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WO2008096881A1 - プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置 - Google Patents

プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置 Download PDF

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Publication number
WO2008096881A1
WO2008096881A1 PCT/JP2008/052202 JP2008052202W WO2008096881A1 WO 2008096881 A1 WO2008096881 A1 WO 2008096881A1 JP 2008052202 W JP2008052202 W JP 2008052202W WO 2008096881 A1 WO2008096881 A1 WO 2008096881A1
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
producing
electrode
processing apparatus
plasma producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/052202
Other languages
English (en)
French (fr)
Inventor
Hirofumi Takikawa
Hajime Shiki
Takashi Okawa
Shigenobu Yamanaka
Akio Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daiken Kagaku Kogyo KK
Toyohashi University of Technology NUC
Original Assignee
Daiken Kagaku Kogyo KK
Toyohashi University of Technology NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daiken Kagaku Kogyo KK, Toyohashi University of Technology NUC filed Critical Daiken Kagaku Kogyo KK
Priority to JP2008557185A priority Critical patent/JP5368114B2/ja
Publication of WO2008096881A1 publication Critical patent/WO2008096881A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

　本発明の目的は、放電によりプラズマを発生させた場合に損耗材料粒子の放出が大幅に低減化され、電極損耗が極めて少なく、長寿命のプラズマ生成用電極、プラズマ生成装置及びプラズマ処理装置を提供することである。 　本発明は、放電によって供給ガスのプラズマＰを発生させるプラズマ生成装置７のプラズマ生成用電極であって、このプラズマ生成用電極の少なくとも放電表面がＰｔ１－ＹＲｈＹ（０＜Ｙ＜１）で表されるＰｔ・Ｒｈ系金属の電極材料から形成されるプラズマ生成用電極、このプラズマ生成用電極を用いてプラズマを生成するプラズマ生成装置７及びこのプラズマ生成装置により被処理物表面をプラズマ処理するプラズマ処理装置２である。
PCT/JP2008/052202 2007-02-09 2008-02-08 プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置 Ceased WO2008096881A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008557185A JP5368114B2 (ja) 2007-02-09 2008-02-08 プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPPCT/JP2007/052803 2007-02-09
PCT/JP2007/052803 WO2008096454A1 (ja) 2007-02-09 2007-02-09 プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置

Publications (1)

Publication Number Publication Date
WO2008096881A1 true WO2008096881A1 (ja) 2008-08-14

Family

ID=39681373

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2007/052803 Ceased WO2008096454A1 (ja) 2007-02-09 2007-02-09 プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置
PCT/JP2008/052202 Ceased WO2008096881A1 (ja) 2007-02-09 2008-02-08 プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/052803 Ceased WO2008096454A1 (ja) 2007-02-09 2007-02-09 プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置

Country Status (1)

Country Link
WO (2) WO2008096454A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011049103A (ja) * 2009-08-28 2011-03-10 Nissan Motor Co Ltd プラズマ発生方法
JP2011060688A (ja) * 2009-09-14 2011-03-24 Kasuga Electric Works Ltd プラズマ表面処理装置
KR20190067885A (ko) * 2016-11-30 2019-06-17 지앙수 페이보레드 나노테크놀로지 컴퍼니., 리미티드 플라즈마 중합 코팅 장치

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013538288A (ja) * 2010-07-21 2013-10-10 ダウ コーニング フランス 基板のプラズマ処理
EP2807667B1 (en) * 2012-01-27 2017-10-18 Oerlikon Metco (US) Inc. Closed loop cooling of a plasma gun to improve hardware life
EP3043628B1 (en) * 2015-01-08 2021-03-10 Tantec A/S Automatic gas control system for plasma treatment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03225727A (ja) * 1990-01-17 1991-10-04 Esab Welding Prod Inc プラズマアークトーチ用電極
JPH0780724A (ja) * 1993-09-14 1995-03-28 Fuji Xerox Co Ltd 非導電性材料の放電加工装置
JPH07282953A (ja) * 1994-04-07 1995-10-27 Toshiba Corp コロナ放電用電極および静電気除去装置
JPH08250056A (ja) * 1995-03-07 1996-09-27 Himu Electro Kk イオン発生装置およびこのイオン発生装置を用いた洗浄装置
JP2002343535A (ja) * 2001-05-21 2002-11-29 Daikin Ind Ltd ガス処理装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03225727A (ja) * 1990-01-17 1991-10-04 Esab Welding Prod Inc プラズマアークトーチ用電極
JPH0780724A (ja) * 1993-09-14 1995-03-28 Fuji Xerox Co Ltd 非導電性材料の放電加工装置
JPH07282953A (ja) * 1994-04-07 1995-10-27 Toshiba Corp コロナ放電用電極および静電気除去装置
JPH08250056A (ja) * 1995-03-07 1996-09-27 Himu Electro Kk イオン発生装置およびこのイオン発生装置を用いた洗浄装置
JP2002343535A (ja) * 2001-05-21 2002-11-29 Daikin Ind Ltd ガス処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011049103A (ja) * 2009-08-28 2011-03-10 Nissan Motor Co Ltd プラズマ発生方法
JP2011060688A (ja) * 2009-09-14 2011-03-24 Kasuga Electric Works Ltd プラズマ表面処理装置
KR20190067885A (ko) * 2016-11-30 2019-06-17 지앙수 페이보레드 나노테크놀로지 컴퍼니., 리미티드 플라즈마 중합 코팅 장치
KR102175721B1 (ko) * 2016-11-30 2020-11-06 지앙수 페이보레드 나노테크놀로지 컴퍼니., 리미티드 플라즈마 중합 코팅 장치

Also Published As

Publication number Publication date
WO2008096454A1 (ja) 2008-08-14

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