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WO2006036560A3 - Micro-commutateurs electromecaniques a membranes deformables - Google Patents

Micro-commutateurs electromecaniques a membranes deformables Download PDF

Info

Publication number
WO2006036560A3
WO2006036560A3 PCT/US2005/032782 US2005032782W WO2006036560A3 WO 2006036560 A3 WO2006036560 A3 WO 2006036560A3 US 2005032782 W US2005032782 W US 2005032782W WO 2006036560 A3 WO2006036560 A3 WO 2006036560A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems switches
membranes
deforming
deforming membranes
application
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/032782
Other languages
English (en)
Other versions
WO2006036560A2 (fr
Inventor
Clarence Chui
Manish Kothari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IDC LLC
Original Assignee
IDC LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/144,546 external-priority patent/US8008736B2/en
Priority claimed from US11/150,407 external-priority patent/US7345805B2/en
Priority claimed from US11/198,925 external-priority patent/US7724993B2/en
Application filed by IDC LLC filed Critical IDC LLC
Priority to MX2007003577A priority Critical patent/MX2007003577A/es
Priority to EP05798437A priority patent/EP1809568A2/fr
Priority to JP2007533542A priority patent/JP2008515150A/ja
Publication of WO2006036560A2 publication Critical patent/WO2006036560A2/fr
Publication of WO2006036560A3 publication Critical patent/WO2006036560A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Micromachines (AREA)
  • Push-Button Switches (AREA)

Abstract

L'invention concerne des micro-commutateurs électromécaniques constitués de membranes ou de couches déformables sous l'application d'une tension. Selon certains modes de réalisation, l'application d'une tension ouvre des contacts de commutateur.
PCT/US2005/032782 2004-09-27 2005-09-14 Micro-commutateurs electromecaniques a membranes deformables Ceased WO2006036560A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
MX2007003577A MX2007003577A (es) 2004-09-27 2005-09-14 Conmutadores mems con membranas de deformacion.
EP05798437A EP1809568A2 (fr) 2004-09-27 2005-09-14 Micro-commutateurs electromecaniques a membranes deformables
JP2007533542A JP2008515150A (ja) 2004-09-27 2005-09-14 変形する薄膜を備えたｍｅｍｓスイッチ

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US61346504P 2004-09-27 2004-09-27
US61350104P 2004-09-27 2004-09-27
US60/613,465 2004-09-27
US60/613,501 2004-09-27
US11/144,546 US8008736B2 (en) 2004-09-27 2005-06-03 Analog interferometric modulator device
US11/144,546 2005-06-03
US11/150,407 2005-06-10
US11/150,407 US7345805B2 (en) 2004-09-27 2005-06-10 Interferometric modulator array with integrated MEMS electrical switches
US11/198,925 2005-08-05
US11/198,925 US7724993B2 (en) 2004-09-27 2005-08-05 MEMS switches with deforming membranes

Publications (2)

Publication Number Publication Date
WO2006036560A2 WO2006036560A2 (fr) 2006-04-06
WO2006036560A3 true WO2006036560A3 (fr) 2006-05-04

Family

ID=35501242

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/032782 Ceased WO2006036560A2 (fr) 2004-09-27 2005-09-14 Micro-commutateurs electromecaniques a membranes deformables

Country Status (5)

Country Link
EP (1) EP1809568A2 (fr)
JP (1) JP2008515150A (fr)
MX (1) MX2007003577A (fr)
TW (1) TW200635845A (fr)
WO (1) WO2006036560A2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1850360A1 (fr) * 2006-04-26 2007-10-31 Seiko Epson Corporation Microrupteur avec une première pièce commandable et une seconde pièce de contact
US7649671B2 (en) * 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7724417B2 (en) 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
KR101752011B1 (ko) * 2008-11-07 2017-06-28 카벤디시 키네틱스, 인크. 더 큰 ｍｅｍｓ 디바이스를 대체하기 위해 복수의 더 작은 ｍｅｍｓ 디바이스를 이용하는 방법
US8115383B2 (en) * 2009-10-29 2012-02-14 Global Oled Technology Llc Electroluminescent area illumination with integrated mechanical switch
US8576029B2 (en) 2010-06-17 2013-11-05 General Electric Company MEMS switching array having a substrate arranged to conduct switching current
RU2532684C2 (ru) * 2013-05-23 2014-11-10 Общество с ограниченной ответственностью "СПИНТЕК" Переключатель и коммутатор
US11615924B2 (en) * 2020-10-25 2023-03-28 AAC Technologies Pte. Ltd. MEMS switch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003060940A1 (fr) * 2002-01-18 2003-07-24 Abb Research Ltd Systeme micro-electromecanique et procede de fabrication
US20040022044A1 (en) * 2001-01-30 2004-02-05 Masazumi Yasuoka Switch, integrated circuit device, and method of manufacturing switch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040022044A1 (en) * 2001-01-30 2004-02-05 Masazumi Yasuoka Switch, integrated circuit device, and method of manufacturing switch
WO2003060940A1 (fr) * 2002-01-18 2003-07-24 Abb Research Ltd Systeme micro-electromecanique et procede de fabrication

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PEROULIS D ET AL: "LOW CONTACT RESISTANCE SERIES MEMS SWITCHES", 2002 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST. (IMS 2002). SEATTLE, WA, JUNE 2 - 7, 2002, vol. 1, 2 June 2002 (2002-06-02), NEW YORK, NY, US, pages 223 - 226, XP001099477, ISBN: 0-7803-7239-5 *

Also Published As

Publication number Publication date
JP2008515150A (ja) 2008-05-08
TW200635845A (en) 2006-10-16
MX2007003577A (es) 2007-05-23
EP1809568A2 (fr) 2007-07-25
WO2006036560A2 (fr) 2006-04-06

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