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WO2007011865A3 - Microcavity plasma devices with dielectric encapsulated electrodes - Google Patents

Microcavity plasma devices with dielectric encapsulated electrodes Download PDF

Info

Publication number
WO2007011865A3
WO2007011865A3 PCT/US2006/027667 US2006027667W WO2007011865A3 WO 2007011865 A3 WO2007011865 A3 WO 2007011865A3 US 2006027667 W US2006027667 W US 2006027667W WO 2007011865 A3 WO2007011865 A3 WO 2007011865A3
Authority
WO
WIPO (PCT)
Prior art keywords
plasma devices
microcavity plasma
encapsulated electrodes
dielectric encapsulated
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/027667
Other languages
French (fr)
Other versions
WO2007011865A2 (en
Inventor
Gary J Eden
Sung-Jin Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Illinois at Urbana Champaign
University of Illinois System
Original Assignee
University of Illinois at Urbana Champaign
University of Illinois System
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Illinois at Urbana Champaign, University of Illinois System filed Critical University of Illinois at Urbana Champaign
Priority to JP2008521697A priority Critical patent/JP5271080B2/en
Priority to EP06787559.1A priority patent/EP1905057B1/en
Publication of WO2007011865A2 publication Critical patent/WO2007011865A2/en
Anticipated expiration legal-status Critical
Publication of WO2007011865A3 publication Critical patent/WO2007011865A3/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/18—AC-PDPs with at least one main electrode being out of contact with the plasma containing a plurality of independent closed structures for containing the gas, e.g. plasma tube array [PTA] display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

Microcavity plasma devices and arrays with thin foil electrodes (16, 18) protected by metal oxide dielectric (15, 19) is disclosed. In a device, a pattern of microcavities (12) is produced in a metal foil. A thin glass layer (25) or vacuum packaging (34) is able to seal the discharge medium into the array.
PCT/US2006/027667 2005-07-15 2006-07-17 Microcavity plasma devices with dielectric encapsulated electrodes Ceased WO2007011865A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008521697A JP5271080B2 (en) 2005-07-15 2006-07-17 Array of microcavity plasma devices with encapsulated dielectric electrodes
EP06787559.1A EP1905057B1 (en) 2005-07-15 2006-07-17 Arrays of microcavity plasma devices with dielectric encapsulated electrodes

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69947505P 2005-07-15 2005-07-15
US60/699,475 2005-07-15

Publications (2)

Publication Number Publication Date
WO2007011865A2 WO2007011865A2 (en) 2007-01-25
WO2007011865A3 true WO2007011865A3 (en) 2009-04-02

Family

ID=37669467

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/027667 Ceased WO2007011865A2 (en) 2005-07-15 2006-07-17 Microcavity plasma devices with dielectric encapsulated electrodes

Country Status (4)

Country Link
EP (1) EP1905057B1 (en)
JP (1) JP5271080B2 (en)
KR (1) KR20080031957A (en)
WO (1) WO2007011865A2 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2915311B1 (en) * 2007-04-17 2011-01-07 Saint Gobain FLASHLIGHT WITH DISCHARGE.
US8159134B2 (en) 2007-05-16 2012-04-17 The Board Of Trustees Of The University Of Illinois Arrays of microcavity plasma devices and electrodes with reduced mechanical stress
EP2203940B1 (en) * 2007-10-25 2013-04-03 The Board Of Trustees Of The University Of Illinois Array of microcavity plasma devices with microcavities having curved sidewalls and method of forming such array
US8471471B2 (en) 2007-10-25 2013-06-25 The Board Of Trustees Of The University Of Illinois Electron injection-controlled microcavity plasma device and arrays
WO2009140509A1 (en) 2008-05-14 2009-11-19 The Board Of Trustees Of The University Of Illinois Microcavity and microchannel plasma device arrays in a single, unitary sheet
US8179032B2 (en) 2008-09-23 2012-05-15 The Board Of Trustees Of The University Of Illinois Ellipsoidal microcavity plasma devices and powder blasting formation
US8541946B2 (en) 2009-12-17 2013-09-24 The Board Of Trustees Of The University Of Illinois Variable electric field strength metal and metal oxide microplasma lamps and fabrication
US8547004B2 (en) 2010-07-27 2013-10-01 The Board Of Trustees Of The University Of Illinois Encapsulated metal microtip microplasma devices, arrays and fabrication methods
US9484621B2 (en) * 2012-11-02 2016-11-01 Nokia Technologies Oy Portable electronic device body having laser perforation apertures and associated fabrication method
IN2012CH05191A (en) * 2012-12-13 2015-07-10 Krupakar Murali Subramanian
US8995658B2 (en) 2013-02-13 2015-03-31 Honeywell International Inc. Physics-based key generation
US9465960B2 (en) 2013-12-04 2016-10-11 Honeywell International Inc. Physics-based authentication
TWI548310B (en) * 2014-11-21 2016-09-01 財團法人工業技術研究院 Modular electrode device for plasma processing
KR101723956B1 (en) 2015-11-26 2017-04-06 한림대학교 산학협력단 Micro plasma device for treating eyeball
DE102017116800B4 (en) 2017-07-25 2024-03-14 Cinogy Gmbh Electrode arrangement for a dielectrically hindered plasma treatment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242859B1 (en) * 1997-04-10 2001-06-05 Fujitsu Limited Plasma display panel and method of manufacturing same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62262360A (en) * 1986-05-07 1987-11-14 Canon Inc Flat light source device
CH676168A5 (en) * 1988-10-10 1990-12-14 Asea Brown Boveri
JP2001118541A (en) * 1999-10-21 2001-04-27 Matsushita Electric Ind Co Ltd Light emitting device
US20020030437A1 (en) * 2000-09-13 2002-03-14 Nobuhiro Shimizu Light-emitting device and backlight for flat display
US6695664B2 (en) * 2001-10-26 2004-02-24 Board Of Trustees Of The University Of Illinois Microdischarge devices and arrays
JP2003208850A (en) * 2002-01-15 2003-07-25 Noritake Co Ltd Flat plate type display device and method of manufacturing the display device
JP2003217519A (en) * 2002-01-25 2003-07-31 Matsushita Electric Ind Co Ltd Gas discharge lamp and information display system using the same
KR100530765B1 (en) * 2002-10-04 2005-11-23 이규왕 Nanoporous dielectrics for plasma generator
JP3919714B2 (en) * 2003-07-25 2007-05-30 三菱電機株式会社 Discharge light emitting device and contact image sensor using the same
EP1797579B1 (en) * 2004-10-04 2015-09-02 The Board Of Trustees Of The University Of Illinois Microdischarge devices with encapsulated electrodes and its method of fabrication

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242859B1 (en) * 1997-04-10 2001-06-05 Fujitsu Limited Plasma display panel and method of manufacturing same

Also Published As

Publication number Publication date
KR20080031957A (en) 2008-04-11
EP1905057B1 (en) 2016-03-09
WO2007011865A2 (en) 2007-01-25
JP5271080B2 (en) 2013-08-21
EP1905057A2 (en) 2008-04-02
JP2009502010A (en) 2009-01-22
EP1905057A4 (en) 2012-06-27

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