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WO2008090839A1 - 流量計 - Google Patents

流量計 Download PDF

Info

Publication number
WO2008090839A1
WO2008090839A1 PCT/JP2008/050695 JP2008050695W WO2008090839A1 WO 2008090839 A1 WO2008090839 A1 WO 2008090839A1 JP 2008050695 W JP2008050695 W JP 2008050695W WO 2008090839 A1 WO2008090839 A1 WO 2008090839A1
Authority
WO
WIPO (PCT)
Prior art keywords
temperature
detecting section
communicating pipe
temperature detecting
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/050695
Other languages
English (en)
French (fr)
Inventor
Masaki Inoue
Hidetaka Yada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Priority to KR1020097010712A priority Critical patent/KR101393124B1/ko
Priority to JP2008555047A priority patent/JP4945581B2/ja
Priority to US12/524,158 priority patent/US8015870B2/en
Publication of WO2008090839A1 publication Critical patent/WO2008090839A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)

Abstract

　装置全体を大型化させること無く、リニア特性を向上させつつ、安定した大流量の測定を可能にする流量計である。その構成は、流通管２と、流通管２の一部を冷却する冷却装置３と、冷却装置３により冷却される流通管２の温度を検出する第１温度検出部４と、冷却装置３の温度を検出する第２温度検出部５と、流通管２において冷却領域２ａよりも上流側の非冷却領域２ｂの温度を検出する第３温度検出部６と、第２温度検出部５の検出温度と第３温度検出部６の検出温度との差が所定値となるように冷却装置３を制御するとともに、第２温度検出部５の検出温度と第１温度検出部４の検出温度との差に基づいて流通管２を流れる流体Ｆの流量を算出する情報処理部８と、を備え、第２温度検出部５が、冷却装置３において、流通管に前記流体Ｆが流れることにより、流体Ｆから温度影響を最初に受ける部分近傍に配置されている。
PCT/JP2008/050695 2007-01-26 2008-01-21 流量計 Ceased WO2008090839A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020097010712A KR101393124B1 (ko) 2007-01-26 2008-01-21 유량계
JP2008555047A JP4945581B2 (ja) 2007-01-26 2008-01-21 流量計
US12/524,158 US8015870B2 (en) 2007-01-26 2008-01-21 Flowmeter for measuring a flow rate using a heat exchange principle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-016392 2007-01-26
JP2007016392 2007-01-26

Publications (1)

Publication Number Publication Date
WO2008090839A1 true WO2008090839A1 (ja) 2008-07-31

Family

ID=39644416

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050695 Ceased WO2008090839A1 (ja) 2007-01-26 2008-01-21 流量計

Country Status (5)

Country Link
US (1) US8015870B2 (ja)
JP (1) JP4945581B2 (ja)
KR (1) KR101393124B1 (ja)
TW (1) TWI436039B (ja)
WO (1) WO2008090839A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016156650A (ja) * 2015-02-23 2016-09-01 サーパス工業株式会社 熱式流量計およびその製造方法
JP2020008338A (ja) * 2018-07-04 2020-01-16 アズビル株式会社 熱式流量計

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101741284B1 (ko) 2009-09-30 2017-05-29 가부시키가이샤 호리바 에스텍 유량 센서
FR2951266B1 (fr) * 2009-10-14 2011-11-11 Suez Environnement Dispositif de detection du blocage d'un compteur mecanique de fluide, et compteur avec detection de blocage
WO2011106024A1 (en) * 2010-02-26 2011-09-01 Hewlett-Packard Development Company, L.P. Flow measurement system and methods
US20140251004A1 (en) * 2011-10-26 2014-09-11 Weatherford Canada Partnership Method and system for flow measurement
ITMI20112158A1 (it) * 2011-11-26 2013-05-27 Anyware Electronics Sas Di Paolo Fo Rlani & C Sensore di flusso a basso consumo per liquidi caldi
DE102012201214A1 (de) * 2012-01-27 2013-08-01 Siemens Aktiengesellschaft Durchfluss-Sensor
US20150201882A1 (en) * 2012-08-02 2015-07-23 Shuntcheck, Inc. Continuous real-time csf flow monitor and method
NL2011975C2 (nl) * 2013-12-17 2015-06-18 Berkin Bv Stromingsmeetapparaat van het thermische type.
US9494470B2 (en) * 2014-03-20 2016-11-15 Varian Semiconductor Equipment Associates, Inc. Thermistor based measurement system
US10908005B2 (en) * 2014-10-01 2021-02-02 Sierra Instruments, Inc. Capillary sensor tube flow meters and controllers
GB2533936B (en) 2015-01-07 2017-10-25 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
EP3067671A1 (en) * 2015-03-13 2016-09-14 Flowgem Limited Flow determination
USD800591S1 (en) 2016-03-31 2017-10-24 Homeserve Plc Flowmeter
KR101887307B1 (ko) * 2017-06-15 2018-08-09 현대제철 주식회사 유량계 보호용 냉온장치
CN110614919B (zh) * 2019-09-23 2023-04-28 联合汽车电子有限公司 冷却液流量监测方法及液冷电驱系统
JP2023067758A (ja) * 2021-11-01 2023-05-16 株式会社堀場エステック 気化装置、気化装置の制御方法、気化装置用プログラム、及び、流体制御装置
KR102749635B1 (ko) * 2022-07-27 2025-01-08 엠케이피 주식회사 유량계 및 이를 포함하는 유량 제어 장치
KR102749634B1 (ko) * 2022-07-27 2025-01-08 엠케이피 주식회사 유량계 및 이를 포함하는 유량 제어 장치
KR102796885B1 (ko) * 2022-11-29 2025-04-18 엠케이피 주식회사 유량계 및 이를 포함하는 유량 제어 장치
CN118980411B (zh) * 2024-07-30 2025-05-16 深圳蓝动精密有限公司 热式流量传感器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03195924A (ja) * 1989-12-25 1991-08-27 Kojundo Chem Lab Co Ltd 液体流量測定法とその装置
JPH08338746A (ja) * 1995-06-14 1996-12-24 Nippon M K S Kk 流量検出装置および流量検出方法
JP2002310757A (ja) * 2001-04-12 2002-10-23 Ricoh Co Ltd 微少流量測定装置
JP2004045290A (ja) * 2002-07-12 2004-02-12 Stec Inc 流量計
JP2006078218A (ja) * 2004-09-07 2006-03-23 Yamatake Corp 流量センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9305088D0 (en) * 1993-03-12 1993-04-28 Wrc Plc Improvements in and relating to measurement of fluid flow velocity

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03195924A (ja) * 1989-12-25 1991-08-27 Kojundo Chem Lab Co Ltd 液体流量測定法とその装置
JPH08338746A (ja) * 1995-06-14 1996-12-24 Nippon M K S Kk 流量検出装置および流量検出方法
JP2002310757A (ja) * 2001-04-12 2002-10-23 Ricoh Co Ltd 微少流量測定装置
JP2004045290A (ja) * 2002-07-12 2004-02-12 Stec Inc 流量計
JP2006078218A (ja) * 2004-09-07 2006-03-23 Yamatake Corp 流量センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016156650A (ja) * 2015-02-23 2016-09-01 サーパス工業株式会社 熱式流量計およびその製造方法
JP2020008338A (ja) * 2018-07-04 2020-01-16 アズビル株式会社 熱式流量計

Also Published As

Publication number Publication date
TW200839197A (en) 2008-10-01
TWI436039B (zh) 2014-05-01
JP4945581B2 (ja) 2012-06-06
US8015870B2 (en) 2011-09-13
KR101393124B1 (ko) 2014-05-08
US20100037688A1 (en) 2010-02-18
KR20090105909A (ko) 2009-10-07
JPWO2008090839A1 (ja) 2010-05-20

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