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WO2008043122A1 - Générateur de bulles en technologie mems pour la production grosses bulles de vapeur stables - Google Patents

Générateur de bulles en technologie mems pour la production grosses bulles de vapeur stables Download PDF

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Publication number
WO2008043122A1
WO2008043122A1 PCT/AU2006/001477 AU2006001477W WO2008043122A1 WO 2008043122 A1 WO2008043122 A1 WO 2008043122A1 AU 2006001477 W AU2006001477 W AU 2006001477W WO 2008043122 A1 WO2008043122 A1 WO 2008043122A1
Authority
WO
WIPO (PCT)
Prior art keywords
vapour bubble
bubble generator
heater
mems
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/AU2006/001477
Other languages
English (en)
Inventor
Angus John North
Samuel James Myers
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Priority to CA002662725A priority Critical patent/CA2662725A1/fr
Priority to PCT/AU2006/001477 priority patent/WO2008043122A1/fr
Priority to AU2006349360A priority patent/AU2006349360A1/en
Priority to EP06790347A priority patent/EP2074054A4/fr
Priority to JP2009528548A priority patent/JP2010504228A/ja
Priority to TW096103746A priority patent/TWI380910B/zh
Publication of WO2008043122A1 publication Critical patent/WO2008043122A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04598Pre-pulse
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0458Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04588Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/1412Shape

Definitions

  • the invention relates to MEMS devices and in particular MEMS devices that vaporize liquid to generate a vapor bubble during operation.
  • MEMS micro-mechanical systems
  • resistive heaters are used to heat the liquid to the liquid's superheat limit, resulting in the formation of a rapidly expanding vapor bubble.
  • the impulse provided by the bubble expansion can be used as a mechanism for moving liquid through the device. This is the case in thermal inkjet printheads where each nozzle has a heater that generates a bubble to eject a drop of ink onto the print media.
  • the present invention will be described with particular reference to its use in this application.
  • the invention is not limited to inkjet printheads and is equally suited to other devices in which vapor bubbles formed by resistive heaters are used to move liquid through the device (e.g. some 'Lab-on-a-chip' devices).
  • the time scale for heating a liquid to its superheat limit determines how much thermal energy will be stored in the liquid when the superheat limit is reached: this determines how much vapor will be produced and the impulse of the expanding vapor bubble (impulse being defined as pressure integrated over area and time).
  • Impulse being defined as pressure integrated over area and time.
  • Longer time scales for heating result in a greater volume of liquid being heated and hence a larger amount of stored energy, a larger amount of vapor and larger bubble impulse. This leads to some degree of tunability for the bubbles produced by MEMS heaters.
  • Controlling the time scale for heating to the superheat limit is simply a matter of controlling the power supplied to the heater during the nucleation event: lower power will result in a longer nucleation time and larger bubble impulse, at the cost of an increased energy requirement (the extra energy stored in the liquid must be supplied by the heater). Controlling the power may be done by way of reduced voltage across the heater or by way of pulse width modulation of the voltage to obtain a lower time averaged power.
  • the present invention provides a MEMS vapour bubble generator comprising: a chamber for holding liquid; a heater positioned in the chamber for thermal contact with the liquid; and, drive circuitry for providing the heater with an electrical pulse such that the heater generates a vapour bubble in the liquid; wherein, the pulse has a first portion with insufficient power to nucleate the vapour bubble and a second portion with power sufficient to nucleate the vapour bubble, subsequent to the first portion.
  • the heating pulse is shaped to increase the heating rate prior to the end of the pulse, bubble stability can be greatly enhanced, allowing access to a regime where large, repeatable bubbles can be produced by small heaters.
  • the first portion of the pulse is a pre-heat section for heating the liquid but not nucleating the vapour bubble and the second portion is a trigger section for nucleating the vapour bubble.
  • the pre-heat section has a longer duration than the trigger section.
  • the pre-heat section is at least two micro-seconds long.
  • the trigger section is less than a micro-section long.
  • the drive circuitry shapes the pulse using pulse width modulation.
  • the pre-heat section is a series of sub-nucleating pulses.
  • the drive circuitry shapes the pulse using voltage modulation.
  • the time averaged power in the pre-heat section is constant and the time averaged power in the trigger section is constant.
  • the MEMS vapour bubble generator is used in an inkjet printhead to eject printing fluid from nozzle in fluid communication with the chamber.
  • the first portion of the pulse is a pre-heat section for heating the liquid but not nucleating the vapour bubble and the second portion is a trigger section for superheating some of the liquid to nucleate the vapour bubble.
  • the pre-heat section has a longer duration than the trigger section.
  • the pre-heat section is at least two micro-seconds long.
  • the trigger section is less than one micro-section long.
  • the drive circuitry shapes the pulse using pulse width modulation.
  • the pre-heat section is a series of sub-nucleating pulses.
  • the drive circuitry shapes the pulse using voltage modulation.
  • the time averaged power in the pre-heat section is constant and the time averaged power in the trigger section is constant.
  • the present invention provides a MEMS vapour bubble generator used in an inkjet printhead to eject printing fluid from a nozzle in fluid communication with the chamber.
  • the heater is suspended in the chamber for immersion in a printing fluid.
  • the pulse is generated for recovering a nozzle clogged with dried or overly viscous printing fluid.
  • Figures IA to IE show water vapour bubbles generated at different heating rates;
  • Figure 2A and 2B show two alternatives for shaping the pulse into pre-heat and trigger sections;
  • Figure 3 is a plot of the hottest point on a heater and a cooler point on the heater for two different pulse shapes
  • Figure 4A shows water vapour bubbles generated using a traditional square-shaped pulse
  • Figure 4B shows a bubble generated using a pulse shaped by pulse width modulation
  • Figures 4C and 4D show a bubble generated using voltage modulated pulses
  • Figure 5 shows the MEMS bubble generator in use within an inkjet printhead.
  • the temperature profile of the heater will be strongly distorted by cooling at the boundaries of the heater. Ideally the temperature profile would be a "top-hat”, with uniform temperature across the whole heater, but in the case of low heating rates, the edges of the temperature profile will be pulled down.
  • the top-hat temperature profile is ideal for maximising the effectiveness of the heater, as only those portions of the heater above the superheat limit will contribute significantly to the bubble impulse.
  • the nucleation rate is a very strong exponential function of temperature near the superheat limit. Portions of the heater that are even a few degrees below the superheat limit will produce a much lower nucleation rate than those portions above the superheat limit. These portions of the heater have much less contribution to the bubble impulse as they will be thermally isolated by bubbles expanding from hotter portions of the heater. In other words, if the temperature profile across the heater is not uniform, there can exist a race condition between bubble nucleation on colder parts of the heater and bubbles expanding from hotter parts of the heater.
  • Figures IA to IE are line drawings of stroboscopic photographs of vapour bubbles 12 generated at different heating rates by varying the voltage of the drive pulse. Using a strobe with a duration of 0.3 microseconds, the images show capture the bubbles at their greatest extent.
  • the heater 10 is 30 ⁇ m x 4 ⁇ m in an open pool of water at an angle of 15 degrees from the support wafer surface. The dual bubble appearance is due to a reflected image of the bubble on the wafer surface.
  • the drive voltage is 5 volts and the bubble 12 reaches its maximum extent at 1 microsecond.
  • the bubble is relatively small but has a regular shape along the heater length.
  • the drive voltage decreases to 4.1 volts and the time to maximum bubble growth increases to 2 microseconds. Consequently, the bubble 12 is larger but bubble irregularities 14 start to occur.
  • the pulse voltage progressively decreases in Figures 1C, ID and IE (3.75V, 3.45V and 2.95V respectively). As the voltage decreases, so to does the heating rate, thereby increasing the time scale for reaching the liquid superheat limit. This allows more time for heat leakage into the liquid, resulting in a larger amount of stored thermal energy and the production of more vapor when bubble nucleation occurs.
  • the size of the bubble 12 increases. Lower voltages therefore result in greater bubble impulse, allowing the bubble to grow to a greater extent.
  • the irregularities 12 in the bubble shape also increase.
  • the bubble is potentially unstable and non-repeatable when the time scale for heating to the superheat limit exceeds 1 microsecond.
  • the time to maximum bubble size is 1, 2, 3, 5, and 10 microseconds respectively.
  • the invention provides a way of avoiding the instability caused by the race condition so that the designer can use low heating rates to generate a large bubble impulse on a heater with fixed geometry and thermal properties.
  • Figures 2A and 2B shows two possibilities for driving the heaters to produce large, stable bubbles.
  • the drive circuit uses amplitude modulation to decrease the power of the pre-heat section 16 relative to the trigger section 18.
  • pulse width modulation of the voltage (creating a rapid series of sub-ejection pulses) can be used to reduce the power of the pre-heat phase 16 compared to the trigger section 18.
  • pulse shapes that will satisfy the criteria of a relatively low powered pre-heat section and a subsequent trigger section that nucleates the bubble.
  • Shaping the pulse can be done with pulse width modulation, voltage modulation or a combination of both.
  • pulse width modulation is the preferred method of shaping the pulse, being more amenable to CMOS circuit design.
  • the pulse is not limited to a pre-heat and trigger section only; additional pulse sections may be included for other purposes without negating the benefits of the present invention.
  • the sections need not maintain constant power levels. Constant time averaged power is preferred for the pre-heat section and the trigger section, as that is the simplest case to handle theoretically and experimentally.
  • FIG. 3 illustrates the concept: even if the spatial temperature uniformity is poor (an unavoidable side effect of low heating rates in the pre-heat phase), the time lag 32 between the hotter and colder regions of the heater reaching the superheat limit can be reduced by switching to a higher heating rate 36 after the pre-heat. In this way, the colder regions reach the superheat limit before they are thermally isolated by bubbles expanding from hotter regions. The majority of the heater surface reaches the superheat limit 34 before significant bubble expansion occurs, so the heater area will be more effectively and consistently utilised for bubble formation.
  • Figures 4A to 4D demonstrate the effectiveness of shaped pulses in producing large, stable bubbles.
  • the bubble size can be increased tremendously using shaped pulses, without suffering the irregularity shown in Figures IA to IE.
  • a circuit designer will have a choice of voltage modulation or pulse width modulation of the heating signal to create the shaped pulse, but generally pulse width modulation is considered more suitable to integration with e.g. a CMOS driver circuit.
  • a CMOS driver circuit As an example, such a circuit may be used to generate maintenance pulses in an inkjet printhead, where the increased bubble impulse is better able to recover clogged nozzles as part of a printer maintenance cycle. This is discussed in the co-pending application (temporarily referred to by docket number PUAOl IUS), the contents of which are incorporated herein by reference.
  • Figure 5 shows the MEMS bubble generator of the present invention applied to an inkjet printhead.
  • a detailed description of the fabrication and operation of some of the Applicant's thermal printhead ICs is provided in USSN 11/097,308 and USSN 11/246,687. In the interests of brevity, the contents of these documents are incorporated herein by reference.
  • a single nozzle device 30 is shown in Figure 5. It will be appreciated that an array of such nozzles are formed on a supporting wafer substrate 28 using lithographic etching and deposition techniques common within in the field semi-conductor/MEMS fabrication.
  • the chamber 20 holds a quantity of ink.
  • the heater 10 is suspended in the chamber 20 such that it is in electrical contact with the CMOS drive circuitry 22.
  • Drive pulses generated by the drive circuitry 22 heat the heater 10 to generate a vapour bubble 12 that forces a droplet of ink 24 through the nozzle 26.
  • Using the drive circuitry 22 to shape the pulse in accordance with the present invention gives the designer a broader range of bubble impulses from a single heater and drive voltage.
  • Figures 4A to 4D show stroboscopic images of water vapor bubbles in an open pool on a 30 ⁇ m x
  • Figure 4A shows the prior art situation of a simple square profile pulse of 4.2V for 0.7 microseconds.
  • the pulse is shaped by pulse width modulation - a pre-heat series having nine 100 nano-second pulses separated by 150 nano-seconds, followed by a trigger pulse of 300 nano-seconds, all at 4.2V.
  • the bubble size in Figure 4B is greater because of the amount of thermal energy transferred to the liquid prior to nucleation in the trigger pulse.
  • Figures 4C and 4D the pulses are voltage modulated.
  • the pulse of Figure 4C has a pre-heat portion of 2.4V for 8 microseconds, followed by 4V for 0.1 microseconds to trigger nucleation.
  • the Figure 4D pulse has a pre-heat section of 2.25V for 16 microseconds followed by a trigger of 4.2V for 0.15 microseconds.
  • the designer has great flexibility in controlling the bubble size at the design phase or during operation by altering the length of the pre-heat section of the pulse. Care must be given to avoiding accidentally exceeding the superheat limit during the pre-heat section so that nucleation does not occur until the trigger section. If the pulse is pulse width modulated, the modulation should be fast enough to give a reasonable approximation of the temperature rise generated by a constant, reduced voltage. Care must also be given to ensuring the trigger section takes the whole heater above the superheat limit with enough margin to account for system variances, without overdriving to the extent that the heater is damaged. These considerations can be met with routine thermal modelling or experiment with the heater in an open pool of liquid.

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne un générateur de bulles de vapeur en technologie MEMS utilisant un chauffage en contact thermique avec un liquide pour produire une bulle. Le chauffage est alimenté par une impulsion électrique dont la forme est conçue pour présenter une partie de sous-nucléation de puissance relativement basse et une partie haute puissance qui provoque la bulle par nucléation. L'énergie thermique transférée au liquide par la partie de sous-nucléation accélère la nucléation de la bulle sur toute la surface du chauffage pendant la partie de nucléation. Cela produit une bulle plus grande et plus stable, de forme régulière.
PCT/AU2006/001477 2006-10-09 2006-10-09 Générateur de bulles en technologie mems pour la production grosses bulles de vapeur stables Ceased WO2008043122A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CA002662725A CA2662725A1 (fr) 2006-10-09 2006-10-09 Generateur de bulles en technologie mems pour la production grosses bulles de vapeur stables
PCT/AU2006/001477 WO2008043122A1 (fr) 2006-10-09 2006-10-09 Générateur de bulles en technologie mems pour la production grosses bulles de vapeur stables
AU2006349360A AU2006349360A1 (en) 2006-10-09 2006-10-09 MEMS bubble generator for large stable vapor bubbles
EP06790347A EP2074054A4 (fr) 2006-10-09 2006-10-09 Générateur de bulles en technologie mems pour la production grosses bulles de vapeur stables
JP2009528548A JP2010504228A (ja) 2006-10-09 2006-10-09 大型安定蒸気気泡のためのmems気泡発生器
TW096103746A TWI380910B (zh) 2006-10-09 2007-02-01 用於大型穩定的氣泡之微機械系統(mems)氣泡產生器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2006/001477 WO2008043122A1 (fr) 2006-10-09 2006-10-09 Générateur de bulles en technologie mems pour la production grosses bulles de vapeur stables

Publications (1)

Publication Number Publication Date
WO2008043122A1 true WO2008043122A1 (fr) 2008-04-17

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PCT/AU2006/001477 Ceased WO2008043122A1 (fr) 2006-10-09 2006-10-09 Générateur de bulles en technologie mems pour la production grosses bulles de vapeur stables

Country Status (6)

Country Link
EP (1) EP2074054A4 (fr)
JP (1) JP2010504228A (fr)
AU (1) AU2006349360A1 (fr)
CA (1) CA2662725A1 (fr)
TW (1) TWI380910B (fr)
WO (1) WO2008043122A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014019929A1 (fr) 2012-08-03 2014-02-06 Université Lyon 1 Claude Bernard Reacteur et procede pour la mise en oeuvre d'une reaction de fusion nucleaire
US11458265B2 (en) 2013-10-31 2022-10-04 Rai Strategic Holdings, Inc. Aerosol delivery device including a bubble jet head and related method

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Publication number Priority date Publication date Assignee Title
US4746937A (en) * 1985-06-10 1988-05-24 Ing. C. Olivetti & C., S.P.A. Control apparatus for an on-demand ink jet printing element
US5886716A (en) * 1994-08-13 1999-03-23 Eastman Kodak Company Method and apparatus for variation of ink droplet velocity and droplet mass in thermal ink-jet print heads
US6296350B1 (en) * 1997-03-25 2001-10-02 Lexmark International, Inc. Ink jet printer having driver circuit for generating warming and firing pulses for heating elements

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DE68915410T2 (de) * 1988-12-16 1994-12-22 Hewlett Packard Co Verfahren und Gerät zum Drucken von Grauwerten mit einem durch Wärme angetriebenen Tintenstrahl.
JP4217331B2 (ja) * 1999-03-01 2009-01-28 キヤノン株式会社 インクジェット記録ヘッドの駆動方法
CA2311017C (fr) * 1999-06-14 2004-07-20 Canon Kabushiki Kaisha Tete d'enregistrement, substrat de tete d'enregistrement et enregistreur
JP4856806B2 (ja) * 1999-06-14 2012-01-18 キヤノン株式会社 記録ヘッド、記録ヘッド用基体および記録装置
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JP2002240288A (ja) * 2001-02-14 2002-08-28 Fuji Xerox Co Ltd インクジェット記録ヘッドおよびその駆動条件設定方法、ならびにインクジェット記録装置
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US4746937A (en) * 1985-06-10 1988-05-24 Ing. C. Olivetti & C., S.P.A. Control apparatus for an on-demand ink jet printing element
US5886716A (en) * 1994-08-13 1999-03-23 Eastman Kodak Company Method and apparatus for variation of ink droplet velocity and droplet mass in thermal ink-jet print heads
US6296350B1 (en) * 1997-03-25 2001-10-02 Lexmark International, Inc. Ink jet printer having driver circuit for generating warming and firing pulses for heating elements

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014019929A1 (fr) 2012-08-03 2014-02-06 Université Lyon 1 Claude Bernard Reacteur et procede pour la mise en oeuvre d'une reaction de fusion nucleaire
US11458265B2 (en) 2013-10-31 2022-10-04 Rai Strategic Holdings, Inc. Aerosol delivery device including a bubble jet head and related method
US12128179B2 (en) 2013-10-31 2024-10-29 Rai Strategic Holdings, Inc. Aerosol delivery device including a bubble jet head and related method

Also Published As

Publication number Publication date
EP2074054A1 (fr) 2009-07-01
TWI380910B (zh) 2013-01-01
EP2074054A4 (fr) 2010-08-11
JP2010504228A (ja) 2010-02-12
AU2006349360A1 (en) 2008-04-17
CA2662725A1 (fr) 2008-04-17
TW200817192A (en) 2008-04-16

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