WO2008090747A1 - Σδ型ad変換器およびそれを用いた角速度センサ - Google Patents
Σδ型ad変換器およびそれを用いた角速度センサ Download PDFInfo
- Publication number
- WO2008090747A1 WO2008090747A1 PCT/JP2008/000087 JP2008000087W WO2008090747A1 WO 2008090747 A1 WO2008090747 A1 WO 2008090747A1 JP 2008000087 W JP2008000087 W JP 2008000087W WO 2008090747 A1 WO2008090747 A1 WO 2008090747A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- digital
- converter
- angular velocity
- velocity sensor
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/322—Continuously compensating for, or preventing, undesired influence of physical parameters
- H03M3/324—Continuously compensating for, or preventing, undesired influence of physical parameters characterised by means or methods for compensating or preventing more than one type of error at a time, e.g. by synchronisation or using a ratiometric arrangement
- H03M3/326—Continuously compensating for, or preventing, undesired influence of physical parameters characterised by means or methods for compensating or preventing more than one type of error at a time, e.g. by synchronisation or using a ratiometric arrangement by averaging out the errors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/322—Continuously compensating for, or preventing, undesired influence of physical parameters
- H03M3/368—Continuously compensating for, or preventing, undesired influence of physical parameters of noise other than the quantisation noise already being shaped inherently by delta-sigma modulators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/39—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators
- H03M3/412—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution
- H03M3/422—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution having one quantiser only
- H03M3/43—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution having one quantiser only the quantiser being a single bit one
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/39—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators
- H03M3/436—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the order of the loop filter, e.g. error feedback type
- H03M3/456—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the order of the loop filter, e.g. error feedback type the modulator having a first order loop filter in the feedforward path
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/458—Analogue/digital converters using delta-sigma modulation as an intermediate step
- H03M3/466—Multiplexed conversion systems
- H03M3/472—Shared, i.e. using a single converter for multiple channels
- H03M3/474—Shared, i.e. using a single converter for multiple channels using time-division multiplexing
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/458—Analogue/digital converters using delta-sigma modulation as an intermediate step
- H03M3/478—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication
- H03M3/48—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication characterised by the type of range control, e.g. limiting
- H03M3/486—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication characterised by the type of range control, e.g. limiting by adapting the input gain
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/458—Analogue/digital converters using delta-sigma modulation as an intermediate step
- H03M3/478—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication
- H03M3/488—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication using automatic control
- H03M3/49—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication using automatic control in feedback mode, i.e. by determining the range to be selected from one or more previous digital output values
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Compression, Expansion, Code Conversion, And Decoders (AREA)
- Gyroscopes (AREA)
Abstract
入力切替装置(44)とDA変換装置(48)とから出力される電荷を積分しその少なくとも2つの積分値を保持する積分装置(62)と、この積分装置(62)から出力される少なくとも2つの積分値を所定の値と比較する比較装置(63)と、この比較装置(63)の出力信号を演算する演算装置(73)とを備え、この演算装置(73)に、比較装置(63)から出力される少なくとも2つの比較信号の差を演算する差分演算装置(70)を設けたΣΔAD変換器を用いて、出力特性が安定した角速度センサを提供する。
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008800031159A CN101611548B (zh) | 2007-01-26 | 2008-01-25 | ∑△型ad转换器以及使用了该转换器的角速度传感器 |
| EP08702828.8A EP2096759B1 (en) | 2007-01-26 | 2008-01-25 | Sigma-delta type analog-to-digital (ad) converter and angular velocity sensor using same |
| US12/523,769 US7898448B2 (en) | 2007-01-26 | 2008-01-25 | Sigma-delta type analog-to-digital (AD) converter and angular velocity sensor using same |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007016017 | 2007-01-26 | ||
| JP2007-016017 | 2007-01-26 | ||
| JP2007292830A JP4924370B2 (ja) | 2007-01-26 | 2007-11-12 | Σδ型ad変換器およびそれを用いた角速度センサ |
| JP2007-292830 | 2007-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2008090747A1 true WO2008090747A1 (ja) | 2008-07-31 |
Family
ID=39644322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2008/000087 Ceased WO2008090747A1 (ja) | 2007-01-26 | 2008-01-25 | Σδ型ad変換器およびそれを用いた角速度センサ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7898448B2 (ja) |
| EP (1) | EP2096759B1 (ja) |
| JP (1) | JP4924370B2 (ja) |
| CN (1) | CN101611548B (ja) |
| WO (1) | WO2008090747A1 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009092583A (ja) * | 2007-10-11 | 2009-04-30 | Nippon Signal Co Ltd:The | ジャイロセンサのドリフト抑制方法 |
| WO2011010446A1 (ja) * | 2009-07-22 | 2011-01-27 | パナソニック株式会社 | 角速度センサ |
| JP2011027455A (ja) * | 2009-07-22 | 2011-02-10 | Panasonic Corp | 角速度センサ |
| JP2011085416A (ja) * | 2009-10-13 | 2011-04-28 | Panasonic Corp | 角速度センサ |
| WO2021080948A2 (en) | 2019-10-24 | 2021-04-29 | Danisco Us Inc | Variant maltopentaose/maltohexaose-forming alpha-amylases |
| WO2023114988A2 (en) | 2021-12-16 | 2023-06-22 | Danisco Us Inc. | Variant maltopentaose/maltohexaose-forming alpha-amylases |
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| US7891245B2 (en) * | 2006-11-22 | 2011-02-22 | Panasonic Corporation | Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit |
| IT1392553B1 (it) | 2008-12-11 | 2012-03-09 | St Microelectronics Rousset | Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico |
| JP2010169532A (ja) * | 2009-01-22 | 2010-08-05 | Panasonic Corp | 駆動回路、物理量センサ装置 |
| JP2010181312A (ja) * | 2009-02-06 | 2010-08-19 | Panasonic Corp | 角速度センサ |
| CN102472624A (zh) * | 2009-06-26 | 2012-05-23 | 罗姆股份有限公司 | 角速度传感器和用于它的同步检波电路 |
| EP2469228B1 (en) | 2009-10-13 | 2017-08-02 | Panasonic Intellectual Property Management Co., Ltd. | Angular velocity sensor |
| US8714012B2 (en) * | 2010-02-16 | 2014-05-06 | Stmicroelectronics S.R.L. | Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope |
| JP5717376B2 (ja) * | 2010-03-31 | 2015-05-13 | シチズンホールディングス株式会社 | 物理量センサ |
| JP5468442B2 (ja) * | 2010-03-31 | 2014-04-09 | 本田技研工業株式会社 | Ad変換回路、及び、誤差補正方法 |
| DE102010039272B3 (de) * | 2010-08-12 | 2011-12-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Kapazitätsmessschaltung, Sensorsystem und Verfahren zum Messen einer Kapazität unter Verwendung eines sinusförmigen Spannungssignals |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| CN103221331B (zh) | 2010-09-18 | 2016-02-03 | 快捷半导体公司 | 用于微机电系统的密封封装 |
| WO2012037539A1 (en) | 2010-09-18 | 2012-03-22 | Fairchild Semiconductor Corporation | Micromachined 3-axis accelerometer with a single proof-mass |
| US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
| KR101332701B1 (ko) | 2010-09-20 | 2013-11-25 | 페어차일드 세미컨덕터 코포레이션 | 기준 커패시터를 포함하는 미소 전자기계 압력 센서 |
| US8599054B2 (en) * | 2011-03-10 | 2013-12-03 | Pgs Geophysical As | Method for using a sensor system having a single-bit quantizer and a multi-bit feedback loop |
| US8547267B2 (en) | 2011-11-30 | 2013-10-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Idle tone suppression circuit |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| EP2648334B1 (en) | 2012-04-05 | 2020-06-10 | Fairchild Semiconductor Corporation | Mems device front-end charge amplifier |
| EP2647952B1 (en) * | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
| EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| CN102832938A (zh) * | 2012-09-03 | 2012-12-19 | 江苏国石半导体有限公司 | 一种电流输入的adc电路 |
| DE102013014881B4 (de) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien |
| US9513309B2 (en) | 2013-02-08 | 2016-12-06 | Panasonic Intellectual Property Management Co., Ltd. | Inertia sensor with switching elements |
| US9759564B2 (en) | 2013-03-15 | 2017-09-12 | Fairchild Semiconductor Corporation | Temperature and power supply calibration |
| US9835647B2 (en) | 2014-03-18 | 2017-12-05 | Fairchild Semiconductor Corporation | Apparatus and method for extending analog front end sense range of a high-Q MEMS sensor |
| JP6492949B2 (ja) * | 2015-05-14 | 2019-04-03 | セイコーエプソン株式会社 | 回路装置、物理量検出装置、電子機器及び移動体 |
| US10365104B2 (en) * | 2016-05-11 | 2019-07-30 | Murata Manufacturing Co., Ltd. | Digital controller for a MEMS gyroscope |
| US9866227B1 (en) * | 2016-12-27 | 2018-01-09 | Intel IP Corporation | Sigma-delta analog-to-digital converter including loop filter having components for feedback digital-to-analog converter correction |
| JP7119478B2 (ja) * | 2018-03-23 | 2022-08-17 | セイコーエプソン株式会社 | 回路装置、物理量測定装置、電子機器及び移動体 |
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| US12000967B2 (en) * | 2021-03-31 | 2024-06-04 | Apple Inc. | Regional gain control for segmented thin-film acoustic imaging systems |
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| US11881874B2 (en) * | 2022-02-17 | 2024-01-23 | Invensense, Inc. | Motion sensor with sigma-delta analog-to-digital converter having resistive continuous-time digital-to-analog converter feedback for improved bias instability |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07249989A (ja) * | 1994-03-11 | 1995-09-26 | Yamaha Corp | アナログ/ディジタル変換器 |
| JP2001237706A (ja) | 2000-02-23 | 2001-08-31 | Hitachi Ltd | Δς型ad変換器 |
| JP2005274458A (ja) * | 2004-03-25 | 2005-10-06 | Denso Corp | 振動型角速度センサ |
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| FR2533382B1 (fr) * | 1982-09-21 | 1988-01-22 | Senn Patrice | Codeur de type delta-sigma, a double integration et applications de ce codeur a une voie de transmission de type mic et a la mesure de tensions continues |
| US5245343A (en) * | 1990-08-03 | 1993-09-14 | Honeywell Inc. | Enhanced accuracy delta-sigma A/D converter |
| GB9111821D0 (en) * | 1991-06-01 | 1991-07-24 | Marconi Gec Ltd | Analogue-to-digital converters |
| JP3170977B2 (ja) * | 1993-10-12 | 2001-05-28 | 株式会社村田製作所 | 振動子の駆動検出回路 |
| US5644308A (en) * | 1995-01-17 | 1997-07-01 | Crystal Semiconductor Corporation | Algorithmic analog-to-digital converter having redundancy and digital calibration |
| US5831562A (en) * | 1996-07-12 | 1998-11-03 | Sipex Corporation | Differential sample and hold circuit with common mode sampling for an analog-to-digital converter |
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| JP4032681B2 (ja) * | 2001-08-27 | 2008-01-16 | 株式会社デンソー | 同期検波方法及び装置並びにセンサ信号検出装置 |
| JP2004317484A (ja) * | 2003-03-31 | 2004-11-11 | Denso Corp | 振動型角速度センサ |
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| FR2911737B1 (fr) * | 2007-01-23 | 2009-03-27 | Ulis Soc Par Actions Simplifie | Procede pour numeriser une grandeur analogique, dispositif de numerisation mettant en oeuvre ce procede et detecteur de rayonnements electromagnetiques integrant un tel dispositif |
| US7504977B2 (en) * | 2007-04-23 | 2009-03-17 | Texas Instruments Incorporated | Hybrid delta-sigma/SAR analog to digital converter and methods for using such |
| US7511648B2 (en) * | 2007-04-23 | 2009-03-31 | Texas Instruments Incorporated | Integrating/SAR ADC and method with low integrator swing and low complexity |
-
2007
- 2007-11-12 JP JP2007292830A patent/JP4924370B2/ja not_active Expired - Fee Related
-
2008
- 2008-01-25 US US12/523,769 patent/US7898448B2/en not_active Expired - Fee Related
- 2008-01-25 WO PCT/JP2008/000087 patent/WO2008090747A1/ja not_active Ceased
- 2008-01-25 EP EP08702828.8A patent/EP2096759B1/en not_active Not-in-force
- 2008-01-25 CN CN2008800031159A patent/CN101611548B/zh not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07249989A (ja) * | 1994-03-11 | 1995-09-26 | Yamaha Corp | アナログ/ディジタル変換器 |
| JP2001237706A (ja) | 2000-02-23 | 2001-08-31 | Hitachi Ltd | Δς型ad変換器 |
| JP2005274458A (ja) * | 2004-03-25 | 2005-10-06 | Denso Corp | 振動型角速度センサ |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009092583A (ja) * | 2007-10-11 | 2009-04-30 | Nippon Signal Co Ltd:The | ジャイロセンサのドリフト抑制方法 |
| WO2011010446A1 (ja) * | 2009-07-22 | 2011-01-27 | パナソニック株式会社 | 角速度センサ |
| JP2011027455A (ja) * | 2009-07-22 | 2011-02-10 | Panasonic Corp | 角速度センサ |
| US8925383B2 (en) | 2009-07-22 | 2015-01-06 | Panasonic Corporation | Angular speed sensor |
| EP2413098A4 (en) * | 2009-07-22 | 2016-01-20 | Panasonic Ip Man Co Ltd | ANGLE SPEED SENSOR |
| JP2011085416A (ja) * | 2009-10-13 | 2011-04-28 | Panasonic Corp | 角速度センサ |
| WO2021080948A2 (en) | 2019-10-24 | 2021-04-29 | Danisco Us Inc | Variant maltopentaose/maltohexaose-forming alpha-amylases |
| WO2023114988A2 (en) | 2021-12-16 | 2023-06-22 | Danisco Us Inc. | Variant maltopentaose/maltohexaose-forming alpha-amylases |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008206134A (ja) | 2008-09-04 |
| CN101611548A (zh) | 2009-12-23 |
| EP2096759B1 (en) | 2018-01-03 |
| CN101611548B (zh) | 2012-10-03 |
| US20100013688A1 (en) | 2010-01-21 |
| EP2096759A4 (en) | 2012-01-18 |
| US7898448B2 (en) | 2011-03-01 |
| JP4924370B2 (ja) | 2012-04-25 |
| EP2096759A1 (en) | 2009-09-02 |
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