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WO2007040713A2 - Structures nano-resonnantes couplees emettant de l'energie - Google Patents

Structures nano-resonnantes couplees emettant de l'energie Download PDF

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Publication number
WO2007040713A2
WO2007040713A2 PCT/US2006/027430 US2006027430W WO2007040713A2 WO 2007040713 A2 WO2007040713 A2 WO 2007040713A2 US 2006027430 W US2006027430 W US 2006027430W WO 2007040713 A2 WO2007040713 A2 WO 2007040713A2
Authority
WO
WIPO (PCT)
Prior art keywords
nano
substructures
resonant
resonating
rows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/027430
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English (en)
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WO2007040713A3 (fr
Inventor
Jonathan Gorrell
Mark Davidson
Michael E. Maines
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Virgin Islands Microsystems Inc
Original Assignee
Virgin Islands Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/238,991 external-priority patent/US7791290B2/en
Priority claimed from US11/243,477 external-priority patent/US7626179B2/en
Application filed by Virgin Islands Microsystems Inc filed Critical Virgin Islands Microsystems Inc
Publication of WO2007040713A2 publication Critical patent/WO2007040713A2/fr
Anticipated expiration legal-status Critical
Publication of WO2007040713A3 publication Critical patent/WO2007040713A3/fr
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/364—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor
    • H01Q1/366—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor using an ionized gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/0903—Free-electron laser

Definitions

  • Patent applications (1) U.S. Patent Application No. 10/917,511, filed on August 13, 2004, entitled “Patterning Thin Metal Film by Dry Reactive Ion Etching,” and to U.S. Application No. 11/203,407, filed on August 15, 2005, entitled “Method Of Patterning Ultra-Small Structures,” (2) U.S. Application No. 11/243,476 [Atty. Docket 2549-0058], entitled “Structures And Methods For Coupling Energy From An Electromagnetic Wave,” filed on October 5, 2005; which are both commonly owned with the present application, the entire contents of each of which are incorporated herein by reference. FIELD OF THE DISCLOSURE
  • This disclosure relates to electromagnetic radiation devices, and particularly to ultra-small resonant structures.
  • a few such devices emit radiation at frequencies spanning the infrared, visible, and ultra-violet spectrums.
  • a subgroup (being the majority) of such devices are constructed using semiconductor-based technologies (light emitting diodes and the like), and are considered small (on the order of millimeters in dimension).
  • the devices of the present invention produce electromagnetic radiation by the excitation of ultra-small resonant structures.
  • the resonant excitation in a device according to the invention is induced by electromagnetic interaction which is caused, e.g., by the passing of a charged particle beam in close proximity to the device.
  • the charged particle beam can include ions (positive or negative), electrons, protons and the like.
  • the beam may be produced by any source, including, e.g., without limitation an ion gun, a tungsten filament, a cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ' ion-impact ionizer.
  • ultra-small resonant structure shall mean any structure of any material, type or microscopic size that by its characteristics causes electrons to resonate at a frequency in excess of the microwave frequency.
  • ultra-small within the phrase “ultra-small resonant structure” shall mean microscopic structural dimensions and shall include so-called “micro” structures, “nano” structures, or any other very small structures that will produce resonance at frequencies in excess of microwave frequencies.
  • FIGs.1-2 are schematic views of coupled nano-resonating energy emitting structures according to embodiments of the present invention.
  • Figs. 3(a)-3(o) show various coupled nano-resonating energy emitting structures according to embodiments of the present invention.
  • Figs. 4(a)-4(d), 5(a)-5(e) and 6(a)-6(d) are microscopic photographs of series of exemplary structures according to embodiments of the present invention.
  • a nano-resonating energy emitting structure 100 consists of a number of component substructures 102-1, 102-2, 102-3, . . . , 102- «.
  • a source 104 of charged particles produces a beam 106 consisting of one or more charged particles.
  • the charged particles of beam 106 may consist of electrons, protons or ions.
  • the charged particle beam can include ions (positive or negative), electrons, protons and the like. Many well-known means and methods exist to produce a charged particle beam.
  • the beam may be produced by any source, including, e.g., without limitation an ion gun, a tungsten filament, a cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.
  • the beam 106 passes in proximity to nano-resonating structure 100, causing the component substructures 102-1, 102-2, 102-3, . . .
  • Electromagnetic radiation may be coupled out of nano-resonating structure 100, .e.g., to some other structure.
  • the electromagnetic radiation may be coupled to an electro-magnetic wave via .
  • a waveguide conduit 108 positioned in the proximity of nano-resonating structure 100.
  • the waveguide conduit may be, for example, an optical fiber or the like.
  • Fig. 2 depicts alternate embodiments of the present invention in which nano-resonant structure 200 consists of a number of component substructures 202-1, 202-2, 202-3, . . . , 202-n, (collectively substructures 202) along with component substructures 204-1, 204-2, 204-.3, . . ., 204-m (collectively substructures 204),
  • the two collections- of substructures 202, 204 are positioned opposite each other such that a particle beam 106 can pass between them.
  • the individual substructures 202 are each shown opposite a corresponding substructure 204, there is no requirement that they be directly opposite each other, and, in some embodiments the two collections of substructures may be offset from each other.
  • the two collections or rows of substructures 202, 204 are shown in the drawing to be parallel or substantially parallel to each other, there is also no requirement that they be in rows or that they be in parallel rows.
  • each substructure 102-y may capacitively couple with at least one adjacent substructure 102rj+l (and possibly substructure 102-y ' rl.
  • a substructure may capacitively couple with at least two adjacent substructures, There is no requirement that the substructure couple with an immediately adjacent substructure. As the magnetic and electric fields extend out to infinity the coupling can occur between any two or more structures. Magnetic coupling may also occur.
  • the various substructures that comprise a nano-resonant structure 100, 200 may be formed in different shapes, including C-shaped, rectangular (which includes square shaped and which includes rectangles with rounded corners), semicircular, semi-ovular, or semi-rectangular.
  • the various- substructures may have straight and/or rounded edges and/or corners.
  • Each substructure may be at an angle to the electron beam.
  • the substructures can all be the same shape and size, they can be the same shape and of different sizes as each other, or of different shapes and / or sizes as each other.
  • the nano-resonant structures 100, 200 may be symmetrical or non-symmetrical. There is no requirement that any multiple nano-resonating structures be positioned with any symmetry relating to each other or any other.
  • Figs. 3(a)-3(o) show various exemplary nano-resonating energy emitting structures according to embodiments of the present invention.
  • the waveguide conduit is omitted from these drawings.
  • Fig. 3(a) depicts an embodiments of the present invention in which the nano-resonant structure 100-A comprises substructures that are rectangular shaped blocks positioned spaced apart and adjacent to each other.
  • the blocks may all be substantially the same size and shape, or they may be of different sizes.
  • the blocks may be substantially equally spaced, or the inter-block spacing may vary.
  • the blocks are substantially perpendicular to a path 110 of a particle beam.
  • the row of rectangular blocks in Fig. 3(a) form a so-called comb structure.
  • Figs. 4(a)-4(d) Figures 6, 8, 9, 12, respectively, from related U.S.
  • Figs. 3(b)-3(c) depict embodiments of the present invention similar to those shown in Fig. 3(a). However, in the embodiments shown in Figs. 3(b)-3(c), some or all of the various subcomponents 100-B and 100-C are positioned at non-right angles relative a path 110 of a particle beam. As with the embodiments of Fig. 3(a), the substructures 100-B and 100-C are substantially rectangular shaped blocks positioned spaced apart and adjacent to each other. The blocks may all be substantially the same size and shape, or they may be of different sizes. The blocks may be substantially equally spaced, or the inter-block spacing may vary. The two rows of rectangular blocks in each of Figs. 3(b)-3(c) form angled comb structures.
  • FIG. 3(d) depicts embodiments of the present invention according to
  • the nano-resonant structure 100-D consists of a series of rectangular shaped substructures 102-D1, 102-D2, . . ., 102-D m-1 , 102-D m , and in which immediately adjacent substructures have different sizes and/or shapes, while alternating substructures are substantially the same size and shape.
  • the substructures couple with the immediately adjacent substructures as well as with the alternate substructures.
  • substructure 102-D1 couples with substructures 102-D3 and 102-D5, etc. as well as with the immediately adjacent substructure 102-D2.
  • Figs. 3(e)-3(g) depict embodiments of the present invention as shown in Fig, 1.
  • the substructures 100-E are substantially semi-circular in shape.
  • each substructure consists of two open rectangular shapes, and in the embodiments of Fig. 3(g), each substructure consists of two open rectangular shapes, one within the other.
  • the substructures are open in the direction of a path 110 of a particle beam.
  • Fig. 3(h) depicts a nano-resonant structure having two rows of substantially rectangular shaped blocks or posts (denoted 202-H, 204-H).
  • This embodiment corresponds to those of Fig. 2.
  • the blocks may all be substantially the same size and shape, or they may be of different sizes.
  • the blocks in each row may be substantially equally spaced, or the inter-block spacing may vary.
  • the blocks are substantially perpendicular to a path 110 of a particle beam.
  • each of the blocks 202-H is substantially opposite a corresponding one of the blocks 204-H.
  • blocks 202-H there is no requirement that the blocks 202-H be parallel to the blocks 204-H, nor is there any requirement that each of the blocks 202-H be exactly opposite a corresponding block 204-H.
  • blocks 202-1 are not the same size as the substructures (blocks 204-1) in the second row.
  • the blocks in the second row are not each exactly opposite a corresponding block in the first row, instead they are offset.
  • U.S. Application No. 11/243,477) are microscopic photographs of series of substantially parallel rows of nano-resonating energy emitting structures according to embodiments of the present invention.
  • the structures on -the left side of Fig. 5(a) are substantially parallel and substantially symmetric to those on the right side of the photograph.
  • the structures in Fig. 5(b) are substantially parallel and symmetric, although the structures on the left side of the picture are smaller than those on-the right side of the picture and are staggered. [0029] .
  • the structures on the both sides of the drawing are substantially rectangular in shape, with dimensions of about 200 nm by 71.7 nm ⁇ 77.2 nm.
  • the two rows of rectangular nano structures are about 62.8 nm apart.
  • the structures in each row are about 100 nm apart,
  • the structures on the both sides of the drawing are also substantially rectangular in shape.
  • the structures in each row are about 53.5 nm apart.
  • the various substructures shown in Figs. 5(b)-5(e), e.g., are substantially rectangular, with rounded corners.
  • Fig. 3(j) depicts a nano-resonant structure 200-J having two substantially parallel rows of tilted rectangular shaped substructures (denoted 202-J, 204-J) 3 forming a so-called chevron shaped nano-resonant structure. The rows are separated so that a particle beam may be emitted to pass between the two rows or in a path above the two rows.
  • Fig. 3(k) depicts two rows of tilted parallel nano-resonating energy emitting structures as in Fig. 3(J), however, in this embodiment the structures 202-K are offset or staggered relative to the structures 204-K. ,
  • the nano-resonant structure may be positioned so that a particle beam passes in either direction along the path shown.
  • Figs. 3(l)-3(o) show various other exemplary nano-resonant structures according to embodiments of the present invention.
  • Nano-resonating structures 100, 200 can be constructed with many types of materials. Examples of suitable fabrication materials include silver, high conductivity metals, and high temperature superconducting materials. The material may be opaque or semi-transparent. In the above- identified patent applications, ultra-small structures for producing electromagnetic radiation are • disclosed, and methods of making the same. In at least one embodiment,' the resonant structures of the present invention are made from at least one layer of metal (e.g., silver, gold, aluminum, platinum or copper or alloys made with such metals); however, multiple layers and non-metallic structures (e.g., carbon nanotubes and high temperature superconductors) can be utilized, as long as the structures are excited by the passage of a charged particle beam.
  • metal e.g., silver, gold, aluminum, platinum or copper or alloys made with such metals
  • multiple layers and non-metallic structures e.g., carbon nanotubes and high temperature superconductors
  • the materials making up the resonant structures may be deposited on a substrate and then ' etched, electroplated, or otherwise processed to create a number of individual resonant elements.
  • the material- need not even be a contiguous layer, but can be a series of resonant elements individually present on a substrate.
  • the materials making up the resonant elements can be produced by a variety of methods, such as by pulsed-plating,- depositing or etching. Preferred methods for doing so are described in co-pending U.S. Application No. 10/917,571, filed on August 13, 2004, entitled “Patterning Thin Metal Film by Dry Reactive Ion Etching," and in U.S. Application No. 11/203,407, filed on August 15, 2005, entitled “Method Of Patterning Ultra-Small Structures,” both of which are commonly owned at the time of filing, and the entire contents of each of which are incorporated herein by reference.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mathematical Physics (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Electron Beam Exposure (AREA)
  • Lasers (AREA)

Abstract

Cette invention concerne une structure nano-résonnante couplée qui comprend une pluralité de sous-structures nano-résonnantes produites et conçues pour coupler l'énergie provenant d'un faisceau de particules chargées dans la structure nano-résonnante et pour envoyer l'énergie couplée à l'extérieur de la structure nano-résonnante. Les sous-structures nano-résonnantes peuvent se présenter sous diverses formes et peuvent comprendre des rangées parallèles de structures. Les rangées peuvent être symétriques ou asymétriques, inclinées et/ou décalées.
PCT/US2006/027430 2005-09-30 2006-07-14 Structures nano-resonnantes couplees emettant de l'energie Ceased WO2007040713A2 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US11/238,991 2005-09-30
US11/238,991 US7791290B2 (en) 2005-09-30 2005-09-30 Ultra-small resonating charged particle beam modulator
US11/243,477 2005-10-05
US11/243,477 US7626179B2 (en) 2005-09-30 2005-10-05 Electron beam induced resonance
US11/302,471 US7361916B2 (en) 2005-09-30 2005-12-14 Coupled nano-resonating energy emitting structures
US11/302,471 2005-12-14

Publications (2)

Publication Number Publication Date
WO2007040713A2 true WO2007040713A2 (fr) 2007-04-12
WO2007040713A3 WO2007040713A3 (fr) 2009-04-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116421175A (zh) * 2023-05-04 2023-07-14 浙江大学 一种基于柔性超表面的智能穿戴传感系统与方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1471828A1 (fr) * 2002-01-18 2004-11-03 California Institute Of Technology Procede et appareil de manipulation et de detection nanomagnetiques
US6922118B2 (en) * 2002-11-01 2005-07-26 Hrl Laboratories, Llc Micro electrical mechanical system (MEMS) tuning using focused ion beams

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116421175A (zh) * 2023-05-04 2023-07-14 浙江大学 一种基于柔性超表面的智能穿戴传感系统与方法

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Publication number Publication date
WO2007040713A3 (fr) 2009-04-16

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