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WO2008067383A3 - Composite substrate sealing methods and resulting devices - Google Patents

Composite substrate sealing methods and resulting devices Download PDF

Info

Publication number
WO2008067383A3
WO2008067383A3 PCT/US2007/085768 US2007085768W WO2008067383A3 WO 2008067383 A3 WO2008067383 A3 WO 2008067383A3 US 2007085768 W US2007085768 W US 2007085768W WO 2008067383 A3 WO2008067383 A3 WO 2008067383A3
Authority
WO
WIPO (PCT)
Prior art keywords
composite substrate
substrate sealing
sealing methods
resulting devices
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/085768
Other languages
French (fr)
Other versions
WO2008067383A2 (en
Inventor
Jian Gu
Chia-Fu Chou
Frederic Zenhausern
Qihuo Wei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Arizona
Arizona State University ASU
Original Assignee
University of Arizona
Arizona State University ASU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Arizona, Arizona State University ASU filed Critical University of Arizona
Publication of WO2008067383A2 publication Critical patent/WO2008067383A2/en
Publication of WO2008067383A3 publication Critical patent/WO2008067383A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/051—Micromixers, microreactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Joining Of Glass To Other Materials (AREA)

Abstract

The present invention provides composite substrates and methods for using them for substrate sealing and production of fluidic devices.
PCT/US2007/085768 2006-11-28 2007-11-28 Composite substrate sealing methods and resulting devices Ceased WO2008067383A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86130906P 2006-11-28 2006-11-28
US60/861,309 2006-11-28

Publications (2)

Publication Number Publication Date
WO2008067383A2 WO2008067383A2 (en) 2008-06-05
WO2008067383A3 true WO2008067383A3 (en) 2008-12-31

Family

ID=39468682

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/085768 Ceased WO2008067383A2 (en) 2006-11-28 2007-11-28 Composite substrate sealing methods and resulting devices

Country Status (1)

Country Link
WO (1) WO2008067383A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104591073A (en) * 2014-12-05 2015-05-06 上海交通大学 Microchannel structure and method for generating microchannel

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016966A1 (en) * 1990-05-10 1991-11-14 Pharmacia Biosensor Ab Microfluidic structure and process for its manufacture
WO1999019717A1 (en) * 1997-10-15 1999-04-22 Aclara Biosciences, Inc. Laminate microstructure device and method for making same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016966A1 (en) * 1990-05-10 1991-11-14 Pharmacia Biosensor Ab Microfluidic structure and process for its manufacture
WO1999019717A1 (en) * 1997-10-15 1999-04-22 Aclara Biosciences, Inc. Laminate microstructure device and method for making same

Also Published As

Publication number Publication date
WO2008067383A2 (en) 2008-06-05

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