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WO2006108137A3 - Glass inspection systems and methods for using same - Google Patents

Glass inspection systems and methods for using same Download PDF

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Publication number
WO2006108137A3
WO2006108137A3 PCT/US2006/013012 US2006013012W WO2006108137A3 WO 2006108137 A3 WO2006108137 A3 WO 2006108137A3 US 2006013012 W US2006013012 W US 2006013012W WO 2006108137 A3 WO2006108137 A3 WO 2006108137A3
Authority
WO
WIPO (PCT)
Prior art keywords
methods
inspection systems
same
glass inspection
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/013012
Other languages
French (fr)
Other versions
WO2006108137A2 (en
Inventor
Leon R Zoeller Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to EP06749504A priority Critical patent/EP1866625A4/en
Priority to CN200680016105XA priority patent/CN101175986B/en
Priority to JP2008505569A priority patent/JP2008536127A/en
Publication of WO2006108137A2 publication Critical patent/WO2006108137A2/en
Publication of WO2006108137A3 publication Critical patent/WO2006108137A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts

Landscapes

  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Several different inspection systems (100) and methods are described herein that identify defects (e.g. inclusions, occlusions, scratches, stains, blisters, cords or other imperfections associated with surface discontinuities or materal non-homogeneities) on or within a lass sheet 110 .
PCT/US2006/013012 2005-04-06 2006-04-06 Glass inspection systems and methods for using same Ceased WO2006108137A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP06749504A EP1866625A4 (en) 2005-04-06 2006-04-06 Glass inspection systems and methods for using same
CN200680016105XA CN101175986B (en) 2005-04-06 2006-04-06 Glass inspection systems and methods for using same
JP2008505569A JP2008536127A (en) 2005-04-06 2006-04-06 Glass inspection apparatus and method of use thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66917105P 2005-04-06 2005-04-06
US60/669,171 2005-04-06

Publications (2)

Publication Number Publication Date
WO2006108137A2 WO2006108137A2 (en) 2006-10-12
WO2006108137A3 true WO2006108137A3 (en) 2006-11-16

Family

ID=37074107

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/013012 Ceased WO2006108137A2 (en) 2005-04-06 2006-04-06 Glass inspection systems and methods for using same

Country Status (6)

Country Link
EP (1) EP1866625A4 (en)
JP (1) JP2008536127A (en)
KR (1) KR20070121820A (en)
CN (1) CN101175986B (en)
TW (1) TWI360652B (en)
WO (1) WO2006108137A2 (en)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5581563B2 (en) * 2007-03-08 2014-09-03 株式会社日立製作所 Illumination apparatus, defect inspection apparatus and method using the same, height measurement apparatus and method
JP2010048745A (en) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd Defect inspection system and defect inspection method
KR101292570B1 (en) * 2008-12-31 2013-08-12 엘지디스플레이 주식회사 System for testing distortion of liquid crystal display device
EP2253949A1 (en) * 2009-05-22 2010-11-24 Dr. Schenk GmbH Industriemesstechnik Device and method for detecting an optically diverting and/or polarisation-rotating error
EP2261633A1 (en) * 2009-06-10 2010-12-15 Becton Dickinson France Supporting device for a transparent article and method for putting said article under compression
CN101650307B (en) * 2009-07-17 2011-02-09 富美科技有限公司 Scraper blade surface detection system
CN102081047B (en) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 Method and system for distinguishing defects of substrate
CN101988908A (en) * 2009-07-31 2011-03-23 法国圣-戈班玻璃公司 Method and system for distinguishing fault of substrate
BE1019378A3 (en) * 2010-06-17 2012-06-05 Agc Glass Europe ANALYSIS OF DRYING BRANDS.
WO2012081398A1 (en) * 2010-12-15 2012-06-21 旭硝子株式会社 Glass plate, method for inspecting glass plate, and method for manufacturing glass plate
DE102012002174B4 (en) 2012-02-07 2014-05-15 Schott Ag Apparatus and method for detecting defects within the volume of a transparent pane and using the apparatus
CN102621149B (en) * 2012-03-21 2015-07-22 深圳市华星光电技术有限公司 Substrate detection device and method
CN102608132B (en) * 2012-04-09 2014-06-11 昆山胜泽光电科技有限公司 Multi-type glass flaw detection device and detection method
CN102645435A (en) * 2012-04-19 2012-08-22 深圳市华星光电技术有限公司 Method and device for detecting substrate
CN102721692B (en) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 The pick-up unit of glass substrate board box
CN102778460A (en) * 2012-07-31 2012-11-14 法国圣戈班玻璃公司 Method for detecting internal flaw of substrate
IN2015KN00605A (en) * 2012-08-13 2015-07-17 Kawasaki Heavy Ind Ltd
EP2725348A1 (en) 2012-10-29 2014-04-30 Scientific Visual SARL Optical quality control device
CN103886573B (en) * 2012-12-20 2018-10-12 联想(北京)有限公司 Object detecting method and article detection device
DE102013105693A1 (en) 2013-06-03 2013-10-31 Viprotron Gmbh Method for optical error inspection of object, involves projecting light beams from illumination surface on projection surface arranged behind object, and detecting shadow impact generated on projection surface with optical detection unit
CN104237137B (en) * 2013-06-07 2016-12-28 昆山胜泽光电科技有限公司 Measure glass different angles color, brightness and the device of reflectance spectrum
DE102013107215B3 (en) 2013-07-09 2014-10-09 Heraeus Quarzglas Gmbh & Co. Kg Method for producing a mirror substrate blank made of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank
EP3087374A1 (en) * 2013-12-23 2016-11-02 Corning Inc. Non-imaging coherent line scanner systems and methods for optical inspection
CN103791835A (en) * 2014-01-26 2014-05-14 扬州苏庆非标装备研发有限公司 Profile and size detecting method of section of strip-shaped optical glass
CN103868478A (en) * 2014-04-01 2014-06-18 四川虹视显示技术有限公司 Rapid detection method and device for flatness of transparent flat plate
CN103913466A (en) * 2014-04-08 2014-07-09 上海华力微电子有限公司 Detection device and detection method for wafer defect
KR101952617B1 (en) * 2014-07-03 2019-02-28 (주)엘지하우시스 Method of detecting corrosion of glass substrate
KR101942260B1 (en) 2014-07-03 2019-01-28 (주)엘지하우시스 Method of detecting corrosion of glass substrate
CN104297264A (en) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 Glass surface blemish on-line detecting system
WO2016096078A1 (en) * 2014-12-19 2016-06-23 Merck Patent Gmbh Method and device for optically sensing a chromatographic specimen
KR20180033186A (en) * 2015-06-19 2018-04-02 코닝 인코포레이티드 Method and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques
CN105372253A (en) * 2015-12-14 2016-03-02 陈艳 Light tube defect detection system
CN107132244B (en) * 2016-02-29 2020-01-07 鞍钢股份有限公司 A Quantitative Evaluation Method of Inclusions in Steel
CN105675617B (en) * 2016-04-06 2020-05-01 东旭科技集团有限公司 Method and apparatus for measuring surface granularity of plate glass
CN110050184B (en) 2016-11-02 2023-06-13 康宁股份有限公司 Method and apparatus for inspecting defect on transparent substrate and method of emitting incident light
KR102537558B1 (en) 2016-11-02 2023-05-26 코닝 인코포레이티드 Method and apparatus for inspecting defects on a transparent substrate
CN106556573B (en) * 2016-11-17 2018-01-12 仝宁瑶 A kind of experimental provision for being used to determine glass refraction
TWI622764B (en) * 2017-01-11 2018-05-01 由田新技股份有限公司 Automatic optical inspection system for surface foreign matter detection
JP6796704B2 (en) * 2017-02-28 2020-12-09 東洋ガラス株式会社 Container inspection device and container inspection method
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216481A (en) * 1990-12-19 1993-06-01 Toyo Glass Co., Ltd. Method of and apparatus for inspecting transparent object for defect
US5452079A (en) * 1992-06-26 1995-09-19 Central Glass Company, Limited Method of and apparatus for detecting defect of transparent sheet as sheet glass
US6633377B1 (en) * 2000-04-20 2003-10-14 Image Processing Systems Inc. Dark view inspection system for transparent media
US20040174519A1 (en) * 2003-03-05 2004-09-09 Gahagan Kevin T. Inspection of transparent substrates for defects

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4340304A (en) * 1978-08-11 1982-07-20 Rockwell International Corporation Interferometric method and system
JPS57120804A (en) * 1981-01-20 1982-07-28 Hitachi Metals Ltd Inspecting method of surface defect
SU1260773A1 (en) * 1984-11-29 1986-09-30 Специальное Конструкторско-Технологическое Бюро Института Радиофизики И Электроники Ан Усср Device for detecting defects in transparent thin-film articles
JPS6484139A (en) * 1987-09-28 1989-03-29 Teijin Ltd Film flaw detecting device
JPH04178545A (en) * 1990-11-14 1992-06-25 Fuji Photo Film Co Ltd Method and apparatus for inspecting transparent band-like body
JPH0579994A (en) * 1991-09-21 1993-03-30 Kowa Co Transparent body defect inspecting device
US5576827A (en) * 1994-04-15 1996-11-19 Micromeritics Instrument Corporation Apparatus and method for determining the size distribution of particles by light scattering
US5610391A (en) * 1994-08-25 1997-03-11 Owens-Brockway Glass Container Inc. Optical inspection of container finish dimensional parameters
US6040900A (en) * 1996-07-01 2000-03-21 Cybernet Systems Corporation Compact fiber-optic electronic laser speckle pattern shearography
CA2252308C (en) * 1998-10-30 2005-01-04 Image Processing Systems, Inc. Glass inspection system
JP2001041719A (en) * 1999-07-27 2001-02-16 Canon Inc Inspection apparatus and inspection method for transparent material and storage medium
JP4358955B2 (en) * 2000-01-07 2009-11-04 株式会社堀場製作所 Foreign matter inspection device
US6404489B1 (en) * 2000-03-29 2002-06-11 Corning Incorporated Inclusion detection
JP2002090310A (en) * 2000-09-19 2002-03-27 Sekisui Chem Co Ltd Sheet inspection device
JP2003083902A (en) * 2001-09-11 2003-03-19 Fuji Photo Film Co Ltd Method and device for inspecting specimen
US6943898B2 (en) * 2002-05-07 2005-09-13 Applied Materials Israel, Ltd. Apparatus and method for dual spot inspection of repetitive patterns
JP2004028785A (en) * 2002-06-25 2004-01-29 Fuji Photo Film Co Ltd Parallel light generator, and web defect detector
GB0219248D0 (en) * 2002-08-17 2002-09-25 Univ York OPtical assembly and method for detection of light transmission
WO2004017099A2 (en) * 2002-08-19 2004-02-26 Green Vision Systems Ltd. Electro-optically inspecting a longitudinally moving rod of material

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216481A (en) * 1990-12-19 1993-06-01 Toyo Glass Co., Ltd. Method of and apparatus for inspecting transparent object for defect
US5452079A (en) * 1992-06-26 1995-09-19 Central Glass Company, Limited Method of and apparatus for detecting defect of transparent sheet as sheet glass
US6633377B1 (en) * 2000-04-20 2003-10-14 Image Processing Systems Inc. Dark view inspection system for transparent media
US20040174519A1 (en) * 2003-03-05 2004-09-09 Gahagan Kevin T. Inspection of transparent substrates for defects

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1866625A4 *

Also Published As

Publication number Publication date
EP1866625A4 (en) 2010-12-29
TW200706859A (en) 2007-02-16
CN101175986A (en) 2008-05-07
WO2006108137A2 (en) 2006-10-12
CN101175986B (en) 2010-10-13
JP2008536127A (en) 2008-09-04
KR20070121820A (en) 2007-12-27
EP1866625A2 (en) 2007-12-19
TWI360652B (en) 2012-03-21

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