WO2008078525A1 - Dispositif pour un contrôle de température précis - Google Patents
Dispositif pour un contrôle de température précis Download PDFInfo
- Publication number
- WO2008078525A1 WO2008078525A1 PCT/JP2007/073541 JP2007073541W WO2008078525A1 WO 2008078525 A1 WO2008078525 A1 WO 2008078525A1 JP 2007073541 W JP2007073541 W JP 2007073541W WO 2008078525 A1 WO2008078525 A1 WO 2008078525A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- flow passage
- temperature
- cooler
- heat
- heat medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B1/00—Compression machines, plants or systems with non-reversible cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B29/00—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B30/00—Heat pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B5/00—Compression machines, plants or systems, with several evaporator circuits, e.g. for varying refrigerating capacity
- F25B5/02—Compression machines, plants or systems, with several evaporator circuits, e.g. for varying refrigerating capacity arranged in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B6/00—Compression machines, plants or systems, with several condenser circuits
- F25B6/02—Compression machines, plants or systems, with several condenser circuits arranged in parallel
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Air Conditioning Control Device (AREA)
- Other Air-Conditioning Systems (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Temperature (AREA)
Abstract
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008551016A JP4875714B2 (ja) | 2006-12-27 | 2007-12-06 | 精密温度調整装置 |
| CN2007800464837A CN101558270B (zh) | 2006-12-27 | 2007-12-06 | 对温度进行精密调整的装置 |
| KR1020097009012A KR101453924B1 (ko) | 2006-12-27 | 2007-12-06 | 정밀 온도 조정 장치 |
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006-351583 | 2006-12-27 | ||
| JP2006351583 | 2006-12-27 | ||
| JP2007126179 | 2007-05-11 | ||
| JP2007-126179 | 2007-05-11 | ||
| JP2007257152 | 2007-10-01 | ||
| JP2007-257152 | 2007-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2008078525A1 true WO2008078525A1 (fr) | 2008-07-03 |
Family
ID=39562319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2007/073541 Ceased WO2008078525A1 (fr) | 2006-12-27 | 2007-12-06 | Dispositif pour un contrôle de température précis |
Country Status (5)
| Country | Link |
|---|---|
| JP (3) | JP4875714B2 (fr) |
| KR (1) | KR101453924B1 (fr) |
| CN (1) | CN101558270B (fr) |
| TW (1) | TWI387716B (fr) |
| WO (1) | WO2008078525A1 (fr) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009122357A (ja) * | 2007-11-14 | 2009-06-04 | Orion Mach Co Ltd | 板状部材の温度調整装置 |
| WO2009125776A1 (fr) * | 2008-04-10 | 2009-10-15 | オリオン機械株式会社 | Appareil de réglage de la température et de l’humidité et système de régulation de la température et de l’humidité |
| WO2010026840A1 (fr) * | 2008-09-02 | 2010-03-11 | 株式会社ラスコ | Dispositif d’échange de chaleur |
| JP2010185616A (ja) * | 2009-02-12 | 2010-08-26 | Orion Mach Co Ltd | 温湿度調整装置 |
| JP2010230184A (ja) * | 2009-03-26 | 2010-10-14 | Orion Mach Co Ltd | 温湿度調整装置 |
| JP2010236700A (ja) * | 2009-03-30 | 2010-10-21 | Orion Mach Co Ltd | 温湿度調整装置 |
| JP2010255879A (ja) * | 2009-04-22 | 2010-11-11 | Orion Mach Co Ltd | 温度調整装置 |
| JP2010270975A (ja) * | 2009-05-22 | 2010-12-02 | Orion Mach Co Ltd | 温度調整機能付きの除湿装置 |
| JP2011094852A (ja) * | 2009-10-28 | 2011-05-12 | Orion Machinery Co Ltd | 温湿度調整装置および温湿度調整方法 |
| CN101691960B (zh) * | 2009-09-30 | 2012-10-10 | 广东美的电器股份有限公司 | 三管制热回收空调系统 |
| JP2017161123A (ja) * | 2016-03-08 | 2017-09-14 | 日本スピンドル製造株式会社 | 温度調整装置 |
| CN108278490A (zh) * | 2016-12-30 | 2018-07-13 | 贵港市芭田生态有限公司 | 防板结剂输送系统及方法 |
| US10338612B2 (en) | 2015-02-24 | 2019-07-02 | Fives Landis Limited | Machine tools and methods of operation thereof |
| WO2023199688A1 (fr) * | 2022-04-14 | 2023-10-19 | パナソニックエナジー株式会社 | Dispositif de régulation de température et procédé de régulation de température |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5098046B2 (ja) * | 2008-06-26 | 2012-12-12 | オリオン機械株式会社 | 温度調整システム |
| JP5526359B2 (ja) * | 2010-03-11 | 2014-06-18 | オリオン機械株式会社 | 温度調整送風装置 |
| CN101975489B (zh) * | 2010-11-03 | 2012-01-18 | 合肥工业大学 | 全天候宽温带精密温度控制系统 |
| JP2014081120A (ja) * | 2012-10-16 | 2014-05-08 | Orion Mach Co Ltd | 精密温度調整装置 |
| CN103307819B (zh) * | 2013-05-21 | 2015-05-20 | 澳柯玛股份有限公司 | 可调控压缩机输冷量的制冷系统及方法 |
| JP6429084B2 (ja) * | 2015-03-31 | 2018-11-28 | 株式会社東京精密 | ウエハ搭載台の温度制御装置及び温度制御方法並びにプローバ |
| KR101910347B1 (ko) * | 2016-12-05 | 2018-10-23 | 주식회사 글로벌스탠다드테크놀로지 | 반도체 제조설비의 고도화 온도제어장치 |
| AT521086B1 (de) * | 2018-03-28 | 2020-02-15 | Avl List Gmbh | Konditioniereinrichtung zur Regelung eines gasförmigen oder |
| KR102547057B1 (ko) * | 2019-04-23 | 2023-06-26 | 씨케이디 가부시키 가이샤 | 열교환 시스템 |
| JP2021009590A (ja) * | 2019-07-02 | 2021-01-28 | 株式会社Kelk | 温度制御システム及び温度制御方法 |
| CN116670447A (zh) * | 2020-12-08 | 2023-08-29 | 株式会社湘南贸易 | 冷却装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5197048A (fr) * | 1975-02-22 | 1976-08-26 | ||
| JPH09189460A (ja) * | 1996-01-09 | 1997-07-22 | Mitsubishi Heavy Ind Ltd | 冷凍装置 |
| JPH10148416A (ja) * | 1996-11-15 | 1998-06-02 | Yasuhiko Arai | 除湿機 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0728545Y2 (ja) * | 1986-10-18 | 1995-06-28 | ダイキン工業株式会社 | 液体温度制御装置 |
| CN1142593A (zh) * | 1995-04-12 | 1997-02-12 | 三洋电机株式会社 | 设置循环流体分支路径的热泵式空调器 |
| CN2526749Y (zh) * | 2002-03-11 | 2002-12-18 | 北京中能创新电力技术有限公司 | 半导体致冷气体除湿装置 |
-
2007
- 2007-12-06 JP JP2008551016A patent/JP4875714B2/ja active Active
- 2007-12-06 WO PCT/JP2007/073541 patent/WO2008078525A1/fr not_active Ceased
- 2007-12-06 KR KR1020097009012A patent/KR101453924B1/ko active Active
- 2007-12-06 CN CN2007800464837A patent/CN101558270B/zh active Active
- 2007-12-11 TW TW096147151A patent/TWI387716B/zh active
-
2009
- 2009-09-30 JP JP2009228074A patent/JP4435278B2/ja active Active
- 2009-09-30 JP JP2009228085A patent/JP2009300077A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5197048A (fr) * | 1975-02-22 | 1976-08-26 | ||
| JPH09189460A (ja) * | 1996-01-09 | 1997-07-22 | Mitsubishi Heavy Ind Ltd | 冷凍装置 |
| JPH10148416A (ja) * | 1996-11-15 | 1998-06-02 | Yasuhiko Arai | 除湿機 |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009122357A (ja) * | 2007-11-14 | 2009-06-04 | Orion Mach Co Ltd | 板状部材の温度調整装置 |
| JP5343231B2 (ja) * | 2008-04-10 | 2013-11-13 | オリオン機械株式会社 | 温湿度調整装置 |
| WO2009125776A1 (fr) * | 2008-04-10 | 2009-10-15 | オリオン機械株式会社 | Appareil de réglage de la température et de l’humidité et système de régulation de la température et de l’humidité |
| JP5594597B2 (ja) * | 2008-09-02 | 2014-09-24 | 株式会社ラスコ | 冷却装置 |
| CN101960239A (zh) * | 2008-09-02 | 2011-01-26 | 株式会社拉斯科 | 换热装置 |
| WO2010026840A1 (fr) * | 2008-09-02 | 2010-03-11 | 株式会社ラスコ | Dispositif d’échange de chaleur |
| JP2010185616A (ja) * | 2009-02-12 | 2010-08-26 | Orion Mach Co Ltd | 温湿度調整装置 |
| JP2010230184A (ja) * | 2009-03-26 | 2010-10-14 | Orion Mach Co Ltd | 温湿度調整装置 |
| JP2010236700A (ja) * | 2009-03-30 | 2010-10-21 | Orion Mach Co Ltd | 温湿度調整装置 |
| JP2010255879A (ja) * | 2009-04-22 | 2010-11-11 | Orion Mach Co Ltd | 温度調整装置 |
| JP2010270975A (ja) * | 2009-05-22 | 2010-12-02 | Orion Mach Co Ltd | 温度調整機能付きの除湿装置 |
| CN101691960B (zh) * | 2009-09-30 | 2012-10-10 | 广东美的电器股份有限公司 | 三管制热回收空调系统 |
| JP2011094852A (ja) * | 2009-10-28 | 2011-05-12 | Orion Machinery Co Ltd | 温湿度調整装置および温湿度調整方法 |
| US10338612B2 (en) | 2015-02-24 | 2019-07-02 | Fives Landis Limited | Machine tools and methods of operation thereof |
| JP2017161123A (ja) * | 2016-03-08 | 2017-09-14 | 日本スピンドル製造株式会社 | 温度調整装置 |
| CN108278490A (zh) * | 2016-12-30 | 2018-07-13 | 贵港市芭田生态有限公司 | 防板结剂输送系统及方法 |
| CN108278490B (zh) * | 2016-12-30 | 2024-02-20 | 贵港市芭田生态有限公司 | 防板结剂输送系统及方法 |
| WO2023199688A1 (fr) * | 2022-04-14 | 2023-10-19 | パナソニックエナジー株式会社 | Dispositif de régulation de température et procédé de régulation de température |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090106452A (ko) | 2009-10-09 |
| JP4875714B2 (ja) | 2012-02-15 |
| CN101558270B (zh) | 2011-07-20 |
| TWI387716B (zh) | 2013-03-01 |
| CN101558270A (zh) | 2009-10-14 |
| TW200827639A (en) | 2008-07-01 |
| KR101453924B1 (ko) | 2014-10-23 |
| JP4435278B2 (ja) | 2010-03-17 |
| JPWO2008078525A1 (ja) | 2010-04-22 |
| JP2009300077A (ja) | 2009-12-24 |
| JP2010043855A (ja) | 2010-02-25 |
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