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WO2007007616A1 - Vérin polymère à entraînement direct - Google Patents

Vérin polymère à entraînement direct Download PDF

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Publication number
WO2007007616A1
WO2007007616A1 PCT/JP2006/313418 JP2006313418W WO2007007616A1 WO 2007007616 A1 WO2007007616 A1 WO 2007007616A1 JP 2006313418 W JP2006313418 W JP 2006313418W WO 2007007616 A1 WO2007007616 A1 WO 2007007616A1
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WIPO (PCT)
Prior art keywords
actuator
drive unit
electrode layer
drive
polymer
Prior art date
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PCT/JP2006/313418
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English (en)
Japanese (ja)
Inventor
Ryo Yoshitomi
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Eamex Corp
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Eamex Corp
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/008—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for characterised by the actuating element
    • F03G7/012—Electro-chemical actuators
    • F03G7/0121—Electroactive polymers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/029—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for characterised by the material or the manufacturing process, e.g. the assembly

Definitions

  • the present invention relates to an improvement of a linear motion type polymer actuator device that can be applied to the fields of robots, medical equipment, micromachines, and the like.
  • Patent Documents 1 and 2 disclose polymer actuators using an ion conductive polymer / noble metal joined body (IPMC film).
  • Patent Document 1 Japanese Patent Laid-Open No. 7-4075
  • Patent Document 2 JP-A-11 235064
  • the driving of the polymer actuator is realized by the movement of water together with the ions in the ion conductive polymer membrane. Specifically, when a voltage is applied to the ion conductive resin membrane sandwiched between the electrodes, the negative electrode side swells due to the movement of water held in the polymer together with the positive ions. On the other hand, the positive pole side facing it is due to the phenomenon of shrinking by losing water. Therefore, the primitive movement of the polymer actuator is a bending motion in which the negative pole side extends and the positive pole side contracts. Therefore, if you want to drive the actuator linearly, use some method to make the bending movement. Need to convert to linear motion.
  • Non-Patent Document 1 As a mechanism of a polymer actuator that moves linearly, for example, Non-Patent Document 1, FIG.
  • a mechanism consisting of a basic unit in which four rod-shaped IPMC films 1, 1, 2, 2, and 2 are connected in a horizontally long rhombus shape has been proposed.
  • 3 is a moving part
  • 5 is a fixed part.
  • Non-Patent Document 1 M. Yamakita et al: "Control of Mechanical Impedance of IPMC Linear Actuator with Antagonism Structure, Proc. Of the 2nd Conference on Artificial Muscles, 2004
  • the mechanism has the following problems.
  • Another problem with this mechanism is that during linear motion, the diamond shape extends vertically in the direction perpendicular to the motion axis, as shown in Fig. 5-2.
  • the length of the actuator is adjusted depending on the number of basic units to be connected.
  • the diamond-shaped basic unit has a certain width, it is difficult to fine-tune the length. It also has a point.
  • the present invention eliminates the need for a rotation support means for the connection portion between the polymer actuator elements, reduces the dead space of the entire mechanism, and reduces the weight, size, and linear motion of the actuator.
  • the purpose is to stabilize the shaft and speed.
  • the inventors of the present invention have a rectangular parallelepiped solid electrolyte layer (ionic conductive polymer film layer) and a surface opposite to each other across the solid electrolyte layer.
  • Two or more actuator elements such as electrode layers formed in an insulated state, are connected to each other.
  • a pair of the actuator elements arranged in parallel in a direction substantially perpendicular to the linear drive direction is configured as a drive unit that provides the linear drive, and the actuator element Are connected to each other on the opposite surfaces, and are electrically connected to each other at the same end. It is characterized by that.
  • the electrode layer force on the same surface of each of the respective actuator elements is composed of different electrode layer elements through an electrical insulating portion over a range from the one end to the other end, and the solid electrolyte.
  • Different electrode layer elements are provided on opposite surfaces across the layers, and the electrode layer elements on the same surface and the electrode layer elements on the opposite surface constitute the same electrode layer.
  • the other end of the one actuator element is fixed to a fixed part, and the other end of the other actuator element constitutes a moving end, and a voltage is applied to each electrode layer of the actuator element.
  • a pair of terminal portions are provided on the fixed portion.
  • the present invention connects a plurality of rectangular parallelepiped solid electrolyte layers and a plurality of activator elements each having an electrode layer force formed in an insulated state on opposite surfaces across the solid electrolyte layers.
  • a pair of the actuator elements arranged in parallel in a direction substantially perpendicular to the linear motion drive direction is configured as a drive unit for providing linear motion drive.
  • the same edge force of the actuator element The electrode layers formed on the opposing surfaces are connected in a planar shape, and the electrode layers at the same edge formed on the opposite surfaces are electrically connected to each other. It is a linear motion type polymer actuator device characterized in that it is connected to.
  • the present invention provides a linear motion drive type polymer actuator device in which the other end portion of the one actuator element is fixed to a fixed portion and the other end portion of the other actuator element constitutes a moving end portion. It is.
  • the present invention also provides an electrode layer on the same surface of each of the actuator elements. Force The force of the one end portion is composed of different electrode layer elements through an electrically insulating portion over the range of the other end portion, and has different electrode layer elements on the opposite surfaces across the solid electrolyte layer.
  • the present invention is a linear motion drive type polymer actuator device in which a pair of terminal portions to which a voltage is applied to each electrode layer of the actuator element is provided in the fixed portion.
  • the linear-actuated polymer actuator device of the present invention realizes a linearly-actuated actuator using an ion conductive polymer membrane, and the possibility of application to a control system is widened.
  • the fact that the actuator elements are connected in a planar shape eliminates the need for a rotation support means that can cause motion axis and speed instability, contributing to stabilization of the axis and speed during linear motion. be able to.
  • FIG. 1-1 is a schematic side view of a linear drive actuator device according to an embodiment of the present invention when stationary.
  • FIG. 1-2 is a schematic side view of the actuator device at the time of linear motion driving.
  • FIG. 2 is a schematic perspective view of a polymer actuator element used in the apparatus.
  • FIG. 3 is a schematic view of the polymer actuator element.
  • FIG. 3 (a) is a plan view
  • FIG. 3 (b) is a side view
  • FIG. 3 (c) is a rear view.
  • Fig. 4 is a schematic view of the polymer actuator element of the other example, and Fig. 4 (a) is a plan view.
  • FIG. 4 (b) is a cross-sectional view taken along the line Y—Y, and FIG. 4 (c) is a rear view.
  • FIG. 5-1 is a conceptual diagram of a conventional linear motion type actuator device when stationary.
  • FIG. 5-2 is a conceptual diagram at the time of driving of the linear drive actuator device. Explanation of symbols
  • FIG. 11 is a schematic side view of a linear motion type actuator device according to an embodiment of the present invention at rest.
  • FIG. 12 is a schematic side view of the actuator device during linear motion driving.
  • reference numeral 100 denotes a polymer activator element constituting the apparatus of the present invention.
  • this polymer actuator element 100 is composed of a rectangular parallelepiped solid electrolyte layer 101 and electrode layers 102 and 103 formed on the surfaces facing each other with the solid electrolyte layer 101 sandwiched therebetween.
  • the four polymer actuator elements 100a, 100b, 100c, and 100d are sequentially connected.
  • These polymer actuator elements 100a, 100b, 100c, and 100d are arranged in parallel in a direction substantially perpendicular to the linear motion driving direction X, and the polymer actuator element 100a and the polymer actuator element 100b, The polymer actuator element 100b, the polymer actuator element 100c, and the polymer actuator element 100c and the polymer actuator element d constitute a pair of drive units for the actuator elements.
  • each polymer actuator element is formed on the opposing surfaces of the electrode layer 103a and the electrode layer 103b, and the electrode layer 103a and the electrode.
  • the layers 103b and the electrode layers 103c and 103d are connected to each other in a planar shape.
  • Layers 102d are electrically connected to each other!
  • the polymer actuator element 100a includes electrode layers 102a, 103a 'on the same surface from the one end A.
  • the other end portion D is divided through the electrically insulating portion 104 to be configured as different electrode layer elements, and also on the surface facing the solid electrolyte layer 101 as different electrode layer elements.
  • This polymer actuator element 100a has the same configuration as the other polymer actuator elements 100b, 100c, and 100d.
  • the end portion D of the polymer actuator element 101 is fixed to the fixed portion 10, and the other open end portion E constitutes the moving end portion and is connected to the moving portion 11. Yes.
  • the voltage application to the polymer actuator is electrically connected to the electrode layers 103 'and 102' of the polymer actuator 100a through an electric terminal (not shown) provided in the fixed portion 10. Has been.
  • the other linear polymer actuator elements connected to the polymer actuator element 101 cause 100b, 100c, 100d and the same forward and reverse bending motions to cause linear motion in the X direction as shown in Fig. 12. Driving is realized, and the moving unit 11 can move in the linear direction.
  • Reference numeral 12 denotes a fastener for electrically connecting the electrode layer 102a and the electrode layer 102b, the electrode layer 102 and the electrode layer 102, and the electrode layer 102c and the electrode layer 102d. is there . 13 is an insulating part.
  • the fastener 12 may be a metal clip, a resin clip coated with metal, or the like, which can be fixed by connecting the same end portions of the polymer actuator element to each other and having conductivity.
  • FIG. 4 is a schematic view showing another example of a polymer actuator element.
  • FIG. 4 (a) is a plan view.
  • Fig. 4 (b) is a cross-sectional view along line Y-Y, and
  • Fig. 4 (c) is a rear view.
  • the electrode layers 112a and 112a at the intersecting positions across the solid electrolyte layer 111 are electrically connected to each other, and the connecting means is formed by perforating the solid electrolyte layer 111.
  • the electrode layers 112a and 112a and the electrode layers 113a and 113a ′ constitute the same electrode by forming the electrode layer in the hole at the same time.
  • the ion exchange resin that can be used for the solid electrolyte layer of the polymer actuator element used in the present invention is not particularly limited, and a known ion exchange resin can be used. Regardless of whether the ion exchange resin is a cation type or an anion type, the same effect can be obtained by changing the way the potential difference is applied.
  • cation exchange resin it is possible to use polyethylene, polystyrene, fluorine resin or the like into which a hydrophilic functional group such as sulfonic acid group or carboxyl group is introduced.
  • resins examples include perfluorosulfonic acid resin (trade name “Nafion” manufactured by DuPont), perfluorocarboxylic acid resin (trade name “Flemion” manufactured by Asahi Glass Co., Ltd.), ACIPLEX (Asahi Kasei Kogyo).
  • NEOSEPTA manufactured by Toyama Corporation
  • the ion exchange resin preferably has flexibility.
  • the ion exchange resin is swollen by the liquid organic compound.
  • the ion exchange resin can become a gel electrolyte by becoming a swollen state.
  • the degree of swelling is not particularly limited, but the degree of swelling of the polymer activator, that is, the swollen state of the polymer activator with respect to the thickness of the polymer electrolyte in a dry state.
  • the rate of increase in thickness at 3 to 200% is preferred, and 5 to 60% is more preferred.
  • the displacement bending performance is inferior, and when the degree of swelling is greater than 200%, the displacement bending performance is also inferior and the tensile strength is greatly reduced.
  • the said organic compound is contained in an ion exchange resin, when a metal electrode is porous, a part of said solvent may be contained in the said metal electrode with a salt.
  • liquid organic compound As the liquid organic compound used in the present invention, a polar organic solvent containing a salt or an ion liquid is used. In the case of a force-polarized organic solvent that can be used alone, a salt containing ions that serve as charge carriers is required. However, the ionic liquid may be used as the salt. This is because these liquid organic compounds easily move in the ion exchange resin when a potential difference is given to the ion exchange resin.
  • the liquid organic compound is an organic compound that is liquid at normal temperature and pressure, and particularly preferably has a boiling point of 180 ° C. or higher or a decomposition temperature. This is because solvent evaporation is likely to occur, which can contribute to long-term stability.
  • the polarizable organic solvent is preferably an organic compound having a boiling point or decomposition temperature of 180 ° C. or higher, but is particularly preferably a polarizable organic solvent having a boiling point of 245 ° C. or higher.
  • Specific examples of preferred polarizable organic solvents include diethylene glycol, glycerin, sulfolane, propylene carbonate, butyrolatatatone, or a mixture thereof. Of these, diethylene glycol, glycerin, sulfolane or a mixture thereof is particularly preferred.
  • the salt contained in the polarizable organic solvent is not particularly limited as long as it is a salt that can be dissolved in the polarizable organic solvent.
  • the ion exchange resin forms counter ions with force thiones.
  • a salt of a monovalent to trivalent cation can be used, and the use of a monovalent cation such as Na +, K +, or Li + can bend or displace with a large ionic radius. It is even more preferable to use a large alkylammonium ion because it allows greater bending or displacement.
  • Examples of the alkyl ammonia include CH N + H, C H N + H, (CH) N + H, (C H) N + H, (CH) N + H, (C H)
  • H N + H H N + (CH) OH ⁇ HN + CH (CH OH), (HOCH) C (CH N + H), CHO
  • Ammonium ions having alicyclic hydrocarbons in addition to hydrocarbons as functional groups can be used.
  • the concentration of the salt is a functional group of the ion exchange resin. In order to obtain sufficient bending or displacement, it is preferably 0.01-1 OmolZl, more preferably 0.1-1.OmolZl, .
  • Preferred examples of the ionic liquid include tetraalkyl ammonium ion, imidazolium ion, alkyl pyridinium ion, virazolium ion, pyrrolium ion, pyrrolium ion, pyrrolidinium ion, and piberidinium ion. At least one cation selected from the group;
  • n and m are arbitrary integers.
  • the tetraalkylammonium cation is not particularly limited.
  • Trimethylpropyl ammonium, trimethylhexyl ammonium and tetrapentyl ammonium can be used.
  • the imidazolium cation a dialkyl imidazolium ion and Z or a trialkyl imidazolium ion can be used.
  • the imidazolium cation is
  • 1-ethyl 3-methylimidazolium ion, 1-hexyl 3 methyl imidazolium ion, 1-butyl 3-methyl imidazolium ion, 1,3-dimethyl imidazolium ion, 1-methyl 3-ethyl Illustrates imidazolium ion, 1, 2, 3 trimethylimidazolium ion, 1,2 dimethyl-3-ethyl imidazolium ion, 1,2 dimethyl-3-propylimidazolium ion, 1-butyl-2,3 dimethyl imidazolium ion be able to.
  • the alkylpyridinium cation is not particularly limited, but N butyl pyridinium ion, N methyl pyridinium ion, N ethyl pyridinium ion, N-propyl pyridinium ion, 1-ethyl-2— Examples include methylpyridium, 1-butyl-4 methylpyridium, 1-butyl-2,4 dimethylpyridium.
  • the pyrazolium cation is not particularly limited. Examples include Zorium ion, 1-Ethyl-2-methylvirazolium ion, 1-Propyl 2-methylvirazolium ion, 1-Butyl2-methylvirazolium ion.
  • the pyrrolium cation is not particularly limited, and examples thereof include 1,1-dimethylpyrrolium ion, 1-ethyl-1 methylpyrrolium ion, 1-methyl-1 propylpyrrolium ion, and 1-butyl-1 methylpyrrolium ion. can do.
  • the pyrrolinium cation is not particularly limited, but 1, 2 dimethylpyrrolium ion, 1-ethyl-2-methylpyrrolium ion, 1-propyl 2-methylpyrrolium ion, 1-butyl-2-methylpyrrole Rium ion can be exemplified
  • the pyrrolidinium cation is not particularly limited. Can be illustrated.
  • the piperidinium cation is not particularly limited. It is possible to illustrate this.
  • the ionic liquid is not particularly limited in the combination of the cation and the cation.
  • EMITFSI 1-methyl-3-ethylimidazoletrifluoromethane sulfoimide
  • EM IBF 1-methyl- 3 imidazolium tetrafluoroborate
  • EMIPF 1-methyl- 3 imidazolium hexafluorophosphate
  • a potential difference is applied to the surface of the ion exchange resin.
  • a pair of electrodes are provided at positions facing each other across the ion exchange resin.
  • the metal used for the electrode can be used without limitation as long as it is a solid metal (including noble metal) with good conductivity except for a liquid metal such as mercury, and may be an alloy.
  • An appropriate metal can be selected depending on the type of ion-exchange resin liquid organic compound used.
  • facing metal electrodes means that a pair of metal electrodes exist in parallel. However, the two electrodes need not be completely parallel, but may be slightly deviated from parallel as long as the actuator element can be displaced by applying a voltage to the metal electrodes. However, as the parallel force shifts, the bending and deformation efficiency per Coulomb amount changes.
  • the shape of the ion exchange resin is made into a parallel flat plate shape, and a pair of metal electrodes is formed on the surface of the plane side wall facing in parallel with the Met method, Among these, it is preferable to provide by an electroless plating method.
  • an electroless plating method As described later, when a metal film that can be used as a metal electrode is formed on the surface of the ion exchange resin by an electroless plating method, the contact area between the ion exchange resin and the metal electrode is increased, and this causes bending as an actuator. This is because the amount of displacement can be increased.
  • the polymer activator used in the present invention can be driven for a long time without being coated, but may be further coated with a flexible resin.
  • the resin is not particularly limited, and polyurethane resin and Z or silicon resin can be used.
  • the polyurethane resin is not particularly limited, but it is particularly preferable to use a flexible thermoplastic polyurethane because of its high flexibility and good adhesion.
  • the product name “Asaflex 825” (flexibility 200%, manufactured by Asahi Kasei), product name “Pelecene 2363—80A” (flexibility 550%), “Pelecene 2363 — 80AEJ (flexibility) 650%), “Pelecene 2363-90A” (flexibility: 500%), “Pelecene 2363-90AE” (flexibility: 550%), (manufactured by Dow Chemical Co., Ltd.).
  • the silicone resin is not particularly limited, but a resin having a flexibility of 50% or more is particularly preferable because of its high flexibility and good adhesion.
  • the Siri As the resin for example, “Silaseal 3FW”, “Silaseal DC738RTV”, “DC3145”, and “DC3140” (above, manufactured by Dow Co., Ltd.) can be used.
  • the flexibility refers to the tensile elongation at break (Ultimate Elongation%) in accordance with ASTM D412.
  • the actuator element of the embodiment is basically manufactured by the following technique in order to increase the bending rate and the amount of displacement.
  • the actuator element used in the present invention is not limited to the one manufactured by the following manufacturing method.
  • An example of a preferable manufacturing method of the actuator element used in the present invention is to manufacture a laminated body in which a metal film is provided on the surface of a rectangular parallelepiped ion exchange resin, and use the metal film as a metal electrode. That is.
  • This laminate can be produced by adsorbing a metal complex to an ion exchange resin and then immersing the ion exchange resin in an aqueous reducing agent solution to reduce the metal complex.
  • the electrode forming process includes a process including an adsorption process and a reduction process.
  • the electrode forming step is a step of forming a metal electrode by an electroless plating method, an adsorption step for adsorbing a metal complex on an ion exchange resin, and a reduction in which a reducing agent solution is brought into contact with the ion exchange resin on which the metal complex is adsorbed. The process is included.
  • the ion exchange resin Before the adsorption-reduction step, the ion exchange resin is swelled by immersing the ion exchange resin in a good solvent such as water or methanol or a mixed solvent containing a good solvent.
  • a swelling step may be provided. This is because more metal complexes can be adsorbed to the ion exchange resin by making the ion exchange resin swell.
  • the ratio of swelling the ion exchange resin is not less than 110%, preferably 110% to 300% of the thickness of the ion exchange resin in the dry state, so that more metal complexes can be adsorbed. preferable.
  • a good solvent a basic salt mixed in an amount of 1 to 30 wt%, preferably 1 to LO wt% can be used.
  • a preliminary treatment such as a roughening treatment may be performed prior to the swelling step.
  • the adsorption step is not particularly limited as long as the metal complex is adsorbed on the ion exchange resin. It is not specified.
  • a metal complex solution may be applied to the polymer electrolyte, but it is preferable to perform the adsorption step by immersing the ion exchange resin membrane in the metal complex solution because the operation is easy.
  • the metal complex that can be used in the adsorption step is not particularly limited as long as the metal film formed on the surface of the laminate by reduction can function as an electrode.
  • the metal complex is preferably a complex having a central metal of an electrochemically stable metal having a low ionization tendency such as a gold complex, a platinum complex, a noradium complex, a rhodium complex, and a ruthenium complex.
  • a metal complex having a metal as a central metal such as a noble metal having good electrical conductivity and high electrochemical stability, is preferable.
  • a complex having a metal such as gold, which is relatively difficult to electrolyze, as a central metal is preferable.
  • a gold complex having gold as a central metal is particularly preferable.
  • the ligand of the metal complex is not particularly limited, and examples thereof include ethylenediamine and phenantorin phosphorus derivatives.
  • the metal salt solution used in the adsorption step is not limited to a solvent, and water or a non-aqueous polar organic compound can be used.
  • the solvent is water as the main component because the metal salt can be easily dissolved and handled.
  • the metal salt solution is preferably an aqueous metal salt solution.
  • the metal complex solution is preferably an aqueous metal complex solution, particularly preferably an aqueous gold complex solution or an aqueous platinum complex solution, and more preferably an aqueous gold complex solution.
  • the adsorption step is a step of adsorbing the metal complex to the cation exchange resin
  • conditions such as temperature and immersion time are not particularly limited, but the temperature may be 20 ° C or higher. It is preferable for efficient swelling.
  • the metal complex solution may contain a good solvent for the polymer electrolyte so that the metal complex is easily adsorbed to the cation-exchanged resin.
  • the reducing agent used in the electroless plating reduction step can be used by appropriately selecting the type according to the type of the metal complex used in the metal complex solution adsorbed on the ion exchange resin.
  • E.g. sodium sulfite, hydrazine, sodium borohydride, phosphorous An acid, sodium hypophosphite, etc. can be used.
  • the reducing agent may be appropriately selected depending on the metal species to be deposited.
  • the metal to be precipitated by reduction is nickel or cobalt
  • sodium phosphinate, dimethylaminoborane, hydrazine, or potassium tetrahydroborate can be used as the reducing agent.
  • the metal deposited by reduction is palladium
  • sodium phosphinate, sodium phosphonate, or potassium tetrahydroborate can be used as the reducing agent.
  • the metal to be deposited by reduction is copper, formalin, sodium phosphonate, or potassium tetrahydroborate can be used as the reducing agent.
  • the metal deposited by reduction is silver or gold
  • dimethylaminoborane or potassium tetrahydroborate can be used as the reducing agent.
  • the metal deposited by reduction is platinum
  • hydrazine or sodium tetrahydroborate can be used as the reducing agent.
  • the metal deposited by reduction is tin
  • trisalt-titanium can be used as the reducing agent.
  • the reducing agent is not limited to the above types, but is used with catalysts such as platinum black, non-metallic acids or ions such as Hg S, HI and I—, Na (H 3 PO 4) and Na 2 SO Lower acid
  • Ionization trends such as silicates, lower oxides such as CO and S02, Li, Na, Cu, Mg, Zn, Fe, Fe (II), Sn (II), Ti (m), Cr (II) Large metals or their amalgams and low-valent metal salts, hydrides such as A1H [(CH3) 2CHCH2] 2 and lithium aluminum hydride, diimides, formic acid, aldehydes, saccharides and L-scorbic acid are used as appropriate. I'll do it.
  • the reducing agent can be selected as appropriate according to the metal species to be reduced.
  • the growth rate of the metal, the particle size of the deposited metal, the contact area between the metal electrode of the fractal structure and the ion exchange resin, In order to change the electrode structure and the flexibility of the grease after plating, the optimum type of reducing agent can be selected and used.
  • the kind of the reducing agent can be appropriately selected so that the reducing bath in the reduction step has a desired pH.
  • the concentration of the reducing agent solution is not particularly limited as long as it contains an amount of reducing agent sufficient to obtain the amount of metal to be precipitated by reduction of the metal complex. Concentration equivalent to the metal salt solution used when forming electrodes by plating It is also possible to use degrees. Further, the reducing agent solution can contain a good solvent for the ion exchange resin.
  • a laminate having a metal film on the surface of the ion exchange resin can be obtained by performing the adsorption step and the reduction step once, but the adsorption step and the reduction step are performed.
  • the displacement performance (flexibility) when driven as an actuator and the electric double layer capacity at the interface between the metal film and the ion-exchange resin are compared with the conventional values. Can be larger. If the adsorption process and the reduction process are repeated, attach them in the previous reduction process!
  • a washing step is not particularly limited, and the reduction may be removed by washing with water.
  • the solvent contained in the laminate is replaced with a desired liquid organic compound as a polymer activator used in the present invention.
  • the solvent can be exchanged by immersing the laminate obtained above in a desired liquid organic compound at room temperature and pressure for about 30 minutes.
  • a desired metal electrode is manufactured by scraping off a part of the metal film from the laminated body in which the entire surface obtained by the above method is covered with the metal film!
  • a metal film By cutting out a metal film at a predetermined site, two metal electrodes are provided on one surface on the opposite side surface, and the electrodes at positions intersecting each other with an ion exchange resin interposed therebetween are connected to each other. In the cross state, the same electrode layer can be obtained.
  • membrane cation exchange resin (fluorine resin-based ion exchange resin: perfluorocarboxylic acid resin, trade name "Flemion", manufactured by Asahi Glass Co., Ltd., ion exchange capacity 1. 4 meq / g) was cut into a flat plate shape measuring 1 mm in length, 3 mm in width, and 5 mm in length. This cation exchange resin was immersed in methanol as a good solvent at 20 ° C for 1 hour or longer. At the time of this immersion, the film thickness of the swollen membrane cation exchange resin was measured, and the ratio of the increase in the film thickness after swelling to the dry film thickness [the degree of swelling (%)] was calculated. And swelling degree is 50 The cation exchange resin was soaked in a good solvent so as to be%.
  • the temperature of the aqueous solution was set to 60 to 80 ° C., and the dichlorophenanthrine gold complex was reduced for 6 hours while gradually adding sodium sulfite.
  • (3) washing step the membranous polymer electrolyte having a gold electrode formed on the surface was taken out and washed with water at 70 ° C. for 1 hour.
  • the cation exchange resin (laminated body) on which the cleaned metal electrode was formed was taken out.
  • the thickness of the laminate at this stage was lmm due to swelling of the cation exchange resin.
  • the gold electrode is present on the entire bottom and side surfaces, the gold on the bottom surface of the laminate and the wide side of the side surface! Deleted.
  • the gold on the narrow side surface was deleted leaving the gold at the connecting portion connecting the two divided gold in an intersecting state to obtain an actuator element.
  • the obtained actuator elements were wide and arranged in parallel so that the side surfaces were in contact, and connected and fixed with metal clips alternately in the order of the upper end and the lower end to obtain a drive unit.
  • one end of the drive unit was fixed to the fixed part, and the electric terminal provided on the fixed part was connected to each of the positive electrode and the negative electrode of the metal electrode of the actuator element.
  • the other end was connected to the moving part to obtain an actuator device used in the examples.
  • the actuator device of the present invention can be used in various applications that require a linear drive mechanism.
  • a linear actuator that is lightweight and silent when driven such as a positioning device, posture control device, lifting device, transport device, moving device, adjusting device, adjusting device, guiding device, or joint It can be suitably used as a drive unit of the apparatus.
  • office equipment, antennas, equipment for placing people such as beds and chairs, medical equipment, engines, optical equipment, fixtures, side trimmers, vehicles, lifting equipment, food processing equipment, cleaning equipment, measurement Equipment, inspection equipment, control equipment, machine tools, processing machines, electronic equipment, electron microscopes, electric razors, electric toothbrushes, manipulators, masts, amusement equipment, amusement equipment, vehicle simulation equipment, vehicle occupant restraining devices, and aircraft
  • a driving unit that generates a driving force for moving a track-type orbit which is a driving unit force that generates a linear driving force, or a pressing unit that performs a linear operation Can be used.
  • the actuator device is, for example, a track-type track that is a driving unit force that generates a linear driving force in a valve, a brake, and a locking device used in all machines including the above-mentioned devices such as OA devices and measuring devices. It can be used as a driving unit that generates a driving force for movement or a pressing unit that performs a linear operation.
  • the positioning device drive unit, the attitude control device drive unit, the lifting device drive unit, the transport device drive unit, and the mobile device drive In addition to the above-described devices, equipment, machines, etc., in general mechanical equipment, the positioning device drive unit, the attitude control device drive unit, the lifting device drive unit, the transport device drive unit, and the mobile device drive.
  • the actuator device can be suitably used as a drive unit for an adjustment device such as a part, an amount and a direction, a drive unit for an adjustment device such as a shaft, a drive unit for a guidance device, and a pressing unit for a pressing device.
  • the actuator device can be suitably used as a drive unit in a joint device, such as a joint unit that can be directly driven, such as a joint intermediate member, or a drive unit that gives a rotational motion to the joint.
  • the actuator device includes, for example, a drive unit for an inkjet part in an inkjet printer such as a CAD printer, a drive unit for changing the optical axis direction of the light beam of the printer, and a disk drive device such as an external storage device It can be suitably used as a head drive unit for the paper and a drive unit for paper pressing contact force adjusting means in a paper feeding device of an image forming apparatus including a printer, a copying machine, and a fax machine.
  • the actuator device includes, for example, a driving unit of a driving mechanism that moves and installs a measuring unit and a feeding unit such as a high-frequency feeding unit such as a frequency sharing antenna for radio astronomy, and the like, and It can be suitably used for a drive part of a lift mechanism in a mast such as a vehicle-mounted pneumatic operation telescopic mast (telescoping mast) or an antenna.
  • a driving unit of a driving mechanism that moves and installs a measuring unit and a feeding unit such as a high-frequency feeding unit such as a frequency sharing antenna for radio astronomy, and the like, and It can be suitably used for a drive part of a lift mechanism in a mast such as a vehicle-mounted pneumatic operation telescopic mast (telescoping mast) or an antenna.
  • the actuator device is, for example, a driving unit of a massage unit of a chair-shaped massage machine, a driving unit of a nursing care or medical bed, a driving unit of a posture control device of an electric reclining chair, a massage machine, an easy chair, or the like.
  • Recliner backrest used • Extension rod drive that allows the ottoman to move up and down, chairs, nursing beds, etc. If the backrest of a retractable chair in furniture that carries a person such as a backrest or redderrest is placed, the drive unit used for the direct drive of the legrest or the bed of the nursing bed and the drive unit for controlling the posture of the standing chair Can be suitably used.
  • the actuator device includes, for example, a driving unit of a testing device, a driving unit of a pressure measuring device such as a blood pressure used in an extracorporeal blood treatment device, a driving unit of a catheter, an endoscope device, a forceps, etc.
  • Drive unit of cataract surgery device using sound wave drive unit of exercise device such as jaw movement device, drive unit of means for relatively expanding and contracting chassis member of sick hoist, raising and lowering and moving of care bed It can be used suitably for a drive unit for posture control and the like.
  • the actuator device includes, for example, a drive unit for a vibration isolator that attenuates vibration transmitted from a vibration generating unit such as an engine to a vibration receiving unit such as a frame, and a valve operating valve for an intake and exhaust valve of an internal combustion engine. It can be suitably used as a drive unit for an apparatus, a drive unit for an engine fuel control device, and a drive unit for an engine fuel supply device such as a diesel engine.
  • the actuator device includes, for example, a driving unit of a calibration device of an imaging device with a camera shake correction function, a driving unit of a lens driving mechanism such as a home video camera lens, and a moving lens group of an optical device such as a still camera or a video camera.
  • the actuator device can be suitably used for, for example, a pressing portion of a fixture such as a caulking fixing of a hose fitting to a hose body.
  • the actuator device includes, for example, a drive unit such as a suspension spring of an automobile suspension, a drive unit of a fuel filler opener for unlocking a fuel filler lid of a vehicle, and an extension and a retraction of a bulldozer blade.
  • Drive unit drive device for automatically changing the gear ratio of a transmission for an automobile and for automatically connecting and disconnecting a clutch It can use suitably for the drive part.
  • the actuator device includes, for example, a driving unit for a lifting device for a wheelchair with a seat plate lifting device, a driving unit for a step-lifting elevator, a driving unit for a lifting transfer device, a medical bed, an electric bed, an electric table, an electric table Suitable for chairs, nursing beds, lifting tables, CT scanners, truck cabin tilting devices, lifters for lifters and other lifting machines, and drive units for heavy vehicle unloading devices Can be used.
  • the actuator device can be suitably used for, for example, a drive unit of a discharge amount adjusting mechanism such as a food discharge nozzle device of a food processing apparatus.
  • the actuator device can be suitably used, for example, for a driving unit such as a carriage or a cleaning unit of a cleaning device for raising and lowering.
  • the actuator device includes, for example, a driving unit of a measuring unit of a three-dimensional measuring device that measures the shape of a surface, a driving unit of a stage device, a sensor such as a detection system for operating characteristics of a tire, a driving unit of a part, a force sensor
  • the drive unit of the device that gives the initial speed of the impact response evaluation device, the drive unit of the piston drive device of the piston cylinder of the device including the in-hole water permeability test device, the drive unit for moving in the elevation angle direction in the light collecting and tracking power generator, Alignment is required in the drive unit of the tuning mirror of the sapphire laser oscillation wavelength switching mechanism of the measurement device including the gas concentration measurement device, the inspection device of the printed circuit board, and the flat panel display inspection device such as liquid crystal and PDP.
  • Adjustable aperture device drive unit used for charged particle beam systems such as system, drive device for support device or detection unit of measurement object in flatness measuring instrument, and assembly of fine devices, semiconductors It can be suitably used for the drive part of precision positioning devices such as exposure equipment, semiconductor inspection equipment, and 3D shape measurement equipment.
  • the actuator device can be suitably used for, for example, an electric razor drive unit and an electric toothbrush drive unit.
  • the actuator device is, for example, an imaging device for a three-dimensional object or a drive unit of a focus depth adjustment device for a readout optical system shared by CD and DVD, and a drive target surface by a plurality of actuator elements. Desired by deforming its shape as an active curved surface
  • the drive unit of the variable mirror that can form the curved surface approximately and easily change the focal position
  • the drive unit of the disk device that can linearly move the moving unit having at least one of the magnetic heads such as an optical pickup , Magnetic tape for linear tape storage systems, etc.
  • Drive unit of head actuator element assembly drive unit of image forming apparatus applied to electrophotographic copying machine, printer, facsimile, etc.
  • magnetic head unit A drive unit of a mounting member such as a material, a drive unit of an optical disc master exposure apparatus that drives and controls a focusing lens group in the optical axis direction, a drive unit of a head drive unit that drives an optical head, or recording information on a recording medium
  • Information recording / reproducing device drive unit that reproduces information recorded on the recording medium
  • circuit / breaker distributed circuit / breaker
  • the actuator device is, for example, a drive unit of a rubber composition press molding vulcanizing device, a drive unit of a component aligning device that aligns a component to be transferred into a single row / single layer or a predetermined posture.
  • Compression molding device drive unit welding device holding mechanism drive unit, bag making filling and packaging machine drive unit, machining center and other machine tools, injection molding machine and press machine drive units, and printing device Drive units for fluid application devices such as painting devices and lacquer spraying devices, drive units for manufacturing devices that manufacture camshafts, drive units for lifting devices for covering materials, and drive devices such as tuft ear regulators in non-woven looms , Needle drive systems for tufting machines, looper drive systems, knife drive systems, etc., drive units for polishing equipment that polishes parts such as cam grinders and ultra-precision machined parts, Movement
  • annealing window drive Drive unit for the horizontal movement mechanism of the device, drive unit for the support arm of the glass melting furnace for Haas, drive unit for advancing and retreating the rack of the exposure device such as the method of forming the fluorescent screen of the color picture tube, and driving the torch arm of the ball bonding device Parts mounting process and measurement inspection, such as driving parts in the XY direction of the head, bonding head, mounting of chip parts and measurement using probes Drive unit for the process, drive unit for raising and lowering the cleaning tool support of the substrate cleaning device, drive unit for moving the detection head that scans the glass substrate forward and backward, drive unit for the exposure device that transfers the pattern onto the substrate, precision unit Sub-micron micro-positioning device drive unit, chemical mechanical force polishing tool measurement device positioning device drive unit, circuit device such as conductor circuit element and liquid crystal display element, etc.
  • Is used for manufacturing in the lithographic process a stage drive suitable for the exposure apparatus and scanning exposure apparatus used for positioning, a drive section for means for transporting or positioning workpieces, a reticle stage, a wafer stage, etc.
  • Drive unit for positioning and transporting, etc. drive unit for precision positioning stage device in chamber, chemical mechanical force polishing system Machine parts or semiconductor wafer positioning device drive units, semiconductor stepper device drive units, drive units for precise positioning in the processing machine introduction station, NC machine machining center, etc.
  • the drive unit of passive vibration isolator and active vibration isolator for various devices typified by machines and IC industry steppers, exposure equipment used in the lithographic process of manufacturing semiconductor elements and liquid crystal display elements, etc.
  • a drive unit that displaces a reference grating plate of the light beam scanning device in the optical axis direction of the light beam, and a drive unit of a transfer device that transfers the reference grating plate into the article processing unit in the transverse direction of the competitor.
  • the above-mentioned actuator device can be suitably used for, for example, a drive unit for a probe positioning device of a scanning probe microscope such as an electron microscope and a drive unit for positioning an electron microscope sample micro-motion device.
  • the actuator device is, for example, a driving unit of a joint mechanism typified by a wrist of a robot arm in an automatic welding robot, a robot including an industrial robot, a nursing mouth bot, or a manipulator, and a joint other than the direct drive type.
  • a drive unit of an artificial limb such as an electric prosthesis having a plurality of openable and closable fingers, a drive unit of a handling robot, a drive unit of a prosthesis, and a power suitably for a drive part.
  • the actuator device can be suitably used, for example, as a pressing portion of a device that presses the upper rotary blade or the lower rotary blade of the side trimmer.
  • the above-mentioned actuator device is, for example, a driving unit for an accessory in a game device such as a pachinko machine, a driving unit for an amusement device such as a doll or a pet robot, and a driving unit for a simulation device for a simulation device for riding. It can be used suitably.
  • the actuator device can be used, for example, in a valve drive unit used in all machines including the above-described devices.
  • the valve drive unit of the evaporative helium gas re-liquid apparatus a bellows type Drive unit for pressure-sensitive control valve, drive unit for opening device that drives rod frame, drive unit for vacuum gate valve, drive unit for solenoid operation type control valve for hydraulic system, and motion transmission device using pivot lever It can be suitably used for a built-in valve drive unit, a rocket movable nozzle valve drive unit, a suck back valve drive unit, and a pressure regulating valve unit drive unit.
  • the actuator device can be used as, for example, a brake pressing unit used in machines including the above-described devices.
  • brakes for elevators, brakes for elevators, etc. It can be suitably used for a pressing portion of a braking device suitable for use in a brake, and a pressing portion of a brake structure or a brake system.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne un vérin polymère à entraînement direct dans lequel le volume mort de l’ensemble du mécanisme est réduit par l’élimination du besoin en moyens de support rotatif du joint des éléments de vérin polymère, et la vitesse axiale est stabilisée au cours du déplacement linéaire tout en réduisant le poids et les dimensions du vérin. Une pluralité d’éléments de vérin comprenant chacun une couche électrolytique solide parallélépipédique rectangulaire planaire, et des couches d’électrodes formées sur les surfaces opposées intercalant la couche électrolytique solide dans un état mutuellement isolé sont directement entraînées par un vérin polymère, dans lequel une paire d’éléments de vérin agencés en parallèle et dans une direction sensiblement perpendiculaire à la direction d’entraînement direct est constituée telle une unité à entraînement direct, des parties d’extrémité identiques des éléments de vérin sont couplées de manière planaire sur les couches d’électrodes formées sur les surfaces opposées, et les couches d’électrodes disposées sur les parties d’extrémité identiques formées sur les surfaces respectives du côté opposé sont raccordées électriquement.
PCT/JP2006/313418 2005-07-14 2006-07-05 Vérin polymère à entraînement direct Ceased WO2007007616A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-205359 2005-07-14
JP2005205359A JP4711765B2 (ja) 2005-07-14 2005-07-14 直動駆動型高分子アクチュエータ装置

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WO2007007616A1 true WO2007007616A1 (fr) 2007-01-18

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JP (1) JP4711765B2 (fr)
WO (1) WO2007007616A1 (fr)

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US12199528B2 (en) 2022-11-23 2025-01-14 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscles including closing aid, artificial muscle assemblies, and methods of using same

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JP5144096B2 (ja) * 2007-03-22 2013-02-13 イーメックス株式会社 開閉運動アクチュエータ
JP5243112B2 (ja) * 2008-06-18 2013-07-24 アルプス電気株式会社 アクチュエータおよびその製造方法
JP5271410B2 (ja) * 2009-04-17 2013-08-21 アルプス電気株式会社 アクチュエータ素子及び入力装置
JP4777488B2 (ja) * 2009-09-24 2011-09-21 パナソニック株式会社 平板積層型導電性高分子アクチュエータ
JP5959807B2 (ja) 2010-08-05 2016-08-02 キヤノン株式会社 アクチュエータおよびアクチュエータ構造体
EP3918222A1 (fr) 2019-01-30 2021-12-08 Driv Automotive Inc. Suspension comprenant un matériau pouvant être commandé électriquement

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JP2005168088A (ja) * 2003-11-28 2005-06-23 Eamex Co 駆動用素子及びその用途

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JP2004314219A (ja) * 2003-04-14 2004-11-11 Institute Of Physical & Chemical Research 直動人工筋アクチュエータおよび直動人工筋アクチュエータの製造方法
JP2005168088A (ja) * 2003-11-28 2005-06-23 Eamex Co 駆動用素子及びその用途

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US7839055B2 (en) 2008-03-27 2010-11-23 Panasonic Corporation Flat-plate lamination-type conductive polymer actuator and flat-plate lamination-type conductive polymer actuator device as well as operating method thereof
US8585015B2 (en) 2008-12-09 2013-11-19 Tsubakimoto Chain Co. Engagement chain
US20230241765A1 (en) * 2022-02-01 2023-08-03 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscles comprising an electrode pair and a clamping device for compressing the electrode pair
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US12199528B2 (en) 2022-11-23 2025-01-14 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscles including closing aid, artificial muscle assemblies, and methods of using same

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