する役割を担う。短絡側チョッパーゲートアンプ 26は 、短絡電流制御回路 17が、短絡パルス発生回路 14で決定されたパルス幅信号に従 つて確実に動作できるレベルまで短絡パルス発生回路 14のパルス信号を増幅する 役割を担う。正側チョッパースィッチ 15は、正側パルス発生回路 13で決定されたパ ノレス幅信号に従い正側直流電源 11からの電力を電解槽にパルス的に供給する役割 を行う。逆流防止ダイオード 16は、逆電力が正側直流電源 11側に流れるのを防止 する。短絡電流制御回路 17は、正ノ^レス電圧印加後のパルス電圧不印加時に陽極 20と陰極 21の出力端子 18を短絡時間 Tの間、短絡させる。  The side chopper gate amplifier (GA) 25 plays a role of amplifying the pulse signal of the pulse generation circuit 13 to a level at which the positive side chopper switch 15 can reliably operate according to the pulse width signal determined by the positive side pulse generation circuit 13. . The short-circuit side chopper gate amplifier 26 plays a role of amplifying the pulse signal of the short-circuit pulse generation circuit 14 to a level at which the short-circuit current control circuit 17 can reliably operate according to the pulse width signal determined by the short-circuit pulse generation circuit 14. . The positive chopper switch 15 performs the role of supplying the electric power from the positive DC power supply 11 to the electrolytic cell in a pulsed manner in accordance with the panel width signal determined by the positive pulse generating circuit 13. The reverse current prevention diode 16 prevents reverse power from flowing to the positive DC power supply 11 side. The short-circuit current control circuit 17 short-circuits the output terminals 18 of the anode 20 and the cathode 21 for a short-circuit time T when no pulse voltage is applied after applying a positive no-relay voltage.

s  s

[0022] 図 2に示す電源を用い下記条件で陽極酸化を行った。試験片には、導電性のよい 代表として A1100P材を用レヽた。このときの試験片のサイズは 50mm X 50mm X I· 5mm (0. 53dm2)であった。また、導電性の悪い代表として ADC12材を用いた。こ のときの試験片のサイズは 50mm X 50mm X 3. 0mm (0. 56dm2)であった。電解 槽は電解液量約 2001とし、液循環およびミクロ爆気による攪拌、プレート型熱交換器 による冷却を行レ、、陰極バーは鉛、陰極板は炭素とした。浴液組成は遊離硫酸濃度 約 150g/l、浴温度 10°Cとした。陽極酸化電流密度は 20A/dm2までいろいろ変え て行った。また、陽極酸化処理後、井水流水で約 2分間水洗し、温風による強制乾燥 を施した。 [0022] Anodization was performed under the following conditions using the power source shown in FIG. For the test piece, A1100P material was used as a representative of good conductivity. The size of the test piece at this time was 50 mm × 50 mm XI · 5 mm (0.53 dm 2 ). ADC12 material was used as a representative of poor conductivity. The size of the test piece at this time was 50 mm × 50 mm × 3.0 mm (0.56 dm 2 ). The electrolytic cell had an electrolyte volume of about 2001, liquid circulation and micro-explosive agitation, and cooling with a plate heat exchanger. The cathode bar was lead and the cathode plate was carbon. The bath composition was a free sulfuric acid concentration of about 150 g / l and a bath temperature of 10 ° C. Anodizing current density was carried out varied variously to 20A / dm 2. In addition, after anodizing treatment, it was washed with running well water for about 2 minutes and subjected to forced drying with warm air.

[0023] 図 3にパルス設定条件およびそれに対応する実際の電圧'電流波形を示す。図に おいて、 T はパルス電圧印加時間、 Tはパルス電圧をゼロにしかつ電極間を短絡  FIG. 3 shows a pulse setting condition and an actual voltage 'current waveform corresponding to the pulse setting condition. In the figure, T is the pulse voltage application time, T is the pulse voltage zero and the electrodes are short-circuited

+ d  + d

する操作に必要なデッドタイム (この間、開回路状態になる)、 τは短絡時間である。 電圧波形は、 T 設定にそって立ち上がり、 T間に極わずか下降し、 Tの間ゼロをThe dead time required for the operation to be performed (becomes an open circuit state during this period), and τ is the short circuit time. The voltage waveform rises according to the T setting, falls slightly during T, and reaches zero during T.

+ d s + d s

示す。電流波形は、 T の初期に急速に増大し極大を経て下降し、 Tの間はゼロ、 T Show. The current waveform increases rapidly at the beginning of T, falls through the maximum, is zero during T, T

+ d s に入った瞬間瞬時に大きな負電流が流れるがその後すぐにゼロに戻り、 T 間はほと んど流れず、 τ 経過後負電流が増大しその後極大値を経て減少しはじめる。  A large negative current flows instantaneously at the moment of entering + d s, but then returns to zero immediately, hardly flows during T, the negative current increases after τ elapses, and then begins to decrease after reaching a maximum value.

このような波形になるのは次のように説明できる。非特許文献 (アルミニウムアノード 酸化皮膜の生成'溶解の挙動、永山政一、高橋英明、甲田満、金属表面技術、 Vol . 30, No. 9, p. 438〜456 (1979) )によれば、陽極酸ィ匕の定常状態は図 4のよう に示される(図 4 (a)は、図 4 (c)に示される陽極酸化皮膜全体構造の中のバリヤ一層 部を拡大したものである)。即ち、電解液を挟んで陽極アルミニウム合金と陰極カーボ ンが配されており、陽極では A1が酸化されて A1〇になり、陰極では H+イオンが還  Such a waveform can be explained as follows. According to non-patent literature (Aluminum anode oxide film formation 'dissolution behavior, Masakazu Nagayama, Hideaki Takahashi, Mitsuru Koda, Metal Surface Technology, Vol. 30, No. 9, p. 438-456 (1979)) The steady state of anodic acid is shown in Fig. 4 (Fig. 4 (a) is an enlarged view of the barrier layer in the entire anodized film structure shown in Fig. 4 (c)). That is, an anode aluminum alloy and a cathode carbon are arranged with the electrolyte in between, A1 is oxidized to A10 at the anode, and H + ions are returned at the cathode.

2 3  twenty three

元されて Hになっている。ここにおいてバリヤ一層の成長は次のように説明されてい Formerly H. Here, the further growth of the barrier is explained as follows:

2  2

る。 The

(1)バリヤ一層底部と接する A1金属が陽極酸化されて Al3+イオンになる(図 4 (a) (1)):(1) The A1 metal in contact with the bottom of the barrier layer is anodized into Al 3+ ions (Fig. 4 (a) (1)):

Al→Al3+ + 3e" (式 1) Al → Al 3+ + 3e "(Formula 1)

(2)生成した Al3+イオンの一部はノくリヤー層内を拡散して電解液中へと移動する(図 4 (a) (2)) 0 (2) by diffusing portion Hanoch rear layer of the resulting Al 3+ ions migrate into the electrolyte solution (Fig. 4 (a) (2)) 0

(3)—方、ノくリヤー層上部の電解液との界面では、ノくリヤー層構成物質である Al O  (3)-On the other hand, at the interface with the electrolyte at the top of the knurled layer, Al O, which is the knoWn layer constituent material, is used.

2 3 が強レ、電界の作用を受け Al3+と 02_に分解する(図 4 (a) (3)): 2 3 Tsuyore, decomposed into Al 3+ and 0 2_ under the action of the electric field (FIG. 4 (a) (3)) :

Al O→2Α13+ + 302" (式 2) Al O → 2Α1 3+ + 30 2 "(Formula 2)

2 3  twenty three

(4)上記により生成した Al3+は電解液中に移動し(図 4 (a) (4))、 (4) Al 3+ generated by the above moves into the electrolyte (Fig. 4 (a) (4))

(5)また、上記により生成した O2—はバリヤ一層内を移動する(図 4 (a) (5))。 (5) The O 2 — generated by the above moves in the barrier layer (Fig. 4 (a) (5)).

(6)バリヤ一層内を移動しバリヤ一層(Al O ) ZA1の界面に達した〇2 イオンは、境 (6) further barrier to move one layer in the barrier (Al O) 〇 2 ions reaching the surface of ZA1 is Sakai

2 3  twenty three

界の金属 A1と反応して Al Oを生成する(図 4 (a) (6)): Reacts with the metal A1 at the boundary to produce Al 2 O (Fig. 4 (a) (6)):

2 3  twenty three

2Al + 3〇2—→A1〇 + 6e" (式 3) 2Al + 30 2 — → A1 0 + 6e "(Formula 3)

2 3  twenty three

(7)また、バリヤ一層上部のバリヤ一層(Al O ) /電解液の界面においては、 H〇が  (7) In addition, at the barrier layer (Al 2 O 3) / electrolyte interface above the barrier layer, H

2 3 2 強い電界の作用を受け H+イオンと〇2_イオンに分解する(図 4 (a) (7)): 2 3 decomposed into 2 strong under the action of the electric field H + ions and 〇 2 _ ion (FIG. 4 (a) (7)) :

H〇→2H+ +〇2 (式 4) H_〇 → 2H + + 〇 2 (Equation 4)

2  2

ここで発生した〇2_の一部は、上記 (5)、(6)のプロセスを経て A1〇 の生成に関与す るものと考えられる。 Some 〇 2_ generated here, the (5), be involved in the generation of A1_rei through a process of (6) It is thought that.

以上がバリヤ一層の成長であり、このプロセスによって陽極酸化皮膜が成長し続け る。  This is the growth of the barrier layer, and the anodic oxide film continues to grow by this process.

ここで、ノ リヤー層内を電荷が、 Al3+、 02_の形で移動するが Af +の輸率は約 40 %、 O2一の輸率は約 60%とのことである。なお、この Al3+の輸率は低温になるほど、 また酸化電流密度が増すほど低下する、即ち皮膜の成長速度は増大するとのことで ある。 Here, the charges move in the form of Al 3+ and 0 2 _ in the NOR layer, but the transport number of Af + is about 40% and the transport number of O 2 is about 60%. The transport number of Al 3+ decreases as the temperature decreases and the oxidation current density increases, that is, the growth rate of the film increases.

[0025] ここにおいて、バリヤ一層近傍の電位勾配は図 4 (b)のようになっていると想定され る。  [0025] Here, the potential gradient in the vicinity of the barrier layer is assumed to be as shown in Fig. 4 (b).

(1)バリヤ一層内の Af +濃度は、バリヤ一層 ZA1界面側が高ぐバリヤ一層 Z電解液 界面側が低くなつている(図 4 (b) (A) )。 (1) The Af + concentration in the barrier layer is higher on the barrier layer ZA1 interface side and lower on the barrier layer Z electrolyte interface side (Fig. 4 (b) (A)).

(2)また、バリヤ一層内の 02_濃度は、ノ リヤー層/ A1界面側が低ぐノ リヤー層/電 解液界面側が高くなつている(図 4 (b) (B) )。 (2) In addition, the 02_ concentration in the barrier layer is lower on the non-layer / A1 interface side and higher on the non-layer / electrolyte interface side (Figs. 4 (b) and (B)).

(3)そして、 Al O 中の Al3+の拡散速度に限界があるので電解進行に伴って A1/A1 (3) And since the diffusion rate of Al 3+ in Al 2 O is limited, A1 / A1

2 3 2 2 3 2

O界面には Al3+が滞るようになる。そのため界面の Al3+の濃度はさらに高くなる(図Al 3+ becomes stagnant at the O interface. Therefore the concentration of Al 3+ of the interface is further increased (Fig.

3 Three

4 (b) (C) )。  4 (b) (C)).

(4)同様に、 Al O中での 02_の拡散速度に限界があるので電解進行に伴って A1〇 (4) Similarly, there is a limit to the diffusion rate of 0 2_ in Al 2 O.

2 3 2 3 2 3 2 3

/電解液界面では、〇2_が滞るようになる。そのため界面の〇2_の濃度は高くなる( 図 4(b) (D) )。 At the / electrolyte interface, ○ 2_ becomes stagnant. Therefore, the concentration of ○ 2_ at the interface becomes high (Fig. 4 (b) (D)).

[0026] 以上のような理解から、図 3の電圧波形、電流波形を次のように説明できる。  From the above understanding, the voltage waveform and current waveform in FIG. 3 can be explained as follows.

(1)電圧波形が Tの間若干低下するのは(図 3(1) :なお、図中の丸囲み文字は便宜 d  (1) The voltage waveform decreases slightly during T (Fig. 3 (1): The circled characters in the figure are for convenience.

的に括弧で囲まれた文字として記載する。以下同様))、 Al/Al O界面の Al3+、 A1 It is written as a character enclosed in parentheses. The same applies below)), Al 3+ , A1 at the Al / Al O interface

2 3  twenty three

O Z電解液界面の O2—がそれぞれ Al側および電解液側に拡散するためであろう。O in OZ electrolyte interface 2 - would to diffuse the Al side and the electrolyte side.

2 3 twenty three

(2)電流波形が T 間において、初め急激に立ち上がるのは(図 3(2))、電圧上昇に追  (2) The current waveform rises sharply during the period T (Fig. 3 (2)).

+  +

随して(式 1)、(式 2)、(式 3)の反応が急速に進行するからである。  This is because the reactions of (Formula 1), (Formula 2), and (Formula 3) proceed rapidly.

(3)次いで電流波形が極大値を経て減少に転じるのは(図 3(3))、電解進行に伴って 図 4 (b)に示したように両界面を含むバリヤ一層の濃度勾配(電位障壁)が増大する ためである。 (4)電流値が減少するとやがて印加電圧、電位障壁がバランスして一定電流値になる (図 3(4))。 (3) Next, the current waveform starts to decrease after reaching the maximum value (Fig. 3 (3)). As the electrolysis progresses, as shown in Fig. 4 (b), the concentration gradient (potential of the barrier layer including both interfaces) This is because the barrier is increased. (4) When the current value decreases, the applied voltage and potential barrier eventually balance and become a constant current value (Fig. 3 (4)).

(5) T間においては印加電圧がゼロ(開路状態)になるので電流もゼロになる(図 3(5) d  (5) Since the applied voltage is zero (open circuit) during T, the current is also zero (Fig. 3 (5) d

)。  ).

(6) Τ間では、 Τに入り電極間が短絡した瞬間、 Al/Al Ο界面の Af + (又はホール (6) In the gap, at the moment the electrode enters the gap and the electrodes are short-circuited, the Af + (or hole

2 3  twenty three

)、 Al Ο電解液界面の Ο2— (又は電子)の形での帯電が一挙に放電解消するため極), Al Ο Electrolyte interface Ο 2 — (or electrons) in the form of electrification to eliminate the discharge at once

2 3 twenty three

短時間の間に電流が流れる(図 3(6))。  Current flows in a short time (Fig. 3 (6)).

(7)次いで、 Τ 時間の間ほとんど電流は流れず(図 3(7))、 Τ 時間経過後負電流が増 大しその後は極大を経て減少し始める(図 3(8))。この負電流は、 (式 1)、(式 2)、(式 3)の逆反応が起きているためと考えられる。また、 Τ はこれら逆反応が起こるのに必 要な時定数であり、アルミニウム合金種や電解液の組成によって定まるものと考えら れる。  (7) Next, almost no current flows for Τ time (Fig. 3 (7)), and after the elapse of Τ time, the negative current increases and then starts to decrease (Fig. 3 (8)). This negative current is thought to be due to the reverse reaction of (Equation 1), (Equation 2), and (Equation 3). Also, 時 is the time constant necessary for these reverse reactions to occur, and is considered to be determined by the aluminum alloy type and the composition of the electrolyte.

[0027] 以上より、短絡時間 Τを Τ 以下にすれば負電流はほとんど流れなくすることができ s τ  [0027] From the above, if the short-circuit time Τ is set to Τ or less, almost no negative current can flow. S τ

る。実験的には、 A1合金材が導電性の良好な A1100Pの場合、短絡時間 Τを約 2 s μ Sにすれば負電流はほとんど流れないことが確認された。また、 A1合金材が導電性 の悪い ADC12の場合、短絡時間 Τを約 15 /i sにすれば負電流はほとんど流れない ことが確認された。よって、この場合の T は A1100Pの場合約 2 μ s、 ADC12の場 合は 15 μ sと推定される。 A1100Pの場合、 5 μ sまでは、負電流は流れても極僅か であり、 2 μ sまでは負電流は認められなかった。一方、 ADC12の場合、 15 /i sを超 えると負電流が急激に流れるようになった。以上のように好ましい短絡時間は A1合金 の材質によって変動する。  The Experimentally, it was confirmed that when the A1 alloy material is A1100P with good conductivity, almost no negative current flows if the short-circuit time 時間 is about 2 s μS. In addition, it was confirmed that when the A1 alloy material is poorly conductive ADC12, the negative current hardly flows if the short-circuit time Τ is about 15 / is. Therefore, T in this case is estimated to be about 2 μs for A1100P and 15 μs for ADC12. In the case of A1100P, the negative current was negligible until 5 μs, and no negative current was observed until 2 μs. On the other hand, in the case of ADC12, negative current began to flow rapidly when it exceeded 15 / is. As described above, the preferred short circuit time varies depending on the material of the A1 alloy.

[0028] 以上のことから、電位障壁の内の AlZAl O界面、 Al O /電解液界面の部分の [0028] From the above, the AlZAlO interface and the AlO / electrolyte interface in the potential barrier

2 3 2 3  2 3 2 3

みの電荷を除去しておけば、次のノ^レス電圧印加により、大電流を流すことができる 以上のように A1100Pの場合では短絡時間を 以下、好ましくは l〜5 x s、より 好ましくは 1〜3 μ s程度にすることにより、生成した皮膜を負電流により減じることがな いので、皮膜成長速度を向上することができる。一方、 ADC12の場合は、短絡時間 を 以下、好ましくは:!〜 15 z s、より好ましくは 1〜: 10 x sにすることにより、皮膜 成長速度を向上することができる。 As shown above, in the case of A1100P, the short-circuit time is less, preferably 1 to 5 xs, more preferably 1 By setting the length to about 3 μs, the generated film is not reduced by a negative current, so that the film growth rate can be improved. On the other hand, in the case of ADC12, the short-circuit time is set to the following, preferably:! To 15 zs, more preferably 1 to 10 xs. The growth rate can be improved.

[0029] 図 1に示されるように、皮膜成長速度は実効電流密度に比例する。短絡時の負電 流による実効電流の低下は上記のように短絡時間を極端に短くすることによって低減 でき、その結果皮膜成長速度は大幅に向上できることがわかったが、本発明によれ ば、パルス周波数を最適化することによりさらに皮膜成長速度を向上させることができ る。  [0029] As shown in FIG. 1, the film growth rate is proportional to the effective current density. It has been found that the decrease in effective current due to the negative current at the time of short circuit can be reduced by extremely shortening the short circuit time as described above, and as a result, the film growth rate can be greatly improved. The film growth rate can be further improved by optimizing the film thickness.

[0030] 図 5に図 3の電流波形の詳細を示す。図 5 (a)は周波数が小さい場合 (T が大きい  FIG. 5 shows details of the current waveform of FIG. Figure 5 (a) shows the case where the frequency is small (T is large)

+ 場合)を、図 5(b)は周波数が大きい場合 (T 力 M、さい場合)を示した。ただし図 5(b)  Fig. 5 (b) shows the case where the frequency is large (T force M, dice). However, Fig. 5 (b)

+  +

におレ、ては、 Tは 2 μ sとして負電流がほとんど流れなレ、場合としてある。  In this case, T is 2 μs, and the negative current almost flows.

パルスの周波数 fは、  The frequency f of the pulse is

f =1/(T +Τ +Τ) (式 5)  f = 1 / (T + Τ + Τ) (Equation 5)

(i) +G) d s  (i) + G) d s

ここで iは最適化のために試行する複数の周波数のうちの i番目であることを意味す る。  Here i means the i-th of multiple frequencies to be tried for optimization.

陽極酸化に使われる電気量 Qは、図 5の電流波形の積分値 S であり、このときの  The quantity of electricity Q used for anodization is the integrated value S of the current waveform in Fig. 5.

(i)  (i)

周波数が f であるとすれば、  If the frequency is f,

(i)  (i)

Q =S -f (式 6)  Q = S -f (Equation 6)

(ϋ (ϋ (ϋ  (ϋ (ϋ (ϋ

この Q が大きければ大きいほど皮膜成長速度は大きくなる。大きい Q を与える T ω (ϋ の範囲は、図 5において電流値が極大となる T から、面積(a) =面積 (b)となる The larger the Q, the higher the film growth rate. T ω that gives a large Q (The range of ϋ is the area (a) = area (b) from T where the current value is maximum in Fig. 5.

+ ω + (m) + ω + (m)

T の間であると考えてよい。  You can think of it as between T.

+ (e)  + (e)

[0031] 実験より求めた電流波形から、  [0031] From the current waveform obtained from the experiment,

T ^25 μ s  T ^ 25 μ s

+ (m)  + (m)

Τ =90μ s  Τ = 90μ s

+ (e)  + (e)

であり、これに対応する周波数は図 5(b)に示すように、 T =5 zs、 A1100Pの場合  The corresponding frequency is as shown in Fig. 5 (b) when T = 5 zs and A1100P.

d  d

Τ = 2μ s、 ADC12の場合 T = 15 μ sと好ましい値にすれば、  Τ = 2μs, ADC12 T = 15μs

f =1/(25 + 5 + 2) =31. 3KHz  f = 1 / (25 + 5 + 2) = 31.3KHz

max max

Figure imgf000014_0001
min
Figure imgf000014_0001
min

となる。実際には、実験的に 8〜35KHzで問題なく陽極酸化でき、より好ましくは 10 〜30KHzとすることが望ましいことが確かめられた。 実施例 It becomes. In practice, it has been confirmed experimentally that anodization can be performed without problems at 8 to 35 KHz, and more preferably 10 to 30 KHz. Example

[0032] 以下に、実施例を通して本発明をさらに詳細に説明するが、もちろん本発明はこれ ら実施例に限定されるものではない。  [0032] Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is of course not limited to these examples.

[0033] (実施例 1、比較例 1)  [Example 1 and Comparative Example 1]

図 2に示す電源を用い下記条件で陽極酸化を行った。試験片には、導電性のよい 代表として Al 1 OOP材を用レヽた。このときの試験片のサイズは 50mm X 50mm X 1. 5mm (0. 53dm2)であった。電解槽は電解液量約 2001とし、液循環およびミクロ爆 気による攪拌、プレート型熱交換器による冷却を行い、陰極バーは鉛、陰極板は炭 素とした。浴液組成は遊離硫酸濃度約 150g/l、浴温度 10°Cとした。陽極酸化電流 密度は 20A/ dm2までいろいろ変えて行った。また、陽極酸化処理後、井水流水で 約 2分間水洗し、温風による強制乾燥を施した。 Anodization was performed under the following conditions using the power source shown in FIG. For the test piece, an Al 1 OOP material was used as a representative of good conductivity. The size of the test piece at this time was 50 mm × 50 mm × 1.5 mm (0.53 dm 2 ). The electrolytic cell had an electrolyte volume of approximately 2001, liquid circulation, micro-explosion agitation, and cooling by a plate heat exchanger. The cathode bar was lead and the cathode plate was carbon. The bath composition was a free sulfuric acid concentration of about 150 g / l and a bath temperature of 10 ° C. Anodizing current density was carried out varied variously to 20A / dm 2. In addition, after anodizing, it was washed with running well water for about 2 minutes and forced-dried with warm air.

正電流通電時間 T = 80 /i s、デッドタイム(回路オープン時間) T = 5 /i s、パルス  Positive current conduction time T = 80 / is, dead time (circuit open time) T = 5 / is, pulse

+ d  + d

電圧印加時正電流密度 I をいろいろ変化させたが I = 20A/dm2で安定に陽極酸 The positive current density I was changed variously when voltage was applied, but stable anodic acid at I = 20A / dm 2

+ +  + +

ィ匕できたのでこのィ直に固定した。短絡 B寺間 Tを 2、 3、 4、 5、 10、 20、 40 sと変えた 場合の負電流の変化を調べた結果を図 6の表、図 7に示す。  I was able to fix it directly. The table of Fig. 6 and Fig. 7 show the results of investigating changes in the negative current when the short-circuit B temple T is changed to 2, 3, 4, 5, 10, 20, 40 s.

負電流は T = 2 μ sではほとんど流れず、 Τ < 5 μ sでは流れても極僅かであり、 Τ が 5 II sを超えると増加の割合が大きくなるが 15 μ s程度までは許容の範囲であり、 2 0 μ sを超えるとかなり大きく増加した。  Negative current hardly flows at T = 2 μs, and even when Τ <5 μs, it is negligible.When と exceeds 5 II s, the rate of increase increases, but it is acceptable up to about 15 μs. The range increased considerably beyond 20 μs.

即ち、皮膜成長速度を向上するには短絡時間 Τを 15 μ s以下程度にすれば負電 流を抑制して低減するか又はほとんど流れないようにすることができる。  That is, in order to improve the film growth rate, if the short-circuit time 15 is set to about 15 μs or less, the negative current can be suppressed and reduced or hardly flow.

[0034] (実施例 2、比較例 2)  [Example 2 and Comparative Example 2]

実施 ί列 1におレヽて、正電流通電日寺間 Τ =40 Sとし、 Τを 2、 5、 10、 20、 40 Sと 変えた場合の負電流の変化を調べた結果を図 6の表、図 7に示す。  Figure 6 shows the results of investigating the change in negative current when に お = 40 S between positive current energizing days and temples is changed to 2, 5, 10, 20, and 40 S. It is shown in the table, Fig. 7.

負電流は短絡時間 2 μ sではほとんど流れなレ、が、短絡時間が 10、 20、 40 μ sと増 大するにつれて急激に大きくなるが 10 μ s程度までは許容の範囲であり、 20 μ sを超 えるとかなり大きく増加した。  Negative current hardly flows when the short-circuit time is 2 μs, but it increases rapidly as the short-circuit time increases to 10, 20, and 40 μs, but it is acceptable up to about 10 μs. When s was exceeded, it increased considerably.

[0035] (実施例 3) [0035] (Example 3)

実施例 1におレ、て、試験片に導電性の悪レ、ADC12 (サイズは 50mm X 50mm X 3 • Omm (0.56dm2))を用い T =80 /i s、 T =5 μ s、 I = 10A/dm2に固定して負In Example 1, the test piece has poor conductivity, ADC12 (size is 50mm x 50mm x 3 • Omm (0.56dm 2 )) is fixed at T = 80 / is, T = 5 μs, and I = 10A / dm 2

+ d + + d +

電流の変化を調べた。その結果、 Tが 15 μ sまではほとんど負電流は流れず、 15/i s以上で急激に流れた。 The change in current was examined. As a result, almost no negative current flowed until T was 15 μs, and it flowed rapidly over 15 / is.

Claims

請求の範囲 The scope of the claims [1] パルス電力を用レ、、アルミニウム合金の表面に陽極酸化皮膜を形成するアルミニウム 合金陽極酸化方法にぉレ、て、正のパルス電圧印加後のパルス電圧不印加時に陽極 酸化用陽極と陽極酸化用陰極とを 15 z s以下の短絡時間で短絡することを特徴とす るアルミニウム合金陽極酸化方法。  [1] Using pulse power, an aluminum alloy anodizing method for forming an anodized film on the surface of an aluminum alloy, and anodizing anode and anode when no pulse voltage is applied after applying a positive pulse voltage An aluminum alloy anodizing method characterized by short-circuiting an oxidation cathode with a short-circuiting time of 15 zs or less. [2] 前記短絡時間が 1 μ s以上 15 μ s以下であることを特徴とする請求項 1に記載のアル ミニゥム合金陽極酸化方法。  [2] The aluminum alloy anodizing method according to [1], wherein the short-circuiting time is not less than 1 μs and not more than 15 μs. [3] 前記短絡時間が 1 μ s以上 5 / s以下であることを特徴とする請求項 1に記載のアルミ ニゥム合金陽極酸化方法。 [3] The aluminum alloy anodizing method according to [1], wherein the short circuit time is 1 μs or more and 5 / s or less. [4] 前記パルス電力の波形のサイクル力 パルス電圧印加時間 (T )、デッドタイム (T ) [4] Cycle power of the pulse power waveform Pulse voltage application time (T), dead time (T) + d + d 、短絡時間 (T )の順に構成されていることを特徴とする請求項 1、 2または 3に記載の s The s according to claim 1, 2 or 3, characterized by being configured in the order of short circuit time (T) アルミニウム合金陽極酸化方法。  Aluminum alloy anodizing method. [5] 前記パルス電力の周波数が 8〜35KHzであることを特徴とする請求項 1から 4のい ずれかに記載のアルミニウム合金陽極酸化方法。  [5] The aluminum alloy anodizing method according to any one of [1] to [4], wherein the frequency of the pulse power is 8 to 35 KHz. [6] 前記パルス電力の周波数が 10〜30KHzであることを特徴とする請求項 1から 4のい ずれかに記載のアルミニウム合金陽極酸化方法。  6. The aluminum alloy anodizing method according to any one of claims 1 to 4, wherein the frequency of the pulse power is 10 to 30 KHz. [7] パルス電力を用レ、、アルミニウム合金の表面に陽極酸化皮膜を形成するアルミニウム 合金陽極酸化方法に用いるアルミニウム合金陽極酸化用電源にぉレ、て、正のパルス 電圧印加後のパルス電圧不印加時に、陽極酸化用陽極に接続する端子と陽極酸化 用陰極に接続する端子とを 15 μ s以下の短絡時間で短絡させるパルス電力を発生 するパルス電力発生部を有することを特徴とするアルミニウム合金陽極酸化用電源。  [7] Pulse power is applied to an aluminum alloy anodizing power source used in an aluminum alloy anodizing method for forming an anodized film on the surface of an aluminum alloy. An aluminum alloy characterized by having a pulse power generator that generates a pulse power that short-circuits a terminal connected to the anodizing anode and a terminal connected to the anodizing cathode at a short-circuiting time of 15 μs or less during application. Power source for anodization. [8] 前記パルス電力発生部が、前記短絡時間が 1 μ s以上 15 μ s以下であるパルス電力 を発生することを特徴とする請求項 7に記載のアルミニウム合金陽極酸化用電源。  8. The power source for anodizing an aluminum alloy according to claim 7, wherein the pulse power generation unit generates pulse power having the short-circuit time of 1 μs to 15 μs. [9] 前記パルス電力発生部が、前記短絡時間が 1 μ s以上 5 μ s以下であるパルス電力を 発生することを特徴とする請求項 7に記載のアルミニウム合金陽極酸化用電源。  [9] The aluminum alloy anodizing power source according to [7], wherein the pulse power generation unit generates pulse power having the short circuit time of 1 μs or more and 5 μs or less. [10] 前記パルス電力発生部が、波形がパルス電圧印加時間 (T )、デッドタイム (T )、短  [10] The pulse power generator has a waveform whose pulse voltage application time (T), dead time (T), short + d 絡時間 (T )の順に構成されているパルス電力を発生することを特徴とする請求項 7  A pulse power configured in the order of + d entanglement time (T) is generated. S  S 力 9のいずれかに記載のアルミニウム合金陽極酸化用電源。 前記パルス電力発生部が、周波数が 8〜35KHzであるパルス電力を発生することを 特徴とする請求項 7から 10のいずれかに記載のアルミニウム合金陽極酸化用電源。 前記パルス電力発生部が、周波数が 10〜 30KHzであるパルス電力を発生すること を特徴とする請求項 7から 10のいずれかに記載のアルミニウム合金陽極酸化用電源 The power source for anodizing an aluminum alloy according to any one of forces 9. The aluminum alloy anodizing power source according to any one of claims 7 to 10, wherein the pulse power generation unit generates pulse power having a frequency of 8 to 35 KHz. 11. The power source for anodizing an aluminum alloy according to claim 7, wherein the pulse power generation unit generates pulse power having a frequency of 10 to 30 KHz.
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