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WO2007059740A3 - Elektroakustisches bauelement - Google Patents

Elektroakustisches bauelement Download PDF

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Publication number
WO2007059740A3
WO2007059740A3 PCT/DE2006/002029 DE2006002029W WO2007059740A3 WO 2007059740 A3 WO2007059740 A3 WO 2007059740A3 DE 2006002029 W DE2006002029 W DE 2006002029W WO 2007059740 A3 WO2007059740 A3 WO 2007059740A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
electroacoustic component
relates
following holds
holds good
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2006/002029
Other languages
English (en)
French (fr)
Other versions
WO2007059740A2 (de
Inventor
Werner Ruile
Ulrike Roesler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Priority to JP2008541581A priority Critical patent/JP5193051B2/ja
Priority to DE112006002542T priority patent/DE112006002542A5/de
Priority to US12/093,876 priority patent/US7851977B2/en
Publication of WO2007059740A2 publication Critical patent/WO2007059740A2/de
Publication of WO2007059740A3 publication Critical patent/WO2007059740A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Es wird ein elektroakustisches Bauelement mit zwei Substraten angegeben, zwischen denen ein Schichtsystem angeordnet ist, das eine Metallschicht und eine Schicht niedriger akustischen Impedanz Za,2 umfasst, wobei die Metallschicht eine Schicht mit einer hohen akustischen Impedanz Za,1 umfasst, und wobei gilt: Za,1/ Za,2 ≥ 4,5. Somit ist eine ausreichende akustische Reflexion für geführte akustische Volumenwellen gewährleistet. Ferner wird ein elektroakustisches Bauelement mir einem piezoelektrischen Substrat aus Lithiumtantalat angegeben, das einen Schnittwinkel φ rot YX aufweist, wobei gilt 7° < φ < 24°.
PCT/DE2006/002029 2005-11-23 2006-11-20 Elektroakustisches bauelement Ceased WO2007059740A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008541581A JP5193051B2 (ja) 2005-11-23 2006-11-20 電気音響素子
DE112006002542T DE112006002542A5 (de) 2005-11-23 2006-11-20 Elektroakustisches Bauelement
US12/093,876 US7851977B2 (en) 2005-11-23 2006-11-20 Electroacoustic component

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005055871A DE102005055871A1 (de) 2005-11-23 2005-11-23 Elektroakustisches Bauelement
DE102005055871.2 2005-11-23

Publications (2)

Publication Number Publication Date
WO2007059740A2 WO2007059740A2 (de) 2007-05-31
WO2007059740A3 true WO2007059740A3 (de) 2007-08-16

Family

ID=37770692

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/DE2006/002034 Ceased WO2007059741A1 (de) 2005-11-23 2006-11-20 Mit geführten akustischen wellen arbeitendes bauelement
PCT/DE2006/002029 Ceased WO2007059740A2 (de) 2005-11-23 2006-11-20 Elektroakustisches bauelement

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/DE2006/002034 Ceased WO2007059741A1 (de) 2005-11-23 2006-11-20 Mit geführten akustischen wellen arbeitendes bauelement

Country Status (4)

Country Link
US (2) US7948333B2 (de)
JP (2) JP5001947B2 (de)
DE (3) DE102005055871A1 (de)
WO (2) WO2007059741A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005055871A1 (de) * 2005-11-23 2007-05-24 Epcos Ag Elektroakustisches Bauelement
DE102006019961B4 (de) * 2006-04-28 2008-01-10 Epcos Ag Elektroakustisches Bauelement
DE102006039515B4 (de) * 2006-08-23 2012-02-16 Epcos Ag Drehbewegungssensor mit turmartigen Schwingstrukturen
JP4760911B2 (ja) * 2006-09-21 2011-08-31 株式会社村田製作所 弾性境界波装置
DE102006048879B4 (de) * 2006-10-16 2018-02-01 Snaptrack, Inc. Elektroakustisches Bauelement
JP4811516B2 (ja) * 2007-03-06 2011-11-09 株式会社村田製作所 弾性境界波装置
DE102007012383B4 (de) * 2007-03-14 2011-12-29 Epcos Ag Mit geführten akustischen Volumenwellen arbeitendes Bauelement
DE102008016613B4 (de) * 2008-04-01 2010-04-15 Epcos Ag Verfahren zur Herstellung eines elektrischen Bauelements mit mindestens einer dielektrischen Schicht und ein elektrisches Bauelement mit mindestens einer dielektrischen Schicht
DE102008034372B4 (de) * 2008-07-23 2013-04-18 Msg Lithoglas Ag Verfahren zum Herstellen einer dielektrischen Schicht in einem elektroakustischen Bauelement sowie elektroakustisches Bauelement
JP5455538B2 (ja) * 2008-10-21 2014-03-26 キヤノン株式会社 半導体装置及びその製造方法
JP5212484B2 (ja) * 2009-01-15 2013-06-19 株式会社村田製作所 圧電デバイスおよび圧電デバイスの製造方法
JP2010187373A (ja) * 2009-01-19 2010-08-26 Ngk Insulators Ltd 複合基板及びそれを用いた弾性波デバイス
US20100217525A1 (en) * 2009-02-25 2010-08-26 King Simon P System and Method for Delivering Sponsored Landmark and Location Labels
US8280080B2 (en) * 2009-04-28 2012-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Microcap acoustic transducer device
JP5562441B2 (ja) * 2010-12-28 2014-07-30 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
JPWO2012102131A1 (ja) * 2011-01-27 2014-06-30 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
JP5751887B2 (ja) * 2011-03-30 2015-07-22 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
US8939556B2 (en) * 2011-06-09 2015-01-27 Hewlett-Packard Development Company, L.P. Fluid ejection device
CN104917487B (zh) * 2014-03-10 2019-04-23 联华电子股份有限公司 共振滤波器
US9571061B2 (en) * 2014-06-06 2017-02-14 Akoustis, Inc. Integrated circuit configured with two or more single crystal acoustic resonator devices
WO2016100692A2 (en) * 2014-12-17 2016-06-23 Rf Micro Devices, Inc. Plate wave devices with wave confinement structures and fabrication methods
FR3042648B1 (fr) * 2015-10-20 2018-09-07 Soitec Silicon On Insulator Dispositif a ondes acoustiques de surface et procede de fabrication associe
JP2017098781A (ja) * 2015-11-25 2017-06-01 セイコーエプソン株式会社 圧電素子、超音波プローブ、超音波測定装置及び圧電素子の製造方法
CN111108689B (zh) * 2017-09-29 2023-09-26 株式会社村田制作所 多工器、高频前端电路以及通信装置
US20210159883A1 (en) * 2019-11-27 2021-05-27 Tohoku University Energy confinement in acoustic wave devices
CN114744976B (zh) * 2022-04-19 2023-06-23 四川大学 一种有效提高叉指换能器激发效率的方法

Citations (11)

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Publication number Priority date Publication date Assignee Title
US4328472A (en) * 1980-11-03 1982-05-04 United Technologies Corporation Acoustic guided wave devices
EP0886375A1 (de) * 1996-03-08 1998-12-23 SANYO ELECTRIC Co., Ltd. Akustisches oberflächenwellenelement und tragbares telefon damit
US6046656A (en) * 1997-05-08 2000-04-04 Kabushiki Kaisha Toshiba Elastic boundary wave device and method of its manufacture
US20030137367A1 (en) * 2002-01-18 2003-07-24 Michio Kadota Surface acoustic wave device
WO2003088475A1 (fr) * 2002-04-12 2003-10-23 Thales Dispositif d'interconnexion pour composants a ondes acoustiques d'interface
DE10325281A1 (de) * 2003-06-04 2004-12-23 Epcos Ag Elektroakustisches Bauelement und Verfahren zur Herstellung
US20050099091A1 (en) * 2003-11-12 2005-05-12 Fujitsu Media Devices Limited Elastic boundary wave device and method of manufacturing the same
US20050162048A1 (en) * 2002-03-19 2005-07-28 Marc Solal Interface acoustic wave device made of lithium tantalate
WO2005083881A1 (ja) * 2004-03-02 2005-09-09 Murata Manufacturing Co., Ltd. 弾性表面波装置
WO2005086345A1 (ja) * 2004-03-05 2005-09-15 Murata Manufacturing Co., Ltd. 弾性境界波装置
WO2005093949A1 (ja) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. 弾性境界波装置の製造方法及び弾性境界波装置

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
FR2799906B1 (fr) 1999-10-15 2002-01-25 Pierre Tournois Filtre a ondes acoustiques d'interface notamment pour les liaisons sans fil
JP3402311B2 (ja) * 2000-05-19 2003-05-06 株式会社村田製作所 弾性表面波装置
FR2838577B1 (fr) 2002-04-12 2005-11-25 Thales Sa Module comprenant des composants a ondes acoustiques d'interface
JP3815424B2 (ja) * 2002-11-08 2006-08-30 株式会社村田製作所 弾性境界波装置
JP4337816B2 (ja) * 2003-04-18 2009-09-30 株式会社村田製作所 弾性境界波装置
KR100821483B1 (ko) 2004-01-19 2008-04-10 가부시키가이샤 무라타 세이사쿠쇼 탄성 경계파 장치
US7619347B1 (en) * 2005-05-24 2009-11-17 Rf Micro Devices, Inc. Layer acoustic wave device and method of making the same
DE102005055871A1 (de) 2005-11-23 2007-05-24 Epcos Ag Elektroakustisches Bauelement
JP2008078739A (ja) * 2006-09-19 2008-04-03 Fujitsu Media Device Kk 弾性波デバイスおよびフィルタ
JP4760911B2 (ja) * 2006-09-21 2011-08-31 株式会社村田製作所 弾性境界波装置

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328472A (en) * 1980-11-03 1982-05-04 United Technologies Corporation Acoustic guided wave devices
EP0886375A1 (de) * 1996-03-08 1998-12-23 SANYO ELECTRIC Co., Ltd. Akustisches oberflächenwellenelement und tragbares telefon damit
US6046656A (en) * 1997-05-08 2000-04-04 Kabushiki Kaisha Toshiba Elastic boundary wave device and method of its manufacture
US20030137367A1 (en) * 2002-01-18 2003-07-24 Michio Kadota Surface acoustic wave device
US20050162048A1 (en) * 2002-03-19 2005-07-28 Marc Solal Interface acoustic wave device made of lithium tantalate
WO2003088475A1 (fr) * 2002-04-12 2003-10-23 Thales Dispositif d'interconnexion pour composants a ondes acoustiques d'interface
DE10325281A1 (de) * 2003-06-04 2004-12-23 Epcos Ag Elektroakustisches Bauelement und Verfahren zur Herstellung
US20050099091A1 (en) * 2003-11-12 2005-05-12 Fujitsu Media Devices Limited Elastic boundary wave device and method of manufacturing the same
WO2005083881A1 (ja) * 2004-03-02 2005-09-09 Murata Manufacturing Co., Ltd. 弾性表面波装置
US20060290233A1 (en) * 2004-03-02 2006-12-28 Murata Manufacturing Co., Ltd. Surface acoustic wave device
WO2005086345A1 (ja) * 2004-03-05 2005-09-15 Murata Manufacturing Co., Ltd. 弾性境界波装置
EP1722473A1 (de) * 2004-03-05 2006-11-15 Murata Manufacturing Co., Ltd. Rand-schallwelleneinrichtung
WO2005093949A1 (ja) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. 弾性境界波装置の製造方法及び弾性境界波装置
EP1732214A1 (de) * 2004-03-29 2006-12-13 Murata Manufacturing Co., Ltd. Rand-oberflächenwellenbauelement-herstellungsverfahren und rand-oberflächenbauelement

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KAWACHI O ET AL: "Optimal cut for leaky SAW on LiTaO3 for high performance resonators and filters", IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS AND FREQUENCY CONTROL, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 48, no. 5, September 2001 (2001-09-01), pages 1442 - 1448, XP002261269, ISSN: 0885-3010 *

Also Published As

Publication number Publication date
WO2007059741A1 (de) 2007-05-31
US20080266024A1 (en) 2008-10-30
DE112006002542A5 (de) 2008-06-26
WO2007059740A2 (de) 2007-05-31
JP5001947B2 (ja) 2012-08-15
US7948333B2 (en) 2011-05-24
JP5193051B2 (ja) 2013-05-08
US20080252396A1 (en) 2008-10-16
US7851977B2 (en) 2010-12-14
JP2009516967A (ja) 2009-04-23
JP2009516968A (ja) 2009-04-23
DE102005055871A1 (de) 2007-05-24
DE112006002507A5 (de) 2008-06-26

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