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WO2008090738A1 - Diaphragm pump - Google Patents

Diaphragm pump Download PDF

Info

Publication number
WO2008090738A1
WO2008090738A1 PCT/JP2008/000062 JP2008000062W WO2008090738A1 WO 2008090738 A1 WO2008090738 A1 WO 2008090738A1 JP 2008000062 W JP2008000062 W JP 2008000062W WO 2008090738 A1 WO2008090738 A1 WO 2008090738A1
Authority
WO
WIPO (PCT)
Prior art keywords
peripheral edge
laser welding
section
case body
pump chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/000062
Other languages
French (fr)
Japanese (ja)
Inventor
Yosuke Fukuhara
Hidekazu Urano
Shigeru Sugiyama
Yorihisa Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Star Micronics Co Ltd
Takasago Electric Inc
Original Assignee
Star Micronics Co Ltd
Takasago Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Star Micronics Co Ltd, Takasago Electric Inc filed Critical Star Micronics Co Ltd
Publication of WO2008090738A1 publication Critical patent/WO2008090738A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

A laser welding section (9), at which a resin diaphragm (21) is joined to a case body (10), is placed at a portion away from a peripheral edge (11a) of a pump chamber (11) with a non-welding region (13) provided between the portion and the peripheral edge, and this sufficiently dissipates heat, which occurs in laser light irradiation, to the case body (10) side. Also, the laser welding section (9) is placed between a peripheral edge (11a) of the pump chamber (11) and an outer peripheral edge (27a) of a movable section (28) of a metal diaphragm (25), and this causes vibration of a piezoelectric element (30) to be reliably produced only by themovable section (28). The construction sufficiently dissipates heat occurring at the time of laser welding, suppressing deformation of the diaphragms caused by heat. Also, because the position where laser welding is applied is appropriately set, the diaphragms sufficiently exhibit their characteristics.
PCT/JP2008/000062 2007-01-25 2008-01-22 Diaphragm pump Ceased WO2008090738A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-014732 2007-01-25
JP2007014732A JP2008180161A (en) 2007-01-25 2007-01-25 Diaphragm pump

Publications (1)

Publication Number Publication Date
WO2008090738A1 true WO2008090738A1 (en) 2008-07-31

Family

ID=39644313

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000062 Ceased WO2008090738A1 (en) 2007-01-25 2008-01-22 Diaphragm pump

Country Status (2)

Country Link
JP (1) JP2008180161A (en)
WO (1) WO2008090738A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102852775A (en) * 2012-07-27 2013-01-02 华中科技大学 Valveless micropump based on laser impact wave mechanical effect and manufacturing method thereof
CN102979704A (en) * 2011-09-06 2013-03-20 株式会社村田制作所 Fluid control device
CN110709321A (en) * 2017-06-02 2020-01-17 天体电子学先进电子系统公司 Air quality sensor for cockpit and crew rest area

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101377192B (en) * 2007-08-30 2012-06-13 研能科技股份有限公司 Fluid delivery device
JP5528404B2 (en) * 2011-09-06 2014-06-25 株式会社村田製作所 Fluid control device
JP5900155B2 (en) 2011-09-06 2016-04-06 株式会社村田製作所 Fluid control device
JP6127361B2 (en) * 2011-11-08 2017-05-17 株式会社村田製作所 Fluid control device
CN108317093B (en) * 2014-02-21 2019-12-10 株式会社村田制作所 Blower fan
CN106849747A (en) * 2017-02-28 2017-06-13 厦门大学 A kind of MEMS piezoelectric ultrasonic pumps
JP7104879B2 (en) * 2018-03-28 2022-07-22 日本電気硝子株式会社 Diaphragm device manufacturing method and diaphragm device
CA3104391A1 (en) * 2018-12-19 2020-06-25 M2P-Labs Gmbh Method for increasing the dosing precision of microfluidic pumps or valves, and welding apparatus and tensioning apparatus for carrying out the method
CN117203428A (en) * 2021-04-27 2023-12-08 株式会社村田制作所 Actuator, pump, method of manufacturing actuator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323879A (en) * 2000-05-16 2001-11-22 Matsushita Electric Ind Co Ltd Piezo pump
JP2002337236A (en) * 2001-05-14 2002-11-27 Honda Motor Co Ltd Method of welding resin members
JP2006063960A (en) * 2004-08-30 2006-03-09 Star Micronics Co Ltd Check valve and diaphragm pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323879A (en) * 2000-05-16 2001-11-22 Matsushita Electric Ind Co Ltd Piezo pump
JP2002337236A (en) * 2001-05-14 2002-11-27 Honda Motor Co Ltd Method of welding resin members
JP2006063960A (en) * 2004-08-30 2006-03-09 Star Micronics Co Ltd Check valve and diaphragm pump

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102979704A (en) * 2011-09-06 2013-03-20 株式会社村田制作所 Fluid control device
US9028226B2 (en) 2011-09-06 2015-05-12 Murata Manufacturing Co., Ltd. Fluid control device
CN102852775A (en) * 2012-07-27 2013-01-02 华中科技大学 Valveless micropump based on laser impact wave mechanical effect and manufacturing method thereof
CN102852775B (en) * 2012-07-27 2015-05-20 华中科技大学 Valveless micropump based on laser impact wave mechanical effect and manufacturing method thereof
CN110709321A (en) * 2017-06-02 2020-01-17 天体电子学先进电子系统公司 Air quality sensor for cockpit and crew rest area
JP2020522422A (en) * 2017-06-02 2020-07-30 アストロニクス アドバンスド エレクトロニック システムズ コーポレイション Air quality sensor in cockpit and passenger rest area

Also Published As

Publication number Publication date
JP2008180161A (en) 2008-08-07

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