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WO2007070353A3 - Methods and apparatus for processing a substrate - Google Patents

Methods and apparatus for processing a substrate Download PDF

Info

Publication number
WO2007070353A3
WO2007070353A3 PCT/US2006/046765 US2006046765W WO2007070353A3 WO 2007070353 A3 WO2007070353 A3 WO 2007070353A3 US 2006046765 W US2006046765 W US 2006046765W WO 2007070353 A3 WO2007070353 A3 WO 2007070353A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
edge
polishing film
methods
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/046765
Other languages
French (fr)
Other versions
WO2007070353A2 (en
Inventor
Erik C Wasinger
Gary C Ettinger
Sen-Hou Ko
Wei-Yung Hsu
Liang-Yuh Chen
Ho Seon Shin
Donald Olgado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/298,555 external-priority patent/US20070131653A1/en
Priority claimed from US11/299,295 external-priority patent/US7993485B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to KR1020087015337A priority Critical patent/KR101236855B1/en
Priority to EP06844980A priority patent/EP1976806A4/en
Priority to JP2008544516A priority patent/JP2009518872A/en
Publication of WO2007070353A2 publication Critical patent/WO2007070353A2/en
Publication of WO2007070353A3 publication Critical patent/WO2007070353A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02021—Edge treatment, chamfering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/004—Machines or devices using grinding or polishing belts; Accessories therefor using abrasive rolled strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

Apparatus and methods adapted to polish an edge of a substrate include a polishing film, a frame adapted to tension and load the polishing film so that at least a portion of the film is supported in a plane, and a substrate rotation driver adapted to rotate a substrate against the plane of the polishing film such that the polishing film is adapted to apply force to the substrate, contour to an edge of the substrate, the edge including at least an outer edge and a first bevel, and polish the outer edge and the first bevel as the substrate is rotated. Numerous other aspects are provided.
PCT/US2006/046765 2005-12-09 2006-12-07 Methods and apparatus for processing a substrate Ceased WO2007070353A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020087015337A KR101236855B1 (en) 2005-12-09 2006-12-07 Methods and apparatus for processing a substrate
EP06844980A EP1976806A4 (en) 2005-12-09 2006-12-07 METHOD AND DEVICE FOR PROCESSING A SUBSTRATE
JP2008544516A JP2009518872A (en) 2005-12-09 2006-12-07 Method and apparatus for processing a substrate

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/298,555 2005-12-09
US11/299,295 2005-12-09
US11/298,555 US20070131653A1 (en) 2005-12-09 2005-12-09 Methods and apparatus for processing a substrate
US11/299,295 US7993485B2 (en) 2005-12-09 2005-12-09 Methods and apparatus for processing a substrate

Publications (2)

Publication Number Publication Date
WO2007070353A2 WO2007070353A2 (en) 2007-06-21
WO2007070353A3 true WO2007070353A3 (en) 2007-11-29

Family

ID=38163413

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/046765 Ceased WO2007070353A2 (en) 2005-12-09 2006-12-07 Methods and apparatus for processing a substrate

Country Status (5)

Country Link
EP (1) EP1976806A4 (en)
JP (2) JP2009518872A (en)
KR (1) KR101236855B1 (en)
TW (1) TWI362697B (en)
WO (1) WO2007070353A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7993485B2 (en) 2005-12-09 2011-08-09 Applied Materials, Inc. Methods and apparatus for processing a substrate
US7976361B2 (en) * 2007-06-29 2011-07-12 Ebara Corporation Polishing apparatus and polishing method
JP5274993B2 (en) * 2007-12-03 2013-08-28 株式会社荏原製作所 Polishing equipment
JP2014083647A (en) * 2012-10-25 2014-05-12 Avanstrate Inc Magnetic fluid for glass substrate polishing
CN104956467B (en) * 2013-01-31 2018-02-16 应用材料公司 Method and apparatus for the base-plate cleaning after chemical-mechanical planarization
KR102229920B1 (en) 2013-10-25 2021-03-19 어플라이드 머티어리얼스, 인코포레이티드 Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning
DE102015008814A1 (en) 2015-07-10 2017-01-12 Thielenhaus Technologies Gmbh Pressure shoe with expansion chamber
JP2017087305A (en) * 2015-11-02 2017-05-25 日本電気硝子株式会社 Method and apparatus for polishing disc-shaped workpiece
JP6920849B2 (en) * 2017-03-27 2021-08-18 株式会社荏原製作所 Substrate processing method and equipment
JP6414353B1 (en) * 2018-03-27 2018-10-31 株式会社不二越 Film wrap processing equipment
JP7121572B2 (en) * 2018-07-20 2022-08-18 株式会社荏原製作所 Polishing device and polishing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4533399A (en) * 1983-04-12 1985-08-06 Minnesota Mining And Manufacturing Company Contact lens cleaning method
US20040185751A1 (en) * 2003-02-03 2004-09-23 Masayuki Nakanishi Substrate processing apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081494A (en) * 1994-06-27 1996-01-09 Sanshin:Kk Wafer material edge end part polishing device
JP2924890B2 (en) * 1998-04-20 1999-07-26 トヨタ自動車株式会社 Polishing method
US6629875B2 (en) * 2000-01-28 2003-10-07 Accretech Usa, Inc. Machine for grinding-polishing of a water edge
US6622334B1 (en) * 2000-03-29 2003-09-23 International Business Machines Corporation Wafer edge cleaning utilizing polish pad material
JP2002154041A (en) * 2000-11-17 2002-05-28 I M T Kk Polishing device
JP4156200B2 (en) * 2001-01-09 2008-09-24 株式会社荏原製作所 Polishing apparatus and polishing method
JP2005186176A (en) * 2003-12-24 2005-07-14 Shinko Electric Ind Co Ltd Wafer edge polishing machine
WO2005081301A1 (en) * 2004-02-25 2005-09-01 Ebara Corporation Polishing apparatus and substrate processing apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4533399A (en) * 1983-04-12 1985-08-06 Minnesota Mining And Manufacturing Company Contact lens cleaning method
US20040185751A1 (en) * 2003-02-03 2004-09-23 Masayuki Nakanishi Substrate processing apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1976806A4 *

Also Published As

Publication number Publication date
WO2007070353A2 (en) 2007-06-21
EP1976806A4 (en) 2011-08-10
TWI362697B (en) 2012-04-21
KR20080075001A (en) 2008-08-13
JP2009518872A (en) 2009-05-07
TW200735200A (en) 2007-09-16
JP2012183637A (en) 2012-09-27
KR101236855B1 (en) 2013-02-26
EP1976806A2 (en) 2008-10-08

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