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WO2008087008A1 - Dispositif pour mettre en forme un rayon de lumière - Google Patents

Dispositif pour mettre en forme un rayon de lumière Download PDF

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Publication number
WO2008087008A1
WO2008087008A1 PCT/EP2008/000257 EP2008000257W WO2008087008A1 WO 2008087008 A1 WO2008087008 A1 WO 2008087008A1 EP 2008000257 W EP2008000257 W EP 2008000257W WO 2008087008 A1 WO2008087008 A1 WO 2008087008A1
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WO
WIPO (PCT)
Prior art keywords
lens array
lens
light beam
lenses
filter unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/000257
Other languages
German (de)
English (en)
Other versions
WO2008087008A8 (fr
Inventor
Iouri Mikliaev
Vitalij Lissotschenko
Aleksei Mikhailov
Maxim Darscht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Focuslight Germany GmbH
Original Assignee
Limo Patentverwaltung GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Limo Patentverwaltung GmbH and Co KG filed Critical Limo Patentverwaltung GmbH and Co KG
Publication of WO2008087008A1 publication Critical patent/WO2008087008A1/fr
Publication of WO2008087008A8 publication Critical patent/WO2008087008A8/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression

Definitions

  • the present invention relates to a device for shaping a light beam according to the preamble of claim 1. Furthermore, the present invention relates to a laser device according to the preamble of claim 22. Furthermore, the present invention relates to
  • the mean propagation direction of the light means, especially if this is not a plane wave or at least partially divergent.
  • light beam, sub-beam or beam is meant, unless expressly stated otherwise, an idealized beam of geometric optics, but a real light beam, such as a laser beam with a Gaussian profile, which has no infinitesimal small, but an extended beam cross-section.
  • Pitch means the distance between the centers of the lenses
  • a device for shaping a light beam of the type mentioned comprises two arrays of cylindrical lenses, which are arranged one behind the other in the propagation direction of the light beam to be formed. Behind the second of the two lens arrays a biconvex lens is arranged, which can superimpose the light which has passed through the lens arrays in a working plane.
  • a laser beam which has a Gaussian profile corresponding intensity distribution, are formed such that it has a intensity distribution corresponding to a so-called top hat in the working plane.
  • individual points of an input-side intensity distribution are transmitted to specific points of an output-side intensity distribution. This proves to be disadvantageous, because thus the shape of the intensity profile in the working plane is highly dependent on the input side
  • Intensity distribution of the light beam to be formed For example, a shift in the light beam on the input side or a change in the angle at which the light beam strikes the device causes a change in the shape of the intensity profile. Therefore, the adjustment of the device designed very expensive.
  • the problem underlying the present invention is the provision of a device for forming a light beam of the type mentioned, the more tolerant to input side changes in the intensity distribution of the forming
  • Light beam is, especially when the light of the light beam is coherent. Furthermore, a laser device of the type mentioned is to be developed. Furthermore, a method of the type mentioned is to be specified.
  • the device comprises first lens means, which are arranged between the first and the second lens array and can pass through the first lens array passed through portions of the light before the second lens array or in the region of the second lens array with each other.
  • the first lens array divides the input intensity distribution into several or many sections.
  • the shape of the lenses may dictate an output intensity distribution, such as a top hat distribution. If the lenses of the first lens array are the same, each of the lenses will perform the same predetermined beam transformation.
  • the intensity distributions of the individual sections or partial beams resulting from the passage through the lenses are superimposed by the first lens means in the region of the second lens array or shortly before it.
  • the light of the light beam to be formed is coherent or at least partially coherent, so that this superposition leads to strong interference effects.
  • the resulting interference patterns are periodic and repeat the input intensity distribution on a different scale several times. The envelope of this periodically repeating intensity distribution still has the desired given intensity distribution.
  • the second lens array is positioned in order to straighten the interference patterns as much as possible and to keep only the envelope.
  • the lenses of the second lens array may have a shape adapted to the input intensity distribution.
  • the intensity distribution or field distribution resulting behind the second lens array is tolerant to changes in the intensity distribution before the first lens array.
  • Achieve intensity distribution which is designed for example as a top hat distribution.
  • the output-side intensity distribution corresponds to or equals the input-side intensity distribution, wherein the beam quality of the light beam can then be improved by the device according to the invention.
  • the periodically repeating interference patterns resulting from the interference effects form local intensity intensities which are spaced apart from one another in the region of the second lens array.
  • the distance corresponds to this local
  • the lenses of the first lens array and / or the lenses of the second lens array are each designed in such a way, in particular in each case in their edge regions such
  • the lenses may have a cross-section in a middle region, which essentially corresponds to a second-order aspherical cross-section, such as, for example, a hyperbolic or a parabolic cross-section.
  • the lenses can have a cross-section in their edge regions that deviates from a second-order aspherical cross-section.
  • a very uniform top hat profile of the output-side intensity distribution can be achieved.
  • the device comprises a filter unit for reducing the diffraction factor M 2 of the light beam to be formed.
  • This filter unit can be designed as a Fourier filter unit. This can, for example, the
  • Filter unit comprising second and third lens means for the double Fourier transform of the light beam, which are arranged such that the output-side Fourier plane of the second lens means corresponds to the input-side Fourier plane of the third lens means. Furthermore, the filter unit a
  • aperture diaphragm which is net angeord net in the output side Fourier plane of the second lens means and / or in the input-side Fourier plane of the third lens means. Inhomogeneities in the intensity distribution behind the second lens array will usually repeat several times periodically.
  • Periodicity may arise from the fact that the first and the second lens array are periodic, their periodicities being correlated by the superimposition in the region of the second lens array. This effect occurs in particular when the light of the light beam to be formed is spatially coherent or at least spatially partially coherent. The periodicity can then cause strong diffraction effects.
  • the inhomogeneities in the intensity distribution behind the second lens array are diffracted by the first Fourier transformation into the zeroth, the first and further diffraction orders and can be filtered out of the light beam by a spatial filter such as the aperture stop. This further improves the quality of the intensity distribution. For example, only the zeroth order may be passed through the aperture stop and the first and higher orders filtered out of the aperture stop.
  • first lens means and / or the second lens means and / or the third lens means each comprise a lens or a lens array or a plurality of lenses or lens arrays. It can be provided that the lenses of the at least one lens array of the first, second or third
  • Lens means have a pitch, which differs from the center distance of the first lens array and / or the distance of local intensity maxima before the second lens array to each other. Due to the different center distances can optionally on arranged behind the lens arrays lenses for
  • Overlay is omitted because this function can be transferred to the lens or the array.
  • a device according to the invention is arranged to influence the exiting laser beam intracavity. This can prevent the laser device from oscillating in undesired modes, so that a laser beam with a very small diffraction factor M 2 can be generated.
  • the emerging laser beam has a top hat profile corresponding intensity distribution.
  • the laser beam is particularly suitable for applications such as material processing or the like.
  • the exiting laser beam has a Gaussian profile corresponding intensity distribution, wherein the laser radiation in the interior of the resonator at least partially has a top hat profile corresponding intensity distribution.
  • the efficiency of the laser can be increased.
  • Fig. 1 is a schematic side view of a first
  • FIG. 2 shows a schematic side view of a second embodiment of a device according to the invention with schematic intensity distributions of a light beam to be formed at different locations of the device;
  • Fig. 3 is a schematic side view of a third
  • Fig. 4 is a schematic side view of a fourth
  • Fig. 5a is a schematic side view of a fifth
  • FIG. 5b shows a detailed view of the embodiment according to FIG. 5a
  • FIG. 5c shows a detailed view according to the arrow Vc in FIG. 5b
  • FIG. 6a shows a schematic side view corresponding to FIG. 5b of a sixth embodiment of a device according to the invention with schematic intensity distributions of a light beam to be formed at different locations of the device;
  • FIG. 6b shows a detail view according to the arrow VIb in FIG. 6a;
  • FIG. 7a shows a schematic side view corresponding to FIG. 5b of a seventh embodiment of a device according to the invention with schematic intensity distributions of a light beam to be formed at different locations of the device;
  • FIG. 7b shows a detail view according to the arrow VI Ib in FIG. 7a;
  • FIG. 7c shows a detail view according to the arrow VI Ic in FIG. 7a;
  • Fig. 8a is a Fig. 5b corresponding schematic side view of an eighth embodiment of the invention in accordance
  • FIG. 8b is a detail view according to the arrow VI I Ib in FIG. 8a;
  • Fig. 9a a Fig. 5b shows a corresponding schematic side view of a ninth embodiment of a device according to the invention with schematic intensity distributions of a light beam to be formed at different locations of the device;
  • FIG. 9b shows a detail view according to the arrow IXb in FIG. 9a;
  • FIG. 10a a schematic side view corresponding to FIG. 5b of a tenth embodiment of a device according to the invention with schematic intensity distributions of a light beam to be formed at different locations of the device;
  • Fig. 10b is a detail view according to the arrow Xb in Fig. 10a.
  • the illustrated in Fig. 1 embodiment of a device according to the invention comprises in the propagation direction of a to be formed
  • first lens means Light beam or in the positive Z-direction behind a first lens array 1, first lens means 3, a second lens array 2 and a filter unit 4.
  • the filter unit 4 has in the Z direction behind the other second lens means 5, an aperture diaphragm 7 and third lens means 6.
  • the first lens array 1 comprises a substrate which has cylindrical lenses 9 arranged side by side on its exit side in the X direction, with cylinder axes extending in the Y direction.
  • cylindrical lenses are also arranged on the entrance side of the substrate, the cylinder axes of which extend in the X direction.
  • the first lens array 1 comprises two or more substrates instead of a substrate, on each of which lenses, in particular cylindrical lenses, are arranged Cylinder axes can be aligned parallel and / or perpendicular to each other.
  • the light beam to be formed is subdivided into a plurality of sections which each have an intensity distribution which is dependent on the shape of the individual cylindrical lenses 9.
  • the intensity distributions resulting from the passage through the cylindrical lenses 9 are superimposed by the first lens means 3 in the region of the second lens array 2 or shortly before it.
  • the first lens means 3 may be formed as a single lens as shown or as a system of multiple lenses.
  • the distance between the first lens array 1 and the first lens means 3 may correspond to the sum of the focal lengths of the first lens array 1 and the first lens means 3, so that the first lens array 1 and the first lens means 3 form a telescope or a telescope-like arrangement.
  • the distance between the second lens array 2 and the first lens means 3 may correspond to the sum of the focal lengths of the second lens array 2 and the first lens means 3, so that the second lens array 2 and the first lens means 3 are also one
  • Telescope or form a telescope-like arrangement
  • the first lens means 3 thus form a telecentric arrangement with the lens arrays 1, 2. Furthermore, the first lens means 3 are arranged such that in the output-side focal plane of the lens means 3 a Fourier transformation of the input side
  • Focal plane of the lens means 3 is formed.
  • the reference numeral 10 designates in FIG. 1 an intensity distribution or a field distribution which may arise shortly before or in the region of the second lens array 2.
  • This intensity distribution 10 has interference patterns resulting from the overlay, which are periodic and repeat the input intensity distribution on a different scale several times.
  • the envelope of this periodically repeating intensity distribution still has the desired predetermined intensity distribution, such as a top-hat profile.
  • the second lens array 2 comprises in the illustrated embodiment, two substrates 1 1, 12, of which the first substrate 1 1 arranged on its inlet side and the second substrate 12 on its exit side in the X direction side by side
  • Cylindrical lenses 13, 14 having extending in the Y direction cylinder axes.
  • cylinder lenses are likewise arranged on the exit side of the first substrate 11 and / or on the entry side of the second substrate 12, whose cylinder axes extend in the X direction.
  • the second lens array 2 instead of two substrates 1 1, 12 comprises only one substrate on which on the entrance and / or on the exit side lenses, in particular cylindrical lenses are arranged, the cylinder axes aligned parallel and / or perpendicular to each other could be .
  • the interference patterns resulting in periodically repeating interference patterns 10 form local intensity intensities spaced from one another in the region of the second lens array 2.
  • the distance of these local intensity maxima from one another corresponds to the center distance Cylindrical lenses 13 and / or 14 of the second lens array 2 in the X direction to each other. This can be achieved in particular by the fact that
  • P ' is the center distance of the cylindrical lenses 13 and / or 14 of the second lens array 2. This center distance P ' also corresponds to the width of the cylindrical lenses 13 and / or 14 of the second lens array 2 in the X direction.
  • F denotes the focal length of the first lens means 3.
  • ⁇ is the wavelength of the light beam to be formed.
  • P is the pitch of the cylindrical lenses 9 of the first
  • Lens arrays 1 in the X direction which corresponds to the width of the cylindrical lenses 9 of the first lens array 1 in the X direction.
  • the second lens array 2 is used to straighten the interference pattern of the intensity distribution 10 as possible and possibly only to maintain the envelope.
  • the cylindrical lenses 13, 14 of the second lens array 2 can be connected to the
  • Input intensity distribution have adapted form.
  • the intensity distribution 15 or field distribution resulting behind the second lens array has inhomogeneities in the illustrated exemplary embodiment, which repeat themselves periodically several times. This periodicity may result from the fact that the first and the second lens array 1, 2 are periodic, their periodicities being correlated by the superposition in the region of the second lens array 2. This periodicity can cause strong diffraction effects, especially with coherent or at least partially coherent light. Due to these diffraction effects, the filter unit 4 is able to filter out the inhomogeneities from the intensity distribution or from the field distribution of the light beam to be formed.
  • the second lens means 5, the aperture diaphragm 7 and the third lens means 6 are accommodated in a Fourier arrangement in the device.
  • each of the lens means 5, 6 effects a Fourier transformation of the light beam to be formed, wherein the aperture diaphragm 7 is arranged in the output-side Fourier plane of the second lens means 5 and / or in the input-side Fourier plane of the third lens means 6.
  • This can be achieved, for example, in that the distance between the second lens means 5 and the aperture diaphragm 7 corresponds to the focal length of the second lens means 5 and / or that the distance between the third lens means 6 and the aperture diaphragm 7 corresponds to the focal length of the third lens means 6.
  • the second lens means 5 and / or the third lens means 6 each consist of a lens as shown, or else comprise a plurality of lenses.
  • reference numeral 16 schematically indicates an intensity distribution or field distribution resulting from a single Fourier transformation by means of the second lens means 5 in the region of the aperture diaphragm 7.
  • a peak 17 is arranged in the middle, which corresponds to a zeroth order of the Fourier-transformed intensity distribution 16.
  • two peaks 18 corresponding to the first order of the Fourier-transformed intensity distribution 16 are arranged.
  • Spaced laterally outwards relative to the peaks 18 are peaks 19, 20 which correspond to higher orders of the Fourier-transformed intensity distribution 16.
  • the Aperture diaphragm 7 is dimensioned in the X direction and possibly also in the Y direction in such a way that only portions of the light which correspond to the peak 17 of the zeroth order are transmitted.
  • Filter unit 4 to filter out portions of light corresponding to higher orders than, for example, the zeroth order. This filtering out filters out the periodic component from the field distribution.
  • This intensity distribution 21 corresponds to a top hat profile, in which only in the lateral
  • FIGS. 2 to 10 b the same parts are provided with the same reference numerals as in FIG. 1.
  • Fig. 2 shows an embodiment of the device according to the invention, in which behind the filter unit 4, a Schmidt plate 22 and imaging means 23 are arranged. By means of these additional refractive means, the intensity distribution 21 can be converted into an intensity distribution 24 corresponding to a top hat profile.
  • Fig. 3 shows an embodiment of the device according to the invention, in which behind the second lens array 2 serving as a field lens imaging means 25 are arranged.
  • additional refractive means instead of the intensity distribution 21 behind the filter unit 4, a top hat
  • FIG 4 shows an embodiment of the device according to the invention, in which the cylindrical lenses 9 of the first lens array 1 and, under certain circumstances, the cylindrical lenses 13, 14 of the second lens array 2 are shaped in such a way that the interference-related
  • the light beam to be formed has an intensity distribution 27 behind the filter unit 4, which corresponds to a top hat profile.
  • the cylindrical lenses 9 and optionally also the cylindrical lenses 13, 14 can be shaped in this case, like the cylindrical lenses described in DE 10 2004 020 250 A1. These cylindrical lenses each have such a curvature in their edge regions that diffraction-related effects are thereby reduced.
  • the cylindrical lenses in a middle region have a cross-section which is substantially an aspherical cross-section second
  • FIGS. 5a to 5c show an embodiment in which the first lens means are formed by two separate lenses 3a and 3b. Even with the use of two separate lenses 3a, 3b can also be provided a telescopic arrangement or telescope-like arrangement.
  • the system of the lenses 3a, 3b with the lens arrays 1, 2 form a telecentric arrangement.
  • the lenses 3a, 3b are arranged such that in the output side focal plane of the
  • FIG. 5b and FIG. 5c show that local intensity maxima 28 which are spaced apart from one another in the X direction in front of the second lens array 2 or even in front of the second lens 3b, each having a Gaussian profile in accordance with the intensity distribution 10 also drawn.
  • Fig. 5a and Fig. 5b show that local intensity maxima 28 which are spaced apart from one another in the X direction in front of the second lens array 2 or even in front of the second lens 3b, each having a Gaussian profile in accordance with the intensity distribution 10 also drawn.
  • 5b illustrates that the envelope 29 of the intensity distribution 10 can correspond to a top hat profile.
  • the second lens array 2 comprises only one substrate 12, but can also be like the one already described embodiments have two or more substrates.
  • the first lens 3a can cause the Fourier transformation, whereas the second lens 3b causes the telecentricity of the system. If the second lens 3b is omitted with the same arrangement of the first lens 3a, the intensity distribution 10 is not changed. Only the mean propagation directions of the partial beams emanating from the local intensity maxima 28 will no longer be parallel to one another.
  • FIGS. 6a and 6b therefore shows a
  • This lens array 30 is designed as cylindrical lenses 31 with cylinder axes extending in the Y direction.
  • This lens array 30 can also be used as part of the lens array 2 according to the embodiments according to FIGS.
  • the lens array 30 has a center pitch P 1 of the individual cylindrical lenses 31, which is smaller than the distance P 2 of the local intensity maxima 28 to one another.
  • the center distance Pi By this choice of the center distance Pi, the parallelism of the intensity of the local I ntensticiansmaxima 28 outgoing partial beams can be ensured.
  • the embodiments according to FIGS. 5 a to 5 b. 5c are smaller due to the cylindrical lenses 31 which are very small compared to the lens 3b.
  • the first lens 3a is also replaced by a lens array 32.
  • the lenses of this lens array 32 are designed as cylindrical lenses 33 with cylinder axes extending in the Y direction.
  • the lens array 32 has a pitch P 3 of the individual cylindrical lenses 33, the is smaller than the center distance P 4 of the cylindrical lenses 9 of the first lens array 1 and thus the local intensity maxima 34 generated by these to each other.
  • the center distance P 3 the function of the lens 3 a can be realized by the lens array 32.
  • Extension of the cylindrical lenses 33 compared to the first lens 3a reduces the aberrations.
  • FIGS. 8a and 8b differs from that according to FIGS. 5a to 5c only in that the distance between the second lens means 5 of the filter unit 4 and the second lens array 2 is somewhat smaller.
  • the second lens means 5 according to FIGS. 8a and 8b converge the partial beams emanating from the local intensity maxima 28.
  • the lens means 5 can thus be saved compared with those shown in FIGS. 6a and 6b.
  • FIGS. 10a and 10b corresponds to that according to FIGS. 9a and 9b, except for the fact that the first lens

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lenses (AREA)

Abstract

L'invention concerne un dispositif pour mettre en forme un rayon de lumière, comprenant un premier réseau (1) de lentilles à travers lequel peut passer le rayon de lumière à mettre en forme, un deuxième réseau (2) de lentilles qui est disposé derrière le premier réseau (1) de lentilles dans le sens de propagation du rayon de lumière, de sorte que la lumière qui est passée à travers le premier réseau (1) de lentilles puisse passer à travers le deuxième réseau (2) de lentilles, ainsi que des premiers moyens (3) de lentilles qui sont disposés entre le premier et le deuxième réseau (1, 2) de lentilles et par le biais desquels les proportions de lumière qui sont passées à travers le premier réseau (1) de lentilles peuvent être superposées les unes aux autres dans la zone du deuxième réseau (2) de lentilles.
PCT/EP2008/000257 2007-01-15 2008-01-15 Dispositif pour mettre en forme un rayon de lumière Ceased WO2008087008A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007002890.5 2007-01-15
DE102007002890 2007-01-15

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Publication Number Publication Date
WO2008087008A1 true WO2008087008A1 (fr) 2008-07-24
WO2008087008A8 WO2008087008A8 (fr) 2008-10-30

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008024589A1 (de) 2008-05-21 2009-11-26 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung eines Laserstrahls
DE102009005844A1 (de) 2009-01-21 2010-07-22 Jenoptik Laser, Optik, Systeme Gmbh Verfahren und Anordnung zur Homogenisierung von optischen Strahlen
US12339440B2 (en) 2021-07-08 2025-06-24 Elbit Systems Electro-Optics—Elop Ltd. Correction optical elements for coherent beam combining systems and systems and methods for coherent beam combining using same

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US5844727A (en) * 1997-09-02 1998-12-01 Cymer, Inc. Illumination design for scanning microlithography systems
US20040156130A1 (en) * 2002-12-31 2004-08-12 Powell Karlton David Homogenizing optical sheet, method of manufacture, and illumination system
EP1489438A1 (fr) * 2003-06-18 2004-12-22 Hentze-Lissotschenko Patentverwaltungs GmbH & Co. KG Dispositif pour former un faisceau de lumière
DE102004020250A1 (de) * 2004-04-26 2005-11-10 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung und Verfahren zur optischen Strahlhomogenisierung
WO2006119785A1 (fr) * 2005-05-06 2006-11-16 Limo Patentverwaltung Gmbh & Co. Kg Dispositif de repartition d'un rayonnement elctromagnetique en une pluralite de faisceaux partiels uniformes

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5844727A (en) * 1997-09-02 1998-12-01 Cymer, Inc. Illumination design for scanning microlithography systems
US20040156130A1 (en) * 2002-12-31 2004-08-12 Powell Karlton David Homogenizing optical sheet, method of manufacture, and illumination system
EP1489438A1 (fr) * 2003-06-18 2004-12-22 Hentze-Lissotschenko Patentverwaltungs GmbH & Co. KG Dispositif pour former un faisceau de lumière
DE102004020250A1 (de) * 2004-04-26 2005-11-10 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung und Verfahren zur optischen Strahlhomogenisierung
WO2006119785A1 (fr) * 2005-05-06 2006-11-16 Limo Patentverwaltung Gmbh & Co. Kg Dispositif de repartition d'un rayonnement elctromagnetique en une pluralite de faisceaux partiels uniformes

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008024589A1 (de) 2008-05-21 2009-11-26 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung eines Laserstrahls
DE102009005844A1 (de) 2009-01-21 2010-07-22 Jenoptik Laser, Optik, Systeme Gmbh Verfahren und Anordnung zur Homogenisierung von optischen Strahlen
DE102009005844B4 (de) 2009-01-21 2018-11-22 Jenoptik Optical Systems Gmbh Anordnung zur Umwandlung gaussförmiger Laserstrahlung
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