WO2007060984A1 - Resin-bonded superabrasive wheel and process for producing the same - Google Patents
Resin-bonded superabrasive wheel and process for producing the same Download PDFInfo
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- WO2007060984A1 WO2007060984A1 PCT/JP2006/323306 JP2006323306W WO2007060984A1 WO 2007060984 A1 WO2007060984 A1 WO 2007060984A1 JP 2006323306 W JP2006323306 W JP 2006323306W WO 2007060984 A1 WO2007060984 A1 WO 2007060984A1
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- Prior art keywords
- resin
- bonded
- metal
- base metal
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/02—Wheels in one piece
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
Definitions
- the present invention relates to a resin-bonded superabrasive wheel having a strong bonding force between a base metal and an abrasive grain layer and
- a method of bonding a base and an abrasive layer a method of compression molding inside a mold while making the raw material powder adhere to a copper base metal is manufactured. Conventional power is also adopted as one of the methods.
- this method is a manufacturing method in which the bonding strength between resin and copper is relatively high and the stability of adhesive strength is also high.
- the bonding strength between polyimide resin and copper is remarkably high, and has been applied mainly to the manufacture of semiconductor substrates.
- the bonding mechanism between polyimide resin and copper is based on the anchor effect and intermolecular force, but in particular, recently, as a reason for polyimide resin to be strongly bonded to copper, It is clear that it is due to the chemical reaction between metal and polyimide resin. Also, in general, it is difficult to maintain a perfect cleaning surface on a metal surface, and hydroxyl groups and the like are formed on the metal surface unless treated in a special environment such as vacuum. Copper is similar to iron-based materials in that hydroxyl groups are present on the surface, although the rate of oxidation is slower.
- a polyimide resin used as a binder for a resin-bonded super-granular wheel is partially commercially available in which the imidization reaction is completely completed, but in many cases the imidization reaction proceeds completely. It is a state and contains a precursor. A carboxyl group is present in the precursor, and it is considered that bonding strength is generated by bonding with a hydroxyl group on the metal surface. Therefore, it is possible to achieve very strong bonding by heating and compression molding the raw material powders of the granule layer with the polyimide resin as a binder using a copper base metal in close contact with each other in a mold. Conceivable.
- 10-6 thermal expansion coefficient of the high tool abrasive layer as compared to Zetakappa is not lower than 10 X 10- 6 ⁇ below and iron and steel. Therefore, tensile stress is generated as a residual stress in the adhesive layer when it is cooled after the heat forming, but the residual stress is higher particularly when copper is used as the base metal than when it is iron or steel. An increase in residual stress is one of the factors causing a decrease in adhesive strength.
- Patent Document 1 Japanese Patent Application Laid-Open No. 5-293763
- a soft metal such as copper is thickly sprayed on the metal base metal to form a porous stress relaxation layer, and a metal bond is formed.
- Methods for manufacturing wheels have also been proposed.
- thermal spraying it is necessary to melt only the surface of the raw material particles to be jetted and keep the inside unmelted. It is the powder flame spray process that is capable of this.
- a method of firmly bonding by interposing a copper layer at the interface between a metallic base metal having a relatively high yield point of an iron-based material etc. and an abrasive grain layer It is conceivable to form a copper layer by plating. However, in the method using plating, it is possible to obtain a uniform copper layer on a flat surface without unevenness. If the artifice surface used for force processing has a shape with projections and depressions, the plating thickness It is likely that non-uniformities will occur, making it difficult to control the film thickness.
- Patent Document 1 Japanese Patent Application Laid-Open No. 5-293763
- Patent Document 2 Japanese Patent Application Laid-Open No. Hei 2-256466
- the strength of the joint becomes dependent on the breaking strength of copper, leading to a reduction in the joint strength. Therefore, it is necessary to control the thickness so as not to create a thicker area than necessary.
- the thickness of the copper layer to be formed is uneven, if the conditions for forming the copper layer are set based on the maximum thickness, the copper layer is formed, which is not only a very thin portion. There is a risk that an insulting area will occur.
- the problem to be solved by the present invention is to make the thickness of the copper layer, which is the key to the bonding strength between the base metal and the abrasive grain layer, uniform and to increase the bonding strength between the base metal and the abrasive grain layer. is there.
- a first feature of the resin-bonded ultra-granulated wheel of the present invention is a resin-bonded ultra-fine particle, in which a metal coating is formed on the surface of a base metal by thermal spraying and a super-granular layer is bonded to the surface of the metal film.
- a grit wheel wherein the metal coating is copper.
- the surface roughness of the copper layer formed in this manner does not depend on the surface roughness of the base metal, and the surface roughness is 1 / z mRa or more. Also by setting the conditions appropriately, it is possible to form a film with uniform surface roughness and uniform thickness.
- the present invention differs from the method proposed in Patent Document 1 in that the copper layer is formed by thermal spraying. Further, the present invention is an invention relating to a resin bonded wheel, and the function of the copper layer and the bonding mechanism are completely different from those related to the metal bond of Patent Document 2.
- the second feature is that arc spraying is used, and the rotation speed of the base metal is 20 Zmin or more and 6 OOZ min or less, the feed speed of the nozzle is 300 mm Zmin or more and 1 OOO mm Zmin or less, and the spraying distance is 80 mm or more 150 mm or less, wire feed speed is 0.8 mZ min or more and 2. 4 mm or less, wire diameter is 1. O mm or more and 1.6 mm or less, and voltage between wires is The current is set to 40A or more and 80A or less by setting 30V or more and 50V or less.
- the structure of the copper layer is preferably denser than porous. Therefore, as the method of thermal spraying, arc thermal spraying should be used rather than powder flame spraying.
- the arc spraying method is a method also used for coating on metal surfaces, and since it melts to the inside of the raw material particles to be jetted, the structure of the film becomes dense, and a uniform copper layer is obtained without increasing the film thickness. You can get
- the number of revolutions of the base metal is more preferably 20 Zmin or more and 550 Zmin or less, and more preferably 50 Zmin or more and 550 Zmin or less.
- the feed rate of nos and nore is more preferably 350 mmZ min or more and 100 mm or less and more preferably 350 mm Zmin or more and 950 mm Zmin or less.
- the spraying distance is more preferably 90 mm or more and 150 mm or less, still more preferably 90 mm or more and 140 mm or less.
- the wire feeding speed is more preferably 0.9 mZmin or more and 2.4 mZmin or less, and still more preferably 0.9 mZ min or more and 2.2 mZ min or less.
- the wire diameter is more preferably 1.1 mm or more and 1.6 mm or less, still more preferably 1.1 or more and 1.5 or less.
- the voltage between the wires is more preferably 35V or more and 50V or less.
- the current is more preferably 40A or more and 70A or less.
- the third feature is that the thickness of the metal film is 5 ⁇ m or more and 1 mm or less. This is a condition for obtaining strength as a joint. If the thickness of the copper layer exceeds 1 mm, the strength of the copper material will be low, which may cause plastic deformation of the joint, which may reduce the accuracy of the outer circumference of the wheel. There is a risk that the grain layer may peel off. On the other hand, if the distance is 5 m or less, there is a risk that unsprayed portions may occur due to nonuniform film thickness that can not be suppressed under the spraying conditions.
- the force is 500 / z m, more preferably 10 ⁇ m to 100 ⁇ m.
- a fourth feature is that the binder of the superabrasive layer is a polyimide resin. If a polyimide resin containing a precursor is used, it is preferred that the copper layer be in the oxidized state, rather than having to be a non-acidic surface, but formed by thermal spraying. If the precursor is not contained, it may be treated in a reducing atmosphere.
- the material of the base metal is iron-based material, titanium alloy, duralmin. Iron-based materials, titanium alloys and duralumin can form abrasive grain layers with high yield points at high pressure. In view of the yield point and Young's modulus of the material, preferably, iron-based material, titanium alloy It is better to use. Further, it is more preferable to use an iron-based material from the viewpoint of bonding between the material to be sprayed and the base metal. However, when thermally spraying on a titanium alloy, a nickel layer should be provided on the surface of the base metal in advance, and copper should be sprayed on the nickel surface.
- the resin-bonded ultra-granulated wheel according to the present invention is provided with a base metal, a metal coating formed on the surface of the base metal by thermal spraying, a surface of the metal coating, and a resin bond and a super-granule.
- the metal film includes copper and copper oxide.
- the metal coating is formed by the thermal spraying treatment, so that the metal coating having a smooth surface can be formed even if there are irregularities on the surface of the base metal.
- the resin bond contains a polyimide resin.
- the base metal contains cemented carbide.
- the polyimide resin constituting the resin bond has oxygen, which can form a coordinate bond, for example, an ether bond.
- the X-ray diffraction intensity of the (111) plane of copper oxide, Cu 0 (111), and the X-ray of the (111) plane of copper is preferably, the X-ray diffraction intensity of the (111) plane of copper oxide, Cu 0 (111), and the X-ray of the (111) plane of copper.
- Z ⁇ Cu (l l l) + Cu 2 O (l l l) ⁇ is not less than 0.15 and not more than 0.25.
- a method of manufacturing a resin-bonded ultra-granulated wheel comprising the steps of: forming a metal film having a surface by thermal spraying on a surface of a base metal; and resin bonding the surface of the metal film. And a step of forming a superabrasive grain layer including
- the step of forming the metal film includes forming the metal film by thermal spraying in an inert gas.
- the method for producing a resin-bonded superabrasive wheel preferably further comprises the step of heat treating the metal coating after forming the metal coating and before forming the superabrasive layer.
- the base metal includes a cemented carbide.
- the thickness of the base metal is lmm or less.
- a method of manufacturing a resin-bonded ultra-granulated wheel comprising: covering the upper and lower surfaces of a base metal having a disk-like upper surface, lower surface and outer peripheral surface with a jig; A metal coating containing copper and copper oxide is exposed by thermal spraying on the exposed outer peripheral surface. Forming a film; and forming a superabrasive layer including resin bond and superabrasive particles so as to be in contact with the metal film.
- FIG. 1 is a perspective view including a partial cross section of a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
- FIG. 2 is a view showing a cross section of a joint portion of a resin-bonded super-granular wheel according to Embodiment 1 of the present invention.
- FIG. 3 is a perspective view for illustrating a first step of the method for producing a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
- FIG. 4 is a perspective view showing a second step of the method for producing a resin-bonded super-granular wheel according to Embodiment 1 of the present invention.
- FIG. 5 is a perspective view showing a third step of the method of manufacturing a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
- FIG. 6 is a perspective view including a partial cross section shown to explain a fourth step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 1 of the present invention.
- FIG. 7 is a perspective view showing a fifth step of the method of manufacturing a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
- FIG. 8 is a perspective view showing a first step of a method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
- FIG. 9 is a perspective view showing a second step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
- FIG. 10 is a perspective view showing a third step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
- FIG. 11 is a perspective view showing a fourth step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
- FIG. 12 is a perspective view showing a fifth step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
- FIG. 14 is a perspective view showing a first step of a method of manufacturing a resin-bonded super-granular wheel according to a comparative example.
- FIG. 15 is a perspective view showing a second step of the method of manufacturing the resin-bonded super-granular wheel according to the comparative example.
- FIG. 16 is a perspective view showing a third step of the method of manufacturing the resin-bonded super-granular wheel according to the comparative example.
- FIG. 17 is a graph showing X-ray diffraction patterns of the product of the present invention and the comparative product.
- FIG. 18 is a graph showing the concentration of copper oxide in the metal film according to the present invention.
- FIG. 19 is a cross-sectional view showing the structure of a superabrasive grain layer.
- FIG. 1 is a perspective view including a partial cross section of a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
- the disc-shaped resin-bonded super-granular wheel 100 is a disc-shaped base metal 3 having a through hole 38 formed in the center and a metal formed on the outer peripheral surface 33 of the base metal 3.
- a coating 2 and a superabrasive layer 1 formed on the surface of the metal coating 2 are provided.
- the base metal can be made of, for example, an alloy containing iron.
- base metal 3 is made of tungsten carbide, cemented carbide with a main component of Boid, and so on! When cemented carbide is used, the resin-bonded super-granular wheel 100 after use can be recycled.
- the metal film 2 is provided on the outer peripheral surface 33 of the base metal 3 by thermal spraying.
- the metal film 2 contains copper as a main component, and a portion of the copper further contains oxidized copper.
- the metal film 2 may be pure copper without containing copper oxide.
- metal coating 2 is a base metal on the inner circumference 3 Since it is a member for bonding with the superabrasive layer 1 on the outer peripheral side, the adhesion between the superabrasive layer 1 and the base metal 3 is good, and if it is a material, the metal coating 2 is It can be included in the constituent copper.
- Superabrasive layer 1 has a configuration in which superabrasive grains are held by resin bonding. Diamond or cubic boron nitride (cBN) can be used as the superabrasive.
- the super-granular layer 1 is provided on the outer peripheral surface 21 of the metal film 2.
- the thickness of the base metal 3 (the distance from the upper surface 31 to the lower surface 32) tl is not particularly limited, but may be 1 mm or less! /.
- FIGS. 3 to 7 are diagrams for explaining the method of manufacturing the super-granulated wheel according to the first embodiment of the present invention.
- the base metal 3 is disk-shaped, and has a through hole 38 at its center.
- jigs 51 and 52 are attached to the upper and lower surfaces of base metal 3.
- the jigs 51 and 52 cover the upper and lower surfaces.
- the area of the jigs 51 and 52 is equal to the area of the upper and lower surfaces.
- the outer peripheral surface which is the side surface is exposed.
- shaft 53 is inserted into through hole 38, and shaft 53 is rotated in the direction indicated by arrow R.
- the base metal 3 engaged with the shaft 53 and the jigs 51 and 52 also rotate in the direction indicated by the arrow R.
- copper is injected from the nozzle 54 toward the outer peripheral surface 33.
- a metal coating is formed on the outer peripheral surface 33 by the thermal spraying process.
- the base metal 3 is fixed with the molds 61, 62, 63, 64.
- super granules and a resin bond are disposed to be in contact with the outer peripheral surface 21 of the metal film 2, and a pressure is applied to the super-abrasive layer 1 by using a mold 65.
- resin-bonded super-granular wheel 100 having super-granular layer 1 provided on the outer periphery is completed by removing molds 61-65.
- base metal 3 according to the second embodiment has a flange portion 35.
- the flange portion 35 is a portion having an outer diameter larger than other portions, and a metal film is formed on the outer peripheral surface 33 of the flange portion 35.
- base metal 3 is fitted to jigs 51, 52 and shaft 53.
- the outer peripheral surface 33 of the flange portion 35 of the base metal 3 is exposed to the outside. In this state, metal is sprayed from the nozzle 54 on the outer peripheral surface 33 while rotating the base metal 3.
- metal coating 2 is formed on the surface of outer peripheral surface 33 as a result of the thermal spraying process.
- the base metal 3 on which the metal film 2 is formed is fixed in the molds 61, 62, 64, 65.
- resin-bonded super-granular wheel 100 according to Embodiments 1 and 2 has base 3 having outer peripheral surface 33 and outer peripheral surface 21 formed on outer peripheral surface 33 of base 3 by thermal spraying.
- a metal coating 2 and a superabrasive layer 1 provided on an outer peripheral surface 21 of the metal coating 2 and including a resin bond and a superabrasive are provided.
- the metal film 2 contains copper and copper oxide.
- the resin bond may contain polyimide resin.
- the copper oxide may be localized near the interface between the metal coating 2 and the superabrasive grain layer 1.
- the base metal 3 may contain cemented carbide.
- the molecules that make up the resin bond may contain oxygen as a constituent.
- the method of manufacturing resin-bonded ultra-granulated wheel 100 comprises the steps of forming metal coating 2 having outer peripheral surface 21 by thermal spraying on outer peripheral surface 33 of base metal 3; And forming a superabrasive layer 1 including resin bonds and superabrasive grains on the outer peripheral surface 21.
- the step of forming the metal coating 2 includes forming the metal coating 2 by thermal spraying in an inert gas such as nitrogen or argon, and after the metal coating 2 is formed, the superabrasive grain layer 1 is formed.
- the method may further include the step of oxidizing the surface of the metal film 2 by heat treatment before the metal film 2.
- the thickness of the base metal 3 is preferably lmm or less!
- the resin-bonded super-granular wheel is manufactured in the disk shape by covering the upper surface 31 and the lower surface 32 of the base metal 3 having the upper surface 31, the lower surface 32 and the outer peripheral surface 33 with jigs 51 and 52. And forming a metal film 2 containing copper and copper oxide on the exposed outer peripheral surface 33 by thermal spraying, and a resin bond and a superabrasive particle so as to be in contact with the metal film 2. And the step of forming the abrasive grain layer 1.
- the metal coating 2 is formed only where necessary. It is possible. Therefore, the outer peripheral surface 33 can be cleaned and reused after the base metal 3 is used, and the life of the base metal can be improved.
- the method of manufacturing the super-granular wheel according to the comparative example will be described with reference to FIGS.
- the mask 112 is formed on the upper surface 31 and the lower surface 32.
- the base metal 3 on which the mask 112 is formed is immersed in the plating solution 113, and the base metal 3 is rotated using the shaft 114. Thereby, a metal film is formed on the base metal 3.
- a resin-bonded super-granular wheel was produced in the same manner as in Example 1.
- a resin-bonded super-granular wheel was produced in the same manner as in Example 1.
- a resin-bonded super-granular wheel was produced in the same manner as in Example 1 using a copper base metal.
- the abrasive layer was bonded directly to the base metal without forming a copper layer by arc spraying.
- a base of carbon steel for machine structural use was plated with copper at a thickness of 10 m, and a resin-bonded super-granular wheel was manufactured in the same manner as in Example 1.
- Example 1 had higher strength than Comparative Examples 1 and 3. Moreover, although Example 2 and Example 3 are a result in case the surface roughness of a copper layer differs a little, the result which has sufficient intensity
- Example 1 The distribution ratio of copper to copper oxide in the metal coatings produced in Example 1 and Comparative Example 2 was examined using X-ray diffraction. The results are shown in FIG.
- FIG. 18 is a graph showing the distribution of copper oxide in the metal film 2. Referring to FIG. 18, it can be seen that the concentration of copper oxide increases at the interface between the metal coating 2 and the superabrasive grain layer 1, and copper oxide is unevenly distributed at the interface.
- the resin bond 1002 can contain metal powder, carbide or nitride hard particles, solid lubricant particles, and the like as filler in addition to granules such as diamond and CBN.
- metal powder examples include Cu, Ag, Sn, Ni, Au and the like. Particularly preferred from the viewpoint of cost and effect are Cu, Ag or their alloys. Or you may mix and add two or more kinds of metal powder.
- hard particles of carbide or nitride examples include SiC, Si N, Cr 2 O, Al 2 O, SiO 2 and the like.
- 3 4 2 3 2 3 2 force is also selected
- One or more kinds of hard particle force It may be contained in the resin bond as a further filler. By containing such hard particles, the abrasion resistance of the resin bond is enhanced, and the effect of prolonging the life of the superabrasive wheel can be obtained.
- solid lubricant particles may be contained in the resin bond. Examples of solid lubricants of this type include fluorine-containing resins such as polytetrafluoroethylene, hBN, calcium fluoride, graphite, MoS and the like. Such solid lubricant particles
- Samples 1 to 8 were produced by arc spraying according to the production method of Example 1.
- samples 1 to 8 (111) of Cu 2 O in the sample under the following measurement device and measurement conditions
- the ratio of the plane to the (111) plane of Cu was investigated by X-ray diffraction.
- Rint-1500 (made by RIGAKU)
- the ratio of CuO (lll) Z ⁇ Cu (lll) + CuO (lll) ⁇ is 0 ⁇ 15 or more and 0.25 or more.
- the resin-bonded ultra-granulated wheel of the present invention can achieve stable and extremely high bonding strength as compared to the conventional method of forming a copper layer by plating, so it has a long life and a high efficiency. It exerts an excellent effect that a high performance resin bonded superabrasive wheel can be obtained.
- resin-bonded superabrasive wheels using polyimide resin exhibit outstanding high performance and long life, so they can be expected to contribute significantly to the industry where grinding is required. .
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Abstract
Description
明 細 書 Specification
レジンボンド超砥粒ホイールおよびその製造方法 Resin bonded superabrasive wheel and method of manufacturing the same
技術分野 Technical field
[0001] 本発明は、台金と砥粒層間で強固な接合力を有するレジンボンド超砥粒ホイールと The present invention relates to a resin-bonded superabrasive wheel having a strong bonding force between a base metal and an abrasive grain layer and
、その製造方法に関するものである。 , And its manufacturing method.
背景技術 Background art
[0002] レジンボンド超砥粒ホイールにお ヽては、基台と砥粒層との接合方法として、銅製 の台金に原料粉末を密着させながら、金型内部で圧縮成形する方法が、製造方法 の一手法として従来力も採用されている。 In a resin-bonded superabrasive wheel, as a method of bonding a base and an abrasive layer, a method of compression molding inside a mold while making the raw material powder adhere to a copper base metal is manufactured. Conventional power is also adopted as one of the methods.
[0003] この方法が採用されている理由として、榭脂と銅との接合強度が比較的高ぐかつ 接着強度の安定性も高い製法であることがあげられる。特に、ポリイミド榭脂と銅との 接合強度は顕著に高ぐ主として半導体基板の製造に応用されてきた。 [0003] The reason why this method is adopted is that it is a manufacturing method in which the bonding strength between resin and copper is relatively high and the stability of adhesive strength is also high. In particular, the bonding strength between polyimide resin and copper is remarkably high, and has been applied mainly to the manufacture of semiconductor substrates.
[0004] ポリイミド榭脂と銅との接合機構は、一般的な説に準ずればアンカー効果と分子間 力によるといえるが、特にポリイミド榭脂が銅と強固に接合する理由として、最近では 、金属とポリイミド榭脂間における化学反応によるものであることが明らかになつている 。また、一般には金属表面は、完全な清掃表面を維持することが困難であり、真空中 など特別な環境内で処理をしない限りは、金属表面には水酸基などが形成される。 鉄系材料などに比べ銅は、酸ィ匕速度が遅いものの表面に水酸基が存在する点では 同様である。 According to a general theory, it can be said that the bonding mechanism between polyimide resin and copper is based on the anchor effect and intermolecular force, but in particular, recently, as a reason for polyimide resin to be strongly bonded to copper, It is clear that it is due to the chemical reaction between metal and polyimide resin. Also, in general, it is difficult to maintain a perfect cleaning surface on a metal surface, and hydroxyl groups and the like are formed on the metal surface unless treated in a special environment such as vacuum. Copper is similar to iron-based materials in that hydroxyl groups are present on the surface, although the rate of oxidation is slower.
[0005] レジンボンド超砲粒ホイールの結合材として用いるポリイミド榭脂には、完全にイミド 化反応が完了したものも一部市販されているが、多くはイミド化反応が完全に進行し て ヽな 、状態であり前駆体を含むものである。前駆体にはカルボキシル基が存在し、 これが金属表面の水酸基と結合することにより接合力が生じると考えられている。故 に、銅製の台金を使用して、ポリイミド榭脂を結合材とした砲粒層の原料粉末を、金 型内で互いに密着させながら加熱し圧縮成形すると、非常に強固な接合が可能と考 えられる。 [0005] A polyimide resin used as a binder for a resin-bonded super-granular wheel is partially commercially available in which the imidization reaction is completely completed, but in many cases the imidization reaction proceeds completely. It is a state and contains a precursor. A carboxyl group is present in the precursor, and it is considered that bonding strength is generated by bonding with a hydroxyl group on the metal surface. Therefore, it is possible to achieve very strong bonding by heating and compression molding the raw material powders of the granule layer with the polyimide resin as a binder using a copper base metal in close contact with each other in a mold. Conceivable.
[0006] ところが、銅の降伏点が低いため、圧縮成形の工程で銅製の台金が歪んでしまう問 題が生じた。台金が歪めば、後工程の形状仕上げが困難となるため、製造可能な形 状を制約せざるをえなくなる。また、たとえ歪みが小さく収まったとしても、銅は延性材 料であるため除去加工が非常に難しぐ効率のよい製造方法ではない。し力も、銅の 熱膨張係数は 16 X 10— 6ZK:〜 18 X 10— 6ZKであり、鉄や鋼の 10 X 10— 6ΖΚ:〜 12 XHowever, since the yield point of copper is low, there is a problem that the copper base metal is distorted in the compression molding process. The subject arose. If the base metal is distorted, it will be difficult to finish the shape in the post-process, and it will be necessary to restrict the shape that can be manufactured. Also, even if the distortion is small, copper is a ductile material, so it is not an efficient manufacturing method that makes removal very difficult. Also force, thermal expansion coefficient of copper is 16 X 10- 6 ZK: ~ 18 X 10- 6 is a ZK, of iron or steel 10 X 10- 6 ΖΚ: ~ 12 X
10— 6Ζκに比べて高ぐ砥粒層の熱膨張係数は 10 X 10— 6Ζκ以下と鉄や鋼よりも低 い。そのため、加熱成形の後に冷却した際に接着層に引張応力が残留応力として生 じるが、特に台金を銅にした場合は鉄や鋼にした場合よりも、残留応力が高くなる。 残留応力が高くなることは、接着強度の低下を生じる要因の一つとなる。 10-6 thermal expansion coefficient of the high tool abrasive layer as compared to Zetakappa is not lower than 10 X 10- 6 Ζκ below and iron and steel. Therefore, tensile stress is generated as a residual stress in the adhesive layer when it is cooled after the heat forming, but the residual stress is higher particularly when copper is used as the base metal than when it is iron or steel. An increase in residual stress is one of the factors causing a decrease in adhesive strength.
[0007] 一方、剛性の高 、鉄系材料の台金に、銅めつきを施す方法が既に提案されて 、る On the other hand, a method of applying copper plating to a base metal of high rigidity and ferrous material has already been proposed.
。この方法によれば、銅の台金を用いると同様に、銅と砲粒層の樹脂との間に高い接 合力を得ることができる。 . According to this method, a high bonding strength can be obtained between the copper and the resin of the granule layer, similarly to using a copper base.
(例えば、特開平 5— 293763号公報 (特許文献 1)参照) (For example, see Japanese Patent Application Laid-Open No. 5-293763 (Patent Document 1))
また、台金の降伏点が高いため、歪みも生じず、除去加工も容易となる。そのため、 ホイール台金形状やホイールサイズの制約は銅製の台金の場合に比べると非常に 少なくなる。 In addition, since the yield point of the base metal is high, no distortion occurs and removal processing becomes easy. Therefore, restrictions on the shape of the wheel base and the size of the wheel are much less than in the case of the copper base.
[0008] 台金に高い降伏点の材料を使用できる方法としては、上記以外にも、金属の台金 に銅等の軟質金属を厚く溶射して多孔質の応力緩和層を形成し、メタルボンドホイ一 ルを製造する方法も提案されている。溶射により多孔質の層を得るためには、噴射さ れる個々の原料粒子が、表面だけ溶融し、内部は溶融していない状態を維持する必 要がある。これが可能であるのは粉末フレーム溶射法である。 Other than the above, as a method of using a material having a high yield point for the base metal, a soft metal such as copper is thickly sprayed on the metal base metal to form a porous stress relaxation layer, and a metal bond is formed. Methods for manufacturing wheels have also been proposed. In order to obtain a porous layer by thermal spraying, it is necessary to melt only the surface of the raw material particles to be jetted and keep the inside unmelted. It is the powder flame spray process that is capable of this.
(例えば、特開平 2— 256466号公報 (特許文献 2)参照) (For example, see JP-A-2-256466 (Patent Document 2))
以上のように、レジンボンド超砲粒ホイールにおいては、鉄系材料等の降伏点の比 較的高い金属製台金と砥粒層との界面に、銅層を介在させて強固に接合させる方法 として、銅層をめつきで形成する方法が考えられる。しかし、めっきを用いる方法では 、凹凸の無い平坦な面上には、均一な銅層を得ることができる力 加工に用いる砲石 面が凸部ゃ凹部を有する形状である場合には、めっき厚さに不均一が生じる可能性 が高く膜厚の制御が困難となる。一方、メタルボンドホイールにおいては、粉末フレー ム溶射法で形成する方法が考えられるが、レジンボンドホイールに溶射が適用された 発明は、これまでに存在しない。しかも、粉末フレーム溶射法では、厚い多孔質層を 得る場合には有利である力 ロボットアームを用いて精密にノズルの位置および角度 を制御したとしても、薄い層を均一厚さで得ることは困難であるため、レジンボンドホイ ールにおいて、台金と砲粒層との接合強度を高める目的には不向きである。 As described above, in a resin-bonded super-granular wheel, a method of firmly bonding by interposing a copper layer at the interface between a metallic base metal having a relatively high yield point of an iron-based material etc. and an abrasive grain layer. It is conceivable to form a copper layer by plating. However, in the method using plating, it is possible to obtain a uniform copper layer on a flat surface without unevenness. If the artifice surface used for force processing has a shape with projections and depressions, the plating thickness It is likely that non-uniformities will occur, making it difficult to control the film thickness. On the other hand, in the case of metal bond wheels, a method of forming by powder flame spraying can be considered, but thermal spraying was applied to resin bond wheels. The invention does not exist so far. Moreover, in powder flame spraying, it is advantageous to obtain a thick porous layer Even if the position and angle of the nozzle are precisely controlled using a robot arm, it is difficult to obtain a thin layer with a uniform thickness. Because of this, resin bond wheels are not suitable for the purpose of enhancing the bonding strength between the base metal and the particle layer.
特許文献 1:特開平 5 - 293763号公報 Patent Document 1: Japanese Patent Application Laid-Open No. 5-293763
特許文献 2:特開平 2— 256466号公報 Patent Document 2: Japanese Patent Application Laid-Open No. Hei 2-256466
発明の開示 Disclosure of the invention
発明が解決しょうとする課題 Problem that invention tries to solve
[0009] 銅層は、厚くなりすぎると接合部の強度が銅の破壊強度に依存するようになり、接 合強度の低下をまねく。それ故、必要以上に厚い箇所が生じないように厚さを制御す る必要がある。しかし、形成する銅層の厚さに不均一が生じれば、最大厚さを基準に 銅層の形成条件を設定すると、非常に厚さの薄い箇所が生じるだけではなぐ銅層 が形成されて ヽな ヽ箇所が生じる危険がある。 [0009] When the copper layer is too thick, the strength of the joint becomes dependent on the breaking strength of copper, leading to a reduction in the joint strength. Therefore, it is necessary to control the thickness so as not to create a thicker area than necessary. However, if the thickness of the copper layer to be formed is uneven, if the conditions for forming the copper layer are set based on the maximum thickness, the copper layer is formed, which is not only a very thin portion. There is a risk that an insulting area will occur.
[0010] 本発明が解決するべき課題は、台金と砥粒層との接合強度の要となる銅層の厚さ を一様にし、台金と砥粒層との接合強度を高めることである。 The problem to be solved by the present invention is to make the thickness of the copper layer, which is the key to the bonding strength between the base metal and the abrasive grain layer, uniform and to increase the bonding strength between the base metal and the abrasive grain layer. is there.
課題を解決するための手段 Means to solve the problem
[0011] 本発明のレジンボンド超砲粒ホイールの第一の特徴は、台金の表面に溶射処理に よる金属皮膜が設けられ、金属皮膜の表面に超砲粒層が接合されたレジンボンド超 砲粒ホイールであって、金属皮膜は銅であることである。このようにして形成した銅層 の表面粗さは台金の表面粗さに依存せず、表面粗さ 1 /z mRa以上となる。し力も、条 件を適切に設定することで、均一厚さで一様な表面粗さの皮膜を形成することができ る。本発明は、銅層を溶射により形成する点で、特許文献 1に提案されている方法と は異なる。また、本件はレジンボンドホイールに関する発明であり、特許文献 2のメタ ルボンドに関するものとは銅層の機能も接合機構も全く異なる。 [0011] A first feature of the resin-bonded ultra-granulated wheel of the present invention is a resin-bonded ultra-fine particle, in which a metal coating is formed on the surface of a base metal by thermal spraying and a super-granular layer is bonded to the surface of the metal film. A grit wheel wherein the metal coating is copper. The surface roughness of the copper layer formed in this manner does not depend on the surface roughness of the base metal, and the surface roughness is 1 / z mRa or more. Also by setting the conditions appropriately, it is possible to form a film with uniform surface roughness and uniform thickness. The present invention differs from the method proposed in Patent Document 1 in that the copper layer is formed by thermal spraying. Further, the present invention is an invention relating to a resin bonded wheel, and the function of the copper layer and the bonding mechanism are completely different from those related to the metal bond of Patent Document 2.
[0012] 第 2の特徴は、アーク溶射を用いたことであって、台金の回転数を 20Zmin以上 6 OOZmin以内とし、ノズルの送り速度を 300mmZmin以上 1 OOOmmZmin以内と し、溶射距離を 80mm以上 150mm以下とし、ワイヤー送り速度を 0. 8mZmin以上 2. 4mm以内とし、ワイヤ一径を 1. Omm以上 1. 6mm以下とし、ワイヤー間の電圧を 30V以上 50V以下とし、電流を 40A以上 80A以下としたことである。銅層の組織は、 多孔質よりも緻密なほうが望ましい。よって、溶射の方法としては、粉末フレーム溶射 法ではなぐアーク溶射法を用いるべきである。アーク溶射法は、金属面への塗装に も用いられる方法であり、噴射する原料粒子の内部まで溶融しているので、膜の組織 が緻密になり、膜厚を厚くすること無く均一な銅層を得ることができる。台金の回転数 は、 20Zmin以上 550Zmin以内がより好ましぐさらに好ましくは、 50Zmin以上 5 50Zmin以内である。ノス、ノレの送り速度は、 350mmZmin以上 lOOOmmZmin以 内がより好ましく、さらに好ましくは、 350mmZmin以上 950mmZmin以内である。 溶射距離は、 90mm以上 150mm以下がより好ましぐさらに好ましくは、 90mm以上 140mm以下である。ワイヤー送り速度は、 0. 9mZmin以上 2. 4mZmin以下がよ り好ましぐさらに好ましくは、 0. 9mZmin以上 2. 2mZmin以下である。ワイヤ一径 は、 1. 1mm以上 1. 6mm以下がより好ましぐさらに好ましくは、 1. 1以上 1. 5以下 である。ワイヤー間の電圧は、 35V以上 50V以下がより好ましい。電流は、 40A以上 70A以下がより好ましい。 The second feature is that arc spraying is used, and the rotation speed of the base metal is 20 Zmin or more and 6 OOZ min or less, the feed speed of the nozzle is 300 mm Zmin or more and 1 OOO mm Zmin or less, and the spraying distance is 80 mm or more 150 mm or less, wire feed speed is 0.8 mZ min or more and 2. 4 mm or less, wire diameter is 1. O mm or more and 1.6 mm or less, and voltage between wires is The current is set to 40A or more and 80A or less by setting 30V or more and 50V or less. The structure of the copper layer is preferably denser than porous. Therefore, as the method of thermal spraying, arc thermal spraying should be used rather than powder flame spraying. The arc spraying method is a method also used for coating on metal surfaces, and since it melts to the inside of the raw material particles to be jetted, the structure of the film becomes dense, and a uniform copper layer is obtained without increasing the film thickness. You can get The number of revolutions of the base metal is more preferably 20 Zmin or more and 550 Zmin or less, and more preferably 50 Zmin or more and 550 Zmin or less. The feed rate of nos and nore is more preferably 350 mmZ min or more and 100 mm or less and more preferably 350 mm Zmin or more and 950 mm Zmin or less. The spraying distance is more preferably 90 mm or more and 150 mm or less, still more preferably 90 mm or more and 140 mm or less. The wire feeding speed is more preferably 0.9 mZmin or more and 2.4 mZmin or less, and still more preferably 0.9 mZ min or more and 2.2 mZ min or less. The wire diameter is more preferably 1.1 mm or more and 1.6 mm or less, still more preferably 1.1 or more and 1.5 or less. The voltage between the wires is more preferably 35V or more and 50V or less. The current is more preferably 40A or more and 70A or less.
[0013] 第 3の特徴は、金属皮膜の厚みは、 5 μ m以上 lmm以内であることである。これは 、接合部としての強度を得るための条件である。銅層の膜厚が lmmを超えると、銅の 材料強度が低 ヽために、接合部の塑性変形が生じてホイールの外周精度を低下さ せる危険がある上、銅層の破壊が生じて砲粒層が剥離する危険がある。一方、 5 m 以下にすると、溶射条件では抑えきれない膜厚の不均一のために、溶射されていな い箇所が生じる危険がある。好ましくは、 力 500 /z mであり、より好ましくは、 1 0 μ mから 100 μ mである。 The third feature is that the thickness of the metal film is 5 μm or more and 1 mm or less. This is a condition for obtaining strength as a joint. If the thickness of the copper layer exceeds 1 mm, the strength of the copper material will be low, which may cause plastic deformation of the joint, which may reduce the accuracy of the outer circumference of the wheel. There is a risk that the grain layer may peel off. On the other hand, if the distance is 5 m or less, there is a risk that unsprayed portions may occur due to nonuniform film thickness that can not be suppressed under the spraying conditions. Preferably, the force is 500 / z m, more preferably 10 μm to 100 μm.
[0014] 第 4の特徴は、超砥粒層の結合材は、ポリイミド榭脂であることである。前駆体を含 むポリイミド榭脂を使用すれば、銅層が非酸ィ匕表面である必要がなぐむしろ、溶射 により形成される酸化状態の銅層が好ましい。前駆体を含まない場合は、還元雰囲 気中で処理すればよい。 [0014] A fourth feature is that the binder of the superabrasive layer is a polyimide resin. If a polyimide resin containing a precursor is used, it is preferred that the copper layer be in the oxidized state, rather than having to be a non-acidic surface, but formed by thermal spraying. If the precursor is not contained, it may be treated in a reducing atmosphere.
[0015] 第 5の特徴は、台金の材質は、鉄系材料、チタン合金、ジュラルミンであることであ る。鉄系材料やチタン合金、ジュラルミンは、降伏点が高ぐ砥粒層を高圧で成形可 能である。材料の降伏点とヤング率の観点から、好ましくは、鉄系材料、チタン合金を 用いるほうがよい。また、溶射する材料と台金との接合性の観点力ゝら鉄系材料を用い るのがより好ましい。ただし、チタン合金に溶射する際には、予め台金表面に-ッケ ル層を設け、ニッケル表面上に銅の溶射を行うべきである。 A fifth feature is that the material of the base metal is iron-based material, titanium alloy, duralmin. Iron-based materials, titanium alloys and duralumin can form abrasive grain layers with high yield points at high pressure. In view of the yield point and Young's modulus of the material, preferably, iron-based material, titanium alloy It is better to use. Further, it is more preferable to use an iron-based material from the viewpoint of bonding between the material to be sprayed and the base metal. However, when thermally spraying on a titanium alloy, a nickel layer should be provided on the surface of the base metal in advance, and copper should be sprayed on the nickel surface.
[0016] この発明に従ったレジンボンド超砲粒ホイールは、台金と、台金の表面に溶射処理 により形成された金属皮膜と、金属皮膜の表面に設けられ、レジンボンドと超砲粒とを 含む超砥粒層とを備え、金属皮膜は銅および酸化銅を含む。 The resin-bonded ultra-granulated wheel according to the present invention is provided with a base metal, a metal coating formed on the surface of the base metal by thermal spraying, a surface of the metal coating, and a resin bond and a super-granule. And the metal film includes copper and copper oxide.
[0017] このように構成されたレジンボンド超砥粒ホイールでは、溶射処理により金属皮膜を 形成するため、台金表面に凹凸が存在しても表面が平滑な金属皮膜を形成すること ができる。 [0017] In the resin-bonded superabrasive grain wheel configured as described above, the metal coating is formed by the thermal spraying treatment, so that the metal coating having a smooth surface can be formed even if there are irregularities on the surface of the base metal.
[0018] 好ましくは、レジンボンドはポリイミド榭脂を含む。 Preferably, the resin bond contains a polyimide resin.
好ましくは、台金は超硬合金を含む。 Preferably, the base metal contains cemented carbide.
[0019] 好ましくは、レジンボンドを構成するポリイミド榭脂は、例えばエーテル結合のように 配位結合をしうる酸素を構成要素とする。 [0019] Preferably, the polyimide resin constituting the resin bond has oxygen, which can form a coordinate bond, for example, an ether bond.
[0020] 好ましくは、酸化銅の(111)面の X線回折強度 Cu 0 (111)と銅の(111)面の X線 Preferably, the X-ray diffraction intensity of the (111) plane of copper oxide, Cu 0 (111), and the X-ray of the (111) plane of copper.
2 2
回折強度の比率 Cu O (l l l Diffraction intensity ratio Cu O (l l l
2 )Z{Cu (l l l) +Cu O (l l l)}が 0. 15以上 0. 25以下 2) Z {Cu (l l l) + Cu 2 O (l l l)} is not less than 0.15 and not more than 0.25.
2 2
である。 It is.
[0021] この発明の 1つの局面に従ったレジンボンド超砲粒ホイールの製造方法は、台金の 表面に溶射処理により、表面を有する金属皮膜を形成する工程と、金属皮膜の表面 にレジンボンドと超砥粒とを含む超砥粒層を形成する工程とを備える。 According to one aspect of the present invention, there is provided a method of manufacturing a resin-bonded ultra-granulated wheel comprising the steps of: forming a metal film having a surface by thermal spraying on a surface of a base metal; and resin bonding the surface of the metal film. And a step of forming a superabrasive grain layer including
[0022] 好ましくは、金属皮膜を形成する工程は、不活性ガス中で溶射処理により金属皮膜 を形成することを含む。レジンボンド超砥粒ホイールの製造方法は、好ましくは、金属 皮膜を形成した後に、超砥粒層を形成する前に金属皮膜に熱処理を施す工程をさら に備える。 [0022] Preferably, the step of forming the metal film includes forming the metal film by thermal spraying in an inert gas. The method for producing a resin-bonded superabrasive wheel preferably further comprises the step of heat treating the metal coating after forming the metal coating and before forming the superabrasive layer.
[0023] 好ましくは、台金は超硬合金を含む。 Preferably, the base metal includes a cemented carbide.
好ましくは、台金の厚みは lmm以下である。 Preferably, the thickness of the base metal is lmm or less.
[0024] この発明の別の局面に従ったレジンボンド超砲粒ホイールの製造方法は、円盤形 状で上面、下面および外周面を有する台金の上面および下面を治具で覆い、外周 面を露出させて、その露出した外周面に溶射処理により銅と酸化銅とを含む金属皮 膜を形成する工程と、金属皮膜に接触するようにレジンボンドと超砥粒とを含む超砥 粒層を形成する工程とを備える。 According to another aspect of the present invention, there is provided a method of manufacturing a resin-bonded ultra-granulated wheel, comprising: covering the upper and lower surfaces of a base metal having a disk-like upper surface, lower surface and outer peripheral surface with a jig; A metal coating containing copper and copper oxide is exposed by thermal spraying on the exposed outer peripheral surface. Forming a film; and forming a superabrasive layer including resin bond and superabrasive particles so as to be in contact with the metal film.
図面の簡単な説明 Brief description of the drawings
[図 1]この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの一部断面を含 む斜視図である。 FIG. 1 is a perspective view including a partial cross section of a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
[図 2]この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの接合部断面を 示す図である。 FIG. 2 is a view showing a cross section of a joint portion of a resin-bonded super-granular wheel according to Embodiment 1 of the present invention.
[図 3]この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの製造方法の第 1工程を説明するための斜視図である。 FIG. 3 is a perspective view for illustrating a first step of the method for producing a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
[図 4]この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの製造方法の第 2工程を示す斜視図である。 FIG. 4 is a perspective view showing a second step of the method for producing a resin-bonded super-granular wheel according to Embodiment 1 of the present invention.
[図 5]この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの製造方法の第 3工程を示す斜視図である。 FIG. 5 is a perspective view showing a third step of the method of manufacturing a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
[図 6]この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの製造方法の第 4工程を説明するために示す一部断面を含む斜視図である。 FIG. 6 is a perspective view including a partial cross section shown to explain a fourth step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 1 of the present invention.
[図 7]この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの製造方法の第 5工程を示す斜視図である。 FIG. 7 is a perspective view showing a fifth step of the method of manufacturing a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention.
[図 8]この発明の実施の形態 2に従ったレジンボンド超砲粒ホイールの製造方法の第 1工程を示す斜視図である。 FIG. 8 is a perspective view showing a first step of a method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
[図 9]この発明の実施の形態 2に従ったレジンボンド超砲粒ホイールの製造方法の第 2工程を示す斜視図である。 FIG. 9 is a perspective view showing a second step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
[図 10]この発明の実施の形態 2に従ったレジンボンド超砲粒ホイールの製造方法の 第 3工程を示す斜視図である。 FIG. 10 is a perspective view showing a third step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
[図 11]この発明の実施の形態 2に従ったレジンボンド超砲粒ホイールの製造方法の 第 4工程を示す斜視図である。 FIG. 11 is a perspective view showing a fourth step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
[図 12]この発明の実施の形態 2に従ったレジンボンド超砲粒ホイールの製造方法の 第 5工程を示す斜視図である。 FIG. 12 is a perspective view showing a fifth step of the method of manufacturing a resin-bonded super-granular wheel according to Embodiment 2 of the present invention.
圆 13]図 12中の内部構造を示す斜視図である。 [図 14]比較例に従ったレジンボンド超砲粒ホイールの製造方法の第 1工程を示す斜 視図である。 13] It is a perspective view showing an internal structure in FIG. FIG. 14 is a perspective view showing a first step of a method of manufacturing a resin-bonded super-granular wheel according to a comparative example.
[図 15]比較例に従ったレジンボンド超砲粒ホイールの製造方法の第 2工程を示す斜 視図である。 FIG. 15 is a perspective view showing a second step of the method of manufacturing the resin-bonded super-granular wheel according to the comparative example.
[図 16]比較例に従ったレジンボンド超砲粒ホイールの製造方法の第 3工程を示す斜 視図である。 FIG. 16 is a perspective view showing a third step of the method of manufacturing the resin-bonded super-granular wheel according to the comparative example.
[図 17]本発明品および比較品における X線回折図形を示すグラフである。 FIG. 17 is a graph showing X-ray diffraction patterns of the product of the present invention and the comparative product.
[図 18]この発明に従った金属皮膜中での酸化銅の濃度を示すグラフである。 FIG. 18 is a graph showing the concentration of copper oxide in the metal film according to the present invention.
[図 19]超砥粒層の構成を示す断面図である。 FIG. 19 is a cross-sectional view showing the structure of a superabrasive grain layer.
符号の説明 Explanation of sign
[0026] 1 超砲粒層、 2 金属皮膜、 3 台金、 31 上面、 32 下面、 33 外周面、 38 貫 通孔、 100 レジンボンド超砲粒ホイール。 [0026] 1 Ultra-granular layer, 2 metal film, 3 base metal, 31 upper surface, 32 lower surface, 33 outer peripheral surface, 38 penetration holes, 100 resin-bonded ultra-granular wheel.
発明を実施するための最良の形態 BEST MODE FOR CARRYING OUT THE INVENTION
[0027] 以下、この発明の実施の形態について、図面を参照して説明する。なお、以下の実 施の形態では同一部分または相当する部分については同一の参照符号を付し、そ の説明については繰返さない。また、各実施の形態を組み合わせることも可能である Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or corresponding portions are denoted by the same reference characters, and description thereof will not be repeated. Moreover, it is also possible to combine each embodiment.
[0028] (実施の形態 1) Embodiment 1
図 1は、この発明の実施の形態 1に従ったレジンボンド超砲粒ホイールの一部断面 を含む斜視図である。図 1を参照して、円盤形状のレジンボンド超砲粒ホイール 100 は、円盤形状で中心部に貫通孔 38が形成された台金 3と、台金 3の外周面 33に形 成された金属皮膜 2と、金属皮膜 2の表面に形成された超砥粒層 1とを備える。台金 は、たとえば鉄を含む合金で構成することができる。さら〖こ、台金 3はタングステン力 ーバイドを主成分とする超硬合金などで構成されて!ヽてもよ!ヽ。超硬合金を用いた場 合には、使用後のレジンボンド超砲粒ホイール 100をリサイクルすることができる。 FIG. 1 is a perspective view including a partial cross section of a resin-bonded ultra-granulated wheel according to Embodiment 1 of the present invention. Referring to FIG. 1, the disc-shaped resin-bonded super-granular wheel 100 is a disc-shaped base metal 3 having a through hole 38 formed in the center and a metal formed on the outer peripheral surface 33 of the base metal 3. A coating 2 and a superabrasive layer 1 formed on the surface of the metal coating 2 are provided. The base metal can be made of, for example, an alloy containing iron. Furthermore, base metal 3 is made of tungsten carbide, cemented carbide with a main component of Boid, and so on! When cemented carbide is used, the resin-bonded super-granular wheel 100 after use can be recycled.
[0029] 金属皮膜 2は溶射処理により台金 3の外周面 33上に設けられている。金属皮膜 2は 銅を主成分として含み、さらにその銅の一部分が酸化した酸化銅を含む。なお、金属 皮膜 2が酸化銅を含まずに純銅であってもよい。また、金属皮膜 2は内周側の台金 3 と外周側の超砥粒層 1との接合をする部材であるため、超砥粒層 1と台金 3と密着性 がよ 、材料であれば 、ずれの材料であっても金属皮膜 2を構成する銅中に含めるこ とがでさる。 The metal film 2 is provided on the outer peripheral surface 33 of the base metal 3 by thermal spraying. The metal film 2 contains copper as a main component, and a portion of the copper further contains oxidized copper. The metal film 2 may be pure copper without containing copper oxide. Also, metal coating 2 is a base metal on the inner circumference 3 Since it is a member for bonding with the superabrasive layer 1 on the outer peripheral side, the adhesion between the superabrasive layer 1 and the base metal 3 is good, and if it is a material, the metal coating 2 is It can be included in the constituent copper.
[0030] 超砥粒層 1は超砥粒がレジンボンドで保持された構成を有する。超砥粒として、ダイ ャモンドまたは立方晶窒化硼素 (cBN)を用いることができる。金属皮膜 2の外周面 2 1に超砲粒層 1が設けられる。台金 3の厚み(上面 31から下面 32までの距離) tlは特 に制限されるものではな 、が、 1mm以下であってもよ!/、。 Superabrasive layer 1 has a configuration in which superabrasive grains are held by resin bonding. Diamond or cubic boron nitride (cBN) can be used as the superabrasive. The super-granular layer 1 is provided on the outer peripheral surface 21 of the metal film 2. The thickness of the base metal 3 (the distance from the upper surface 31 to the lower surface 32) tl is not particularly limited, but may be 1 mm or less! /.
[0031] 次に、図 1および図 2で示すレジンボンド超砲粒ホイールの製造方法について説明 する。図 3から 7は、この発明の実施の形態 1に従った超砲粒ホイールの製造方法を 説明するための図である。図 3を参照して、まず台金 3を準備する。台金 3は円盤形 状であり、その中心部に貫通孔 38が設けられた形状とされて 、る。 Next, a method of manufacturing the resin-bonded super-granulated wheel shown in FIGS. 1 and 2 will be described. FIGS. 3 to 7 are diagrams for explaining the method of manufacturing the super-granulated wheel according to the first embodiment of the present invention. First, prepare base metal 3 with reference to FIG. The base metal 3 is disk-shaped, and has a through hole 38 at its center.
[0032] 図 4を参照して、台金 3の上面と下面に治具 51, 52を装着する。治具 51, 52により 上面と下面とが覆われる。治具 51, 52の面積は上面および下面の面積に等しい。側 面である外周面が露出する。 Referring to FIG. 4, jigs 51 and 52 are attached to the upper and lower surfaces of base metal 3. The jigs 51 and 52 cover the upper and lower surfaces. The area of the jigs 51 and 52 is equal to the area of the upper and lower surfaces. The outer peripheral surface which is the side surface is exposed.
[0033] 図 5を参照して、貫通孔 38にシャフト 53を差し込み、シャフト 53を矢印 Rで示す方 向に回転させる。これによりシャフト 53に係合した台金 3ならびに治具 51, 52も矢印 Rで示す方向に回転する。このとき、ノズル 54から銅を外周面 33に向かって噴射す る。この溶射処理により外周面 33に金属皮膜を形成する。 Referring to FIG. 5, shaft 53 is inserted into through hole 38, and shaft 53 is rotated in the direction indicated by arrow R. Referring to FIG. As a result, the base metal 3 engaged with the shaft 53 and the jigs 51 and 52 also rotate in the direction indicated by the arrow R. At this time, copper is injected from the nozzle 54 toward the outer peripheral surface 33. A metal coating is formed on the outer peripheral surface 33 by the thermal spraying process.
[0034] 図 6を参照して、金属皮膜 2を形成した後に金型 61, 62, 63, 64で台金 3を固定 する。この状態で金属皮膜 2の外周面 21に接触するように超砲粒とレジンボンドを配 置し、これに金型 65で圧力を加えることにより超砥粒層 1を形成する。 Referring to FIG. 6, after forming the metal film 2, the base metal 3 is fixed with the molds 61, 62, 63, 64. In this state, super granules and a resin bond are disposed to be in contact with the outer peripheral surface 21 of the metal film 2, and a pressure is applied to the super-abrasive layer 1 by using a mold 65.
[0035] 図 7を参照して、金型 61〜65を取り除くことで外周部に超砲粒層 1が設けられたレ ジンボンド超砲粒ホイール 100が完成する。 Referring to FIG. 7, resin-bonded super-granular wheel 100 having super-granular layer 1 provided on the outer periphery is completed by removing molds 61-65.
[0036] (実施の形態 2) Second Embodiment
図 8から図 13を用いて、この発明の実施の形態 2に従ったレジンボンド超砲粒ホイ ールについて説明する。図 8を参照して、実施の形態 2に従った台金 3はフランジ部 3 5を有する。フランジ部 35は他の部分に比べて外径が大きい部分であり、フランジ部 35の外周面 33に金属皮膜が形成される。 [0037] 図 9を参照して、治具 51, 52およびシャフト 53に台金 3を嵌め合わせる。台金 3の フランジ部 35の外周面 33を外部に露出させる。この状態で台金 3を回転させながら 外周面 33にノズル 54から金属を溶射する。 A resin-bonded super-granular wheel according to Embodiment 2 of the present invention will be described with reference to FIGS. 8 to 13. Referring to FIG. 8, base metal 3 according to the second embodiment has a flange portion 35. The flange portion 35 is a portion having an outer diameter larger than other portions, and a metal film is formed on the outer peripheral surface 33 of the flange portion 35. Referring to FIG. 9, base metal 3 is fitted to jigs 51, 52 and shaft 53. The outer peripheral surface 33 of the flange portion 35 of the base metal 3 is exposed to the outside. In this state, metal is sprayed from the nozzle 54 on the outer peripheral surface 33 while rotating the base metal 3.
[0038] 図 10を参照して、溶射処理の結果、外周面 33表面に金属皮膜 2が形成される。 Referring to FIG. 10, metal coating 2 is formed on the surface of outer peripheral surface 33 as a result of the thermal spraying process.
図 11を参照して、金属皮膜 2が形成された台金 3を金型 61, 62, 64, 65内に固定 する。 Referring to FIG. 11, the base metal 3 on which the metal film 2 is formed is fixed in the molds 61, 62, 64, 65.
[0039] 図 12および図 13を参照して、金型内部に超砲粒とレジンボンドとを充填し、これら を固めることで超砥粒層 1を形成する。すなわち、実施の形態 1および 2に従ったレジ ンボンド超砲粒ホイール 100は、外周面 33を有する台金 3と、台金 3の外周面 33に 溶射処理により形成された、外周面 21を有する金属皮膜 2と、金属皮膜 2の外周面 2 1に設けられ、レジンボンドと超砥粒とを含む超砥粒層 1とを備える。金属皮膜 2は銅 および酸化銅を含む。 Referring to FIG. 12 and FIG. 13, the inside of the mold is filled with super granules and a resin bond, and these are solidified to form the super-abrasive layer 1. That is, resin-bonded super-granular wheel 100 according to Embodiments 1 and 2 has base 3 having outer peripheral surface 33 and outer peripheral surface 21 formed on outer peripheral surface 33 of base 3 by thermal spraying. A metal coating 2 and a superabrasive layer 1 provided on an outer peripheral surface 21 of the metal coating 2 and including a resin bond and a superabrasive are provided. The metal film 2 contains copper and copper oxide.
[0040] レジンボンドはポリイミド榭脂を含んでいてもよい。酸化銅は金属皮膜 2と超砥粒層 1との界面近傍に偏在していてもよい。台金 3は超硬合金を含んでいてもよい。レジン ボンドを構成する分子は、酸素を構成要素として含んで 、てもよ 、。 The resin bond may contain polyimide resin. The copper oxide may be localized near the interface between the metal coating 2 and the superabrasive grain layer 1. The base metal 3 may contain cemented carbide. The molecules that make up the resin bond may contain oxygen as a constituent.
[0041] この発明に従ったレジンボンド超砲粒ホイール 100の製造方法は、台金 3の外周面 33に溶射処理により、外周面 21を有する金属皮膜 2を形成する工程と、金属皮膜 2 の外周面 21にレジンボンドと超砥粒とを含む超砥粒層 1を形成する工程とを備える。 金属皮膜 2を形成する工程は、窒素やアルゴンなどの不活性ガス中で溶射処理によ り金属皮膜 2を形成することを含み、金属皮膜 2を形成した後に、超砥粒層 1を形成 する前に金属皮膜 2に熱処理を施して金属皮膜 2の表面を酸化する工程をさらに備 えて 、てもよ 、。台金 3の厚みは lmm以下であることが好まし!/、。 The method of manufacturing resin-bonded ultra-granulated wheel 100 according to the present invention comprises the steps of forming metal coating 2 having outer peripheral surface 21 by thermal spraying on outer peripheral surface 33 of base metal 3; And forming a superabrasive layer 1 including resin bonds and superabrasive grains on the outer peripheral surface 21. The step of forming the metal coating 2 includes forming the metal coating 2 by thermal spraying in an inert gas such as nitrogen or argon, and after the metal coating 2 is formed, the superabrasive grain layer 1 is formed. The method may further include the step of oxidizing the surface of the metal film 2 by heat treatment before the metal film 2. The thickness of the base metal 3 is preferably lmm or less!
[0042] レジンボンド超砲粒ホイールの製造方法は、円盤形状で、上面 31、下面 32および 外周面 33を有する台金 3の上面 31および下面 32を治具 51, 52で覆い、外周面 33 を露出させて、その露出した外周面 33に溶射処理により銅と酸化銅とを含む金属皮 膜 2を形成する工程と、金属皮膜 2に接触するようにレジンボンドと超砥粒とを含む超 砥粒層 1を形成する工程とを備える。 The resin-bonded super-granular wheel is manufactured in the disk shape by covering the upper surface 31 and the lower surface 32 of the base metal 3 having the upper surface 31, the lower surface 32 and the outer peripheral surface 33 with jigs 51 and 52. And forming a metal film 2 containing copper and copper oxide on the exposed outer peripheral surface 33 by thermal spraying, and a resin bond and a superabrasive particle so as to be in contact with the metal film 2. And the step of forming the abrasive grain layer 1.
[0043] 溶射により金属皮膜 2を形成するため、必要な場所にのみ金属皮膜 2を形成するこ とができる。そのため、台金 3を使用後に外周面 33を洗浄して再使用することができ 、台金の寿命を向上させることができる。 [0043] In order to form the metal coating 2 by thermal spraying, the metal coating 2 is formed only where necessary. It is possible. Therefore, the outer peripheral surface 33 can be cleaned and reused after the base metal 3 is used, and the life of the base metal can be improved.
[0044] (比較例) Comparative Example
図 14から 16を参照して、比較例に従った超砲粒ホイールの製造方法について説 明する。比較例では、図 14および図 15で示すように、上面 31および下面 32にマス ク 112を形成する。 The method of manufacturing the super-granular wheel according to the comparative example will be described with reference to FIGS. In the comparative example, as shown in FIGS. 14 and 15, the mask 112 is formed on the upper surface 31 and the lower surface 32.
[0045] 図 16を参照して、マスク 112が形成された台金 3をめつき液 113に浸し、シャフト 11 4を用いて台金 3を回転させる。これにより、台金 3に金属皮膜を形成する。 Referring to FIG. 16, the base metal 3 on which the mask 112 is formed is immersed in the plating solution 113, and the base metal 3 is rotated using the shaft 114. Thereby, a metal film is formed on the base metal 3.
[0046] このようなめつきを用いた金属皮膜の形成においては、マスク 112の形成に手間が かかるという問題がある。 In the formation of the metal film using such adhesion, there is a problem that it takes time to form the mask 112.
実施例 1 Example 1
[0047] 直径 140mmの機械構造用炭素鋼の台金を用いて、その外周面にアーク溶射によ り厚さ 20〜30 /ζ πιの銅層を形成した。このときの銅層の表面粗さは、東京精密製の 表面粗さ計 surfcoml400を用いて測定した結果、 4. 3 μ mRa~4. であつ た。結合材としてポリイミド榭脂の粉末原料を使用し、レジンボンド超砥粒ホイールを 製作した。溶射条件は、表 1の通りである。台金を金型の底板上に組み込み、台金の 上に台金とほぼ同直径の中子をのせ、外枠と中子との隙間に、砲粒層の原料粉末を 充填し、パンチをのせてその上力も低圧にて加圧した。その後、パンチ上から所定の 圧力を加え、その圧力を維持しながら、約 30分かけて室温力も 400°Cまで加熱し、そ の後、徐冷した。 [0047] Using a 140 mm diameter base for carbon steel for machine structure, a copper layer with a thickness of 20 to 30 / ιπ was formed on the outer peripheral surface by arc spraying. The surface roughness of the copper layer at this time was 4.3 μm Ra ̃4., As a result of measurement using a surface roughness meter surfcoml 400 manufactured by Tokyo Seimitsu Co., Ltd. A resin-bonded superabrasive wheel was manufactured using powder raw material of polyimide resin as a binder. The spraying conditions are as shown in Table 1. Insert the base metal on the bottom plate of the mold, place the core of the same diameter as the base metal on the base metal, fill the gap between the outer frame and the core with the raw material powder of the granule layer, and insert the punch. The load was also increased at low pressure. After that, a predetermined pressure was applied from above the punch, and while maintaining the pressure, the room temperature force was also heated to 400 ° C. for about 30 minutes, and then it was gradually cooled.
実施例 2 Example 2
[0048] 実施例 1と同じ方法によりレジンボンド超砲粒ホイールを製作した。 A resin-bonded super-granular wheel was produced in the same manner as in Example 1.
ただし、台金の表面粗さを計測した結果、 6 μ mRa〜7 μ mRaであった。 実施例 3 However, as a result of measuring the surface roughness of the base metal, it was 6 μmRa to 7 μmRa. Example 3
[0049] 実施例 1と同じ方法によりレジンボンド超砲粒ホイールを製作した。 A resin-bonded super-granular wheel was produced in the same manner as in Example 1.
ただし、台金の表面粗さを計測した結果、 1. 3 mRa〜l. 6 mRaであった。 However, as a result of measuring the surface roughness of the base metal, it was 1.3 mRa to 1.6 mRa.
[0050] [表 1] 台金回転数 200 /m i n [Table 1] Base rotation speed 200 / min
ノズル送り速度 900 mm/m i n Nozzle feed speed 900 mm / m i n
溶射距離 120 mm Spray distance 120 mm
電圧 45 V Voltage 45 V
電流 50 A Current 50 A
ワイヤー送り速度 1 . 5 m/m i n Wire feed speed 1.5 m / m i n
ワイヤ一径 1 . 2 mm 比較例 1 Wire diameter: 1.2 mm Comparative example 1
[0051] 銅製の台金を用いて、実施例 1と同じ方法によりレジンボンド超砲粒ホイールを製 作した。 A resin-bonded super-granular wheel was produced in the same manner as in Example 1 using a copper base metal.
[0052] ただし、アーク溶射による銅層を形成せず、台金に直に砥粒層を接合した。 However, the abrasive layer was bonded directly to the base metal without forming a copper layer by arc spraying.
比較例 2 Comparative example 2
[0053] 機械構造用炭素鋼の台金に、厚さ 10 mの銅めつきを施し、実施例 1と同じ方法 によりレジンボンド超砲粒ホイールを製作した。 A base of carbon steel for machine structural use was plated with copper at a thickness of 10 m, and a resin-bonded super-granular wheel was manufactured in the same manner as in Example 1.
比較例 3 Comparative example 3
[0054] 実施例 1のレジンボンドホイールの製作方法において、金型内に台金を組み込ま ずに、リング形状の砥粒層のみを成形し、別途製作したアルミニウム製台金に従来用 V、られて 、るエポキシ榭脂系接着剤を用いて接合させた。 In the method of manufacturing the resin-bonded wheel of Example 1, only the ring-shaped abrasive particle layer is formed without incorporating the base metal in the mold, and the aluminum base metal separately manufactured is used for conventional V, The epoxy resin adhesive was used to bond.
[0055] 以上のように製作したレジンボンド超砲粒ホイールの砲粒層部に、円周等配にて 1 6箇所のスロットを設け、 16個のセグメントを形成した。接合強度は、各々のセグメント の側面から万能試験機のヘッドを押し当て、圧縮せん断試験を行った。接合強度の 値は、ホイール毎に 16箇所の平均値を算出した。 Sixteen slots were provided at circumferentially equidistant positions in the particle layer portion of the resin-bonded super-granulated wheel manufactured as described above to form 16 segments. The joint strength was measured by pressing the head of a universal tester from the side of each segment and performing a compressive shear test. The bonding strength was calculated by averaging 16 values for each wheel.
[0056] 結果を表 2に示す。実施例 1は比較例 1および 3と比較して高い強度が得られた。ま た実施例 2および実施例 3は、銅層の表面粗さが若干異なる場合の結果であるが、 十分な強度を有する結果が得られた。一方、比較例 2は溶射の代わりにめっきにより 銅層を形成した場合である力 実施例 1から 3に比べて強度が低い結果となった。 The results are shown in Table 2. Example 1 had higher strength than Comparative Examples 1 and 3. Moreover, although Example 2 and Example 3 are a result in case the surface roughness of a copper layer differs a little, the result which has sufficient intensity | strength was obtained. On the other hand, in Comparative Example 2, the strength was lower than in Examples 1 to 3, in which the copper layer was formed by plating instead of thermal spraying.
[0057] [表 2] 接合強度 kgf/rmi2 [Table 2] Bonding strength kgf / rmi 2
実施例 1 4. 0 Example 14.0
実施例 2 3. 9 Example 2 3.9
実施例 3 3. 5 Example 3 3.5
比較例 1 2. 7 Comparative Example 1 2. 7
比較例 2 2. 7 Comparative Example 2 2. 7
比較例 3 2. 5 Comparative example 3 2.5
[0058] (実施例 1および比較例 2のサンプルの検証) (Verification of Samples of Example 1 and Comparative Example 2)
実施例 1および比較例 2で製造した金属皮膜中の銅と酸化銅との分布の割合を X 線回折を用いて調べた。その結果を図 17に示す。 The distribution ratio of copper to copper oxide in the metal coatings produced in Example 1 and Comparative Example 2 was examined using X-ray diffraction. The results are shown in FIG.
[0059] 図 17でわ力るように、溶射処理により形成された実施例 1のサンプルでは、 Cuと Cu As shown in FIG. 17, in the sample of Example 1 formed by thermal spraying, Cu and Cu
Oとが存在しており、酸化銅が含まれていることがわかる。 It can be seen that O exists and contains copper oxide.
2 2
[0060] これに対して、めっき品(比較例 2)では、酸化銅が含まれて!/ヽな 、ことがわかる。 On the other hand, in the plated product (Comparative Example 2), copper oxide is included!
次に、実施例 1で製造した金属皮膜中の酸化銅の濃度について詳細に調べた。図 18は金属皮膜 2中での酸化銅の分布を示すグラフである。図 18を参照して、金属皮 膜 2と超砥粒層 1との界面で酸化銅の濃度が上昇し、界面に酸化銅が偏在しているこ とがわかる。 Next, the concentration of copper oxide in the metal film manufactured in Example 1 was examined in detail. FIG. 18 is a graph showing the distribution of copper oxide in the metal film 2. Referring to FIG. 18, it can be seen that the concentration of copper oxide increases at the interface between the metal coating 2 and the superabrasive grain layer 1, and copper oxide is unevenly distributed at the interface.
[0061] さらに、超砥粒層 1内の構成を調べた。その結果を図 19に示す。図 19で示すように 、超砲粒 1001がレジンボンド 1002で結合していることが確認された。 Furthermore, the configuration in the superabrasive layer 1 was examined. The results are shown in FIG. As shown in FIG. 19, it was confirmed that super-granule 1001 was bonded by resin bond 1002.
[0062] レジンボンド 1002には、ダイヤモンド、 CBNなどの砲粒の他に、フイラ一として金属 粉末、炭化物、または窒化物の硬質粒子、および固体潤滑剤粒子などを含有させる ことができる。 The resin bond 1002 can contain metal powder, carbide or nitride hard particles, solid lubricant particles, and the like as filler in addition to granules such as diamond and CBN.
[0063] 金属粉末としては、 Cu、 Ag、 Sn、 Ni、 Auなどがあげられる。コストや効果の観点か ら特に好ましいのは Cu、 Agまたはこれらの合金である。または 2種以上の金属の粉 末を混合して添加してもよ 、。 Examples of metal powder include Cu, Ag, Sn, Ni, Au and the like. Particularly preferred from the viewpoint of cost and effect are Cu, Ag or their alloys. Or you may mix and add two or more kinds of metal powder.
[0064] 炭化物または窒化物の硬質粒子としては、 SiC、 Si N、 Cr O、 Al O、 SiOなど Examples of hard particles of carbide or nitride include SiC, Si N, Cr 2 O, Al 2 O, SiO 2 and the like.
3 4 2 3 2 3 2 力も選択される 1種または 2種以上の硬質粒子力 さらなるフイラ一としてレジンボンド 中に含有されていてもよい。このような硬質粒子を含有することにより、レジンボンドの 耐摩耗性が高まり、超砥粒ホイールの寿命を長くする効果が得られる。 [0065] さらなるフィラーとして、固体潤滑剤粒子がレジンボンド中に含有されていてもよい。 この種の固体潤滑剤としては、ポリテトラフルォロエチレンなどのフッ素榭脂、 hBN、 フッ化カルシウム、グラフアイト、 MoSなどがあげられる。このような固体潤滑剤粒子 3 4 2 3 2 3 2 force is also selected One or more kinds of hard particle force It may be contained in the resin bond as a further filler. By containing such hard particles, the abrasion resistance of the resin bond is enhanced, and the effect of prolonging the life of the superabrasive wheel can be obtained. [0065] As a further filler, solid lubricant particles may be contained in the resin bond. Examples of solid lubricants of this type include fluorine-containing resins such as polytetrafluoroethylene, hBN, calcium fluoride, graphite, MoS and the like. Such solid lubricant particles
2 2
の 1種または 2種以上を添加することにより、砲粒層と被削材との摩擦を低減して研削 抵抗を減少させる効果が得られる。 By adding one or more of the above, the effect of reducing the friction between the particle layer and the work material and reducing the grinding resistance can be obtained.
実施例 4 Example 4
[0066] 実施例 1の製造方法に従って、アーク溶射でサンプル 1から 8を製造した。サンプル 1から 8について、以下の測定装置および測定条件でサンプル中の Cu Oの(111) Samples 1 to 8 were produced by arc spraying according to the production method of Example 1. For samples 1 to 8, (111) of Cu 2 O in the sample under the following measurement device and measurement conditions
2 2
面と Cuの(111)面の割合を X線回折で調べた。 The ratio of the plane to the (111) plane of Cu was investigated by X-ray diffraction.
[0067] 測定装置 Measuring Device
Rint-1500 (リガク製) Rint-1500 (made by RIGAKU)
測定条件 Measurement condition
使用 X線: Cu- Κ α (モノクロメーター搭載) Use X-ray: Cu- α α (with monochromator)
励起条件: 50kV、 200mA Excitation conditions: 50kV, 200mA
光学系:集中法 Optical system: Focusing method
スリット系: DS1° Slit system: DS1 °
RS 0. 15mm RS 0.15 mm
SS 1° SS 1 °
走查速度: 6 / min Running speed: 6 / min
ステップ幅: 0. 02° Step width: 0.20 °
測定モード: θ - 2 Θ ¾ Measurement mode: θ-2 Θ 3⁄4
その結果を表 3に示す。 The results are shown in Table 3.
[0068] [表 3] Cu20(l11) Cu(111) Cu20(l11)/ [Table 3] Cu 2 0 (11) Cu (111) Cu 2 0 (11) /
サンプル No. Sample No.
(積分強度) (積分強度) {Gu20(11l)+Cu(11l)l比 (Integrated intensity) (Integrated intensity) {Gu 2 0 (11 l) + Cu (11 l) l ratio
1 281102 1149225 0.197 1 281 102 1149225 0.197
2 244213 953971 0.2042 244213 953971 0.204
3 248183 1042261 0.192Three 248183 1042261 0.192
4 221693 845997 0.2084 221693 845997 0.208
5 199101 928923 0.1775 199101 928923 0.177
6 229214 986069 0.1896 229 214 986069 0.189
7 242764 1026982 0.1917 242764 1026982 0.191
8 220236 937613 0.190 平均値 - - 0.194 標準偏差 (1σ) - - 0.01 8 220236 937613 0.190 Average value--0.194 Standard deviation (1σ)--0.01
[0069] 表 3から、 CuO(lll)Z{Cu(lll)+CuO(lll)}の割合が 0· 15以上 0.25以 From Table 3, the ratio of CuO (lll) Z {Cu (lll) + CuO (lll)} is 0 · 15 or more and 0.25 or more.
2 2 twenty two
下であれば好ましい特性が得られることが分力つた。 It is important to be able to obtain desirable characteristics if it is below.
産業上の利用可能性 Industrial applicability
[0070] 以上説明したように、本発明のレジンボンド超砲粒ホイールは、従来のめっきにより 銅層を形成する方法に比較して、安定した極めて高い接合強度が得られるので、長 寿命で高性能なレジンボンド超砥粒ホイールが得られるという優れた効果を発揮する 。特に、ポリイミド榭脂が用いられるレジンボンド超砥粒ホイールにおいては、卓越し た高性能、長寿命を発揮するので、研削加工が必用とされる産業界において、おお いに貢献することが期待できる。 As described above, the resin-bonded ultra-granulated wheel of the present invention can achieve stable and extremely high bonding strength as compared to the conventional method of forming a copper layer by plating, so it has a long life and a high efficiency. It exerts an excellent effect that a high performance resin bonded superabrasive wheel can be obtained. In particular, resin-bonded superabrasive wheels using polyimide resin exhibit outstanding high performance and long life, so they can be expected to contribute significantly to the industry where grinding is required. .
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007546463A JPWO2007060984A1 (en) | 2005-11-28 | 2006-11-22 | Resin bond superabrasive wheel and method of manufacturing the same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005341872 | 2005-11-28 | ||
| JP2005-341872 | 2005-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2007060984A1 true WO2007060984A1 (en) | 2007-05-31 |
Family
ID=38067209
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2006/323306 Ceased WO2007060984A1 (en) | 2005-11-28 | 2006-11-22 | Resin-bonded superabrasive wheel and process for producing the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPWO2007060984A1 (en) |
| CN (1) | CN101090803A (en) |
| TW (1) | TW200730303A (en) |
| WO (1) | WO2007060984A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014059559A (en) * | 2007-07-31 | 2014-04-03 | Hitachi Metals Ltd | Cu-based wiring film |
| CN115053065A (en) * | 2020-05-28 | 2022-09-13 | 株式会社日立产机系统 | Compressor |
| WO2023058681A1 (en) | 2021-10-05 | 2023-04-13 | 旭化成株式会社 | Method for producing high-purity diaryl carbonate |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11123841B2 (en) | 2016-05-27 | 2021-09-21 | A.L.M.T. Corp. | Super-abrasive grinding wheel |
| TWI661903B (en) * | 2018-06-27 | 2019-06-11 | National Taipei University Of Technology | Abrasive wheel and method and system for forming the same |
| CN112677060A (en) * | 2020-12-15 | 2021-04-20 | 珠海市巨海科技有限公司 | Resin binder superhard grinding wheel and manufacturing method thereof |
| CN113696109B (en) * | 2021-09-15 | 2022-11-01 | 郑州磨料磨具磨削研究所有限公司 | Grinding wheel for grinding insulated bearing and forming method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63300870A (en) * | 1987-05-28 | 1988-12-08 | Disco Abrasive Syst Ltd | Blade manufacturing method |
| JPH04210380A (en) * | 1990-10-13 | 1992-07-31 | Nippon Alum Co Ltd | Diamond grinding wheel and manufacture thereof |
| JPH04223871A (en) * | 1990-12-25 | 1992-08-13 | Nippon Alum Co Ltd | Diamond grinding wheel and manufacture thereof |
| JPH05293763A (en) * | 1992-04-17 | 1993-11-09 | Noritake Dia Kk | Manufacture of resin bond wheel |
| JPH0647676A (en) * | 1992-06-24 | 1994-02-22 | Niitoretsukusu Honsha:Kk | Manufacture of grinding wheel |
| JPH10151569A (en) * | 1996-11-25 | 1998-06-09 | Osaka Diamond Ind Co Ltd | Super abrasive grain grinding wheel and manufacture thereof |
-
2006
- 2006-11-22 WO PCT/JP2006/323306 patent/WO2007060984A1/en not_active Ceased
- 2006-11-22 CN CN 200680001534 patent/CN101090803A/en active Pending
- 2006-11-22 JP JP2007546463A patent/JPWO2007060984A1/en active Pending
- 2006-11-24 TW TW095143542A patent/TW200730303A/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63300870A (en) * | 1987-05-28 | 1988-12-08 | Disco Abrasive Syst Ltd | Blade manufacturing method |
| JPH04210380A (en) * | 1990-10-13 | 1992-07-31 | Nippon Alum Co Ltd | Diamond grinding wheel and manufacture thereof |
| JPH04223871A (en) * | 1990-12-25 | 1992-08-13 | Nippon Alum Co Ltd | Diamond grinding wheel and manufacture thereof |
| JPH05293763A (en) * | 1992-04-17 | 1993-11-09 | Noritake Dia Kk | Manufacture of resin bond wheel |
| JPH0647676A (en) * | 1992-06-24 | 1994-02-22 | Niitoretsukusu Honsha:Kk | Manufacture of grinding wheel |
| JPH10151569A (en) * | 1996-11-25 | 1998-06-09 | Osaka Diamond Ind Co Ltd | Super abrasive grain grinding wheel and manufacture thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014059559A (en) * | 2007-07-31 | 2014-04-03 | Hitachi Metals Ltd | Cu-based wiring film |
| CN115053065A (en) * | 2020-05-28 | 2022-09-13 | 株式会社日立产机系统 | Compressor |
| WO2023058681A1 (en) | 2021-10-05 | 2023-04-13 | 旭化成株式会社 | Method for producing high-purity diaryl carbonate |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101090803A (en) | 2007-12-19 |
| JPWO2007060984A1 (en) | 2009-05-07 |
| TW200730303A (en) | 2007-08-16 |
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