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WO2008074319A2 - Ceramic electric heating element - Google Patents

Ceramic electric heating element Download PDF

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Publication number
WO2008074319A2
WO2008074319A2 PCT/DE2007/002324 DE2007002324W WO2008074319A2 WO 2008074319 A2 WO2008074319 A2 WO 2008074319A2 DE 2007002324 W DE2007002324 W DE 2007002324W WO 2008074319 A2 WO2008074319 A2 WO 2008074319A2
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WIPO (PCT)
Prior art keywords
ceramic
electrically conductive
heating element
mass
component
Prior art date
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PCT/DE2007/002324
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German (de)
French (fr)
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WO2008074319A3 (en
Inventor
Hagen Klemm
Axel Bales
Sabine Henschke
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Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Publication of WO2008074319A3 publication Critical patent/WO2008074319A3/en
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
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    • C04B35/56Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23QIGNITION; EXTINGUISHING-DEVICES
    • F23Q7/00Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
    • F23Q7/001Glowing plugs for internal-combustion engines
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
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    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/3852Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
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    • C04B2235/3891Silicides, e.g. molybdenum disilicide, iron silicide
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    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
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    • C04B2235/9669Resistance against chemicals, e.g. against molten glass or molten salts
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/027Heaters specially adapted for glow plug igniters

Definitions

  • the invention relates to ceramic electrical heating elements, such as glow plugs or heating pins, which are formed with a combination of electrically conductive and electrically insulating ceramic materials. This material combination can preferably be used at high temperatures.
  • ceramic materials which are formed from silicon nitride and molybdenum silicide or another silicide are used in conventional form.
  • the electrical conductivity is influenced only by the proportion and the grain size of the molybdenum silicide.
  • the electrically insulating ceramic material is likewise formed from silicon nitride and molybdenum silicide.
  • the volume fraction of the electrically conductive component (molybdenum silicide) is then, however, in relation to the electrically solubilizing component (silicon nitride) smaller.
  • the different composition of the two materials used has a disadvantageous effect on the production and the service life of such heating elements, since the two main components
  • the thermal expansion coefficients of these two materials differ significantly, so that even when using residual stresses can not be avoided.
  • the electrical conductivity can be influenced only by the proportions and the grain size of the molybdenum silicide. However, since this is only possible within limits, only a limited range of electrical conductivity can be covered with these two materials and these can be precisely adjusted. Such heating elements can therefore not be produced in any geometric shapes and used universally.
  • a heatable ceramic element which is formed with an electrically insulating and at least one electrically conductive zone of ceramic material.
  • Both layers should be next to other components include silicon nitride and molybdenum silicide.
  • a glow plug for a diesel engine is described in DE 36 21 216 C2.
  • the electrically conductive are formed with an electrically conductive and the electrically insulating part with an electrically insulating ceramic composite material, wherein at least the electrically conductive part is formed with three ceramic components.
  • the electrically conductive main component one or more electrically conductive silicide (s) is present, which is bonded to a metal selected from Mo, W, Ta, Nb, Ti, Zr, Hf, V and Cr - det is / are, with molybdenum silicide being preferred.
  • the ceramic base material is silicon nitriride, sialon or aluminum nitride.
  • the electrical properties of the two ceramic composite materials are adjusted by the proportion of an additionally electrically less conductive ceramic component, such as SiC or B 4 C. These have similar thermo-physical properties as the silicon nitride.
  • both ceramic composite materials electrically conductive and insulating also have very similar thermo-physical properties. For this reason, occur only during sintering and during use only negligible residual stresses in a heating element according to the invention, which has a simplified production and a significantly improved leh lifetime behavior with improved reliability and increased life result.
  • the heating element according to the invention is particularly preferably formed of two ceramic composite materials with silicon nitride, silicon carbide and molybdenum silicide, wherein the proportion of molybdenum silicide in both ceramic composite materials (electrically conductive and insulating) should be almost the same.
  • the thermal expansion coefficient of SiC with 4 * 10 ⁇ 6 K "1 is approximately midway between that of silicon nitride (2.5 * 10 ⁇ 6 K -1 ) and that of MoSi 2 (8.25 * 10 ⁇ 6 K 1 ), which has an advantageous effect on the thermal behavior, in particular under thermal cycling.
  • the resistance of MoSi 2 is 2 * 10 5 ⁇ cm, that of SiC in the range 0.1 to 1000 ⁇ cm (depending on the C content) and that of silicon nitride at l * 10 12 ⁇ cm.
  • the resistivity can be set in a range of 0.001 to 10 ⁇ ⁇ cm for an electrically conductive ceramic composite without reaching the percula- tion threshold.
  • the three components are directly milled and homogenized during the treatment of the starting powders and not formed by reaction sintering. Thus, there is no reactive formation of one of the three components.
  • the three components can be used in powder form.
  • a silicon nitride powder should have an average particle size d50 in the range 0.2 to 2.5 ⁇ m, molybdenum silicide in the range 0.5 to 2.4 ⁇ m and silicon carbide in the range 0.5 to 2 ⁇ m.
  • molybdenum silicide and silicon carbide powder should be as fine as possible.
  • Characteristic is the formation of an electric conductive network structure formed with MoSi 2 and SiC in the volume of the base ceramic SIaN 4 .
  • An electrically conductive ceramic composite can be used in proportions of 40% by mass of silicon nitride, 30
  • Mass% silicon carbide and 30 mass% molybdenum silicide be formed. It has a specific electrical resistance of 0.2 ⁇ cm, which can be adjusted so targeted.
  • An electrically insulating (dielectric) ceramic composite may be formed in proportions of 65% by mass of silicon nitride, 5% by mass of silicon carbide, and 30% by mass of molybdenum silicide. It has a specific electrical resistance of at least 100 ⁇ cm.
  • Conventional sintering additives can be used for both ceramic composite materials.
  • the difference in the proportions of molybdenum silicide in the electrically conductive and in the insulating part of a heating element should not be greater than 10% by mass.
  • the specific electrical resistance is at a SiC content of 6% by mass at 2282 ⁇ cm, with a share of 9% by mass at 10 ⁇ cm, with a share of 11% by mass at 0.03 ⁇ cm and a share of 17 Mass% at 0.03 ⁇ cm.
  • Example 1 In a first example of a heating element according to the invention a Kermikkompositwerkstoff with electrically conductive main component of 47 mass% molybdenum disilicide, with 18 mass% SiC and 35 mass% silicon nitride is formed for the electrically conductive part. It has a specific electrical resistance of 0.01 ⁇ cm and a thermal expansion coefficient of 3.94 * 10 "6 K " 1 .
  • non-electrically conductive part a composition having 47% by mass of molybdenum disilicide, 0% by mass of SiC and 52% by mass of silicon nitride was selected.
  • the specific electrical resistance is infinite and the thermal expansion coefficient is 3.20 * 10 " ⁇ K " 1 .
  • Sintering additives containing 10% by mass of SC 2 O 3 based on the proportion of silicon nitride and silicon carbide as the main component are used.
  • a mixture of the pulverulent starting components is prepared in an isopropanol suspension, which is then dried in a rotary evaporator. Kneading with added polymers and surfactants achieves an injection-moldable consistency.
  • a heating element in the form of a glow plug with a diameter of 3 mm and a length of 45 mm can be produced in a two-component injection molding process. Then organic components are expelled during a heat treatment. The sintering takes place in a nitrogen atmosphere at temperatures up to max. 1800 0 C.
  • a heating element produced in this way can be used in continuous operation at an application temperature of 1500 ° C. without causing damage or destruction.
  • a Kermikkompositwerkstoff with electrically conductive main component of 20 mass% molybdenum disilicide with 30 mass% SiC and 45 mass% silicon nitride is formed for the electrically conductive part. It has a specific electrical resistance of 0.2 ⁇ cm and a thermal expansion coefficient of 2.9 * 10 ⁇ 6 K -1 .
  • composition with 20% by mass of molybdenum disilicide, 10% by mass of SiC and 69% by mass of silicon nitride.
  • the specific electrical resistance goes to infinity and the thermal expansion coefficient is 2.81 ⁇ 10 "6 K '1.
  • Sintering additives with Y 2 O 3 / Al 2 O 3 (with 7% by mass of Y 2 O 3 and 5% by mass of Al 2 O 3 based on silicon nitride and silicon carbide) are used as the main component.
  • a heating element can be provided in the form of a plate with a jet-shaped heating zone by isostatic pressing of both ceramic composites in a defined structure and subsequent green processing.
  • an electrically insulating part is surrounded on the outside by an electrically conductive part in a U-shaped manner.
  • organic components such as pressing aids are expelled in a heat treatment.
  • the sintering takes place in a nitrogen atmosphere at temperatures up to max. 1750 0 C.
  • a heating element produced in this way can be used in continuous operation at an application temperature of 1350 ° C. without damaging or destroying it.
  • a Kermikkompositwerkstoff with electrically conductive main component of 30 mass% molybdenum disilicide, with 35 mass% SiC and 35 mass% silicon nitride is formed for the electrically conductive part. It has an electrical resistivity of 0.05 ohm-cm and a thermal expansion coefficient of 3.21 * 10 "6 K '1.
  • a composition of 24 mass% molybdenum disilicide, 10 mass% SiC and 66 mass% silicon nitride was chosen.
  • Sintering additives with Y 2 O 3 (15% by weight based on the proportions of silicon nitride and silicon carbide) are used as the main component.
  • a mixture of the pulverulent starting components is prepared in a water suspension
  • the film-pourable suspension is prepared by film-casting the two ceramic composites in the Finished structure, with subsequent lamination and green processing to a heating element processed (a variety of ' geometries are possible).
  • organic components such as dispersants, are expelled during a heat treatment.
  • the sintering takes place in a nitrogen atmosphere at temperatures up to max. 1800 0 C.
  • a heating element manufactured in this way can be used in continuous operation at an application temperature of 1400 ° C. without damaging or destroying it.

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Abstract

The invention relates to ceramic electric heating elements, such as glow plugs, or even heating pins, which are made of a combination of electrically conductive and electrically insulating ceramic materials. The object of the invention is to provide ceramic electric heating elements, wherein predetermined electric conductivities can be selectively adjusted in a broad range, and which have at least close to no residual stress due to an adjusted sintering and thermal expansion behavior of the ceramic materials used during sintering and the use at high temperatures. In the heating element according to the invention, the parts are made from an electrically conductive and an electrically insulating ceramic composite material. At least the electrically conductive ceramic composite material is formed using at least three ceramic components, wherein one ceramic base component is silicon nitride, SiAION, or aluminum nitride, and the electrical conductivity is influenced by at least two ceramic components, wherein one or more components (n) comprise an electrically conductive silicon of a metal selected from Mo, W, Ta, Nb, Ti, Zr, Hf, V, and Cr, and a further ceramic component having a lower electric conductivity as opposed to this/these component(s), and wherein the respective portion of further ceramic components determines the electric conductivity of the ceramic composite material(s).

Description

Keramisches elektrisches HeizelementCeramic electric heating element

Die Erfindung betrifft keramische elektrische Heiz- elemente, wie Glühkerzen oder auch Heizstifte, die mit einer Kombination von elektrisch leitenden und elektrisch isolierenden keramischem Werkstoffen gebildet sind. Diese Werkstoffkombination kann bevorzugt bei hohen Temperaturen eingesetzt werden.The invention relates to ceramic electrical heating elements, such as glow plugs or heating pins, which are formed with a combination of electrically conductive and electrically insulating ceramic materials. This material combination can preferably be used at high temperatures.

Für Glühkerzen oder auch Heizstifte werden in herkömmlicher Form Keramikwerkstoffe, die aus Silicium- nitrid und Molybdänsilizid oder einem anderen Silizid gebildet sind, eingesetzt. Die elektrische Leitfähig- keit wird dabei nur über den Anteil und die Korngröße des Molybdänsilizid beeinflusst. Der elektrisch isolierende keramische Werkstoff ist ebenfalls aus SiIi- ciumnitrid und Molybdänsilizid gebildet. Der Volumenanteil der elektrisch leitfähigen Komponente (Molyb- dänsilizid) ist dann aber in Bezug zur elektrisch i- solierenden Komponente (Siliciumnitrid) kleiner. Die unterschiedliche Zusammensetzung der beiden eingesetzten Werkstoffe wirkt sich aber nachteilig auf die Herstellung und das Standzeitverhalten solcher Heiz- elemente aus, da sich die beiden HauptbestandteileFor glow plugs or heating pins, ceramic materials which are formed from silicon nitride and molybdenum silicide or another silicide are used in conventional form. The electrical conductivity is influenced only by the proportion and the grain size of the molybdenum silicide. The electrically insulating ceramic material is likewise formed from silicon nitride and molybdenum silicide. The volume fraction of the electrically conductive component (molybdenum silicide) is then, however, in relation to the electrically solubilizing component (silicon nitride) smaller. However, the different composition of the two materials used has a disadvantageous effect on the production and the service life of such heating elements, since the two main components

(Siliciumnitrid und Molybdänsilizid) in ihren thermo- physikalischen Eigenschaften sehr stark unterscheiden. Insbesondere treten bei der Sinterung Unterschiede im Verdichtungsverhalten auf, was wiederum zu Geometrieinstabilitäten oder zur Rissbildung führen kann.(Silicon nitride and molybdenum silicide) are very different in their thermo-physical properties. In particular, sintering results in differences in the compaction behavior, which in turn can lead to geometry instabilities or crack formation.

Problematisch ist es außerdem, dass die Wärmeausdehnungskoeffizienten dieser beiden Werkstoffe erheblich voneinander abweichen, so dass auch beim Einsatz Eigenspannungen nicht vermieden werden können. Die e- lektrische Leitfähigkeit kann dabei, wie bereits angesprochen nur über die Anteile und die Korngröße des Molybdänsilizids beeinflusst werden. Da dies aber nur in Grenzen möglich ist, kann nur ein begrenzter Bereich der elektrischen Leitfähigkeit mit diesen beiden Werkstoffen abgedeckt und diese genau eingestellt werden. Solche Heizelemente können daher nicht in beliebigen geometrischen Formen hergestellt und univer- seil eingesetzt werden.It is also problematic that the thermal expansion coefficients of these two materials differ significantly, so that even when using residual stresses can not be avoided. As already mentioned, the electrical conductivity can be influenced only by the proportions and the grain size of the molybdenum silicide. However, since this is only possible within limits, only a limited range of electrical conductivity can be covered with these two materials and these can be precisely adjusted. Such heating elements can therefore not be produced in any geometric shapes and used universally.

Aus DE 101 51 617 B4 ist ein heizbares keramisches Element bekannt, das mit einer elektrisch isolierenden und mindestens einer elektrisch leitenden Zone aus keramischem Material gebildet ist.From DE 101 51 617 B4 a heatable ceramic element is known, which is formed with an electrically insulating and at least one electrically conductive zone of ceramic material.

Die in DE 198 60 919 Cl beschriebene technische Lösung betrifft ein keramisches Heizelement und dafür geeignetes Herstellungsverfahren. Es soll eine innen- liegende Isolationsschicht und eine außenliegendeThe technical solution described in DE 198 60 919 C1 relates to a ceramic heating element and suitable manufacturing method. It should be an inner insulation layer and an outer layer

Leitschicht aufweisen. Beide Schichten sollen neben anderen Komponenten Siliciumnitrid und Molybdänsili- zid enthalten.Have conductive layer. Both layers should be next to other components include silicon nitride and molybdenum silicide.

Eine Glühkerze für eine Dieselmaschine ist in DE 36 21 216 C2 beschrieben.A glow plug for a diesel engine is described in DE 36 21 216 C2.

Aus DE 697 00 797 T2 ist ebenfalls ein keramisches Heizelement bekannt.From DE 697 00 797 T2 a ceramic heating element is also known.

Es ist daher Aufgabe der Erfindung, keramische elektrische Heizelemente zur Verfügung zu stellen, bei denen vorgegebene elektrische Leitfähigkeiten in einem breiten Bereich gezielt eingestellt werden können und die infolge eines angepassten Sinter- und Wärmeaus- dehnungsverhaltens der eingesetzten keramischen Werkstoffe bei der Sinterung und dem Einsatz bei hohen Temperaturen zumindest nahezu keine Eigenspannungen aufweisen.It is therefore the object of the invention to provide ceramic electrical heating elements in which predetermined electrical conductivities can be set in a targeted manner over a wide range and, as a result of an adapted sintering and thermal expansion behavior of the ceramic materials used, during sintering and use high temperatures have at least almost no residual stresses.

Erfindungsgemäß wird diese Aufgabe mit Heizelementen, die die Merkmale des Anspruchs 1 aufweisen, gelöst.According to the invention, this object is achieved with heating elements having the features of claim 1.

Vorteilhafte Ausgestaltungen und Weiterbildungen der Erfindung können mit in untergeordneten Ansprüchen bezeichneten Merkmalen erreicht werden.Advantageous embodiments and further developments of the invention can be achieved with features described in the subordinate claims.

Bei dem erfindungsgemäßen Heizelement sind der elektrisch leitende mit einem elektrisch leitenden und der elektrisch isolierende Teil mit einem elektrisch iso- lierenden Keramikkompositwerkstoff gebildet, wobei mindestens der elektrisch leitende Teil mit drei keramischen Komponenten gebildet ist. Dabei ist in beiden Keramikkompositwerkstoffen als elektrisch leitfähige Hauptkomponente ein oder mehrere elektrisch lei- tende(s) Silizid(e), das/die mit einem Metall ausgewählt aus Mo, W, Ta, Nb, Ti, Zr, Hf, V und Cr gebil- det ist/sind, enthalten, wobei Molybdänsilizid bevorzugt ist. Das keramische Basismaterial ist dabei Si- liciumnitririd, Sialon oder Aluminiumnitrid.In the heating element according to the invention, the electrically conductive are formed with an electrically conductive and the electrically insulating part with an electrically insulating ceramic composite material, wherein at least the electrically conductive part is formed with three ceramic components. In this case, in both ceramic composite materials as the electrically conductive main component one or more electrically conductive silicide (s) is present, which is bonded to a metal selected from Mo, W, Ta, Nb, Ti, Zr, Hf, V and Cr - det is / are, with molybdenum silicide being preferred. The ceramic base material is silicon nitriride, sialon or aluminum nitride.

Die elektrischen Eigenschaften der beiden Keramikkompositwerkstoffe werden durch den Anteil einer zusätzlich elektrisch weniger leitfähigen keramischen Komponente, wie SiC oder B4C eingestellt. Diese weisen ähnliche thermo-physikalische Eigenschaften wie das Siliciumnitrid auf.The electrical properties of the two ceramic composite materials are adjusted by the proportion of an additionally electrically less conductive ceramic component, such as SiC or B 4 C. These have similar thermo-physical properties as the silicon nitride.

Durch nahezu gleiche Anteile der elektrisch leitenden Hauptkomponente weisen auch beide Keramikkompositwerkstoffe (elektrisch leitender und isolierender) sehr ähnliche thermo-physikalische Eigenschaften auf. Aus diesem Grund treten sowohl bei der Sinterung als auch während des Einsatzes nur vernachlässigbare Eigenspannungen bei einem erfindungsgemäßen Heizelement auf, was eine vereinfachte Herstellung und ein deut- lieh verbessertes Standzeitverhalten mit verbesserter Zuverlässigkeit und erhöhter Lebensdauer zur Folge hat.By virtue of almost equal proportions of the electrically conductive main component, both ceramic composite materials (electrically conductive and insulating) also have very similar thermo-physical properties. For this reason, occur only during sintering and during use only negligible residual stresses in a heating element according to the invention, which has a simplified production and a significantly improved leh lifetime behavior with improved reliability and increased life result.

Besonders bevorzugt ist das erfindungsgemäße Heizele- ment aus zwei Keramikkompositwerkstoffen mit Siliciumnitrid, Siliciumcarbid und Molybdänsilizid gebildet, wobei der Anteil von Molybdänsilizid in beiden Keramikkompositwerkstoffen (elektrisch leitend und isolierend) nahezu gleich sein sollte.The heating element according to the invention is particularly preferably formed of two ceramic composite materials with silicon nitride, silicon carbide and molybdenum silicide, wherein the proportion of molybdenum silicide in both ceramic composite materials (electrically conductive and insulating) should be almost the same.

So liegt der thermische Ausdehnungskoeffizient von SiC mit 4*10~6 K"1 ca. mittig zwischen dem von Siliciumnitrid (2,5* 10~6 K"1) -und dem von MoSi2 (8,25*10~6 K"1) , was sich vorteilhaft auf das thermische Verhalten, insbesondere bei thermischer Wechselbeanspruchung auswirkt. Der spezifische elektri- sehe Widerstand von MoSi2 liegt bei 2*105 Ωcm, der von SiC im Bereich 0,1 bis 1000 Ωcm (in Abhängigkeit des C-Anteils) und der von Siliciumnitrid bei l*1012 Ωcm.Thus, the thermal expansion coefficient of SiC with 4 * 10 ~ 6 K "1 is approximately midway between that of silicon nitride (2.5 * 10 ~ 6 K -1 ) and that of MoSi 2 (8.25 * 10 ~ 6 K 1 ), which has an advantageous effect on the thermal behavior, in particular under thermal cycling. The resistance of MoSi 2 is 2 * 10 5 Ωcm, that of SiC in the range 0.1 to 1000 Ωcm (depending on the C content) and that of silicon nitride at l * 10 12 Ωcm.

Es hat sich überraschend herausgestellt, dass durch eine Kombination mit einem keramischen Werkstoff mit deutlich höherem spezifischen elektrischen Widerstand, die geforderte elektrische Leitfähigkeit be- reits bei einem Anteil an Molybdänsilsizid, der unterhalb der üblicherweise erforderlichen Perculati- onsschwelle liegt, erreicht werden kann.It has surprisingly been found that the required electrical conductivity can already be achieved by a combination with a ceramic material having a significantly higher specific electrical resistance, even at a proportion of molybdenum silicide which is below the usually required threshold for percussion.

Außerdem kann durch bestimmt gewählte Anteile an Si- lizid und Carbid der spezifische Widerstand in einem Bereich von 0,001 bis 10 Ω cm, bei einem elektrisch leitenden Keramikkompositwerkstoff eingestellt werden, ohne die Perculationsschwelle zu erreichen.In addition, with certain proportions of silicide and carbide selected, the resistivity can be set in a range of 0.001 to 10 Ω · cm for an electrically conductive ceramic composite without reaching the percula- tion threshold.

Die drei Komponenten werden während der Behandlung der Ausgangspulver direkt miteinander gemahlen und homogenisiert und dabei nicht durch Reaktionssintern gebildet. Es erfolgt also keine reaktive Bildung einer der drei Komponenten. Bei der Herstellung eines erfindungsgemäßen Keramikkompositwerkstoffs können die drei Komponenten pulverförmig eingesetzt werden. Dabei sollte ein Siliciumnitridpulver eine mittlere Partikelgröße d50 im Bereich 0,2 bis 2,5 μm, Molyb- dänsilizid im Bereich 0,5 bis 2,4 μm und Siliciumcar- bid im Bereich 0,5 bis 2 μm aufweisen. Insbesondere Molybdänsilzid- und Siliciumcarbidpulver sollten so fein wie möglich sein.The three components are directly milled and homogenized during the treatment of the starting powders and not formed by reaction sintering. Thus, there is no reactive formation of one of the three components. When producing a ceramic composite material according to the invention, the three components can be used in powder form. A silicon nitride powder should have an average particle size d50 in the range 0.2 to 2.5 μm, molybdenum silicide in the range 0.5 to 2.4 μm and silicon carbide in the range 0.5 to 2 μm. In particular, molybdenum silicide and silicon carbide powder should be as fine as possible.

Charakteristisch ist die Bildung einer- elektrisch leitfähigen Netz-Struktur, die mit MoSi2 und SiC im Volumen der Basiskeramik SIaN4 gebildet ist.Characteristic is the formation of an electric conductive network structure formed with MoSi 2 and SiC in the volume of the base ceramic SIaN 4 .

Ein elektrisch leitender Keramikkompositwerkstoff kann mit Anteilen von 40 Masse-% Siliciumnitrid, 30An electrically conductive ceramic composite can be used in proportions of 40% by mass of silicon nitride, 30

Masse-% Siliciumcarbid und 30 Masse-% Molybdänsilizid gebildet sein. Er weist einen spezifischen elektrischen Widerstand von 0,2 Ω cm auf, der so gezielt eingestellt werden kann.Mass% silicon carbide and 30 mass% molybdenum silicide be formed. It has a specific electrical resistance of 0.2 Ω cm, which can be adjusted so targeted.

Ein elektrisch isolierender (dielektrisch) Keramikkompositwerkstoff kann mit Anteilen von 65 Masse-% Siliciumnitrid, 5 Masse-% Siliciumcarbid und 30 Mas- se-% Molybdänsilizid gebildet sein. Er weist einen spezifischen elektrischen Widerstand von mindestens 100 Ω cm auf.An electrically insulating (dielectric) ceramic composite may be formed in proportions of 65% by mass of silicon nitride, 5% by mass of silicon carbide, and 30% by mass of molybdenum silicide. It has a specific electrical resistance of at least 100 Ω cm.

Es können für beide Keramikkompositwerkstoffe herkömmliche Sinteradditive eingesetzt werden.Conventional sintering additives can be used for both ceramic composite materials.

Mit dem Siliciumcarbid kann ein feineres Gefüge ausgebildet werden, was neben dem günstigeren Wärmeausdehnungsverhalten auch verbesserte mechanische Eigenschaften hervorruft. Die Oxidationsbeständigkeit ist ebenfalls verbessert.With the silicon carbide, a finer structure can be formed, which in addition to the favorable thermal expansion behavior also causes improved mechanical properties. The oxidation resistance is also improved.

Der Unterschied der Anteile an Molybdänsilizid im e- lektrisch leitenden und im isolierenden Teil eines Heizelementes sollte nicht größer als 10 Masse-% betragen.The difference in the proportions of molybdenum silicide in the electrically conductive and in the insulating part of a heating element should not be greater than 10% by mass.

So weist ein bei herkömmlichen Heizelementen eingesetzter Keramikwerkstoff, der mit 34 Masse-% SIsN4 und 66 Masse-% MoSi2 hergestelltist, einen thermi- sehen Ausdehungskoeffizienten von 4,28 * 10~6 K"1 und einen spezifischen elektrischen Widerstand von 0,005 Ωcm auf.Thus, a conventional heating elements inserted ceramic material, the hergestelltist with 34 mass% SiSn 4 and 66% by mass of MoSi2, see a thermal expansion coefficient of 4.28 * 10 -6 K "1 and a specific electrical resistance of from 0.005 Ωcm on.

Bei der Erfindung einsetzbare elektrisch leitende Keranαikkompositwerkstoffe mit einem Anteil von 48 Masse-% Si3N4, 5 Masse-% SiC und 47 Masse-% MoSi2 weisen einen thermischen Ausdehnungskoeffizienten von 3,21*10~6 K"1 und einen spezifischen elektrischen Widerstand von 0,162 Ωcm, ein Keramikkompositwerkstoff mit einem Anteil von 36 Masse-% Si3N4, 28 Masse-% SiC und 36 Masse-% MoSi2 weist einen thermischen Ausdehnungskoeffizienten von 3,32*10~6 K"1 und einen spezifischen elektrischen Widerstand von 0,03 Ωcm, einem Anteil von 61 Masse-% Si3N4, 3 Masse-% SiC und 36- Masse-% MoSi2, mit einem Anteil von 35 Masse-% Si3N4, 18 Masse-% SiC und 47 Masse-% MoSi2 weisen einen thermischen Ausdehnungskoeffizienten von 3,69*10 K"1 und einen spezifischen elektrischen Widerstand von 0,01 Ωcm auf und ein elektrisch isolierender Keramikkompositwerkstoff mit 36 Masse-% MoSi2 weist einen thermischen Ausdehnungskoeffizienten von 2,68*10~6 K"1 und einen spezifischen elektrischen Widerstand von 142030 Ωcm auf.In the invention applicable electrically conductive Keranαikkompositwerkstoffe with a share of 48 mass% Si 3 N 4 , 5 mass% SiC and 47 mass% MoSi 2 have a thermal expansion coefficient of 3.21 * 10 ~ 6 K "1 and a specific electrical resistance of 0.162 Ωcm, a ceramic composite having a content of 36 mass% Si 3 N 4 , 28 mass% SiC and 36 mass% MoSi 2 has a thermal expansion coefficient of 3.32 * 10 ~ 6 K "1 and a specific electrical resistance of 0.03 Ωcm, a proportion of 61 mass% Si 3 N 4 , 3 mass% SiC and 36 mass% MoSi 2 , with a content of 35 mass% Si 3 N 4 , 18 mass -% SiC and 47% by mass MoSi 2 have a thermal expansion coefficient of 3.69 * 10 ~ δ K "1 and a specific electrical resistance of 0.01 ohm-cm and an electrically insulating Keramikkompositwerkstoff with 36% by mass of MoSi 2 has a coefficient of thermal expansion of 2.68 * 10 ~ 6 K -1 and a specific elect resistance of 142030 Ωcm.

Bei einem konstanten Anteil von 47 Masse-% MoSi2 kann durch veränderte Anteile an SiC Einfluss auf den spezifischen elektrischen Widerstand genommen werden. So kann dabei davon ausgegangen werden, dass ohne zusätzliches SiC der spezifische elektrische Widerstand gegen unendlich geht. Bei einem SiC-Anteil von 5 Mas- se-% bei 0,2 Ωcm liegt, bei einem Anteil von 9 Masse- % bei 0,06 Ωcm, bei einem Anteil von 14 Masse-% bei 0,002 Ωcm, bei einem Anteil von 18 Masse-% bei 0,002 Ωcm und bei einem Anteil von 23 Masse-% bei 0,002 Ωcm liegt.At a constant proportion of 47% by mass of MoSi 2 may be taken by changing proportions of SiC influence on the electrical resistivity. Thus, it can be assumed that without additional SiC the specific electrical resistance goes to infinity. With a SiC content of 5 mass% at 0.2 Ωcm, with a proportion of 9 mass% at 0.06 Ωcm, with a proportion of 14 mass% at 0.002 Ωcm, with a proportion of 18 Mass% at 0.002 Ωcm and at a proportion of 23% by mass at 0.002 Ωcm.

Bei einem konstanten Anteil von 36 Masse-% MoSi2 kann durch veränderte Anteile an SiC Einfluss auf den spezifischen elektrischen Widerstand genommen werden. So kann dabei davon ausgegangen werden, dass ohne zusätzliches und bis zu einem Anteil von 3 Masse-% SiC der spezifische elektrische Widerstand auch hier ge- gen unendlich geht, was bei einem elektrisch isolierenden Keramikverbundwerkstoff gewünscht ist. Der spezifische elektrische Widerstand liegt bei einem SiC-Anteil von 6 Masse-% bei 2282 Ωcm, bei einem Anteil von 9 Masse-% bei 10 Ωcm, bei einem Anteil von 11 Masse-% bei 0,03 Ωcm und bei einem Anteil von 17 Masse-% bei 0,03 Ωcm.With a constant proportion of 36% by mass of MoSi 2, it is possible to influence the specific electrical resistance by changing the proportion of SiC. Thus, it can be assumed that, without additional and up to a proportion of 3 mass% SiC, the specific electrical resistance also approaches infinity, which is desirable in the case of an electrically insulating ceramic composite material. The specific electrical resistance is at a SiC content of 6% by mass at 2282 Ωcm, with a share of 9% by mass at 10 Ωcm, with a share of 11% by mass at 0.03 Ωcm and a share of 17 Mass% at 0.03 Ωcm.

Bei einem konstanten Anteil von 6 Masse-% SiC treten durch veränderte Anteile an MoSi2 Änderungen des spe- zifischen elektrischen Widerstands, wie folgt auf. So kann dabei davon ausgegangen werden, dass bei einem Anteil von bis zu ca. 30 Masse-% MoSi2 der spezifische elektrische Widerstand gegen unendlich geht. Bei einem Anteil von 32 Masse-% bei 1573 Ωcm liegt, bei einem Anteil von 36 Masse-% bei 18 Ωcm, bei einem Anteil von 38 Masse-% bei 18 Ωcm, bei einem Anteil von 42 Masse-% bei 1 Ωcm, bei einem Anteil von 47 Masse-% bei 0,05 Ωcm liegt und bei einem Anteil von 51 Masse- % bei 0,005 Ωcm liegt.At a constant proportion of 6% by mass of SiC, changes in the specific electrical resistance occur as a result of altered proportions of MoSi 2 . Thus, it can be assumed that with a share of up to about 30 mass% MoSi 2, the specific electrical resistance goes to infinity. With a share of 32% by mass at 1573 Ωcm, with a share of 36% by mass at 18 Ωcm, with a share of 38% by mass at 18 Ωcm, with a share of 42% by mass at 1 Ωcm a proportion of 47% by mass at 0.05 Ωcm and is at a proportion of 51% by mass at 0.005 Ωcm.

Nachfolgend soll die Erfindung an Hand von Beispielen näher erläutert werden.The invention will be explained in more detail with reference to examples.

Beispiel 1: Bei einem ersten Beispiel eines erfindungsgemäßen Heizelements ist für den elektrisch leitenden Teil ein Kermikkompositwerkstoff mit elektrisch leitender Hauptkomponente aus 47 Masse-% Molybdändisilizid, mit 18 Masse-% SiC und 35 Masse-% Siliciumnitrid gebildet. Er weist einen spezifischen elektrischen Widerstand von 0,01 Ωcm und einen thermischen Ausdehnungskoeffizienten von 3,94 * 10"6 K"1 auf.Example 1: In a first example of a heating element according to the invention a Kermikkompositwerkstoff with electrically conductive main component of 47 mass% molybdenum disilicide, with 18 mass% SiC and 35 mass% silicon nitride is formed for the electrically conductive part. It has a specific electrical resistance of 0.01 Ωcm and a thermal expansion coefficient of 3.94 * 10 "6 K " 1 .

Für den nicht elektrisch leitenden Teil wurde eine Zusammensetzung mit 47 Masse-% Molybdändisilizid, 0 Masse-% SiC und 52 Masse-% Siliciumnitrid gewählt. Der spezifische elektrische Widerstand geht gegen un- endlich und der thermische Ausdehnungskoeffizient liegt bei 3,20 * 10 K"1.For the non-electrically conductive part, a composition having 47% by mass of molybdenum disilicide, 0% by mass of SiC and 52% by mass of silicon nitride was selected. The specific electrical resistance is infinite and the thermal expansion coefficient is 3.20 * 10 K " 1 .

Es werden Sinteradditive mit 10 Masse-% SC2O3 bezogen auf den Anteil von Siliciumnitrid und Siliciumcarbid als Hauptkomponente eingesetzt.Sintering additives containing 10% by mass of SC 2 O 3 based on the proportion of silicon nitride and silicon carbide as the main component are used.

Bei der Herstellung wird eine Mischung der pulverför- migen Ausgangskomponenten in einer Isopropanol- Suspension hergestellt, die dann in einem Rotations- Verdampfer getrocknet wird. Durch Kneten mit zugegebenen Polymeren und Tensiden wird eine spritzgussfähige Konsistenz erreicht. Ein Heizelement in Form eines Glühstiftes mit einem Durchmesser von 3 mm und einer Länge von 45 mm kann im Zwei-Komponenten- Spritzgussverfahren hergestellt werden. Dann werden organische Komponenten bei einer Wärmebehandlung ausgetrieben. Die Sinterung erfolgt in einer Stickstoffatmosphäre bei Temperaturen bis max. 1800 0C.In the preparation, a mixture of the pulverulent starting components is prepared in an isopropanol suspension, which is then dried in a rotary evaporator. Kneading with added polymers and surfactants achieves an injection-moldable consistency. A heating element in the form of a glow plug with a diameter of 3 mm and a length of 45 mm can be produced in a two-component injection molding process. Then organic components are expelled during a heat treatment. The sintering takes place in a nitrogen atmosphere at temperatures up to max. 1800 0 C.

Ein so hergestelltes Heizelement kann im Dauerbetrieb bei einer Anwendungstemperatur von 1500 0C eingesetzt werden, ohne dass es zu Beschädigungen oder zur Zerstörung kommt.A heating element produced in this way can be used in continuous operation at an application temperature of 1500 ° C. without causing damage or destruction.

Beispiel 2:Example 2:

Bei einem zweiten Beispiel eines erfindungsgemäßen Heizelements ist für den elektrisch leitenden Teil ein Kermikkompositwerkstoff mit elektrisch leitender Hauptkomponente aus 20 Masse-% Molybdändisilizid mit 30 Masse-% SiC und 45 Masse-% Siliciumnitrid gebildet. Er weist einen spezifischen elektrischen Widerstand von 0,2 Ωcm und einen thermischen Ausdehnungskoeffizienten von 2,9 * 10~6 K"1 auf.In a second example of a heating element according to the invention a Kermikkompositwerkstoff with electrically conductive main component of 20 mass% molybdenum disilicide with 30 mass% SiC and 45 mass% silicon nitride is formed for the electrically conductive part. It has a specific electrical resistance of 0.2 Ωcm and a thermal expansion coefficient of 2.9 * 10 ~ 6 K -1 .

Für den nicht elektrisch leitenden Teil wurde eineFor the non-electrically conductive part was a

Zusammensetzung mit 20 Masse-% Molybdändisilizid, 10 Masse-% SiC und 69 Masse-% Siliciumnitrid gewählt. Der spezifische elektrische Widerstand geht gegen unendlich und der thermische Ausdehnungskoeffizient liegt bei 2,81 * 10"6 K"1.Composition with 20% by mass of molybdenum disilicide, 10% by mass of SiC and 69% by mass of silicon nitride. The specific electrical resistance goes to infinity and the thermal expansion coefficient is 2.81 × 10 "6 K '1.

Es werden Sinteradditive mit Y2O3/AI2O3 ( mit 7 Masse- % Y2O3 und 5 Masse-% AI2O3 bezogen auf Sliciumnitrid und Siliciumcarbid) als Hauptkomponente eingesetzt.Sintering additives with Y 2 O 3 / Al 2 O 3 (with 7% by mass of Y 2 O 3 and 5% by mass of Al 2 O 3 based on silicon nitride and silicon carbide) are used as the main component.

Bei der Herstellung wird eine Mischung der pulverför- migen Ausgangskomponenten in einer Wasser-Suspension hergestellt, die dann durch Sprühgranulation getrocknet wird. Ein Heizelement kann durch isostatisches Pressen beider keramischer Komposite in definierter Struktur und anschließender Grünbearbeitung platten- förmig mit strahlförmiger Heizzone zur Verfügung gestellt werden. Dabei ist eine elektrisch isolierendes Teil außen von elektrisch leitendem Teil u-förmig um- schlössen. Dann werden organische Komponenten, wie Presshilfsmittel, bei einer Wärmebehandlung ausgetrieben. Die Sinterung erfolgt in einer Stickstoffatmosphäre bei Temperaturen bis max. 1750 0C.In the preparation, a mixture of the pulverulent starting components is prepared in a water suspension, which is then dried by spray granulation. A heating element can be provided in the form of a plate with a jet-shaped heating zone by isostatic pressing of both ceramic composites in a defined structure and subsequent green processing. In this case, an electrically insulating part is surrounded on the outside by an electrically conductive part in a U-shaped manner. Then, organic components such as pressing aids are expelled in a heat treatment. The sintering takes place in a nitrogen atmosphere at temperatures up to max. 1750 0 C.

Ein so hergestelltes Heizelement kann im Dauerbetrieb bei einer Anwendungstemperatur von 1350 0C eingesetzt werden, ohne dass es zu Beschädigungen oder zur Zerstörung kommt .A heating element produced in this way can be used in continuous operation at an application temperature of 1350 ° C. without damaging or destroying it.

Beispiel 3:Example 3:

Bei einem dritten Beispiel eines erfindungsgemäßen Heizelements ist für den elektrisch leitenden Teil ein Kermikkompositwerkstoff mit elektrisch leitender Hauptkomponente aus 30Masse-% Molybdändisilizid , mit 35 Masse-% SiC und 35 Masse-% Siliciumnitrid gebildet. Er weist einen spezifischen elektrischen Widerstand von 0,05 Ωcm und einen thermischen Ausdehnungs- koeffizienten von 3,21 * 10"6 K"1 auf.In a third example of a heating element according to the invention a Kermikkompositwerkstoff with electrically conductive main component of 30 mass% molybdenum disilicide, with 35 mass% SiC and 35 mass% silicon nitride is formed for the electrically conductive part. It has an electrical resistivity of 0.05 ohm-cm and a thermal expansion coefficient of 3.21 * 10 "6 K '1.

Für den nicht elektrisch leitenden Teil wurde eine Zusammensetzung mit 24 Masse-% Molybdändisilizid, 10 Masse-% SiC und 66 Masse-% Siliciumnitrid gewählt. Der spezifische elektrische Widerstand geht gegen unendlich und der thermische Ausdehnungskoeffizient liegt bei 2,95 * 10"6 K"1.For the non-electrically conductive part, a composition of 24 mass% molybdenum disilicide, 10 mass% SiC and 66 mass% silicon nitride was chosen. The electrical resistivity approaches infinity and the thermal expansion coefficient is 2.95 * 10 -6 K -1 .

Es werden Sinteradditive mit Y2O3 ( 15 Masse-% bezo- gen auf die Anteile an Siliciumnitrid und Silicium- carbid) als Hauptkomponente eingesetzt.Sintering additives with Y 2 O 3 (15% by weight based on the proportions of silicon nitride and silicon carbide) are used as the main component.

Bei der Herstellung wird eine Mischung der pulverför- migen Ausgangskomponenten in einer Wasser-Suspension hergestellt, die foliengießfähige Suspension wird durch Foliengießen der beider Keramikkomposite in de- finierter Struktur, mit anschließender Laminierung und Grünbearbeitung zu einem Heizelement verarbeitet (es sind unterschiedlichste' Geometrien möglich) . Dann werden organische Komponenten, wie Dispergier- mittel, bei einer Wärmebehandlung ausgetrieben. Die Sinterung erfolgt in einer Stickstoffatmosphäre bei Temperaturen bis max. 1800 0C.During production, a mixture of the pulverulent starting components is prepared in a water suspension, the film-pourable suspension is prepared by film-casting the two ceramic composites in the Finished structure, with subsequent lamination and green processing to a heating element processed (a variety of ' geometries are possible). Then organic components, such as dispersants, are expelled during a heat treatment. The sintering takes place in a nitrogen atmosphere at temperatures up to max. 1800 0 C.

Ein so hergestelltes Heizelement kann im Dauerbetrieb bei einer Anwendungstemperatur von 1400 0C eingesetzt werden, ohne dass es zu Beschädigungen oder zur Zerstörung kommt .A heating element manufactured in this way can be used in continuous operation at an application temperature of 1400 ° C. without damaging or destroying it.

Bei Sintertemperaturen ab 1.750 °C ist es günstig dem Stickstoff eine Druckerhöhung mit Argon durchzuführen. At sintering temperatures from 1,750 ° C, it is favorable to increase the nitrogen pressure with argon.

Claims

Patentansprüche claims 1. Keramisches elektrisches Heizelement, bei dem Teile jeweils mit einem elektrisch leitenden und einem elektrisch isolierenden Keramikkompositwerkstoff gebildet sind, dabei ist mindestens der elektrisch leitende Keramikkompositwerkstoff mit mindestens drei keramischen Komponenten gebildet, dabei ist eine keramische Basiskomponente Siliciumnitrid, SiAlON oder Alumniumnitrid und die elektrische Leitfähigkeit mit mindestens zwei keramischen Komponenten beeinflusst; wobei eine oder mehrere Komponente (n) ein elektrisch leitendes Silizid eines Metalls, das ausgewählt ist aus Mo, W, Ta, Nb, Ti, Zr, Hf, V und Cr; wobei der Anteil an Silizid (en) unterhalb der Per- culationsschwelle liegt; außerdem eine weitere keramische Komponente mit dem gegenüber dieser/diesen Komponente (n) kleinerer elektrischer Leitfähigkeit enthalten sind und der jeweilige Anteil an weiterer keramischer Komponente die elektrische Leitfähigkeit des/der Keramikkompositwerkstoffe (s) bestimmt.1. Ceramic electric heating element, wherein the parts are each formed with an electrically conductive and an electrically insulating ceramic composite, while at least the electrically conductive Keramikkompositwerkstoff is formed with at least three ceramic components, this is a ceramic base component silicon nitride, SiAlON or Alumniumnitrid and the electrical conductivity influenced by at least two ceramic components; wherein one or more component (s) is an electrically conductive silicide of a metal selected from Mo, W, Ta, Nb, Ti, Zr, Hf, V, and Cr; the proportion of silicide (s) is below the threshold of percussion; In addition, a further ceramic component with respect to this / these component (s) of smaller electrical conductivity are included and the respective proportion of further ceramic component determines the electrical conductivity of the / the Keramikkompositwerkstoffe (s). 2. Heizelement nach Anspruch 1, dadurch gekennzeichnet, dass die weitere keramische Komponente Siliciumcarbid oder B4C ist.2. Heating element according to claim 1, characterized in that the further ceramic component is silicon carbide or B 4 C. 3. Heizelement nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass mindestens ein Sinteradditiv enthalten ist. 3. Heating element according to claim 1 or 2, characterized in that at least one sintering additive is included. 4. Heizelement nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Anteile an Silizid im elektrisch leitenden und im e- lektrisch isolierenden Keramikkompositwerkstoff maximal um 10 Masse-% voneinander abweichen.4. Heating element according to one of the preceding claims, characterized in that the proportions of silicide differ in the electrically conductive and in the lektrisch insulating ceramic composite material by a maximum of 10% by mass. 5. Heizelement nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass es mit Si- liciumnitrid, Molybdänsilizid, Siliciumcarbid und einem Sinteradditiv gebildet ist.5. Heating element according to one of the preceding claims, characterized in that it is formed with silicon nitride, molybdenum silicide, silicon carbide and a sintering additive. 6. Heizelement nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die elektrisch leitenden keramischen Komponenten eine e- lektrisch leitende Netzstruktur innerhalb des Volumens der keramischen Basiskomponente bilden.6. Heating element according to one of the preceding claims, characterized in that the electrically conductive ceramic components form an e-lektrisch conductive network structure within the volume of the ceramic base component. 7. Heizelement nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die elektrische Leitfähigkeit vom jeweiligen Anteil der weiteren keramischen Komponente bestimmt ist.7. Heating element according to one of the preceding claims, characterized in that the electrical conductivity is determined by the respective proportion of the further ceramic component. 8. Heizelement nach einem der vorhergehenden An- sprüche, dadurch gekennzeichnet, dass keine der in den Keramikkompositkomponenten enthaltene Komponente reaktiv beim Sintern gebildet worden ist. 8. Heating element according to one of the preceding claims, characterized in that none of the components contained in the ceramic composite components has been reactively formed during sintering.
PCT/DE2007/002324 2006-12-20 2007-12-17 Ceramic electric heating element Ceased WO2008074319A2 (en)

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