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WO2007086173A1 - Gas atmosphere heat treating apparatus and method - Google Patents

Gas atmosphere heat treating apparatus and method Download PDF

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Publication number
WO2007086173A1
WO2007086173A1 PCT/JP2006/321046 JP2006321046W WO2007086173A1 WO 2007086173 A1 WO2007086173 A1 WO 2007086173A1 JP 2006321046 W JP2006321046 W JP 2006321046W WO 2007086173 A1 WO2007086173 A1 WO 2007086173A1
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WO
WIPO (PCT)
Prior art keywords
gas
metal part
heat treatment
transfer passage
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2006/321046
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French (fr)
Japanese (ja)
Inventor
Tadanori Mizoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATIONAL CUSTOMER SERVICE
Original Assignee
INTERNATIONAL CUSTOMER SERVICE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATIONAL CUSTOMER SERVICE filed Critical INTERNATIONAL CUSTOMER SERVICE
Publication of WO2007086173A1 publication Critical patent/WO2007086173A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/045Furnaces with controlled atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/028Multi-chamber type furnaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path
    • F27B9/24Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path being carried by a conveyor
    • F27B9/2407Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/02Supplying steam, vapour, gases or liquids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/04Circulating atmospheres by mechanical means

Definitions

  • the present invention relates to a gas atmosphere heat treatment apparatus and a gas atmosphere heat treatment method for heat treating a metal part.
  • a heat-resistant metal mesh belt conveyor is provided in a heat-resistant metal mattle tube, and a heating device is disposed outside the pine-full tube.
  • a heat insulating material is provided so as to surround the pine tube and an atmosphere gas is supplied to make the muffle tube non-oxidized.
  • a charging chamber, a heating chamber, a carburizing diffusion chamber, a cooling / holding chamber, a quenching chamber, and an extraction chamber are sequentially arranged up to the loading loca unloading port,
  • an iron alloy as a processing object is provided in the transfer passage formed so as to be continuous with the plurality of chambers.
  • Transport rollers for transporting gold parts are provided, and the space between each chamber is cut by a vacuum seal door.
  • the vacuum seal door between the chambers is opened. At this time, outside air containing oxygen is relatively contained in the heating chamber. It seems to invade in a large amount, but this device and method for removing the outside air are described.
  • Patent Documents 2 to 4 describe the force hearth heat treatment furnace described in Patent Documents 2 to 4, which prevents oxygen from entering or invades when an object to be processed is carried from the carry-in entrance of the heat treatment furnace into the transfer passage. There is no description of the device or method for removing the outside air.
  • the end of the driving roller provided in the furnace protrudes from the furnace side wall force, and this force prevents the outside air from entering.
  • the protruding end of the driving roller is covered with a gas purge type seal cover outside the furnace body side wall, and nitrogen gas is injected into the seal cover.
  • a gas purge chamber is provided outside the side wall of the furnace body from which the end of each drive roller protrudes, and the atmospheric gas supplied from the lower side of the gas purge chamber
  • the upper force is discharged, and openings are formed in the wall surface of the gas purge chamber, and the ends of the drive rollers protrude from the openings to the outside.
  • the device of Patent Document 4 is based on the premise that outside air enters the gas purge chamber from the gap between each drive roller end and the wall surface opening, and the intruding outside air is a downward force in the gas purge chamber. It is intended to be eliminated by the atmospheric gas flowing upward. For this reason, when hydrogen is used as the atmospheric gas, there is a disadvantage that the hydrogen gas flowing in from the furnace in the gas purge chamber reacts with the air (oxygen) that has entered from the roller penetrating part and explodes. .
  • Patent Document 1 JP 2003-14376 PR
  • Patent Document 2 JP-A-7-90352
  • Patent Document 3 Japanese Unexamined Patent Publication No. 2000-55564
  • Patent Document 4 JP-A-6-94370
  • the present invention is intended to solve the above-described conventional problems, and suppresses the intrusion of outside air containing oxygen when an object to be processed is carried into the apparatus, and reduces the invading oxygen. It is an object of the present invention to provide an apparatus and a method that can be quickly eliminated and can efficiently perform a heat treatment process of an object to be processed.
  • the present invention suppresses the intrusion of outside air containing oxygen from the carry-in port of the object to be processed, and in addition to quickly removing the invading oxygen, a driving roller and a heating means outside the furnace body side wall It is possible to prevent the intrusion of outside air from the seal cover that covers the end of the furnace, suppress leakage of the furnace atmosphere, and adjust the atmosphere fluctuations in the furnace relatively easily. It is an object of the present invention to provide a gas atmosphere heat treatment apparatus capable of thermally treating an object.
  • Carrying-in loca A plurality of sections are provided up to the unloading outlet, and a drive roller is arranged in parallel in the plurality of sections to form a transfer path for metal parts.
  • the first and second reducing atmosphere gases are supplied so as to be higher, and the first and second reducing atmosphere gases contain hydrogen gas, and are heat treatment apparatuses that heat-treat while moving metal parts with a driving roller.
  • An inlet gas replacement section for removing oxygen that has entered the apparatus from the carry-in entrance with the metal parts, and a furnace body for heating the metal parts that have passed through the inlet gas replacement section.
  • a heating / reduction section provided with a heating means, a cooling section for cooling the metal parts that have passed through the heating / reduction section with a cooling gas, and outside air when the cooled metal parts are taken out of the unloader apparatus.
  • An outlet section for preventing the temperature, and the inlet gas replacement section is at a temperature lower than a temperature at which the metal parts react with the metal parts and react with the metal parts by the temperature control means to cause oxidation discoloration.
  • the water generated by the invading oxygen and the hydrogen gas contained in the first and second reducing atmosphere gases is controlled to a temperature higher than the temperature at which the water turns into water vapor, and is near the inlet of the inlet gas replacement section
  • the first movable door for shutting out the outside air is provided so that it can be opened and closed, and the second movable door is provided inside the first movable door with an interval at which metal parts can be stopped.
  • the second movable door closes the transfer passage leaving a gap of a predetermined cross-sectional area upward, and the water vapor is passed between the first door and the second door and the reducing atmosphere gas.
  • an exhaust port is provided for discharging to the outside of the device.
  • Gas atmosphere heat treatment apparatus wherein a means for spraying an inert gas curtain to the metal component provided on the inside of the door.
  • the heating reduction section is provided with means for supplying a first reducing atmosphere gas to the transfer passage, and the furnace body of the heating reduction section is provided with the heating means and the drive roller.
  • a casing that covers the gap between the mounting locations is airtightly provided outside the furnace body, and the internal pressure of the casing is higher than that outside the device and inside the transfer passage to prevent outside air from entering the furnace body and to cool the inside of the casing. Therefore, means for supplying the second atmospheric gas into the casing is provided, and the second atmospheric gas is supplied into the furnace body through the gap, and the first reducing atmosphere supplied into the furnace body is provided.
  • Means for controlling the mixing ratio of the gas and the second atmospheric gas to a desired range are provided, and a pipe body through which the cooling water passes and a means for detecting the temperature in the casing are provided in the casing to detect the temperature.
  • the gas atmosphere heat treatment apparatus as set forth in (1), wherein a means for controlling the flow rate of the cooling water is provided so as to receive data from the means and control the inside of the casing to a predetermined temperature or lower.
  • the means for supplying the first reducing atmosphere gas includes a nozzle oriented toward the upstream side of the transfer passage and means for supplying hydrogen gas under pressure to the nozzle.
  • the gas atmosphere according to (3), wherein the means for supplying the second atmospheric gas into the casing includes a nozzle provided in a lower portion of the casing, and means for supplying nitrogen gas under pressure to the nozzle. Heat treatment equipment.
  • a nozzle that passes through a gap between the heating unit and the driving roller and that discharges hydrogen gas flowing into the casing inside the casing to the outside of the casing is provided in an upper portion of the casing.
  • a third movable door and a fourth movable door are provided so as to be openable and closable at intervals where the metal parts can be stopped in the vicinity of the carry-out port.
  • the compartment formed by the movable door is provided with an exhaust port that discharges the outside air that has flowed into the chamber,
  • the gas atmosphere heat treatment apparatus wherein a means for spraying an inert gas on a metal part in a curtain shape is provided inside the fourth movable door.
  • a metal part transfer passage is continuously formed from the carry-in port to the carry-out port, and the carry-in port and the carry-out port are formed to be openable and closable in order to suppress the intrusion of outside air into the transfer passage.
  • a reducing atmosphere gas containing hydrogen gas is supplied so that the internal pressure is higher than the outside of the apparatus, a heating means is provided in a predetermined area of the transfer passage, and a gas atmosphere with an exhaust port near the carry-in entrance
  • heat treatment is performed while the parts are transferred in the transfer passage, and when the metal inlet is opened and the metal parts are transferred into the transfer passage, the metal parts are treated in order to suppress oxygen from entering the transfer passage.
  • Included in the reducing atmosphere gas is a process of loading metal parts that closes the inlet after metal parts are carried into the transfer passage while spraying inert gas in the form of a curtain, and oxygen that has entered the transfer passage.
  • With hydrogen gas By passing the metal parts through the transfer passage set in the first temperature range that is higher than the temperature at which the generated water turns into water vapor and lower than the temperature at which the invading oxygen and metal parts react and oxidize and discolor.
  • the inlet gas replacement process and the inlet gas replacement process are completed, in which the oxygen that has entered the carry-in loca device with the metal parts is converted into water vapor and the water vapor is discharged from the exhaust port near the carry-in port together with the reducing atmosphere gas.
  • the metal parts that have been heated and reduced are transferred to a predetermined area where the heating means are provided, and the metal parts are heat-treated in a second temperature range higher than the first temperature range.
  • the parts are further transferred and cooled by blowing cooling gas on the metal parts while passing through the transfer path set in the third temperature range lower than the second temperature range, and the water is sprayed. Oxidative discoloration Without cooling, the cooling process to cool to the temperature, and the metal parts that have been cooled are transferred, and the metal parts are transported out of the apparatus from the outlet while preventing the outside air from entering the apparatus.
  • a gas atmosphere heat treatment method for metal parts which is characterized.
  • the first movable door for blocking outside air is provided near the carry-in entrance of the inlet gas replacement section, and the inertness is provided inside the first movable door. Since means for spraying gas in the form of a curtain is provided, oxygen contained in the outside air entering the carry-in locus transfer path can be suppressed.
  • the internal pressure of the transfer passage is higher than the outside of the apparatus due to the reducing atmosphere gas, and is below the temperature at which oxygen and metal parts react and oxidize, and above the temperature at which water turns into water vapor. Since it is controlled, the oxygen contained in the outside air that has entered the inlet gas replacement section reacts with the hydrogen contained in the reducing atmosphere gas to become water, which becomes water vapor, and this water vapor becomes the reducing atmosphere gas. At the same time, it passes through the gap above the second movable door, and the exhaust port force is also discharged out of the apparatus.
  • a sub chamber is provided to cover the gap between the furnace wall and the heating means and the drive roller, and the second atmosphere gas is added to the sub chamber.
  • the second atmospheric gas cools the sub-chamber and prevents thermal deterioration of the electrical wiring etc. in the sub-chamber.
  • the second atmospheric gas is introduced into the furnace body through the gap between the furnace walls and It is mixed in a desired ratio in the furnace. Keep this desired mixing ratio Since the flow rate of the second atmospheric gas is controlled, it is difficult to sufficiently cool the sub chamber with only the second atmospheric gas.
  • by providing a pipe body through which the cooling water passes in the sub chamber It becomes possible to control the sub-chamber to a desired temperature or lower. Since the pipe body through which the cooling water passes cools the sub chamber together with the second atmospheric gas, the pipe body through which the cooling water passes can have a relatively simple configuration.
  • the sub-chamber covered with the casing is pressurized and supplied with the second reducing atmosphere gas, and the internal pressure of the sub-chamber is set higher than that in the furnace, and the second reducing atmosphere gas is heated and driven. It passes through the gap between the roller installation points and flows into the furnace from the sub chamber.
  • the internal pressure of the sub chamber is set higher than the internal pressure of the furnace body, when hydrogen is contained in the reducing atmosphere gas in the furnace body, due to the high permeability that is a characteristic of hydrogen gas, Hydrogen gas permeates into the sub chamber from the furnace, and this hydrogen gas stays in the upper space of the sub chamber. There is a concern that if this hydrogen gas exceeds the specified volume and oxygen accidentally flows, it will explode.
  • the third movable door and the fourth movable door are provided in the outlet section so as to be openable and closable, and the inert gas is sprayed onto the metal part in a curtain shape. Since the means is provided on the inner side of the fourth movable door, oxygen contained in the outside air entering the carry-out locuser transfer passage can be suppressed. In addition, since the compartment formed between the third movable door and the fourth movable door provided in the exit section is provided with an exhaust port, when the third movable door is opened, The reducing atmosphere gas flows into the compartment, and the outside air that has entered the compartment can be discharged out of the exhaust outlet.
  • the metal part is carried into the transfer passage from the carry-in locuser while spraying an inert gas on the metal part in the form of a curtain in the carry-in process.
  • the amount of oxygen entering from the mouth can be suppressed to an extremely small amount.
  • the internal pressure of the transfer passage is made higher than the outside of the apparatus by the reducing atmosphere gas, and the temperature inside the transfer passage is below the temperature at which oxygen and metal parts react and oxidize and discolor, and above the temperature at which water changes to water vapor.
  • the oxygen contained in the outside air that has entered from the carry-in inlet reacts with the hydrogen contained in the reducing atmosphere gas to become water, which becomes water vapor, and this water vapor is combined with the reducing atmosphere gas.
  • Exhaust port power Can be discharged out of the device. Therefore, the power to completely eliminate oxygen and water in the inlet gas replacement process, or the amount of oxygen and water flowing into the calothermal reduction process is extremely low! As a result, the heat treatment time in the heat reduction process can be significantly reduced.
  • the heated metal part is first cooled with a cooling gas in a reducing atmosphere gas, and even if water is applied to the metal part, the temperature does not cause oxidation discoloration. For example, since it is cooled to about 270 ° C. or less, it becomes possible to cool the metal parts with water after the cooling step using the cooling gas. For example, if a metal part is cooled with water following the cooling process, the metal part can be cooled to about 100 ° C. or less without causing any problems such as oxidative discoloration or crystal structure. And metal parts cooled to below 100 ° C are much easier to handle and can be handled by workers.
  • FIG. 1 is a cross-sectional view when one embodiment of the present invention is cut in a line direction.
  • FIG. 2 is an enlarged cross-sectional view of a part of FIG.
  • FIG. 3 is an enlarged cross-sectional view of a portion continuing from FIG. 2 in the apparatus of FIG.
  • FIG. 4 is an enlarged cross-sectional view of a portion continuing from FIG. 3 in the apparatus of FIG.
  • FIG. 5 is a cross-sectional view of one sub chamber in FIG.
  • FIG. 6 is a cross-sectional view of the other subchamber in FIG.
  • examples of the gas atmosphere heat treatment apparatus and method include an apparatus and method for bright annealing of metal parts, but the gas atmosphere heat treatment of the present invention is not limited to this.
  • the gas atmosphere heat treatment apparatus 10 is provided with an inlet gas replacement section 12, a heating / reduction section 13, a cooling section 14 and an outlet section 15 in succession, and this gas atmosphere heat treatment apparatus 10 Before and after 10, a loading section 11 and a loading section 16 are provided as ancillary facilities.
  • Figure 2 is an enlarged view of the loading compartment 11 and the inlet gas replacement compartment 12.
  • FIG. 3 is an enlarged view of the heating / reducing section 13 and the cooling section 14, and
  • FIG. 4 is an enlarged view of the outlet section 15 and the unloading section 16.
  • a plurality of drive rollers 18a and 18b are continuously arranged in the entire section from the carry-in section 11 to the carry-out section 16, and these drive rollers 18a and 18b are driven to rotate, and the metal that is the object to be processed
  • the component 19 is put in a container such as a tray and placed on the driving rollers 18a and 18b, and is conveyed from the loading section 11 to the unloading section 16 in the right direction in FIG.
  • the heating / reduction section 13 a ceramic roller having high heat resistance is adopted as the drive roller 18b, and a plurality of electric heaters 20 for directly heating the metal parts 19 are provided in the furnace body 21, and the electric heater 20 and the drive roller 18b are attached to the furnace body 21 by covering the outer power of the furnace body with the casings 22 and 23, respectively.
  • the first reducing atmosphere gas hydrogen gas
  • Gas nitrogen gas
  • This reducing atmosphere gas is pressurized so that the internal pressure of the gas atmosphere heat treatment apparatus 10 is higher than the outside! RU
  • an inert gas can be used as the first and second reducing atmosphere gases.
  • the first and second reducing atmosphere gases are used.
  • hydrogen gas and nitrogen gas are used as the reducing atmosphere gas.
  • the metal part 19 placed in a container such as a tray is placed on the conveyor device 27 to stand by, and the metal part 19 to be processed passes through the swing shirt 30. It is controlled to be sent to the inlet gas replacement section 12 at the time.
  • the inlet gas replacement section 12 prevents outside air from entering the furnace, and replaces it with reducing atmosphere gas so that air and moisture in the metal part 19 are not brought into the heating / reducing section 13.
  • the temperature control means described later is controlled to a temperature not lower than the temperature at which water turns into water vapor and not higher than a temperature at which oxygen and metal parts react to cause acid discoloration. This temperature control range can be, for example, about 100 to 300 ° C.
  • a plurality of driving rollers 18a are arranged in parallel in the passage 12a.
  • the nozzle 28 of the frame curtain forming device, the first up / down shutter 29, the nitrogen gas ejection nozzle 30, the second up / down shutter 31, an exhaust port 32a and a swing shutter 33 are arranged.
  • the frame curtain forming device is a force that can be selectively provided rather than the essential configuration.
  • the nozzle 28 is provided outside the upper and lower open / close shirt 29, When the first top / bottom shutter 29 is opened and the metal part 19 is carried into the transfer passage 12a, a flame is blown out from the nozzle 28 in a tense manner to form a frame curtain covering the entire cross section of the transfer passage 12a.
  • the oxygen that tries to enter the device together with the metal parts 19 reacts with the hydrogen to suppress the intrusion of oxygen into the device. It is out.
  • the first vertical opening / closing shutter 29 has a telescopic cylinder 29a provided below and a shutter 29b moved up and down by the telescopic cylinder 29a, and lifts the shutter 29b so that there is no gap in the transfer passage 12a. It closes and shuts off the outside air force in the transfer passage 12a.
  • the nitrogen gas ejection nozzle 30 is provided upstream of the first upper / lower opening / closing shutter 29 in order to eject nitrogen gas as an inert gas.
  • the nitrogen gas is directed toward the metal part 19 in a single force.
  • a curtain of nitrogen gas that blows out and covers the entire cross section of the transfer passage 12a is formed, thereby obtaining the effect of suppressing the outside air intrusion when the shutter 29b is opened.
  • the nitrogen gas ejection nozzle 30 is continuously operated when the shutter 29b is open, and suppresses the amount of oxygen contained in the outside air entering the carry-in locus transfer path.
  • the second vertical opening / closing shutter 31 has a telescopic cylinder 31a provided below, and a shutter 31b moved up and down by the telescopic cylinder 31a.
  • the gap 31c having a predetermined cross-sectional area is closed above the transfer passage 12a.
  • the shutter 31b is provided on the downstream side of the first upper / lower opening / closing shutter 29 with an interval at which the metal part 19 placed in a container such as a tray can be stopped.
  • an exhaust port 32a that is always open is provided at the ceiling of the transfer path 12a, and a burner 32b is attached to the outside of the exhaust port 32a. It is done.
  • the swing shutter 33 is pivotably suspended from the ceiling of the transfer passage 12a, and the lower end extends to the drive roller 18a.
  • the swing shutter 33 is pushed and opened by the tray. Is done.
  • an explosion-proof device 35 is provided at a position relatively close to the heating / reducing section 13.
  • the explosion-proof device 35 has a lid 35b airtightly provided at the opening of a pipe body 35a that allows the transfer passage 12a to communicate with the outside, and the lid 35b is automatically operated when an internal pressure exceeding a predetermined value is generated in the transfer passage 12a. It is provided with such a strength that it can be removed. That is, when a relatively large amount of oxygen enters the transfer passage 12a, the oxygen concentration becomes high, reacts with hydrogen gas to cause an explosion, and a relatively large internal pressure is generated in the transfer passage 12a, the lid 35b Is to release the internal pressure.
  • An explosion-proof device 35 having the same configuration is also provided in the outlet section 15 as shown in FIG.
  • the heating / reduction section 13 is a section where the metal part 19 is heated and passed in a reducing atmosphere, and for example, heat treatment such as bright annealing is performed on the metal part 19.
  • Each of the floors is made of a heat-resistant material, and an oxygen concentration measuring tube 36 is inserted through an inlet 21b formed narrower than the inside of the furnace body 21a. The oxygen concentration is monitored. When this oxygen concentration is high, the supply of the first atmospheric gas (hydrogen gas) is stopped.
  • a ceramic roller having high heat resistance is employed as the driving roller 18b.
  • the electric heater 20 is disposed above and below the plurality of driving rollers 18b in the furnace body 21, and both ends of the electric heater 20 and the driving roller 18b are inserted through the side wall 21c and attached to the mounting portion. A gap is created.
  • This mounting location is shown in Figs. 5 and 6.
  • the outer force of the side wall 21c is also covered with the casings 22 and 23, and the sub chambers 24 and 25 are formed.
  • the radiation temperature gradually increases from the upstream side toward the downstream side in the furnace body, reaches the maximum temperature at a predetermined position in the latter half, and reaches the downstream furnace outlet from this position.
  • the temperature is set to be different for each of the multiple units so that the radiation temperature gradually decreases toward the target, and a temperature sensor (not shown) is placed in the tray that transports the metal parts 19 when the device is initially set. The temperature is measured and initialized by the measured data.
  • a temperature sensor (not shown) is provided on the ceiling inside the furnace body 21a, and the temperature of the reducing atmosphere gas in the heating / reducing section 13 is monitored.
  • the reducing atmosphere gas heated by the electric heater 20 in the heating / reducing section 13 flows into the inlet gas replacement section 12, and is equal to the temperature of a predetermined number of electric heaters 20 provided upstream in the furnace body.
  • the temperature range of the inlet gas replacement section 12 is substantially set. Therefore, the temperature control of the reducing atmosphere gas in the inlet gas replacement section 12 is performed by receiving data from a temperature sensor (not shown) provided in the inlet gas replacement section 12 and the temperature sensor, and in the heating / reduction section 13. This is performed by a device (not shown) for controlling the temperature of a predetermined number of electric heaters 20 on the upstream side.
  • the electric wiring 20 a is connected to one end of the electric heater 20, a driving force transmission device 37 including a rotating shaft and gears is attached to one end of the driving roller 18 b, and the motor 38 is disposed outside the sub chamber 24. Is installed. A rotational force is transmitted from the motor 38 to the driving force transmission device 37 via the chain 39a, the gear 39b, and the rotating shaft 39c, and the driving roller 18b is driven to rotate.
  • the rotating shaft 39c is provided at two locations so as to penetrate inside and outside of the casing 22, and the penetration location is hermetically closed by a sealed bearing.
  • a finned cooling pipe 40 is extended, and a nozzle 41 for supplying a second atmospheric gas (nitrogen gas) is connected to the lower side of the casings 22 and 23.
  • the nozzle 41 is connected to a pipe (not shown) extending from a device (not shown) for supplying a second atmospheric gas under pressure, and a supply amount of the second atmospheric gas is connected to the pipe leading to the nozzle 41.
  • a flow meter (not shown) is provided to measure the flow rate.
  • a nozzle 42 for discharging hydrogen gas is provided above the casings 22 and 23, and an adjustment valve 43a is provided in the middle of the nozzle 42.
  • a burner 43 b is provided at the discharge port of the nozzle 42. The amount of hydrogen gas discharged from the nozzle 42 is adjusted by the adjusting valve 43a and burned by the burner 43b.
  • the sub-chambers 24 and 25 are further provided with a temperature sensor (not shown), and the amount of cooling water sent to the finned cooling pipe 40 by a control device (not shown) that receives data from the temperature sensor. By adjusting the (flow rate), the sub-chambers 24 and 25 are controlled to have a temperature of 120 ° C or lower.
  • FIGS. 5 and 6 only one finned cooling pipe 40 is illustrated. The number of the cooling pipes 40 is set as necessary.
  • the nitrogen gas cools the sub chambers 24 and 25 to prevent thermal deterioration of the electric wiring 20a and the driving force transmission device 37.
  • the nitrogen gas is introduced into the furnace body 21a through the gap between the driving roller 18b and the electric heater 20 and the side wall 21c, and the sub-chambers 24 and 25 have the internal force. Since 21a is mixed in a desired ratio, a large amount of nitrogen gas cannot be supplied, and it is difficult to sufficiently cool the sub chambers 24 and 25 only with nitrogen gas.
  • the finned cooling pipes 40 are provided in the sub chambers 24 and 25, the sub chambers 24 and 25 can be controlled to a desired temperature or lower. Since the finned cooling tube 40 cools the sub chambers 24 and 25 together with the nitrogen gas, the finned cooling tube 40 itself can have a relatively simple configuration.
  • the most downstream part of the heating and reducing section 13 is narrowly formed with a cross section smaller than the inside of the furnace body 21a, and a nozzle 26 directed to the upstream side of the transfer passage 21a is provided here.
  • a pipe (not shown) extending from a device (not shown) for pressurizing and supplying the first atmospheric gas (hydrogen gas).
  • a first atmospheric gas (hydrogen gas) is ejected from the nozzle 26 in the upstream direction of the heating-reducing section 13.
  • the pipe leading to the nozzle 23 is provided with a flow meter (not shown) for measuring the supply amount of hydrogen gas, and the control device (not shown) receives data from the flow meter, and the control device This controls the amount of hydrogen gas supplied from the nozzle 26.
  • Hydrogen gas is ejected from the nozzle 26 in the upstream direction of the heating / reducing section 13 and in the upstream direction. An air flow is created, and this air flow suppresses the flow of heat from the furnace body 21a to the cooling section 14. Further, the hydrogen gas supplied from the nozzle 26 is mixed with nitrogen gas introduced into the furnace body 2 la through the sub chambers 24 and 25 in the furnace body 21a to constitute a reducing atmosphere. The hydrogen gas reacts with this small amount of oxygen to form water (water vapor) even if oxygen is present in the furnace body 21a, creating an oxygen-free state in the furnace body 21a. Since the optimal mixing ratio of hydrogen gas and nitrogen gas in 21a varies depending on the workpiece, the volume ratio of hydrogen gas: nitrogen gas is controlled by a flow meter and a control device (not shown), respectively.
  • the mixing ratio of nitrogen gas and hydrogen gas is controlled so that the hydrogen gas has a volume ratio of 60% or more. More preferably, it is necessary to control the volume ratio of hydrogen gas: nitrogen gas to be approximately 4 to 85:96 to 15. Such a volume ratio is controlled by a flow meter and a control device (not shown) of nitrogen gas and hydrogen gas.
  • the apparatus is configured so that the metal component 19 can be rapidly cooled by the cooling gas, for example, to about 270 ° C or less. That is, in the cooling section 14, both side walls constituting the transfer passage 15a are formed by water-cooled walls, and the ceiling and the bottom surface are formed from a water-cooled tank in which water passes, and a plurality of drive rollers 18b are provided in the transfer passage 15a.
  • Two cooling devices 44 are provided in parallel.
  • the cooling device 44 includes a plurality of finned water cooling tubes 45 disposed above the driving roller 18b, a cooling fan 46 disposed above the water cooling tubes 45, and a motor 47 for driving the cooling fan 46. Are provided.
  • the temperature of the cooling compartment 14 is monitored by a temperature sensor (not shown), the amount of cold water supplied to the finned water cooling pipe 45 is monitored by a monitoring system (not shown), and is controlled by a control device (not shown). Be controlled.
  • the cooling device 44 allows the metal part 19 to pass through the cooling section 14 while blowing the cooling gas, the metal part 19 is cooled to at least about 270 ° C. or less.
  • the outlet compartment 15 is evacuated into the cooling compartment 14 when the cooled metal part 19 is removed.
  • a plurality of driving rollers 18a are arranged in parallel in the passage 16a, and the swing shutter 48, the third upper / lower shutter 49, the exhaust port 50a, the burner toward the outlet 50b, a nitrogen gas ejection nozzle 51, a fourth upper / lower opening / closing shirt 52, and a nozzle 53 of a frame curtain forming apparatus are arranged.
  • the third and fourth open / close shutters 49 and 52 have telescopic cylinders 49a and 52a provided below, and shutters 49b and 52b moved up and down by the contraction cylinders 49a and 52a. 52a is raised to block the transfer passage 15a without gaps, and the outside of the transfer passage 15a is shut off.
  • the third vertical opening / closing shutter 49 and the fourth vertical opening / closing shutter 52 are provided at intervals near which the metal parts can be stopped near the exit, and are formed by the third and fourth vertical opening / closing shutters 49, 52.
  • the outside air flowing into the compartment is discharged from the exhaust port 50a.
  • the exhaust port 50a is always open, and a burner 50b is provided outside the exhaust port 50a. When hydrogen gas is contained in the gas discharged from the exhaust port 50a, the burner 50b burns.
  • the nitrogen gas ejection nozzle 51 is provided on the upstream side of the fourth upper and lower opening / closing shutter 52.
  • the nitrogen gas is ejected in a curtain shape toward the metal part 19, and a nitrogen gas curtain covering the entire cross section of the transfer passage 15a is formed.
  • the frame curtain forming device is a force that can be selectively provided rather than the essential configuration.
  • the nozzle 53 is provided outside the fourth upper / lower shutter 52.
  • a flame is blown out from the nozzle 53 in the form of a curtain to form a frame curtain covering the entire cross section of the transfer passage 15a,
  • oxygen that tries to enter the device reacts with hydrogen to prevent oxygen from entering the device.
  • an unloading section 16 is provided following the exit section 15, and in this unloading section 16, the metal part 19 that has undergone the heat treatment process is taken out from the furnace of the exit section 15 and is transported to the next process.
  • Conveyor device 54 is provided! Immediately before this conveyor device 54 Is provided with a hood 55, and a cold water nozzle 56 is attached to the lower side of the hood 55. In the conveyor device 54, a water collection container 57 is provided below the drive roller 18a, and a drain pipe 58 is connected to the water collection container 57.
  • the metal part 19 that has exited the outlet section 15 has already been cooled to about 250 to 200 ° C or less, but in this unloading section 16, the metal part 19 is further poured into the metal part 19 by pouring cold water.
  • the component 19 is cooled to about 100 ° C or less.
  • the cold water that has passed through the metal part 19 and the drive roller 18 a is drained from the water collection container 57 through the drain pipe 58.
  • the metal part 19 has already been cooled to, for example, about 250 to 200 ° C. or less immediately before the cold water nozzle 56. Therefore, the metal part 19 can be cooled with water. That is, when the metal part 19 has a temperature of about 300 to 270 ° C. or more, there is a possibility of adverse effects such as oxidation discoloration and crystal structure, and cooling with water is not preferable.
  • control by temperature data can be performed by a temperature sensor and a control device provided respectively.
  • Other control can be performed by sequence control, and a plurality of control means and control devices can be configured by one PLC (Programmable Logic Controller).
  • the PLC is a conventional device that uses a computer or a dedicated input device to express the control contents in advance in a program, writes it in memory, and executes the program sequentially to control the sequence. .
  • the gas atmosphere heat treatment apparatus 10 is operated, and each section is set to a predetermined condition. That is, the first force also closes the fourth up / down shutters 29, 31, 49, 52, operates the electric heater 20 in the heating / reduction section 13, and the inside of the transfer passage in the inlet gas replacement section 12 is 100 to 100, for example. Increase the temperature so that the reducing atmosphere gas at a predetermined position in the latter half of the furnace body in the heating / reducing section 13 is about 1000 ° C: L100 ° C. Further, the first reducing atmosphere gas (hydrogen gas) is pressurized and supplied from the nozzle 26 provided in the heating / reduction section 13 toward the upstream of the transfer passage, and the second reducing atmosphere gas (nitrogen gas) is sub-charged.
  • hydrogen gas hydrogen gas
  • nitrogen gas nitrogen gas
  • Through chambers 24, 25 It introduce
  • the internal pressure of the inside of the transfer passage of the gas atmosphere heat treatment apparatus 10 is higher than that of the outside of the apparatus by the first and second reducing atmosphere gases.
  • the first upper and lower opening / closing shirt 29 is opened while nitrogen gas is blown out from the nitrogen gas blowing nozzle 30 in the form of a curtain, and the metal part which is the object to be treated 19 is carried into the transfer passage.
  • the second three upper and lower shutters 31, 49, 52 are closed.
  • the first up / down shutter 29 is closed and the nitrogen gas ejection nozzle 30 is stopped.
  • the outside air force is shut off in the transfer passage, and oxygen around the metal part can be blown off.
  • oxygen entering the carry-in loca transfer passage can be suppressed. For example, it is desirable to suppress the oxygen entering the transfer passage to 4% or less by volume ratio with respect to the reducing atmosphere gas.
  • the frame curtain forming apparatus can be selectively operated as appropriate when the first up / down opening / closing shutter 29 is opened / closed. For example, if a flame is blown out from the nozzle 28 in the form of a curtain by a frame curtain forming device, the hydrogen gas contained in the reducing atmosphere gas is burned by the flame, and oxygen around the metal parts or oxygen that tries to enter the transfer passage Reacts with hydrogen to suppress oxygen entering the transfer passage.
  • the second upper / lower shutter 31 is opened, and after passing the metal part 19, the second The upper / lower shutter 31 is closed, and the metal part 19 is allowed to pass through the transfer passage of the inlet gas replacement section 12 set to, for example, about 100 to 300 ° C.
  • the return atmosphere gas flows toward the exhaust outlet 32a upstream of the downstream force in the transfer passage. Reducing atmosphere in which the hydrogen gas contained in the original atmosphere gas turns into water by reacting with the metal part 19 and the oxygen that has entered the equipment, and this is turned into water, which turns into water vapor.
  • the gas passes through the gap 31 of the second upper / lower opening / closing shutter 31b and is discharged out of the apparatus through the exhaust port 32a.
  • hydrogen gas is contained in the exhaust gas, it is burned by a burner 32b provided outside the exhaust port 32a.
  • the metal part 19 that has been subjected to the inlet gas replacement process is further transferred by a driving roller, and passes through a heat reduction section 13 provided with an electric heater 20.
  • the electric heater 20 in the heating and reducing section 13 gradually increases in temperature from the upstream side toward a predetermined position in the latter half of the furnace body 21, reaches a maximum temperature at a predetermined position in the latter half, and reaches downstream from here.
  • the temperature is set to be different for each of the multiple furnaces so that the radiation temperature decreases toward the outlet of the furnace body 21. Therefore, while the metal parts are transferred from the upstream side to the predetermined position in the latter half of the furnace body 21 in the heat reduction section 13, the temperature of the metal parts gradually increases by about 300 ° C, and the heat treatment temperature.
  • the temperature reaches approximately 1000 to 1080 ° C, and further, the temperature falls to approximately 700 to 900 ° C while being transferred to the outlet of the furnace body 21 on the downstream side.
  • the metal part 19 in which the acid and soot is minimized in the inlet gas replacement process is heat-treated, so that the heat treatment time is shortened compared to the conventional heat treatment method.
  • the metal parts that have been subjected to the heat reduction process are further transferred, and the metal that has been heated while passing through the transfer passage of the cooling section 14 that is set to about 50 ° C. Cool the parts with cooling gas and cool them down to about 270 ° C, which is a temperature range that does not cause oxidative discoloration even when water is sprayed.
  • the metal parts for which the cooling process has been completed are transferred, and the first, second and fourth 3 With the three upper / lower shutters 29, 31, 52 closed, the third upper / lower shutter 49 was opened, and the metal part was passed through the compartment formed by the third and fourth upper / lower shutters 49, 52. Later, the third upper / lower shutter 49 is closed.
  • the third top / bottom opening / closing shutter 49 is opened, the reducing atmosphere gas is discharged to the outside through the exhaust port 50a. It is done.
  • hydrogen gas is contained in the exhaust gas, it is burned by a burner 50b provided outside the exhaust port 50a.
  • the fourth upper / lower opening / closing shutter 52 is opened to carry the metal part out of the apparatus.
  • the first to third upper and lower shutters 29, 31, 49 are closed.
  • the fourth top / bottom open / close shutter 52 is closed to stop the nitrogen gas.
  • the frame curtain forming apparatus can be selectively operated as needed when the fourth upper / lower opening / closing shutter 52 is opened / closed. For example, if a flame is blown out from the nozzle 53 in the form of a curtain using a frame curtain forming device, hydrogen gas contained in the reducing atmosphere gas burns, oxygen and hydrogen in the outside air react, and oxygen enters the transfer passage. Prevention is further promoted.

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Abstract

It is intended to inhibit the penetration of oxygen at the time of carrying of treatment object in an apparatus and realize rapid elimination of any penetrated oxygen to thereby efficiently carry out the operation of heat treatment of treatment object. There is provided a gas atmosphere heat treating apparatus comprising an inlet gas replacing compartment, a thermal reduction compartment, a cooling compartment and an outlet compartment, wherein in the inlet gas replacing compartment, temperature control is made by temperature control means so as to ensure a temperature which is not higher than the temperature at which any oxygen having penetrated in transfer passage reacts with a metal part to thereby cause oxidation discoloration but not lower than the temperature at which water produced from any penetrated oxygen and hydrogen gas contained in first and second reducing atmosphere gases becomes steam, and wherein in the vicinity of carry-in aperture of the inlet gas replacing compartment, first and second moving doors are disposed with a given spacing, and wherein the second moving door closes the transfer passage with an interstice left upside, and wherein between the first and second doors, there is disposed a vent for discharging steam together with reducing atmosphere gas outside the apparatus, and wherein inside the first moving door, there is disposed inert gas emission means.

Description

明 細 書  Specification

ガス雰囲気熱処理装置及び方法  Gas atmosphere heat treatment apparatus and method

技術分野  Technical field

[0001] 本発明は、金属部品を熱処理するためのガス雰囲気熱処理装置及びガス雰囲気 熱処理方法に関する。  [0001] The present invention relates to a gas atmosphere heat treatment apparatus and a gas atmosphere heat treatment method for heat treating a metal part.

背景技術  Background art

[0002] 金属部品の成形方法としてハイド口フォーミングと呼ばれものがある。その原理は、 金属パイプや金属プレートの外側を金型で押さえつけながら、内側から強力な水圧 をかけることにより、ノイブやプレートを膨張させて自在に変形させるものである。この ようにカ卩ェされた金属部品はプレス時の応力を解除しなければならず、そのために熱 処理により金属の再結晶化を行って 、る。  [0002] As a method for forming a metal part, there is a so-called hide mouth forming. The principle is that the outside of the metal pipe or metal plate is pressed with a metal mold and a strong water pressure is applied from the inside, so that the noise and plate are expanded and deformed freely. The metal parts thus formed must be relieved of stress during pressing, and for this purpose, the metal is recrystallized by heat treatment.

この熱処理のためのガス雰囲気熱処理装置としては、例えば、耐熱金属製のマツフ ル筒内に耐熱金属製のメッシュベルトコンベア一が設けられ、マツフル筒の外側に加 熱装置が配置され、この加熱装置とマツフル筒とを囲むように断熱材が設けられ、マ ッフル筒内を無酸ィ匕状態にするために雰囲気ガスが供給されるように構成されたもの がある。  As the gas atmosphere heat treatment apparatus for this heat treatment, for example, a heat-resistant metal mesh belt conveyor is provided in a heat-resistant metal mattle tube, and a heating device is disposed outside the pine-full tube. In some cases, a heat insulating material is provided so as to surround the pine tube and an atmosphere gas is supplied to make the muffle tube non-oxidized.

[0003] このような従来のガス雰囲気熱処理装置では、メッシュベルトコンベア一がマツフル 筒内に設けられているため、熱による劣化でメッシュベルトを頻繁に交換しなければ ならず、交換作業時にはガス雰囲気熱処理装置の操業を停止しなければならな 、と いう欠点がある。また従来の熱処理炉では、加熱装置をマツフル筒の外側に設けるこ とにより、マツフル筒内の気密性を高めて無酸ィ匕状態を効率良く作っているものの、 マツフル筒外力 の加熱では熱効率が悪くなるという欠点があった。  [0003] In such a conventional gas atmosphere heat treatment apparatus, since the mesh belt conveyor is provided in the pine full cylinder, the mesh belt must be frequently replaced due to deterioration due to heat. There is a disadvantage that the operation of the heat treatment apparatus must be stopped. In the conventional heat treatment furnace, a heating device is provided outside the pine full cylinder to improve the hermeticity in the pine full cylinder and efficiently create a non-acidic soot state. There was a drawback of getting worse.

[0004] 上述のような問題を解決するため、電熱ヒーター等の加熱装置と駆動ローラーが炉 体内部に設けられたローラーハース式熱処理装置が提案されている。  [0004] In order to solve the above problems, a roller hearth type heat treatment apparatus in which a heating device such as an electric heater and a driving roller are provided inside the furnace body has been proposed.

例えば、特許文献 1に記載されたローラーハース式真空炉は、装入室、昇温室、浸 炭拡散室、降温 ·保持室、焼入室、抽出室が、搬入ロカ 搬出口まで順次配設され 、これら複数の室に連続するように形成された移送通路には、被処理物である鉄合 金部品を搬送する搬送用ローラが設けられ、それぞれの室間は真空シール扉で仕 切られている。このローラーハース式真空炉では、鉄合金部品を装入室から昇温室 に搬入するため、室間の真空シール扉が開かれるものであり、このとき昇温室内には 酸素を含む外気が比較的多量に侵入するものと思われるが、この外気を除去する装 置や方法にっ 、ては記載されて 、な 、。 For example, in the roller hearth type vacuum furnace described in Patent Document 1, a charging chamber, a heating chamber, a carburizing diffusion chamber, a cooling / holding chamber, a quenching chamber, and an extraction chamber are sequentially arranged up to the loading loca unloading port, In the transfer passage formed so as to be continuous with the plurality of chambers, an iron alloy as a processing object is provided. Transport rollers for transporting gold parts are provided, and the space between each chamber is cut by a vacuum seal door. In this roller hearth type vacuum furnace, in order to carry iron alloy parts from the charging chamber into the heating chamber, the vacuum seal door between the chambers is opened. At this time, outside air containing oxygen is relatively contained in the heating chamber. It seems to invade in a large amount, but this device and method for removing the outside air are described.

[0005] また特許文献 2〜4にも、ローラーハース型熱処理炉が記載されている力 被処理 物を熱処理炉の搬入口から移送通路に搬入する際に、酸素の侵入を防止したり、侵 入した外気を除去する装置や方法にっ 、ての記載はな 、。  [0005] Also, Patent Documents 2 to 4 describe the force hearth heat treatment furnace described in Patent Documents 2 to 4, which prevents oxygen from entering or invades when an object to be processed is carried from the carry-in entrance of the heat treatment furnace into the transfer passage. There is no description of the device or method for removing the outside air.

例えば、還元雰囲気中でステンレス鋼などの金属材料を光輝焼鈍するため、雰囲 気ガスとして水素を用いた場合には、搬入口から侵入する酸素が所定以上に達する と、水素ガスと反応して爆発する危険性が高まるという欠点がある。また所定温度以 上の熱処理炉内で、被処理物である金属材料が搬入口から侵入した酸素と反応して 酸ィ匕変色を生じた場合には、加熱還元工程に比較的長い時間を要し、生産性が低 下するという問題も生じる。  For example, in order to brightly anneal a metal material such as stainless steel in a reducing atmosphere, when hydrogen is used as the atmosphere gas, it reacts with the hydrogen gas when the oxygen entering from the carry-in port reaches a predetermined level or more. There is a disadvantage that the risk of explosion increases. In addition, if the metal material that is the object to be processed reacts with oxygen that has entered from the carry-in port and causes acid discoloration in a heat treatment furnace at a predetermined temperature or higher, a relatively long time is required for the heat reduction process. However, there is also a problem that productivity decreases.

[0006] さらに、特許文献 3を例示して説明すれば、ローラーハース型熱処理装置では、炉 内に設けられた駆動ローラーの端部が炉体側壁力 突出しており、ここ力 の外気の 侵入防止、炉内雰囲気の漏出防止のために、この駆動ローラー突出端をガスパージ 式のシールカバーにより炉体側壁の外側で覆い、シールカバー内に窒素ガスを注入 している。  [0006] Further, with reference to Patent Document 3, in the roller hearth type heat treatment apparatus, the end of the driving roller provided in the furnace protrudes from the furnace side wall force, and this force prevents the outside air from entering. In order to prevent leakage of the furnace atmosphere, the protruding end of the driving roller is covered with a gas purge type seal cover outside the furnace body side wall, and nitrogen gas is injected into the seal cover.

し力しながら、シールカバー内には加熱用ヒーター等の配線やローラー駆動用の ベアリングが配置され、これらの耐熱温度は 120°C程度であることを考えると、シール カバー内には比較的多量の窒素ガスを送り込んで冷却する必要がある。冷却のため に比較的多量の窒素ガスを送り込んだ場合には、窒素ガスがシールカバー内から炉 内に流入することが考えられ、炉内の雰囲気変動に対する調整は非常に困難になる すなわち、還元雰囲気中でステンレス鋼などの金属材料を光輝焼鈍する場合には 、ガス雰囲気熱処理装置の炉内温度が 1000°C程度まで上昇するので、シールカバ 一内の冷却のために、ガスパージ用の窒素ガスをシールカバー内に比較的多量に 送り込むことが必要になる。し力しながら、このときにシールカバー内力も炉内に多量 の窒素ガスが流入することは、光輝焼鈍工程にとって好ましいことではないため、こ れらの条件を満たすべく炉内の雰囲気変動を調整することは非常に困難になる。 However, considering the fact that wiring such as a heater for heating and bearings for driving rollers are arranged in the seal cover and their heat-resistant temperature is about 120 ° C, a relatively large amount is contained in the seal cover. It is necessary to cool by sending nitrogen gas. When a relatively large amount of nitrogen gas is sent for cooling, it is considered that nitrogen gas flows into the furnace from the inside of the seal cover, and it is very difficult to adjust the atmospheric fluctuation in the furnace. When brightly annealing a metal material such as stainless steel in an atmosphere, the furnace temperature of the gas atmosphere heat treatment apparatus rises to about 1000 ° C, so nitrogen gas for gas purging is used for cooling in the seal cover. A relatively large amount in the seal cover It is necessary to send in. However, it is not preferable for the bright annealing process that a large amount of nitrogen gas flows into the furnace at this time as well, so the atmospheric pressure inside the furnace is adjusted to satisfy these conditions. It becomes very difficult to do.

[0007] また特許文献 4のローラーハース型連続炉では、駆動ローラそれぞれの端部が突 出した炉体側壁の外側にガスパージ室が設けられ、このガスパージ室の下側から供 給された雰囲気ガスが、駆動ローラそれぞれの端部周囲を通過した後に上側力 排 出され、またガスパージ室の壁面には開口部が形成され、これら開口部から各駆動 ローラの端部が外部に突出している。  [0007] Further, in the roller hearth type continuous furnace of Patent Document 4, a gas purge chamber is provided outside the side wall of the furnace body from which the end of each drive roller protrudes, and the atmospheric gas supplied from the lower side of the gas purge chamber However, after passing around the ends of the drive rollers, the upper force is discharged, and openings are formed in the wall surface of the gas purge chamber, and the ends of the drive rollers protrude from the openings to the outside.

つまり、特許文献 4の装置は、各駆動ローラ端部と壁面開口部との隙間からガスパ ージ室に外気が侵入することを前提としたものであり、侵入した外気は、ガスパージ 室内の下方力 上方へ流れる雰囲気ガスにより排除しょうとするものである。そのため 、雰囲気ガスとして水素を用いた場合には、ガスパージ室内において、炉内から流入 した水素ガスがローラー貫通部から侵入した空気 (酸素)と反応して爆発する危険性 が高くなるという欠点がある。  In other words, the device of Patent Document 4 is based on the premise that outside air enters the gas purge chamber from the gap between each drive roller end and the wall surface opening, and the intruding outside air is a downward force in the gas purge chamber. It is intended to be eliminated by the atmospheric gas flowing upward. For this reason, when hydrogen is used as the atmospheric gas, there is a disadvantage that the hydrogen gas flowing in from the furnace in the gas purge chamber reacts with the air (oxygen) that has entered from the roller penetrating part and explodes. .

特許文献 1 :特開 2003— 14376号広報  Patent Document 1: JP 2003-14376 PR

特許文献 2:特開平 7— 90352号公報  Patent Document 2: JP-A-7-90352

特許文献 3:特開 2000— 55564号公報  Patent Document 3: Japanese Unexamined Patent Publication No. 2000-55564

特許文献 4:特開平 6 - 94370号公報  Patent Document 4: JP-A-6-94370

発明の開示  Disclosure of the invention

発明が解決しょうとする課題  Problems to be solved by the invention

[0008] 本発明は、上述のような従来の問題を解決しょうとするものであり、被処理物を装置 内に搬入する際に、酸素を含む外気の侵入を抑制すると共に、侵入した酸素を迅速 に排除可能であり、被処理物の熱処理工程を効率良く行うことが可能な装置及び方 法を提供することを課題とする。  [0008] The present invention is intended to solve the above-described conventional problems, and suppresses the intrusion of outside air containing oxygen when an object to be processed is carried into the apparatus, and reduces the invading oxygen. It is an object of the present invention to provide an apparatus and a method that can be quickly eliminated and can efficiently perform a heat treatment process of an object to be processed.

[0009] また本発明は、被処理物の搬入口からの酸素を含む外気の侵入を抑制すると共に 、侵入した酸素を迅速に排除することに加え、炉体側壁の外側の駆動ローラや加熱 手段の端部を覆うシールカバーからの外気の侵入を防止し、炉内雰囲気の漏出を抑 制し、さらに、炉内の雰囲気変動を比較的容易に調整することが可能であり、被処理 物を熱効率良く処理することができるガス雰囲気熱処理装置を提供することを課題と する。 [0009] Further, the present invention suppresses the intrusion of outside air containing oxygen from the carry-in port of the object to be processed, and in addition to quickly removing the invading oxygen, a driving roller and a heating means outside the furnace body side wall It is possible to prevent the intrusion of outside air from the seal cover that covers the end of the furnace, suppress leakage of the furnace atmosphere, and adjust the atmosphere fluctuations in the furnace relatively easily. It is an object of the present invention to provide a gas atmosphere heat treatment apparatus capable of thermally treating an object.

課題を解決するための手段  Means for solving the problem

[0010] 本発明の上記課題は下記の手段によって解決される。  [0010] The above-described problems of the present invention are solved by the following means.

[0011] (1) 搬入ロカ 搬出口まで複数の区画が設けられ、これら複数の区画に駆動ローラ 一が並列配置されて金属部品の移送通路が形成され、移送通路には装置外よりも 内圧が高くなるように第一及び第二の還元雰囲気ガスが供給され、第一及び第二の 還元雰囲気ガスは水素ガスを含むものであり、金属部品を駆動ローラーで移送しな がら熱処理する熱処理装置であって、金属部品と伴に搬入口から装置内に侵入した 酸素を排除する入口ガス置換区画と、当該入口ガス置換区画を通過した金属部品を 加熱するための炉体を有し、当該炉体に加熱手段が設けられた加熱還元区画と、当 該加熱還元区画を通過した金属部品を冷却気体により冷却する冷却区画と、冷却さ れた金属部品を搬出ロカ 装置外へ取り出すときに外気が装置内に侵入するのを 防止するための出口区画とを備え、前記入口ガス置換区画は、温度制御手段により 、金属部品と伴に搬入口から移送通路内へ侵入した酸素と金属部品が反応して酸 化変色する温度以下、かつ侵入した酸素と前記第一及び第二の還元雰囲気ガスに 含まれる水素ガスとにより生成される水が水蒸気に変わる温度以上に制御されるもの であり、前記入口ガス置換区画の搬入口付近には、外気を遮断するための第一の可 動扉が開閉可能に設けられ、第一の可動扉よりも内側に金属部品が停止可能な間 隔を置いて第二の可動扉が設けられ、当該第二の可動扉は所定断面積の隙間を上 方に残して移送通路を閉鎖するものであり、第一の扉と第二の扉との間には前記水 蒸気を還元雰囲気ガスと伴に装置外へ排出する排気口が設けられ、前記第一の可 動扉の内側には金属部品に不活性ガスをカーテン状に噴き付ける手段が設けられ たことを特徴とするガス雰囲気熱処理装置。  [0011] (1) Carrying-in loca A plurality of sections are provided up to the unloading outlet, and a drive roller is arranged in parallel in the plurality of sections to form a transfer path for metal parts. The first and second reducing atmosphere gases are supplied so as to be higher, and the first and second reducing atmosphere gases contain hydrogen gas, and are heat treatment apparatuses that heat-treat while moving metal parts with a driving roller. An inlet gas replacement section for removing oxygen that has entered the apparatus from the carry-in entrance with the metal parts, and a furnace body for heating the metal parts that have passed through the inlet gas replacement section. A heating / reduction section provided with a heating means, a cooling section for cooling the metal parts that have passed through the heating / reduction section with a cooling gas, and outside air when the cooled metal parts are taken out of the unloader apparatus. Intrude into An outlet section for preventing the temperature, and the inlet gas replacement section is at a temperature lower than a temperature at which the metal parts react with the metal parts and react with the metal parts by the temperature control means to cause oxidation discoloration. In addition, the water generated by the invading oxygen and the hydrogen gas contained in the first and second reducing atmosphere gases is controlled to a temperature higher than the temperature at which the water turns into water vapor, and is near the inlet of the inlet gas replacement section The first movable door for shutting out the outside air is provided so that it can be opened and closed, and the second movable door is provided inside the first movable door with an interval at which metal parts can be stopped. The second movable door closes the transfer passage leaving a gap of a predetermined cross-sectional area upward, and the water vapor is passed between the first door and the second door and the reducing atmosphere gas. In addition, an exhaust port is provided for discharging to the outside of the device. Gas atmosphere heat treatment apparatus, wherein a means for spraying an inert gas curtain to the metal component provided on the inside of the door.

[0012] (2)前記第一の可動扉の外側に、金属部品に火炎をカーテン状に噴き付ける手段 が設けられたものである前記(1)に記載のガス雰囲気熱処理装置。  [0012] (2) The gas atmosphere heat treatment apparatus according to (1), wherein means for spraying a flame on a metal part in a curtain shape is provided outside the first movable door.

[0013] (3)前記加熱還元区画には第一の還元雰囲気ガスを移送通路に供給する手段が設 けられ、前記加熱還元区画の炉体には、前記加熱手段及び前記駆動ローラーの取 り付け箇所の隙間を覆うケーシングが炉体外側に気密に設けられ、ケーシング内圧 を装置外及び移送通路内よりも高めて外気の炉体内への侵入を防止すると共に、ケ 一シング内を冷却するため第二の雰囲気ガスをケーシング内に供給する手段が設け られ、第二の雰囲気ガスは前記隙間を通して前記炉体内に供給されるものであり、前 記炉体内に供給された第一の還元雰囲気ガスと第二の雰囲気ガスとの混合比率を 所望範囲に制御する手段が設けられ、前記ケーシング内に、冷却水を通過させる管 体と、ケーシング内の温度を検知する手段とを設け、温度検知手段からのデータを受 理してケーシング内を所定の温度以下に制御するように冷却水の流量を制御する手 段を設けたことを特徴とする前記(1)に記載のガス雰囲気熱処理装置。 [0013] (3) The heating reduction section is provided with means for supplying a first reducing atmosphere gas to the transfer passage, and the furnace body of the heating reduction section is provided with the heating means and the drive roller. A casing that covers the gap between the mounting locations is airtightly provided outside the furnace body, and the internal pressure of the casing is higher than that outside the device and inside the transfer passage to prevent outside air from entering the furnace body and to cool the inside of the casing. Therefore, means for supplying the second atmospheric gas into the casing is provided, and the second atmospheric gas is supplied into the furnace body through the gap, and the first reducing atmosphere supplied into the furnace body is provided. Means for controlling the mixing ratio of the gas and the second atmospheric gas to a desired range are provided, and a pipe body through which the cooling water passes and a means for detecting the temperature in the casing are provided in the casing to detect the temperature. The gas atmosphere heat treatment apparatus as set forth in (1), wherein a means for controlling the flow rate of the cooling water is provided so as to receive data from the means and control the inside of the casing to a predetermined temperature or lower.

[0014] (4)前記第一の還元雰囲気ガスを供給する手段は、移送通路の上流に向けて方向 付けられたノズルと、当該ノズルに水素ガスを加圧供給する手段とを含むものであり、 第二の雰囲気ガスをケーシング内へ供給する手段は、ケーシングの下方部分に設け られたノズルと、当該ノズルに窒素ガスを加圧供給する手段とを含むものである前記( 3)に記載のガス雰囲気熱処理装置。 [0014] (4) The means for supplying the first reducing atmosphere gas includes a nozzle oriented toward the upstream side of the transfer passage and means for supplying hydrogen gas under pressure to the nozzle. The gas atmosphere according to (3), wherein the means for supplying the second atmospheric gas into the casing includes a nozzle provided in a lower portion of the casing, and means for supplying nitrogen gas under pressure to the nozzle. Heat treatment equipment.

[0015] (5) 前記加熱手段及び前記駆動ローラーの取り付け箇所の隙間を通過し、炉体内 力 ケーシング内に流入する水素ガスをケーシング外に排出するノズルをケーシング の上方部分に設け、当該ノズルの外側の端部には前記水素ガスを燃焼させる燃焼 手段が設けられたものである前記(3)に記載のガス雰囲気熱処理装置。 (5) A nozzle that passes through a gap between the heating unit and the driving roller and that discharges hydrogen gas flowing into the casing inside the casing to the outside of the casing is provided in an upper portion of the casing. The gas atmosphere heat treatment apparatus according to (3), wherein a combustion means for burning the hydrogen gas is provided at an outer end portion.

[0016] (6)前記出口区間には、搬出口付近において金属部品が停止可能な間隔で第三の 可動扉及び第四の可動扉が開閉可能に設けられ、第三の可動扉及び第四の可動 扉により形成される隔室にはここに流入した外気を装置外へ排出する排気口が設け られ、 [0016] (6) In the exit section, a third movable door and a fourth movable door are provided so as to be openable and closable at intervals where the metal parts can be stopped in the vicinity of the carry-out port. The compartment formed by the movable door is provided with an exhaust port that discharges the outside air that has flowed into the chamber,

前記第四の可動扉の内側には金属部品に不活性ガスをカーテン状に噴き付ける 手段が設けられたものである前記(1)に記載のガス雰囲気熱処理装置。  The gas atmosphere heat treatment apparatus according to (1), wherein a means for spraying an inert gas on a metal part in a curtain shape is provided inside the fourth movable door.

[0017] (7)前記第四の可動扉の外側に、金属部品に火炎をカーテン状に噴き付ける手段 が設けられものである前記(6)に記載のガス雰囲気熱処理装置。  [0017] (7) The gas atmosphere heat treatment apparatus according to (6), wherein means for spraying a flame on the metal part in a curtain shape is provided outside the fourth movable door.

[0018] (8)前記入口ガス置換区画及び前記出口区間の排気口には、排出される気体に含 まれる水素ガスを燃焼させる燃焼手段が設けられたものである前記(6)に記載のガス 雰囲気熱処理装置。 [0018] (8) The exhaust port of the inlet gas replacement section and the outlet section is provided with combustion means for burning hydrogen gas contained in the exhausted gas. gas Atmospheric heat treatment equipment.

[0019] (9)搬入口から搬出口まで金属部品の移送通路が連続形成され、移送通路への外 気の侵入を抑制するため搬入口及び搬出口は開閉可能に形成され、移送通路には 装置外よりも内圧が高くなるように水素ガスを含む還元雰囲気ガスが供給され、移送 通路の所定域には加熱手段が設けられ、搬入口付近に排気口を備えたガス雰囲気 熱処理装置により、金属部品を移送通路内で移送しながら熱処理する方法であつて 、搬入口を開いて金属部品を移送通路内へ搬入するとき、搬入口から移送通路内へ 侵入する酸素を抑制するため、金属部品に不活性ガスをカーテン状に噴き付けなが ら、移送通路内へ金属部品を搬入した後に搬入口を閉鎖する金属部品の搬入工程 と、移送通路内へ侵入した酸素と、前記還元雰囲気ガスに含まれる水素ガスとにより 生成される水が水蒸気に変わる温度以上、かつ侵入した酸素と金属部品が反応して 酸化変色する温度以下である第一の温度範囲に設定された移送通路内に金属部品 を通過させることにより、金属部品と伴に搬入ロカ 装置内に侵入した酸素を水蒸気 に変え、当該水蒸気を還元雰囲気ガスと伴に搬入口付近の排気口から排出する入 口ガス置換工程と、入口ガス置換工程が終了した金属部品を加熱手段の設けられた 所定域へ移送し、第一の温度範囲よりも高温の第二の温度範囲で金属部品を熱処 理する加熱還元工程と、加熱還元工程が終了した金属部品を更に移送し、第二の 温度範囲よりも低い温度の第三の温度範囲に設定された移送通路内を通過させな がら、金属部品に冷却気体を吹き付けて冷却し、水が灌ぎかけられても酸化変色す ることのな 、温度まで冷却する冷却工程と、冷却工程が終了した金属部品を移送し、 外気が装置内に侵入するのを防止しながら、金属部品を搬出口から装置外へ搬出 することを特徴とする金属部品のガス雰囲気熱処理方法。  (9) A metal part transfer passage is continuously formed from the carry-in port to the carry-out port, and the carry-in port and the carry-out port are formed to be openable and closable in order to suppress the intrusion of outside air into the transfer passage. A reducing atmosphere gas containing hydrogen gas is supplied so that the internal pressure is higher than the outside of the apparatus, a heating means is provided in a predetermined area of the transfer passage, and a gas atmosphere with an exhaust port near the carry-in entrance In this method, heat treatment is performed while the parts are transferred in the transfer passage, and when the metal inlet is opened and the metal parts are transferred into the transfer passage, the metal parts are treated in order to suppress oxygen from entering the transfer passage. Included in the reducing atmosphere gas is a process of loading metal parts that closes the inlet after metal parts are carried into the transfer passage while spraying inert gas in the form of a curtain, and oxygen that has entered the transfer passage. With hydrogen gas By passing the metal parts through the transfer passage set in the first temperature range that is higher than the temperature at which the generated water turns into water vapor and lower than the temperature at which the invading oxygen and metal parts react and oxidize and discolor. The inlet gas replacement process and the inlet gas replacement process are completed, in which the oxygen that has entered the carry-in loca device with the metal parts is converted into water vapor and the water vapor is discharged from the exhaust port near the carry-in port together with the reducing atmosphere gas. The metal parts that have been heated and reduced are transferred to a predetermined area where the heating means are provided, and the metal parts are heat-treated in a second temperature range higher than the first temperature range. The parts are further transferred and cooled by blowing cooling gas on the metal parts while passing through the transfer path set in the third temperature range lower than the second temperature range, and the water is sprayed. Oxidative discoloration Without cooling, the cooling process to cool to the temperature, and the metal parts that have been cooled are transferred, and the metal parts are transported out of the apparatus from the outlet while preventing the outside air from entering the apparatus. A gas atmosphere heat treatment method for metal parts, which is characterized.

[0020] (10)前記還元雰囲気ガスは、水素ガスと窒素ガスとがほぼ4〜85 : 96〜15の比率 で混合されたものである前記(9)に記載の金属部品のガス雰囲気熱処理方法。  [0020] (10) The gas atmosphere heat treatment method for metal parts according to (9), wherein the reducing atmosphere gas is a mixture of hydrogen gas and nitrogen gas in a ratio of approximately 4 to 85:96 to 15 .

[0021] (11)前記金属部品の搬入工程において、金属部品に火炎をカーテン状に噴き付け た後に、金属部品に不活性ガスをカーテン状に噴き付けながら、移送通路内へ金属 部品を搬入することを特徴とする前記(9)に記載の金属部品のガス雰囲気熱処理方 法。 発明の効果 [0021] (11) In the metal part carrying-in process, after the flame is sprayed on the metal part in a curtain shape, the metal part is carried into the transfer passage while the inert gas is sprayed on the metal part in a curtain shape. The method for heat treating a metal part in a gas atmosphere as described in (9) above. The invention's effect

[0022] 前記(1)に記載のガス雰囲気熱処理装置では、入口ガス置換区画の搬入口付近 に外気を遮断するための第一の可動扉が設けられ、第一の可動扉の内側に不活性 ガスをカーテン状に噴き付ける手段が設けられているため、搬入ロカ 移送通路内 へ侵入する外気に含まれる酸素を抑制することができる。  [0022] In the gas atmosphere heat treatment apparatus according to (1), the first movable door for blocking outside air is provided near the carry-in entrance of the inlet gas replacement section, and the inertness is provided inside the first movable door. Since means for spraying gas in the form of a curtain is provided, oxygen contained in the outside air entering the carry-in locus transfer path can be suppressed.

また入口ガス置換区画は、還元雰囲気ガスにより移送通路の内圧が装置外よりも 高くなつており、酸素と金属部品が反応して酸化変色する温度以下、かつ水が水蒸 気に変わる温度以上に制御されているので、この入口ガス置換区画へ侵入した外気 に含まれる酸素は、還元雰囲気ガスに含まれる水素と反応して水になり、この水が水 蒸気になり、この水蒸気が還元雰囲気ガスと伴に第二の可動扉上方の隙間を通過し 、排気口力も装置外に排出される。  In addition, in the inlet gas replacement section, the internal pressure of the transfer passage is higher than the outside of the apparatus due to the reducing atmosphere gas, and is below the temperature at which oxygen and metal parts react and oxidize, and above the temperature at which water turns into water vapor. Since it is controlled, the oxygen contained in the outside air that has entered the inlet gas replacement section reacts with the hydrogen contained in the reducing atmosphere gas to become water, which becomes water vapor, and this water vapor becomes the reducing atmosphere gas. At the same time, it passes through the gap above the second movable door, and the exhaust port force is also discharged out of the apparatus.

したがって、前記(1)に記載のガス雰囲気熱処理装置では、入口ガス置換区画で 酸素や水が完全に排除されるか、あるいは加熱還元区画まで流入する酸素や水分 が極めて少ない量に抑制されるので、ガス雰囲気熱処理装置内における金属部品 の酸化は最小限に抑えられ、従来のローラーハース型連続炉と比べて熱処理時間を 格段に短縮することが可能になった。  Therefore, in the gas atmosphere heat treatment apparatus described in (1) above, oxygen and water are completely eliminated in the inlet gas replacement section, or oxygen and moisture flowing into the heating and reduction section are suppressed to a very small amount. In addition, the oxidation of metal parts in the gas atmosphere heat treatment equipment is minimized, and the heat treatment time can be significantly shortened compared to conventional roller hearth type continuous furnaces.

[0023] 前記(2)に記載のガス雰囲気熱処理装置では、第一の上下開閉シャッターを開い て金属部品を移送通路に搬入するときに、ノズル力 炎をカーテン状に噴き出して移 送通路の全断面に及ぶフレームカーテンを形成し、そこで還元雰囲気ガスに含まれ る水素を燃焼させることにより、金属部品まわりの酸素を水素と反応させて炉体内に 侵入する酸素を抑制することができる。  [0023] In the gas atmosphere heat treatment apparatus described in (2) above, when the first upper and lower opening / closing shutter is opened and the metal part is carried into the transfer passage, the nozzle force flame is jetted out in a curtain shape so that all of the transfer passage is formed. By forming a frame curtain that covers the cross section, and burning hydrogen contained in the reducing atmosphere gas, oxygen around the metal parts reacts with hydrogen to suppress oxygen entering the furnace.

[0024] 前記(3)に記載のガス雰囲気熱処理装置では、炉壁と、加熱手段及び駆動ローラ 一との隙間を外側力 覆うべく副室を設け、この副室内に第二の雰囲気ガスを加圧 供給することにより、副室を介して炉体内へ外気が侵入することを防止し、炉体内に 効果的に無酸素雰囲気を作ることができる。  [0024] In the gas atmosphere heat treatment apparatus according to (3), a sub chamber is provided to cover the gap between the furnace wall and the heating means and the drive roller, and the second atmosphere gas is added to the sub chamber. By supplying the pressure, it is possible to prevent outside air from entering the furnace body through the sub chamber, and to effectively create an oxygen-free atmosphere in the furnace body.

また第二の雰囲気ガスは、副室内を冷却して副室内の電気配線等の熱劣化を防 止するものであり、同時に、炉壁の隙間から炉体内へ導入されて第一の雰囲気ガスと 炉体内で所望の比率に混合されるものである。この所望の混合比率を維持するべぐ 第二の雰囲気ガスは流量制御されているため、第二の雰囲気ガスのみによって副室 内を充分に冷却することは困難であるが、冷却水を通過させる管体を副室内に設け ることにより、副室内を所望温度以下に制御することが可能になる。冷却水を通過さ せる管体は、第二の雰囲気ガスとともに、副室内を冷却するものであるため、冷却水 を通過させる管体は比較的簡略な構成とすることが可能になる。 The second atmospheric gas cools the sub-chamber and prevents thermal deterioration of the electrical wiring etc. in the sub-chamber. At the same time, the second atmospheric gas is introduced into the furnace body through the gap between the furnace walls and It is mixed in a desired ratio in the furnace. Keep this desired mixing ratio Since the flow rate of the second atmospheric gas is controlled, it is difficult to sufficiently cool the sub chamber with only the second atmospheric gas. However, by providing a pipe body through which the cooling water passes in the sub chamber. It becomes possible to control the sub-chamber to a desired temperature or lower. Since the pipe body through which the cooling water passes cools the sub chamber together with the second atmospheric gas, the pipe body through which the cooling water passes can have a relatively simple configuration.

[0025] 前記 (4)に記載のガス雰囲気熱処理装置では、第二の雰囲気ガスとして窒素ガス を使用することにより、副室内における外気侵入防止と冷却との両方を可能にし、さら に、炉体内で第一の雰囲気ガスである水素ガスと混合されることにより、還元雰囲気 を形成する。  [0025] In the gas atmosphere heat treatment apparatus described in (4) above, by using nitrogen gas as the second atmosphere gas, it is possible to prevent both outside air intrusion and cooling in the sub chamber, and furthermore, in the furnace body. Then, a reducing atmosphere is formed by mixing with hydrogen gas, which is the first atmosphere gas.

[0026] 前記(5)に記載のガス雰囲気熱処理装置では、ノズルをケーシングの上方部分に 備え、ノズルの外側の端部に水素ガスを燃焼させる燃焼手段を有するので、炉体内 力もケーシング内に浸透した水素ガスを排出し、燃焼処理することができる。  [0026] In the gas atmosphere heat treatment apparatus according to (5), since the nozzle is provided in the upper part of the casing and the combustion means for burning hydrogen gas is provided at the outer end of the nozzle, the furnace internal force also penetrates into the casing. The discharged hydrogen gas can be discharged and burned.

すなわち、ケーシングで覆われた副室内には第二の還元雰囲気ガスが加圧供給さ れ、副室の内圧は炉体内よりも高く設定されており、第二の還元雰囲気ガスは加熱 手段及び駆動ローラーの取り付け箇所の隙間を通り、副室内から炉体内へ流入する ものである。このように副室の内圧が炉体の内圧よりも高く設定される場合であっても 、炉体内の還元雰囲気ガスに水素が含まれる場合には、水素ガスの特性である高い 浸透性により、炉体内から副室内に水素ガスが浸透し、この水素ガスが副室内の上 部空間に滞留してしまう。この水素ガスが所定容量以上になり、ここに誤って酸素が 流入した場合には爆発することが懸念される。  That is, the sub-chamber covered with the casing is pressurized and supplied with the second reducing atmosphere gas, and the internal pressure of the sub-chamber is set higher than that in the furnace, and the second reducing atmosphere gas is heated and driven. It passes through the gap between the roller installation points and flows into the furnace from the sub chamber. Thus, even when the internal pressure of the sub chamber is set higher than the internal pressure of the furnace body, when hydrogen is contained in the reducing atmosphere gas in the furnace body, due to the high permeability that is a characteristic of hydrogen gas, Hydrogen gas permeates into the sub chamber from the furnace, and this hydrogen gas stays in the upper space of the sub chamber. There is a concern that if this hydrogen gas exceeds the specified volume and oxygen accidentally flows, it will explode.

し力しながら、ガス雰囲気熱処理装置の副室の上方部分にノズルを設ければ、副 室内の上部空間に滞留する水素ガスをノズル力 排除することが可能であり、水素ガ スをノズルの外側で燃焼処理すれば、副室内における水素ガスの爆発を防止するこ とがでさる。  However, if a nozzle is provided in the upper part of the sub chamber of the gas atmosphere heat treatment apparatus, it is possible to eliminate the nozzle force of the hydrogen gas remaining in the upper space of the sub chamber, and the hydrogen gas is placed outside the nozzle. Combustion treatment with this will prevent the explosion of hydrogen gas in the sub chamber.

[0027] 前記 (6)に記載のガス雰囲気熱処理装置では、出口区間に第三の可動扉及び第 四の可動扉が開閉可能に設けられ、金属部品に不活性ガスをカーテン状に噴き付 ける手段が第四の可動扉の内側に設けられたので、搬出ロカ 移送通路内へ侵入 する外気に含まれる酸素を抑制することができる。 また出口区間に設けられた第三の可動扉と第四の可動扉との間に形成される隔室 には排気口を設けたので、第三の可動扉を開いたときに、装置内の還元雰囲気ガス が隔室内に流入し、隔室内に侵入した外気を排気口力 装置外に排出することが可 能である。 [0027] In the gas atmosphere heat treatment apparatus according to (6), the third movable door and the fourth movable door are provided in the outlet section so as to be openable and closable, and the inert gas is sprayed onto the metal part in a curtain shape. Since the means is provided on the inner side of the fourth movable door, oxygen contained in the outside air entering the carry-out locuser transfer passage can be suppressed. In addition, since the compartment formed between the third movable door and the fourth movable door provided in the exit section is provided with an exhaust port, when the third movable door is opened, The reducing atmosphere gas flows into the compartment, and the outside air that has entered the compartment can be discharged out of the exhaust outlet.

[0028] 前記(7)に記載のガス雰囲気熱処理装置では、金属部品を移送通路から搬出する ときに、炎をカーテン状に噴き出して移送通路の全断面に及ぶフレームカーテンを形 成し、そこで還元雰囲気ガスに含まれる水素を燃焼させることにより、装置内に侵入 しょうとする酸素を水素と反応させて、酸素の装置内への侵入を抑制することができ る。  [0028] In the gas atmosphere heat treatment apparatus described in (7) above, when the metal part is carried out of the transfer passage, a flame is blown out in a curtain shape to form a frame curtain covering the entire cross section of the transfer passage. By burning hydrogen contained in the atmospheric gas, oxygen that is about to enter the apparatus reacts with hydrogen, and oxygen can be prevented from entering the apparatus.

[0029] 前記(8)に記載のガス雰囲気熱処理装置では、入口ガス置換区画及び出口区間 の排気口カゝら排出される気体に水素ガスが含まれる場合にも、この水素ガスを排気 口の外側で燃焼処理することが可能である。  [0029] In the gas atmosphere heat treatment apparatus according to (8), even when hydrogen gas is contained in the gas discharged from the exhaust port in the inlet gas replacement section and the outlet section, this hydrogen gas is removed from the exhaust port. Combustion treatment can be performed on the outside.

[0030] 前記(9)に記載のガス雰囲気熱処理方法では、搬入工程において、金属部品に不 活性ガスをカーテン状に噴き付けながら、金属部品を搬入ロカゝら移送通路内へ搬入 するので、搬入口から侵入する酸素を極めて少な 、量に抑制することができる。 また入口ガス置換工程では、移送通路の内圧が還元雰囲気ガスにより装置外よりも 高くされ、酸素と金属部品が反応して酸化変色する温度以下、かつ水が水蒸気に変 わる温度以上に移送通路内が温度設定されるので、搬入口から侵入した外気に含ま れる酸素は、還元雰囲気ガスに含まれる水素と反応して水になり、この水が水蒸気に なり、この水蒸気を還元雰囲気ガスと伴に排気口力 装置外に排出することができる 。したがって、入口ガス置換工程では酸素や水が完全に排除される力、あるいはカロ 熱還元工程まで流入する酸素や水分が極めて少な!/、量に抑制されるので、金属部 品の酸ィヒは最小限に抑えられ、加熱還元工程における熱処理時間を格段に短縮す ることが可能になった。  [0030] In the gas atmosphere heat treatment method according to (9), the metal part is carried into the transfer passage from the carry-in locuser while spraying an inert gas on the metal part in the form of a curtain in the carry-in process. The amount of oxygen entering from the mouth can be suppressed to an extremely small amount. Also, in the inlet gas replacement process, the internal pressure of the transfer passage is made higher than the outside of the apparatus by the reducing atmosphere gas, and the temperature inside the transfer passage is below the temperature at which oxygen and metal parts react and oxidize and discolor, and above the temperature at which water changes to water vapor. Therefore, the oxygen contained in the outside air that has entered from the carry-in inlet reacts with the hydrogen contained in the reducing atmosphere gas to become water, which becomes water vapor, and this water vapor is combined with the reducing atmosphere gas. Exhaust port power Can be discharged out of the device. Therefore, the power to completely eliminate oxygen and water in the inlet gas replacement process, or the amount of oxygen and water flowing into the calothermal reduction process is extremely low! As a result, the heat treatment time in the heat reduction process can be significantly reduced.

またガス雰囲気熱処理方法の冷却工程では、加熱された金属部品を最初に還元 雰囲気ガス中で冷却気体により冷却し、たとえ、金属部品に水が灌ぎかけられても酸 化変色することのない温度、例えば、ほぼ 270°C程度以下まで冷却するので、この冷 却気体による冷却工程の後に金属部品を水で冷却することが可能になる。 例えば、冷却工程に引き続いて金属部品を水で冷却する工程を行えば、金属部品 は酸化変色や結晶構造等の障害を生じること無ぐ 100°C程度以下まで冷却するこ とができる。そして、 100°C程度以下まで冷却された金属部品は、取り扱いが格段に 容易になり、作業員の手による取り扱 、も可能になる。 In the cooling step of the gas atmosphere heat treatment method, the heated metal part is first cooled with a cooling gas in a reducing atmosphere gas, and even if water is applied to the metal part, the temperature does not cause oxidation discoloration. For example, since it is cooled to about 270 ° C. or less, it becomes possible to cool the metal parts with water after the cooling step using the cooling gas. For example, if a metal part is cooled with water following the cooling process, the metal part can be cooled to about 100 ° C. or less without causing any problems such as oxidative discoloration or crystal structure. And metal parts cooled to below 100 ° C are much easier to handle and can be handled by workers.

[0031] 前記(10)に記載のガス雰囲気熱処理方法では、水素ガスと窒素ガスとの混合比 率がほぼ4〜85 : 96〜15でぁるため、炉内の十分な還元雰囲気を形成することがで き、金属の光輝焼鈍を可能にする。  [0031] In the gas atmosphere heat treatment method described in (10) above, since the mixing ratio of hydrogen gas and nitrogen gas is approximately 4 to 85: 96 to 15, a sufficient reducing atmosphere in the furnace is formed. It enables bright annealing of metals.

[0032] 前記(11)に記載のガス雰囲気熱処理方法では、金属部品に不活性ガスをカーテ ン状に噴き付ける工程に先立ち、金属部品に金属部品に火炎をカーテン状に噴き 付けるので、移送通路を外気力も遮断できると共に、酸素が燃焼されるので、移送通 路内への酸素の侵入防止が更に促進される。  [0032] In the gas atmosphere heat treatment method described in (11) above, since the flame is sprayed onto the metal part in a curtain before the inert gas is sprayed onto the metal part in a curtain shape, the transfer passage Since the outside air force can be shut off and oxygen is burned, the prevention of oxygen from entering the transfer path is further promoted.

図面の簡単な説明  Brief Description of Drawings

[0033] [図 1]本発明の一実施形態をライン方向に切断した際の断面図である。 FIG. 1 is a cross-sectional view when one embodiment of the present invention is cut in a line direction.

[図 2]図 1における一部を拡大した断面図である。  FIG. 2 is an enlarged cross-sectional view of a part of FIG.

[図 3]図 1の装置における図 2に連続する部分を拡大した断面図である  FIG. 3 is an enlarged cross-sectional view of a portion continuing from FIG. 2 in the apparatus of FIG.

[図 4]図 1の装置における図 3に連続する部分を拡大した断面図である。  4 is an enlarged cross-sectional view of a portion continuing from FIG. 3 in the apparatus of FIG.

[図 5]図 1における一方の副室の断面図である。  5 is a cross-sectional view of one sub chamber in FIG.

[図 6]図 1における他方の副室の断面図である。  FIG. 6 is a cross-sectional view of the other subchamber in FIG.

符号の説明  Explanation of symbols

[0034] 10 ガス雰囲気熱処理装置 [0034] 10 Gas atmosphere heat treatment device

11 搬入区画  11 Loading compartment

12 入口ガス置換区画  12 Inlet gas replacement section

13 加熱 ·還元区画  13 Heating / reduction section

14 冷却区画  14 Cooling compartment

15 出口区画  15 Exit compartment

16 搬出区画  16 Unloading compartment

18a, 18b 駆動ローラ  18a, 18b Drive roller

19 金属部品 20 電気ヒータ 19 Metal parts 20 Electric heater

21 炉体  21 Furnace

22, 23 ケーシング  22, 23 Casing

24, 25 畐 IJ室  24, 25 畐 IJ room

26 ノズル  26 nozzles

29 第一の上下開閉シャッター (第一の可動扉)  29 First open / close shutter (first movable door)

30 窒素ガス噴出ノズル  30 Nitrogen gas ejection nozzle

31 第二の上下開閉シャッター (第二の可動扉)  31 Second up / down shutter (second movable door)

31c 隙間  31c Clearance

32a 排気口  32a Exhaust port

32b バーナー  32b burner

28 ノズル  28 nozzles

40 フィン付き冷却管  40 Finned cooling pipe

41 ノズル  41 nozzles

49 第三の上下開閉シャッター (第三の可動扉)  49 Third open / close shutter (third movable door)

50a 排気口  50a Exhaust port

50b バーナー  50b burner

51 窒素ガス噴出ノズル  51 Nitrogen gas injection nozzle

52 第四の上下開閉シャッター (第四の可動扉)  52 Fourth open / close shutter (fourth movable door)

発明を実施するための最良の形態 BEST MODE FOR CARRYING OUT THE INVENTION

以下、本発明の一実施の形態を図面に基づいて説明する。  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

なお、以下の実施の形態においては、ガス雰囲気熱処理装置及び方法として、金 属部品を光輝焼鈍する装置及び方法を例示するが、本発明のガス雰囲気熱処理は これに限定されるものではない。  In the following embodiments, examples of the gas atmosphere heat treatment apparatus and method include an apparatus and method for bright annealing of metal parts, but the gas atmosphere heat treatment of the present invention is not limited to this.

図 1の実施形態において、ガス雰囲気熱処理装置 10は入口ガス置換区画 12、加 熱'還元区画 13、冷却区画 14及び出口区画 15が連続して設けられたものであり、こ のガス雰囲気熱処理装置 10の前後に搬入区画 11及び搬出区画 16が付帯設備とし て設けられている。図 2は、搬入区画 11及び入口ガス置換区画 12を拡大した図であ り、図 3は加熱 ·還元区画 13及び冷却区画 14を拡大した図であり、図 4は出口区画 1 5及び搬出区画 16を拡大した図である。 In the embodiment of FIG. 1, the gas atmosphere heat treatment apparatus 10 is provided with an inlet gas replacement section 12, a heating / reduction section 13, a cooling section 14 and an outlet section 15 in succession, and this gas atmosphere heat treatment apparatus 10 Before and after 10, a loading section 11 and a loading section 16 are provided as ancillary facilities. Figure 2 is an enlarged view of the loading compartment 11 and the inlet gas replacement compartment 12. FIG. 3 is an enlarged view of the heating / reducing section 13 and the cooling section 14, and FIG. 4 is an enlarged view of the outlet section 15 and the unloading section 16.

搬入区画 11から搬出区画 16までの全区間には、複数の駆動ローラ 18a, 18bが連 続して配置され、これら駆動ローラ 18a, 18bは回転駆動されるものであり、被処理物 である金属部品 19がトレイなどの容器に入れられて駆動ローラ 18a, 18b上に載せら れ、搬入区画 11から図 1における右方向に向けて搬出区画 16まで搬送される。そし て、加熱'還元区画 13では、駆動ローラ 18bとして耐熱性の高いセラミックローラが採 用され、金属部品 19を直接加熱するための複数の電気ヒータ 20が炉体 21内に設け られ、電気ヒータ 20と駆動ローラ 18bの炉体 21への取り付け箇所が炉体外側力もそ れぞれケーシング 22, 23で覆われて副室 24, 25が形成される。加熱'還元区画 13 には、第一の還元雰囲気ガス (水素ガス)が加熱 ·還元区画 13の下流端部に設けら れたノズル 26から上流方向に向けて噴き出され、第二の還元雰囲気ガス(窒素ガス) が副室 24, 25を介して導入され、これら水素ガスと窒素ガスとが所望の比率に混合 されて還元雰囲気が形成される。この還元雰囲気ガスは、ガス雰囲気熱処理装置 10 の内圧が外部よりも高くなるように加圧されて!、る。  A plurality of drive rollers 18a and 18b are continuously arranged in the entire section from the carry-in section 11 to the carry-out section 16, and these drive rollers 18a and 18b are driven to rotate, and the metal that is the object to be processed The component 19 is put in a container such as a tray and placed on the driving rollers 18a and 18b, and is conveyed from the loading section 11 to the unloading section 16 in the right direction in FIG. In the heating / reduction section 13, a ceramic roller having high heat resistance is adopted as the drive roller 18b, and a plurality of electric heaters 20 for directly heating the metal parts 19 are provided in the furnace body 21, and the electric heater 20 and the drive roller 18b are attached to the furnace body 21 by covering the outer power of the furnace body with the casings 22 and 23, respectively. In the heating / reduction section 13, the first reducing atmosphere gas (hydrogen gas) is ejected upstream from the nozzle 26 provided at the downstream end of the heating / reducing section 13, and the second reducing atmosphere. Gas (nitrogen gas) is introduced through the sub chambers 24 and 25, and these hydrogen gas and nitrogen gas are mixed in a desired ratio to form a reducing atmosphere. This reducing atmosphere gas is pressurized so that the internal pressure of the gas atmosphere heat treatment apparatus 10 is higher than the outside! RU

なお、ガス雰囲気熱処理装置 10では、第一及び第二の還元雰囲気ガスとして不活 性ガスが使用可能であるが、例えば、金属部品を光輝焼鈍するような場合には、第 一及び第二の還元雰囲気ガスは上述のようにそれぞれ水素ガス及び窒素ガスを使 用する。  In the gas atmosphere heat treatment apparatus 10, an inert gas can be used as the first and second reducing atmosphere gases. For example, when bright annealing is performed on a metal part, the first and second reducing atmosphere gases are used. As described above, hydrogen gas and nitrogen gas are used as the reducing atmosphere gas.

[0036] 次に、各区画について更に詳細に説明する。  [0036] Next, each section will be described in more detail.

図 2の搬入区画 11では、トレイなどの容器に入れられた金属部品 19をコンベア装 置 27の上に載せて待機させ、先行して処理される金属部品 19がスウィングシャツタ 一 30を通過した時点で入口ガス置換区画 12へと送り出すように制御される。  In the loading section 11 of FIG. 2, the metal part 19 placed in a container such as a tray is placed on the conveyor device 27 to stand by, and the metal part 19 to be processed passes through the swing shirt 30. It is controlled to be sent to the inlet gas replacement section 12 at the time.

[0037] 入口ガス置換区画 12は、外気が炉内に侵入するのを防止し、金属部品 19内の空 気や水分が加熱 ·還元区画 13に持ち込まれないように、還元雰囲気ガスにより置換 するための区間であり、後述の温度制御手段により、水が水蒸気に変わる温度以上 、かつ酸素と金属部品が反応して酸ィ匕変色する温度以下に制御される。この温度制 御範囲は例えば、 100〜300°C程度にすることができる。 入口ガス置換区画 12には、通路 12aに複数の駆動ローラ 18aが並列配置され、フ レームカーテン形成装置のノズル 28、第一の上下開閉シャッター 29、窒素ガス噴出 ノズル 30、第二の上下開閉シャッター 31、排気口 32a及びスイングシャッター 33が 配置されている。 [0037] The inlet gas replacement section 12 prevents outside air from entering the furnace, and replaces it with reducing atmosphere gas so that air and moisture in the metal part 19 are not brought into the heating / reducing section 13. The temperature control means described later is controlled to a temperature not lower than the temperature at which water turns into water vapor and not higher than a temperature at which oxygen and metal parts react to cause acid discoloration. This temperature control range can be, for example, about 100 to 300 ° C. In the inlet gas replacement section 12, a plurality of driving rollers 18a are arranged in parallel in the passage 12a. The nozzle 28 of the frame curtain forming device, the first up / down shutter 29, the nitrogen gas ejection nozzle 30, the second up / down shutter 31, an exhaust port 32a and a swing shutter 33 are arranged.

ここで、フレームカーテン形成装置は必須の構成ではなぐ選択的に設けることが 可能なものである力 このフレームカーテン形成装置は、ノズル 28が上下開閉シャツ ター 29の外側に設けられたものであり、第一の上下開閉シャッター 29を開いて金属 部品 19を移送通路 12aに搬入するときに、ノズル 28から炎を力一テン状に噴き出し て移送通路 12aの全断面に及ぶフレームカーテンを形成し、このフレームカーテンに より還元雰囲気ガスに含まれる水素を燃焼させることにより、金属部品 19と伴に装置 内に侵入しょうとする酸素を水素と反応させて、装置内への酸素の侵入を抑制するこ とがでさる。  Here, the frame curtain forming device is a force that can be selectively provided rather than the essential configuration. In this frame curtain forming device, the nozzle 28 is provided outside the upper and lower open / close shirt 29, When the first top / bottom shutter 29 is opened and the metal part 19 is carried into the transfer passage 12a, a flame is blown out from the nozzle 28 in a tense manner to form a frame curtain covering the entire cross section of the transfer passage 12a. By burning the hydrogen contained in the reducing atmosphere gas through the flame curtain, the oxygen that tries to enter the device together with the metal parts 19 reacts with the hydrogen to suppress the intrusion of oxygen into the device. It is out.

次に、第一の上下開閉シャッター 29は、下方に設けられた伸縮シリンダー 29aと、 この伸縮シリンダー 29aにより上下動されるシャッター 29bとを有し、シャッター 29bを 上昇させて移送通路 12aを隙間無く塞ぎ、移送通路 12a内を外気力 遮断するもの である。  Next, the first vertical opening / closing shutter 29 has a telescopic cylinder 29a provided below and a shutter 29b moved up and down by the telescopic cylinder 29a, and lifts the shutter 29b so that there is no gap in the transfer passage 12a. It closes and shuts off the outside air force in the transfer passage 12a.

窒素ガス噴出ノズル 30は、不活性ガスとして窒素ガスを噴出するために、第一の上 下開閉シャッター 29の上流側に設けられ、ここで窒素ガスを金属部品 19に向けて力 一テン状に噴き出し、移送通路 12aの全断面に及ぶ窒素ガスのカーテンを形成し、 これにより、シャッター 29bが開いた時の外気侵入を抑制する効果を得るものである。 窒素ガス噴出ノズル 30は、シャッター 29bが開いているとき、連続的に稼動されるも のであり、搬入ロカ 移送通路内へ侵入する外気に含まれる酸素量を抑制するもの である。この窒素ガス噴出ノズル 30からカーテン状に噴き出された窒素ガスにより、 例えば、酸素量を移送通路内の還元雰囲気ガスに対して容積比 4%以下に抑制し た場合には、移送通路内で水素ガスと反応したときの爆発を防止することが可能にな る。  The nitrogen gas ejection nozzle 30 is provided upstream of the first upper / lower opening / closing shutter 29 in order to eject nitrogen gas as an inert gas. Here, the nitrogen gas is directed toward the metal part 19 in a single force. A curtain of nitrogen gas that blows out and covers the entire cross section of the transfer passage 12a is formed, thereby obtaining the effect of suppressing the outside air intrusion when the shutter 29b is opened. The nitrogen gas ejection nozzle 30 is continuously operated when the shutter 29b is open, and suppresses the amount of oxygen contained in the outside air entering the carry-in locus transfer path. For example, when the amount of oxygen is suppressed to a volume ratio of 4% or less with respect to the reducing atmosphere gas in the transfer passage by the nitrogen gas blown out from the nitrogen gas injection nozzle 30 in the curtain shape, Explosion when reacting with hydrogen gas can be prevented.

次に、第二の上下開閉シャッター 31は、下方に設けられた伸縮シリンダー 31aと、 この伸縮シリンダー 31aにより上下動されるシャッター 31bとを有し、シャッター 31bは 、伸縮シリンダー 31aによって上昇させられたときに、所定断面積の隙間 31cを移送 通路 12aの上方に残して閉鎖するものである。シャッター 31bは、第一の上下開閉シ ャッター 29よりも下流側に、トレイなどの容器に入れられた金属部品 19を停止させる ことができる間隔を置いて設けられる。 Next, the second vertical opening / closing shutter 31 has a telescopic cylinder 31a provided below, and a shutter 31b moved up and down by the telescopic cylinder 31a. When lifted by the telescopic cylinder 31a, the gap 31c having a predetermined cross-sectional area is closed above the transfer passage 12a. The shutter 31b is provided on the downstream side of the first upper / lower opening / closing shutter 29 with an interval at which the metal part 19 placed in a container such as a tray can be stopped.

第一の上下開閉シャッター 29と第二の上下開閉シャッター 31との間には、移送通 路 12aの天井部分に常時開放状態の排気口 32aが設けられ、排気口 32aの外側に バーナー 32bが取り付けられる。  Between the first up / down shutter 29 and the second up / down shutter 31, an exhaust port 32a that is always open is provided at the ceiling of the transfer path 12a, and a burner 32b is attached to the outside of the exhaust port 32a. It is done.

スイングシャッター 33は、移送通路 12aの天井から回動可能に吊られ、下端が駆動 ローラ 18aまで延びており、トレイに入れられた金属部品 19が移送されるときに、トレ ィに押されて開閉される。  The swing shutter 33 is pivotably suspended from the ceiling of the transfer passage 12a, and the lower end extends to the drive roller 18a. When the metal part 19 placed in the tray is transferred, the swing shutter 33 is pushed and opened by the tray. Is done.

入口ガス置換区画 12において、加熱 ·還元区画 13に比較的近い位置に、防爆装 置 35が設けられる。防爆装置 35は、移送通路 12aと外部とを連通させる管体 35aの 開口に蓋 35bが気密に設けられたものであり、蓋 35bは、移送通路 12aに所定以上 の内圧が生じたときに自動的に外れる程度の強度で設けられたものである。すなわち 、移送通路 12a内に酸素が比較的多量に侵入し、酸素濃度が高くなり、水素ガスと 反応して爆発が生じ、移送通路 12a内に比較的大きな内圧が発生した場合には、蓋 35bが外れて内圧を逃がすものである。なお、同じ構成の防爆装置 35が、図 4に示し たように出口区画 15にも設けられる。  In the inlet gas replacement section 12, an explosion-proof device 35 is provided at a position relatively close to the heating / reducing section 13. The explosion-proof device 35 has a lid 35b airtightly provided at the opening of a pipe body 35a that allows the transfer passage 12a to communicate with the outside, and the lid 35b is automatically operated when an internal pressure exceeding a predetermined value is generated in the transfer passage 12a. It is provided with such a strength that it can be removed. That is, when a relatively large amount of oxygen enters the transfer passage 12a, the oxygen concentration becomes high, reacts with hydrogen gas to cause an explosion, and a relatively large internal pressure is generated in the transfer passage 12a, the lid 35b Is to release the internal pressure. An explosion-proof device 35 having the same configuration is also provided in the outlet section 15 as shown in FIG.

加熱'還元区画 13は、還元雰囲気で金属部品 19を加熱して通過させることにより、 例えば、光輝焼鈍などの加熱処理を金属部品 19に行う区間であり、炉体 21の天井と 両側壁と炉床がそれぞれ耐熱材から形成され、炉体内部 21aよりも狭く形成された入 口部 21bに酸素濃度測定管 36が挿通され、これを通して採取された雰囲気ガスが、 炉外で測定されて炉内の酸素濃度が監視される。この酸素濃度が高い場合には、第 一の雰囲気ガス (水素ガス)の供給を停止制御する。  The heating / reduction section 13 is a section where the metal part 19 is heated and passed in a reducing atmosphere, and for example, heat treatment such as bright annealing is performed on the metal part 19. Each of the floors is made of a heat-resistant material, and an oxygen concentration measuring tube 36 is inserted through an inlet 21b formed narrower than the inside of the furnace body 21a. The oxygen concentration is monitored. When this oxygen concentration is high, the supply of the first atmospheric gas (hydrogen gas) is stopped.

加熱'還元区画 13では、駆動ローラ 18bとして耐熱性の高いセラミックローラが採用 される。電気ヒータ 20は、炉体 21内における複数の駆動ローラ 18bの上下に配置さ れ、これら電気ヒータ 20と駆動ローラ 18bの両端が側壁 21cに貫挿されて取り付けら れ、この取り付け箇所に若干の隙間が生じる。この取り付け箇所には、図 5及び図 6 に示したように、側壁 21cの外側力もケーシング 22, 23で覆われて副室 24, 25が形 成される。 In the heating / reduction section 13, a ceramic roller having high heat resistance is employed as the driving roller 18b. The electric heater 20 is disposed above and below the plurality of driving rollers 18b in the furnace body 21, and both ends of the electric heater 20 and the driving roller 18b are inserted through the side wall 21c and attached to the mounting portion. A gap is created. This mounting location is shown in Figs. 5 and 6. As shown in Fig. 5, the outer force of the side wall 21c is also covered with the casings 22 and 23, and the sub chambers 24 and 25 are formed.

[0040] 複数の電気ヒータ 20は、上流側から炉体内の下流側に向けて輻射温度が徐々に 高くなり、後半部の所定位置で最高温度に達し、この位置から下流側の炉体出口に 向けて輻射温度が徐々に低くなるように、複数本ごとに異なる温度に設定されるもの であり、装置の初期設定時に、金属部品 19を移送するトレイに温度センサー(図示 せず)を入れて温度測定し、その測定データにより初期設定される。炉体内部 21aの 天井には温度センサー(図示せず)が設けられ、加熱'還元区画 13の還元雰囲気ガ スの温度が監視される。  [0040] In the plurality of electric heaters 20, the radiation temperature gradually increases from the upstream side toward the downstream side in the furnace body, reaches the maximum temperature at a predetermined position in the latter half, and reaches the downstream furnace outlet from this position. The temperature is set to be different for each of the multiple units so that the radiation temperature gradually decreases toward the target, and a temperature sensor (not shown) is placed in the tray that transports the metal parts 19 when the device is initially set. The temperature is measured and initialized by the measured data. A temperature sensor (not shown) is provided on the ceiling inside the furnace body 21a, and the temperature of the reducing atmosphere gas in the heating / reducing section 13 is monitored.

加熱 ·還元区画 13の電気ヒータ 20により加熱された還元雰囲気ガスは、入口ガス 置換区画 12に流入するものであり、炉体内の上流側に設けられた所定本数の電気ヒ ータ 20の温度と伴に、入口ガス置換区画 12の温度範囲を実質的に設定するもので ある。そのため、入口ガス置換区画 12の還元雰囲気ガスの温度制御は、入口ガス置 換区画 12に設けられた温度センサー(図示せず)と、この温度センサーからデータを 受理し、加熱 ·還元区画 13における上流側の所定本数の電気ヒータ 20を温度制御 する装置(図示せず)により行われる。  The reducing atmosphere gas heated by the electric heater 20 in the heating / reducing section 13 flows into the inlet gas replacement section 12, and is equal to the temperature of a predetermined number of electric heaters 20 provided upstream in the furnace body. At the same time, the temperature range of the inlet gas replacement section 12 is substantially set. Therefore, the temperature control of the reducing atmosphere gas in the inlet gas replacement section 12 is performed by receiving data from a temperature sensor (not shown) provided in the inlet gas replacement section 12 and the temperature sensor, and in the heating / reduction section 13. This is performed by a device (not shown) for controlling the temperature of a predetermined number of electric heaters 20 on the upstream side.

副室 24内では、電気ヒータ 20の一端に電気配線 20aが接続され、駆動ローラ 18b の一端に回転軸、ギアなどを含む駆動力伝達装置 37が取り付けられ、副室 24の外 側にモーター 38が設置される。モーター 38からは、チェーン 39a、ギア 39b、回転軸 39cを介して駆動力伝達装置 37に回転力が伝達され、駆動ローラ 18bが回転駆動さ れる。回転軸 39cは、ケーシング 22の内外に貫通するように二箇所に設けられたもの であり、その貫通箇所は密閉式ベアリングで気密に塞がれて 、る。  In the sub chamber 24, the electric wiring 20 a is connected to one end of the electric heater 20, a driving force transmission device 37 including a rotating shaft and gears is attached to one end of the driving roller 18 b, and the motor 38 is disposed outside the sub chamber 24. Is installed. A rotational force is transmitted from the motor 38 to the driving force transmission device 37 via the chain 39a, the gear 39b, and the rotating shaft 39c, and the driving roller 18b is driven to rotate. The rotating shaft 39c is provided at two locations so as to penetrate inside and outside of the casing 22, and the penetration location is hermetically closed by a sealed bearing.

[0041] 副室 24, 25には、内部にフィン付き冷却管 40が延設され、第二の雰囲気ガス(窒 素ガス)を供給するためのノズル 41がケーシング 22, 23の下方に接続される。ノズル 41には第二の雰囲気ガスを加圧供給する装置(図示せず)から延びる配管(図示せ ず)が接続され、このノズル 41に至る管路には、第二の雰囲気ガスの供給量を計測 するための流量計(図示せず)が設けられる。またケーシング 22, 23の上方には、水 素ガスを排出するノズル 42が設けられ、このノズル 42の途中に調整弁 43aが設けら れ、ノズル 42の排出口にバーナー 43bが設けられる。ノズル 42から排出される水素 ガス量は調整弁 43aにより調整され、バーナー 43bにより燃焼処理される。 [0041] In the sub chambers 24 and 25, a finned cooling pipe 40 is extended, and a nozzle 41 for supplying a second atmospheric gas (nitrogen gas) is connected to the lower side of the casings 22 and 23. The The nozzle 41 is connected to a pipe (not shown) extending from a device (not shown) for supplying a second atmospheric gas under pressure, and a supply amount of the second atmospheric gas is connected to the pipe leading to the nozzle 41. A flow meter (not shown) is provided to measure the flow rate. A nozzle 42 for discharging hydrogen gas is provided above the casings 22 and 23, and an adjustment valve 43a is provided in the middle of the nozzle 42. In addition, a burner 43 b is provided at the discharge port of the nozzle 42. The amount of hydrogen gas discharged from the nozzle 42 is adjusted by the adjusting valve 43a and burned by the burner 43b.

副室 24, 25には、さらに、温度センサー(図示せず)が設けられ、温度センサーか らのデータを受理した制御装置(図示せず)によりフィン付き冷却管 40への冷却水の 送り量 (流量)を調整することにより、副室 24, 25内が 120°C以下の温度になるように 制御される。  The sub-chambers 24 and 25 are further provided with a temperature sensor (not shown), and the amount of cooling water sent to the finned cooling pipe 40 by a control device (not shown) that receives data from the temperature sensor. By adjusting the (flow rate), the sub-chambers 24 and 25 are controlled to have a temperature of 120 ° C or lower.

なお、図 5及び 6では、フィン付き冷却管 40を一本のみ図示した力 その配設本数 は必要に応じて設定される。  In FIGS. 5 and 6, only one finned cooling pipe 40 is illustrated. The number of the cooling pipes 40 is set as necessary.

[0042] 配管 41を介して窒素ガスを副室 24, 25内に加圧供給して内圧を高めることにより、 外気が副室 24, 25を介して炉体 21内へ侵入することが防止される。  [0042] By increasing the internal pressure by pressurizing and supplying nitrogen gas into the sub chambers 24 and 25 via the pipe 41, outside air can be prevented from entering the furnace body 21 via the sub chambers 24 and 25. The

また窒素ガスは、副室 24, 25内を冷却して電気配線 20aや駆動力伝達装置 37の 熱劣化を防止するものである。一方、窒素ガスは、副室 24, 25内力も駆動ローラ 18b 及び電気ヒータ 20と側壁 21cとの隙間を通過して炉体内 21aへ導入され、第一の雰 囲気ガス (水素ガス)と炉体内 21aで所望の比率に混合されるものであるため、窒素 ガスを多量に供給することはできず、窒素ガスのみによって副室 24, 25内を充分に 冷却することは困難である。しかしながら、副室 24, 25内にはフィン付き冷却管 40が 設けられているため、副室 24, 25内を所望温度以下に制御することが可能になる。 フィン付き冷却管 40は、窒素ガスとともに副室 24, 25内を冷却するものであるため、 フィン付き冷却管 40自体を比較的簡略な構成とすることが可能である。  The nitrogen gas cools the sub chambers 24 and 25 to prevent thermal deterioration of the electric wiring 20a and the driving force transmission device 37. On the other hand, the nitrogen gas is introduced into the furnace body 21a through the gap between the driving roller 18b and the electric heater 20 and the side wall 21c, and the sub-chambers 24 and 25 have the internal force. Since 21a is mixed in a desired ratio, a large amount of nitrogen gas cannot be supplied, and it is difficult to sufficiently cool the sub chambers 24 and 25 only with nitrogen gas. However, since the finned cooling pipes 40 are provided in the sub chambers 24 and 25, the sub chambers 24 and 25 can be controlled to a desired temperature or lower. Since the finned cooling tube 40 cools the sub chambers 24 and 25 together with the nitrogen gas, the finned cooling tube 40 itself can have a relatively simple configuration.

[0043] 加熱,還元区画 13の最下流部は、炉体内部 21aよりも小さい断面で狭く形成され、 ここに移送通路 21aの上流に向けて方向付けられたノズル 26が設けられ、ノズル 26 には第一の雰囲気ガス (水素ガス)を加圧供給する装置(図示せず)力 延びる配管 (図示せず)が接続される。ノズル 26からは、第一の雰囲気ガス (水素ガス)が加熱- 還元区画 13の上流方向に噴出される。ノズル 23に至る管路には水素ガスの供給量 を計測するための流量計(図示せず)が設けられ、この流量計からのデータを制御装 置(図示せず)が受理し、制御装置によりノズル 26からの水素ガス供給量が制御され る。  [0043] The most downstream part of the heating and reducing section 13 is narrowly formed with a cross section smaller than the inside of the furnace body 21a, and a nozzle 26 directed to the upstream side of the transfer passage 21a is provided here. Is connected to a pipe (not shown) extending from a device (not shown) for pressurizing and supplying the first atmospheric gas (hydrogen gas). A first atmospheric gas (hydrogen gas) is ejected from the nozzle 26 in the upstream direction of the heating-reducing section 13. The pipe leading to the nozzle 23 is provided with a flow meter (not shown) for measuring the supply amount of hydrogen gas, and the control device (not shown) receives data from the flow meter, and the control device This controls the amount of hydrogen gas supplied from the nozzle 26.

ノズル 26から水素ガスが加熱 ·還元区画 13の上流方向に噴出されて、上流方向に 向かう気流が作られ、この気流により炉体内部 21aから冷却区画 14への熱の流れが 抑えられる。またノズル 26から供給された水素ガスは、副室 24, 25を介して炉体内 2 laに導入された窒素ガスと炉体内 21aで混合されて還元雰囲気を構成するものであ る。また水素ガスは、たとえ酸素が炉体内 21aに僅かに存在する場合にも、この僅か な量の酸素と反応して水 (水蒸気)となり、炉体内 21aに無酸素状態を作るものである 炉体内 21aにおける水素ガスと窒素ガスの最適な混合比率は被処理物によって異 なるものであるため、水素ガス:窒素ガスの容積比は、それぞれ流量計と制御装置( 図示せず)により制御される。 Hydrogen gas is ejected from the nozzle 26 in the upstream direction of the heating / reducing section 13 and in the upstream direction. An air flow is created, and this air flow suppresses the flow of heat from the furnace body 21a to the cooling section 14. Further, the hydrogen gas supplied from the nozzle 26 is mixed with nitrogen gas introduced into the furnace body 2 la through the sub chambers 24 and 25 in the furnace body 21a to constitute a reducing atmosphere. The hydrogen gas reacts with this small amount of oxygen to form water (water vapor) even if oxygen is present in the furnace body 21a, creating an oxygen-free state in the furnace body 21a. Since the optimal mixing ratio of hydrogen gas and nitrogen gas in 21a varies depending on the workpiece, the volume ratio of hydrogen gas: nitrogen gas is controlled by a flow meter and a control device (not shown), respectively.

例えば、炉体 21a内において、金属部品 19を加熱して光輝焼鈍処理を行う場合に は、窒素ガスと水素ガスの混合比は、水素ガスが容積比で 60%以上になるように制 御する必要があり、さらに好ましくは、水素ガス:窒素ガスの容積比を、ほぼ 4〜85 : 9 6〜15になるように制御する必要がある。このような容積比は、窒素ガスと水素ガスの それぞれの流量計と制御装置(図示せず)により制御される。  For example, when the bright annealing treatment is performed by heating the metal part 19 in the furnace body 21a, the mixing ratio of nitrogen gas and hydrogen gas is controlled so that the hydrogen gas has a volume ratio of 60% or more. More preferably, it is necessary to control the volume ratio of hydrogen gas: nitrogen gas to be approximately 4 to 85:96 to 15. Such a volume ratio is controlled by a flow meter and a control device (not shown) of nitrogen gas and hydrogen gas.

[0044] 次に、冷却区画 14では、冷却気体により金属部品 19を急速に冷却して、例えば、 ほぼ 270°C程度以下まで冷却し得るように装置が構成されている。すなわち、冷却区 画 14では、移送通路 15aを構成する両側壁が水冷壁により形成され、天井及び底面 も内部に水が通された水冷槽から形成され、この移送通路 15aに駆動ローラー 18b が複数並列され、ここに二台の冷却装置 44が設けられている。この冷却装置 44は、 駆動ローラー 18b上方に配置された複数のフィン付き水冷管 45と、これら水冷管 45 の上方に配置された冷却ファン 46と、この冷却ファン 46を駆動するためのモーター 4 7とを備えるものである。冷却区画 14の温度は、温度センサー(図示せず)で監視さ れ、フィン付き水冷管 45に供給される冷水量が監視システム(図示せず)により監視 され、制御装置(図示せず)により制御される。このような冷却装置 44により、金属部 品 19に冷却気体を吹き付けながら、冷却区画 14を通過させると、金属部品 19は少 なくとも 270°C程度以下までは冷却される。  [0044] Next, in the cooling section 14, the apparatus is configured so that the metal component 19 can be rapidly cooled by the cooling gas, for example, to about 270 ° C or less. That is, in the cooling section 14, both side walls constituting the transfer passage 15a are formed by water-cooled walls, and the ceiling and the bottom surface are formed from a water-cooled tank in which water passes, and a plurality of drive rollers 18b are provided in the transfer passage 15a. Two cooling devices 44 are provided in parallel. The cooling device 44 includes a plurality of finned water cooling tubes 45 disposed above the driving roller 18b, a cooling fan 46 disposed above the water cooling tubes 45, and a motor 47 for driving the cooling fan 46. Are provided. The temperature of the cooling compartment 14 is monitored by a temperature sensor (not shown), the amount of cold water supplied to the finned water cooling pipe 45 is monitored by a monitoring system (not shown), and is controlled by a control device (not shown). Be controlled. When the cooling device 44 allows the metal part 19 to pass through the cooling section 14 while blowing the cooling gas, the metal part 19 is cooled to at least about 270 ° C. or less.

[0045] 金属部品 19が冷却区画 14を通過すると、次に、図 4に示した出口区画 15に至る。  [0045] Once the metal part 19 has passed through the cooling compartment 14, it then reaches the outlet compartment 15 shown in FIG.

出口区画 15は、冷却された金属部品 19を取り出すときに、外気が冷却区画 14に侵 入するのを防止するための区間であり、この区間では通路 16aに複数の駆動ローラ 1 8aが並列配置され、出口に向けてスイングシャッター 48、第三の上下開閉シャッター 49、排気口 50a、バーナー 50b、窒素ガス噴出ノズル 51、第四の上下開閉シャツタ 一 52及びフレームカーテン形成装置のノズル 53が配置されている。 The outlet compartment 15 is evacuated into the cooling compartment 14 when the cooled metal part 19 is removed. In this section, a plurality of driving rollers 18a are arranged in parallel in the passage 16a, and the swing shutter 48, the third upper / lower shutter 49, the exhaust port 50a, the burner toward the outlet 50b, a nitrogen gas ejection nozzle 51, a fourth upper / lower opening / closing shirt 52, and a nozzle 53 of a frame curtain forming apparatus are arranged.

第三及び第四の上下開閉シャッター 49, 52は、下方に設けられた伸縮シリンダー 49a, 52aと、この申縮シリンダー 49a, 52aにより上下動されるシャッター 49b, 52bと を有し、シャッター 49a, 52aを上昇させて移送通路 15aを隙間無く塞ぎ、移送通路 1 5a内を外気力 遮断するものである。  The third and fourth open / close shutters 49 and 52 have telescopic cylinders 49a and 52a provided below, and shutters 49b and 52b moved up and down by the contraction cylinders 49a and 52a. 52a is raised to block the transfer passage 15a without gaps, and the outside of the transfer passage 15a is shut off.

第三の上下開閉シャッター 49と第四の上下開閉シャッター 52は、搬出口付近にお いて金属部品が停止可能な間隔で設けられ、第三及び第四の上下開閉シャッター 4 9, 52により形成される隔室に流入した外気力 排気口 50aから装置外に排出される 。排気口 50aは常時開放状態であり、その外側にバーナー 50bが設けられ、排気口 50aから排出される気体に水素ガスが含まれる場合には、このバーナー 50bにより燃 焼される。  The third vertical opening / closing shutter 49 and the fourth vertical opening / closing shutter 52 are provided at intervals near which the metal parts can be stopped near the exit, and are formed by the third and fourth vertical opening / closing shutters 49, 52. The outside air flowing into the compartment is discharged from the exhaust port 50a. The exhaust port 50a is always open, and a burner 50b is provided outside the exhaust port 50a. When hydrogen gas is contained in the gas discharged from the exhaust port 50a, the burner 50b burns.

窒素ガス噴出ノズル 51は、第四の上下開閉シャッター 52の上流側に設けら、ここで 窒素ガスを金属部品 19に向けてカーテン状に噴き出し、移送通路 15aの全断面に 及ぶ窒素ガスのカーテンを形成し、これにより、シャッター 52bが開いた時の外気の 装置内への侵入を抑制する効果を得るものである。  The nitrogen gas ejection nozzle 51 is provided on the upstream side of the fourth upper and lower opening / closing shutter 52. Here, the nitrogen gas is ejected in a curtain shape toward the metal part 19, and a nitrogen gas curtain covering the entire cross section of the transfer passage 15a is formed. Thus, the effect of suppressing the entry of outside air into the apparatus when the shutter 52b is opened is obtained.

ここで、フレームカーテン形成装置は必須の構成ではなぐ選択的に設けることが 可能なものである力 このフレームカーテン形成装置は、ノズル 53が第四の上下開 閉シャッター 52の外側に設けられたものであり、第四の上下開閉シャッター 52を開 いて金属部品 19を移送通路 15aから搬出するときに、ノズル 53から炎をカーテン状 に噴き出して移送通路 15aの全断面に及ぶフレームカーテンを形成し、このフレーム カーテンにより水素ガスを燃焼させることにより、装置内へ侵入しょうとする酸素を水 素と反応させ、酸素が装置内へ侵入することを防止する。  Here, the frame curtain forming device is a force that can be selectively provided rather than the essential configuration. In this frame curtain forming device, the nozzle 53 is provided outside the fourth upper / lower shutter 52. When the fourth top / bottom open / close shutter 52 is opened and the metal part 19 is carried out from the transfer passage 15a, a flame is blown out from the nozzle 53 in the form of a curtain to form a frame curtain covering the entire cross section of the transfer passage 15a, By burning hydrogen gas with this flame curtain, oxygen that tries to enter the device reacts with hydrogen to prevent oxygen from entering the device.

図 4では、出口区画 15に引き続いて搬出区画 16が設けられ、この搬出区画 16で は、熱処理工程が終了した金属部品 19を出口区画 15の炉内から取り出し、次のェ 程に搬送するためのコンベア装置 54が設けられて!/、る。このコンベア装置 54の直前 にはフード 55が設けられており、このフード 55の下側に冷水ノズル 56が取り付けら れている。コンベア装置 54には、駆動ローラ 18aの下方に集水容器 57が設けられ、 この集水容器 57に排水管 58が接続されている。 In FIG. 4, an unloading section 16 is provided following the exit section 15, and in this unloading section 16, the metal part 19 that has undergone the heat treatment process is taken out from the furnace of the exit section 15 and is transported to the next process. Conveyor device 54 is provided! Immediately before this conveyor device 54 Is provided with a hood 55, and a cold water nozzle 56 is attached to the lower side of the hood 55. In the conveyor device 54, a water collection container 57 is provided below the drive roller 18a, and a drain pipe 58 is connected to the water collection container 57.

出口区画 15を出た金属部品 19は、既にほぼ 250〜200°C程度以下まで冷却され ているが、この搬出区画 16では、さらに冷水ノズル 56から金属部品 19に冷水を降り 注ぐことにより、金属部品 19が例えば 100°C程度以下まで冷却するものである。金属 部品 19と駆動ローラ 18aとを通過した冷水は、集水容器 57から排水管 58を通って排 水される。  The metal part 19 that has exited the outlet section 15 has already been cooled to about 250 to 200 ° C or less, but in this unloading section 16, the metal part 19 is further poured into the metal part 19 by pouring cold water. For example, the component 19 is cooled to about 100 ° C or less. The cold water that has passed through the metal part 19 and the drive roller 18 a is drained from the water collection container 57 through the drain pipe 58.

金属部品 19は、冷水ノズル 56の直前において、既に、例えば 250〜200°C程度 以下まで冷却されており、これが故に、金属部品 19の水による冷却が可能になって いる。つまり、金属部品 19が 300〜270°C程度以上である場合には、酸化変色や結 晶構造等の悪影響を生じる可能性があり、水による冷却は好ましくないからである。  The metal part 19 has already been cooled to, for example, about 250 to 200 ° C. or less immediately before the cold water nozzle 56. Therefore, the metal part 19 can be cooled with water. That is, when the metal part 19 has a temperature of about 300 to 270 ° C. or more, there is a possibility of adverse effects such as oxidation discoloration and crystal structure, and cooling with water is not preferable.

[0047] なお、ガス雰囲気熱処理装置 10において、温度データによる制御はそれぞれ設け られた温度センサーと制御装置とにより実施することができる。その他の制御は、シー ケンス制御により実施することが可能であり、複数の制御手段及び制御装置は、一つ の PLC (Programmable Logic Controller)から構成することが可能である。 PLCは慣 用の装置であり、コンピュータや専用の入力装置を利用して、制御内容をあらかじめ プログラムにより表現し、これをメモリーに書き込み、プログラムを逐次実行することに よりシーケンス制御をする装置である。  [0047] In the gas atmosphere heat treatment apparatus 10, control by temperature data can be performed by a temperature sensor and a control device provided respectively. Other control can be performed by sequence control, and a plurality of control means and control devices can be configured by one PLC (Programmable Logic Controller). The PLC is a conventional device that uses a computer or a dedicated input device to express the control contents in advance in a program, writes it in memory, and executes the program sequentially to control the sequence. .

[0048] 次に、本発明のガス雰囲気熱処理方法について説明する。  [0048] Next, the gas atmosphere heat treatment method of the present invention will be described.

C準備工程]  C preparation process]

最初に、ガス雰囲気熱処理装置 10を稼動させて、各区画を所定条件に設定する。 すなわち、第一力も第四の上下開閉シャッター 29, 31, 49, 52を全て閉鎖し、加熱' 還元区画 13の電気ヒータ 20を稼動させ、入口ガス置換区画 12の移送通路内が例え ば 100〜300°C程度、加熱 ·還元区画 13における炉体後半部の所定位置の還元雰 囲気ガスが 1000〜: L100°C程度になるように温度を上昇させる。また加熱'還元区画 13に設けられたノズル 26から、第一の還元雰囲気ガス(水素ガス)を移送通路の上 流に向けて加圧供給し、第二の還元雰囲気ガス(窒素ガス)を副室 24, 25を介して 炉体 21内に導入し、特に炉体 21内における水素ガス:窒素ガスの容積比がほぼ 4〜 85 : 96〜15程度になるように制御する。このとき、ガス雰囲気熱処理装置 10の移送 通路内は第一及び第二の還元雰囲気ガスにより内圧が装置外よりも高められる。 First, the gas atmosphere heat treatment apparatus 10 is operated, and each section is set to a predetermined condition. That is, the first force also closes the fourth up / down shutters 29, 31, 49, 52, operates the electric heater 20 in the heating / reduction section 13, and the inside of the transfer passage in the inlet gas replacement section 12 is 100 to 100, for example. Increase the temperature so that the reducing atmosphere gas at a predetermined position in the latter half of the furnace body in the heating / reducing section 13 is about 1000 ° C: L100 ° C. Further, the first reducing atmosphere gas (hydrogen gas) is pressurized and supplied from the nozzle 26 provided in the heating / reduction section 13 toward the upstream of the transfer passage, and the second reducing atmosphere gas (nitrogen gas) is sub-charged. Through chambers 24, 25 It introduce | transduces in the furnace body 21, and it controls so that the volume ratio of hydrogen gas: nitrogen gas in the furnace body 21 may be about 4 to 85: 96-15. At this time, the internal pressure of the inside of the transfer passage of the gas atmosphere heat treatment apparatus 10 is higher than that of the outside of the apparatus by the first and second reducing atmosphere gases.

[0049] [金属部品の搬入工程] [0049] [Metal parts loading process]

準備工程により、ガス雰囲気熱処理装置 10が所定条件に設定されたら、窒素ガス 噴出ノズル 30から窒素ガスをカーテン状に噴き出しながら、第一の上下開閉シャツタ 一 29を開いて被処理物である金属部品 19を移送通路内へ搬入する。このとき、第 二力も第四の 3つの上下開閉シャッター 31, 49, 52は閉鎖されている。金属部品 19 を移送通路内へ搬入後に第一の上下開閉シャッター 29を閉じ、窒素ガス噴出ノズル 30を停止させる。  When the gas atmosphere heat treatment apparatus 10 is set to the predetermined conditions by the preparation process, the first upper and lower opening / closing shirt 29 is opened while nitrogen gas is blown out from the nitrogen gas blowing nozzle 30 in the form of a curtain, and the metal part which is the object to be treated 19 is carried into the transfer passage. At this time, the second three upper and lower shutters 31, 49, 52 are closed. After the metal part 19 is carried into the transfer passage, the first up / down shutter 29 is closed and the nitrogen gas ejection nozzle 30 is stopped.

このように搬入時の金属部品 19にカーテン状の窒素ガスとを噴き付けることより、移 送通路内が外気力 遮断されると共に、金属部品まわりの酸素を吹き飛ばすことがで きる。以上のような搬入工程により、金属部品 19を移送通路内へ搬入することにより、 搬入ロカ 移送通路内へ侵入する酸素は抑制することができる。この移送通路内へ 侵入する酸素を、例えば、還元雰囲気ガスに対して容積比で 4%以下に抑制するこ とが望ましい。  Thus, by spraying the curtain-like nitrogen gas on the metal part 19 at the time of carrying in, the outside air force is shut off in the transfer passage, and oxygen around the metal part can be blown off. By carrying the metal part 19 into the transfer passage through the carry-in process as described above, oxygen entering the carry-in loca transfer passage can be suppressed. For example, it is desirable to suppress the oxygen entering the transfer passage to 4% or less by volume ratio with respect to the reducing atmosphere gas.

なお、金属部品の搬入工程において必須ではないが、第一の上下開閉シャッター 29の開閉動作時に、フレームカーテン形成装置を適宜選択的に稼動させることが可 能である。例えば、フレームカーテン形成装置によりノズル 28から火炎をカーテン状 に噴き出せば、火炎により還元雰囲気ガスに含まれる水素ガスが燃焼され、金属部 品まわりの酸素や、移送通路内へ侵入しょうとする酸素が水素と反応し、移送通路内 へ侵入する酸素を抑制することが可能になる。  Although not indispensable in the metal part carrying-in process, the frame curtain forming apparatus can be selectively operated as appropriate when the first up / down opening / closing shutter 29 is opened / closed. For example, if a flame is blown out from the nozzle 28 in the form of a curtain by a frame curtain forming device, the hydrogen gas contained in the reducing atmosphere gas is burned by the flame, and oxygen around the metal parts or oxygen that tries to enter the transfer passage Reacts with hydrogen to suppress oxygen entering the transfer passage.

[0050] [入口ガス置換工程] [0050] [Inlet gas replacement process]

次に、第一、第三及び第四の 3つの上下開閉シャッター 29, 49, 52を閉鎖した状 態で、第二の上下開閉シャッター 31を開き、金属部品 19を通過させた後に第二の 上下開閉シャッター 31を閉鎖し、金属部品 19を例えば 100〜300°C程度に設定さ れた入口ガス置換区画 12の移送通路を通過させる。入口ガス置換区画 12では、還 元雰囲気ガスが移送通路の下流力 上流の排気口 32aに向けて流れており、この還 元雰囲気ガスに含まれる水素ガスが、金属部品 19と伴に搬入ロカも装置内に侵入 した酸素と反応することにより水に変わり、これが水蒸気になり、この過程により水素 ガス濃度が低下した還元雰囲気ガスと伴に第二の上下開閉シャッター 31bの隙間 31 を通過して排気口 32aから装置外に排出される。この排気に水素ガスが含まれる場 合には、排気口 32aの外側に設けられたバーナー 32bにより燃焼処理される。 Next, with the first, third and fourth three upper / lower shutters 29, 49, 52 closed, the second upper / lower shutter 31 is opened, and after passing the metal part 19, the second The upper / lower shutter 31 is closed, and the metal part 19 is allowed to pass through the transfer passage of the inlet gas replacement section 12 set to, for example, about 100 to 300 ° C. In the inlet gas replacement section 12, the return atmosphere gas flows toward the exhaust outlet 32a upstream of the downstream force in the transfer passage. Reducing atmosphere in which the hydrogen gas contained in the original atmosphere gas turns into water by reacting with the metal part 19 and the oxygen that has entered the equipment, and this is turned into water, which turns into water vapor. Along with the gas, the gas passes through the gap 31 of the second upper / lower opening / closing shutter 31b and is discharged out of the apparatus through the exhaust port 32a. When hydrogen gas is contained in the exhaust gas, it is burned by a burner 32b provided outside the exhaust port 32a.

入口ガス置換工程では、移送通路内に侵入する酸素が抑制されると共に、侵入し た酸素が排除されることにより、移送通路内における金属部品 19の酸ィ匕が最小限に 抑えられる。  In the inlet gas replacement step, oxygen that enters the transfer passage is suppressed, and oxygen that has entered is eliminated, so that the oxidation of the metal part 19 in the transfer passage is minimized.

[0051] [加熱還元工程] [0051] [Heat reduction process]

入口ガス置換工程が終了した金属部品 19を駆動ローラーにより更に移送し、電気 ヒータ 20が設けられた加熱還元区画 13を通過させる。加熱還元区画 13における電 気ヒータ 20は、上流側から炉体 21内の後半部の所定位置に向けて輻射温度が徐々 に高くなり、後半部の所定位置で最高温度に達し、ここから下流側の炉体 21の出口 に向けて輻射温度が低くなるように、複数本ごとに異なる温度に設定されたものであ る。そのため、加熱還元区画 13を金属部品が上流側から炉体 21の後半部の所定位 置に移送される間に、金属部品はほぼ 300°C程度力 徐々に温度上昇し、熱処理温 度であるほぼ 1000〜1080°C程度に達し、さらに、下流側の炉体 21の出口まで移送 される間に、ほぼ 700〜900°C程度まで温度が下降する。  The metal part 19 that has been subjected to the inlet gas replacement process is further transferred by a driving roller, and passes through a heat reduction section 13 provided with an electric heater 20. The electric heater 20 in the heating and reducing section 13 gradually increases in temperature from the upstream side toward a predetermined position in the latter half of the furnace body 21, reaches a maximum temperature at a predetermined position in the latter half, and reaches downstream from here. The temperature is set to be different for each of the multiple furnaces so that the radiation temperature decreases toward the outlet of the furnace body 21. Therefore, while the metal parts are transferred from the upstream side to the predetermined position in the latter half of the furnace body 21 in the heat reduction section 13, the temperature of the metal parts gradually increases by about 300 ° C, and the heat treatment temperature. The temperature reaches approximately 1000 to 1080 ° C, and further, the temperature falls to approximately 700 to 900 ° C while being transferred to the outlet of the furnace body 21 on the downstream side.

加熱還元工程では、入口ガス置換工程において酸ィ匕が最小限に抑えられた金属 部品 19を熱処理するものであるため、熱処理時間が従来の熱処理方法よりも短縮さ れる。  In the heat reduction process, the metal part 19 in which the acid and soot is minimized in the inlet gas replacement process is heat-treated, so that the heat treatment time is shortened compared to the conventional heat treatment method.

[0052] [冷却工程]  [0052] [Cooling process]

加熱還元工程が終了した金属部品を更に移送し、加熱還元区画 13よりも低い温度 である 50〜: LOO°C程度に設定された冷却区画 14の移送通路内を通過させながら、 加熱された金属部品に冷却気体を吹き付けて冷却し、水が灌ぎかけられても酸化変 色することのない温度範囲であるほぼ 270°C程度まで冷却する。  The metal parts that have been subjected to the heat reduction process are further transferred, and the metal that has been heated while passing through the transfer passage of the cooling section 14 that is set to about 50 ° C. Cool the parts with cooling gas and cool them down to about 270 ° C, which is a temperature range that does not cause oxidative discoloration even when water is sprayed.

[0053] [搬出工程] [0053] [Unloading process]

搬出工程では、冷却工程が終了した金属部品を移送し、第一、第二及び第四の 3 つの上下開閉シャッター 29, 31, 52を閉鎖した状態で第三の上下開閉シャッター 4 9を開き、第三及び第四の上下開閉シャッター 49, 52により形成される隔室に金属 部品を通過させた後に第三の上下開閉シャッター 49を閉鎖する。このとき、移送通 路内は還元雰囲気ガスにより内圧が装置外よりも高くなつているため、第三の上下開 閉シャッター 49が開かれると、還元雰囲気ガスは排気口 50aを通って外部に排出さ れる。この排気に水素ガスが含まれる場合には、排気口 50aの外側に設けられたバ ーナー 50bにより燃焼処理される。 In the unloading process, the metal parts for which the cooling process has been completed are transferred, and the first, second and fourth 3 With the three upper / lower shutters 29, 31, 52 closed, the third upper / lower shutter 49 was opened, and the metal part was passed through the compartment formed by the third and fourth upper / lower shutters 49, 52. Later, the third upper / lower shutter 49 is closed. At this time, because the internal pressure of the transfer path is higher than the outside of the apparatus due to the reducing atmosphere gas, when the third top / bottom opening / closing shutter 49 is opened, the reducing atmosphere gas is discharged to the outside through the exhaust port 50a. It is done. When hydrogen gas is contained in the exhaust gas, it is burned by a burner 50b provided outside the exhaust port 50a.

次に、窒素ガス噴出ノズル 51から窒素ガスをカーテン状に噴き出しながら、第四の 上下開閉シャッター 52を開いて金属部品を装置外へ搬出する。このとき、第一から 第三の 3つの上下開閉シャッター 29, 31, 49は閉鎖されている。金属部品を出口区 画 15の外側へ搬出した後に、第四の上下開閉シャッター 52を閉じ、窒素ガスを停止 させる。  Next, while the nitrogen gas is ejected from the nitrogen gas ejection nozzle 51 in the form of a curtain, the fourth upper / lower opening / closing shutter 52 is opened to carry the metal part out of the apparatus. At this time, the first to third upper and lower shutters 29, 31, 49 are closed. After the metal parts are carried out of the outlet section 15, the fourth top / bottom open / close shutter 52 is closed to stop the nitrogen gas.

以上のように、金属部品を出口区画 15の外側へ搬出することにより、金属部品の還 元雰囲気ガス中における熱処理が終了する。  As described above, by carrying the metal part outside the outlet section 15, the heat treatment of the metal part in the reducing atmosphere gas is completed.

なお、金属部品の搬出工程において必須ではないが、第四の上下開閉シャッター 52の開閉動作時に、フレームカーテン形成装置を適宜選択的に稼動させることが可 能である。例えば、フレームカーテン形成装置によりノズル 53から火炎をカーテン状 に噴き出せば、還元雰囲気ガスに含まれる水素ガスが燃焼し、外気中の酸素と水素 がが反応し、移送通路内への酸素の侵入防止が更に促進される。  Although not essential in the metal part unloading process, the frame curtain forming apparatus can be selectively operated as needed when the fourth upper / lower opening / closing shutter 52 is opened / closed. For example, if a flame is blown out from the nozzle 53 in the form of a curtain using a frame curtain forming device, hydrogen gas contained in the reducing atmosphere gas burns, oxygen and hydrogen in the outside air react, and oxygen enters the transfer passage. Prevention is further promoted.

Claims

請求の範囲 The scope of the claims [1] 搬入ロカ 搬出口まで複数の区画が設けられ、これら複数の区画に駆動ローラー が並列配置されて金属部品の移送通路が形成され、移送通路には装置外よりも内 圧が高くなるように第一及び第二の還元雰囲気ガスが供給され、第一及び第二の還 元雰囲気ガスは水素ガスを含むものであり、金属部品を駆動ローラーで移送しながら 熱処理する熱処理装置であって、  [1] Carry-in locus A plurality of compartments are provided up to the carry-out exit, and drive rollers are arranged in parallel in these compartments to form a metal part transfer path, so that the internal pressure is higher in the transfer path than outside the device. The first and second reducing atmosphere gases are supplied to the first and second reducing atmosphere gases, and the first and second reducing atmosphere gases contain hydrogen gas. 金属部品と伴に搬入口力 装置内に侵入した酸素を排除する入口ガス置換区画と 、当該入口ガス置換区画を通過した金属部品を加熱するための炉体を有し、当該炉 体に加熱手段が設けられた加熱還元区画と、当該加熱還元区画を通過した金属部 品を冷却気体により冷却する冷却区画と、冷却された金属部品を搬出口から装置外 へ取り出すときに外気が装置内に侵入するのを防止するための出口区画とを備え、 前記入口ガス置換区画は、温度制御手段により、金属部品と伴に搬入ロカ 移送 通路内へ侵入した酸素と金属部品が反応して酸化変色する温度以下、かつ侵入し た酸素と前記第一及び第二の還元雰囲気ガスに含まれる水素ガスとにより生成され る水が水蒸気に変わる温度以上に制御されるものであり、  Carrying inlet force with metal parts An inlet gas replacement section for removing oxygen that has entered the apparatus, and a furnace body for heating the metal parts that have passed through the inlet gas replacement section, and heating means in the furnace body , A cooling section that cools metal parts that have passed through the heating / reduction section with a cooling gas, and outside air enters the apparatus when the cooled metal parts are taken out of the apparatus from the carry-out port. The inlet gas replacement section is a temperature at which the metal part reacts with the oxygen and the metal part reacting with the metal part by the temperature control means, and the temperature is changed by oxidation. The water generated by the invading oxygen and the hydrogen gas contained in the first and second reducing atmosphere gases is controlled to be higher than the temperature at which the water turns into water vapor. 前記入口ガス置換区画の搬入口付近には、外気を遮断するための第一の可動扉 が開閉可能に設けられ、第一の可動扉よりも内側に金属部品が停止可能な間隔を 置いて第二の可動扉が設けられ、当該第二の可動扉は所定断面積の隙間を上方に 残して移送通路を閉鎖するものであり、第一の扉と第二の扉との間には前記水蒸気 を還元雰囲気ガスと伴に装置外へ排出する排気口が設けられ、  In the vicinity of the inlet of the inlet gas replacement section, a first movable door for blocking outside air is provided so as to be openable and closable. Two movable doors are provided, and the second movable door closes the transfer passage leaving a gap of a predetermined cross-sectional area upward, and the water vapor is interposed between the first door and the second door. Is provided with an exhaust port that discharges the gas along with the reducing atmosphere gas, 前記第一の可動扉の内側には金属部品に不活性ガスをカーテン状に噴き付ける 手段が設けられたことを特徴とするガス雰囲気熱処理装置。  A gas atmosphere heat treatment apparatus, characterized in that means for spraying an inert gas on a metal part in a curtain shape is provided inside the first movable door. [2] 前記第一の可動扉の外側に、金属部品に火炎をカーテン状に噴き付ける手段が 設けられたものである請求項 1に記載のガス雰囲気熱処理装置。  [2] The gas atmosphere heat treatment apparatus according to [1], wherein means for spraying a flame on the metal part in a curtain shape is provided outside the first movable door. [3] 前記加熱還元区画には第一の還元雰囲気ガスを移送通路に供給する手段が設け られ、前記加熱還元区画の炉体には、前記加熱手段及び前記駆動ローラーの取り 付け箇所の隙間を覆うケーシングが炉体外側に気密に設けられ、ケーシング内圧を 装置外及び移送通路内よりも高めて外気の炉体内への侵入を防止すると共に、ケー シング内を冷却するため第二の雰囲気ガスをケーシング内に供給する手段が設けら れ、第二の雰囲気ガスは前記隙間を通して前記炉体内に供給されるものであり、前 記炉体内に供給された第一の還元雰囲気ガスと第二の雰囲気ガスとの混合比率を 所望範囲に制御する手段が設けられ、 [3] The heating reduction section is provided with means for supplying the first reducing atmosphere gas to the transfer passage, and a gap between the heating means and the drive roller is provided in the furnace body of the heating reduction section. A covering casing is provided in an airtight manner outside the furnace body, and the casing internal pressure is higher than that outside the apparatus and inside the transfer passage to prevent the outside air from entering the furnace body. Means for supplying a second atmosphere gas into the casing for cooling the inside of the sink is provided, and the second atmosphere gas is supplied into the furnace body through the gap, and is supplied into the furnace body. Means for controlling the mixing ratio of the first reducing atmosphere gas and the second atmosphere gas to a desired range, 前記ケーシング内に、冷却水を通過させる管体と、ケーシング内の温度を検知する 手段とを設け、温度検知手段からのデータを受理してケーシング内を所定の温度以 下に制御するように冷却水の流量を制御する手段を設けたことを特徴とする請求項 1 に記載のガス雰囲気熱処理装置。  The casing is provided with a pipe body through which cooling water passes and a means for detecting the temperature in the casing, and is cooled so as to receive data from the temperature detecting means and control the inside of the casing to a predetermined temperature or lower. The gas atmosphere heat treatment apparatus according to claim 1, further comprising means for controlling a flow rate of water. [4] 前記第一の還元雰囲気ガスを供給する手段は、移送通路の上流に向けて方向付 けられたノズルと、当該ノズルに水素ガスを加圧供給する手段とを含むものであり、第 二の雰囲気ガスをケーシング内へ供給する手段は、ケーシングの下方部分に設けら れたノズルと、当該ノズルに窒素ガスを加圧供給する手段とを含むものである請求項 3に記載のガス雰囲気熱処理装置。  [4] The means for supplying the first reducing atmosphere gas includes a nozzle directed toward the upstream of the transfer passage, and means for pressurizing and supplying hydrogen gas to the nozzle. 4. The gas atmosphere heat treatment apparatus according to claim 3, wherein the means for supplying the second atmospheric gas into the casing includes a nozzle provided in a lower portion of the casing and a means for supplying nitrogen gas under pressure to the nozzle. . [5] 前記加熱手段及び前記駆動ローラーの取り付け箇所の隙間を通過し、炉体内から ケーシング内に流入する水素ガスをケーシング外に排出するノズルをケーシングの 上方部分に設け、当該ノズルの外側の端部には前記水素ガスを燃焼させる燃焼手 段が設けられたものである請求項 3に記載のガス雰囲気熱処理装置。  [5] A nozzle is provided in an upper part of the casing that passes through a gap between the heating means and the driving roller and that flows into the casing from the furnace body and out of the casing. The gas atmosphere heat treatment apparatus according to claim 3, wherein a combustion means for combusting the hydrogen gas is provided in the section. [6] 前記出口区間には、搬出口付近において金属部品が停止可能な間隔で第三の可 動扉及び第四の可動扉が開閉可能に設けられ、第三の可動扉及び第四の可動扉 により形成される隔室にはここに流入した外気を装置外へ排出する排気口が設けら れ、  [6] The exit section is provided with a third movable door and a fourth movable door that can be opened and closed at intervals near which the metal parts can be stopped in the vicinity of the carry-out exit. The compartment formed by the door is provided with an exhaust port that discharges the outside air that flows into the chamber to the outside of the device. 前記第四の可動扉の内側には金属部品に不活性ガスをカーテン状に噴き付ける 手段が設けられたものである請求項 1に記載のガス雰囲気熱処理装置。  2. The gas atmosphere heat treatment apparatus according to claim 1, wherein means for spraying an inert gas on the metal part in a curtain shape is provided inside the fourth movable door. [7] 前記第四の可動扉の外側に、金属部品に火炎をカーテン状に噴き付ける手段が 設けられものである請求項 6に記載のガス雰囲気熱処理装置。 7. The gas atmosphere heat treatment apparatus according to claim 6, wherein means for spraying a flame on the metal part in the form of a curtain is provided outside the fourth movable door. [8] 前記入口ガス置換区画及び前記出口区間の排気口には、排出される気体に含ま れる水素ガスを燃焼させる燃焼手段が設けられたものである請求項 6に記載のガス 雰囲気熱処理装置。 8. The gas atmosphere heat treatment apparatus according to claim 6, wherein a combustion means for burning hydrogen gas contained in the discharged gas is provided at an exhaust port of the inlet gas replacement section and the outlet section. [9] 搬入口から搬出口まで金属部品の移送通路が連続形成され、移送通路への外気 の侵入を抑制するため搬入口及び搬出口は開閉可能に形成され、移送通路には装 置外よりも内圧が高くなるように水素ガスを含む還元雰囲気ガスが供給され、移送通 路の所定域には加熱手段が設けられ、搬入口付近に排気口を備えたガス雰囲気熱 処理装置により、金属部品を移送通路内で移送しながら熱処理する方法であって、 搬入口を開 、て金属部品を移送通路内へ搬入するとき、搬入口から移送通路内へ 侵入する酸素を抑制するため、金属部品に不活性ガスをカーテン状に噴き付けなが ら、移送通路内へ金属部品を搬入した後に搬入口を閉鎖する金属部品の搬入工程 と、 [9] A metal part transfer passage is continuously formed from the carry-in port to the carry-out port, and the carry-in port and carry-out port are formed to be openable and closable in order to suppress the intrusion of outside air into the transfer passage. In addition, a reducing atmosphere gas containing hydrogen gas is supplied so that the internal pressure becomes high, a heating means is provided in a predetermined area of the transfer path, and a metal part is formed by a gas atmosphere heat treatment apparatus having an exhaust port near the carry-in port The heat treatment is carried out while transporting in the transfer passage, and when the carry-in opening is opened and the metal part is carried into the transfer passage, the metal parts are treated in order to suppress oxygen entering from the carry-in entrance into the transfer passage. A metal part loading process in which the inert gas is sprayed in the form of a curtain and the metal part is carried into the transfer passage and then the inlet is closed; 移送通路内へ侵入した酸素と、前記還元雰囲気ガスに含まれる水素ガスとにより生 成される水が水蒸気に変わる温度以上、かつ侵入した酸素と金属部品が反応して酸 化変色する温度以下である第一の温度範囲に設定された移送通路内に金属部品を 通過させることにより、金属部品と伴に搬入ロカ 装置内に侵入した酸素を水蒸気に 変え、当該水蒸気を還元雰囲気ガスと伴に搬入口付近の排気口から排出する入口 ガス置換工程と、  Above the temperature at which the water generated by the oxygen that has entered the transfer passage and the hydrogen gas contained in the reducing atmosphere gas turns into water vapor, and below the temperature at which the invaded oxygen reacts with the metal parts and undergoes oxidation discoloration. By passing metal parts through a transfer passage set to a certain first temperature range, oxygen that has entered the carry-in loca device with the metal parts is converted into water vapor, and the water vapor is carried with the reducing atmosphere gas. An inlet gas replacement process for discharging from an exhaust port near the mouth; 入口ガス置換工程が終了した金属部品を加熱手段の設けられた所定域へ移送し、 第一の温度範囲よりも高温の第二の温度範囲で金属部品を熱処理する加熱還元ェ 程と、  A heat reduction process in which the metal part that has undergone the inlet gas replacement step is transferred to a predetermined area provided with a heating means, and the metal part is heat-treated in a second temperature range higher than the first temperature range; 加熱還元工程が終了した金属部品を更に移送し、第二の温度範囲よりも低い温度 の第三の温度範囲に設定された移送通路内を通過させながら、金属部品に冷却気 体を吹き付けて冷却し、水が灌ぎかけられても酸ィ匕変色することのな 、温度まで冷却 する冷却工程と、  The metal parts that have undergone the heat reduction process are further transferred and cooled by blowing a cooling gas onto the metal parts while passing through the transfer path set in the third temperature range lower than the second temperature range. In addition, a cooling process that cools to a temperature without causing acid discoloration even when water is applied, and 冷却工程が終了した金属部品を移送し、外気が装置内に侵入するのを防止しなが ら、金属部品を搬出ロカ 装置外へ搬出することを特徴とする金属部品のガス雰囲 気熱処理方法。  A metal part gas atmosphere heat treatment method characterized in that the metal part is transported out of the equipment while the cooling process is completed and the outside air is prevented from entering the equipment while the equipment is carried out. . [10] 前記還元雰囲気ガスは、水素ガスと窒素ガスとがほぼ4〜85 : 96〜15の比率で混 合されたものである請求項 9に記載の金属部品のガス雰囲気熱処理方法。  10. The gas atmosphere heat treatment method for metal parts according to claim 9, wherein the reducing atmosphere gas is a mixture of hydrogen gas and nitrogen gas in a ratio of approximately 4 to 85:96 to 15. [11] 前記金属部品の搬入工程において、金属部品に火炎をカーテン状に噴き付けた 後に、金属部品に不活性ガスをカーテン状に噴き付けながら、移送通路内へ金属部 品を搬入することを特徴とする請求項 9に記載の金属部品のガス雰囲気熱処理方法 [11] In the process of carrying in the metal part, flame was sprayed on the metal part in a curtain shape. 10. The gas atmosphere heat treatment method for a metal part according to claim 9, wherein the metal part is subsequently carried into the transfer passage while spraying an inert gas on the metal part in a curtain shape.
PCT/JP2006/321046 2006-01-30 2006-10-23 Gas atmosphere heat treating apparatus and method Ceased WO2007086173A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020164353A (en) * 2019-03-28 2020-10-08 日本碍子株式会社 Manufacturing method of silicon carbide-containing ceramic product

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200082A (en) * 1984-03-22 1985-10-09 大同特殊鋼株式会社 Atmosphere heat treatment furnace
JP2002156188A (en) * 2000-11-17 2002-05-31 Daido Steel Co Ltd Roller hearth atmosphere furnace

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2804221B2 (en) * 1993-09-28 1998-09-24 株式会社ノリタケカンパニーリミテド Sealing device in heat treatment furnace
JP2003014376A (en) * 2001-06-28 2003-01-15 Nachi Fujikoshi Corp Roller hearth vacuum furnace

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200082A (en) * 1984-03-22 1985-10-09 大同特殊鋼株式会社 Atmosphere heat treatment furnace
JP2002156188A (en) * 2000-11-17 2002-05-31 Daido Steel Co Ltd Roller hearth atmosphere furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020164353A (en) * 2019-03-28 2020-10-08 日本碍子株式会社 Manufacturing method of silicon carbide-containing ceramic product
JP7249848B2 (en) 2019-03-28 2023-03-31 日本碍子株式会社 Method for producing ceramic product containing silicon carbide

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