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WO2006029999A3 - Spectrometre de masse a temps de vol - Google Patents

Spectrometre de masse a temps de vol Download PDF

Info

Publication number
WO2006029999A3
WO2006029999A3 PCT/EP2005/054525 EP2005054525W WO2006029999A3 WO 2006029999 A3 WO2006029999 A3 WO 2006029999A3 EP 2005054525 W EP2005054525 W EP 2005054525W WO 2006029999 A3 WO2006029999 A3 WO 2006029999A3
Authority
WO
WIPO (PCT)
Prior art keywords
ion
mass spectrometer
extraction device
source
flight time
Prior art date
Application number
PCT/EP2005/054525
Other languages
German (de)
English (en)
Other versions
WO2006029999A2 (fr
Inventor
Erwin Hoffmann
Uwe Dahlke
Christian Luedke
Carsten Roland
Jochen Skole
Rainer Sorge
Joerg Wollbrandt
Original Assignee
Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev
Ges Zur Foerderung Der Analytischen Wissenschaften Ev
Erwin Hoffmann
Uwe Dahlke
Christian Luedke
Carsten Roland
Jochen Skole
Rainer Sorge
Joerg Wollbrandt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev, Ges Zur Foerderung Der Analytischen Wissenschaften Ev, Erwin Hoffmann, Uwe Dahlke, Christian Luedke, Carsten Roland, Jochen Skole, Rainer Sorge, Joerg Wollbrandt filed Critical Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev
Priority to EP05792139A priority Critical patent/EP1817788B1/fr
Priority to AT05792139T priority patent/ATE517428T1/de
Priority to AU2005284150A priority patent/AU2005284150B2/en
Publication of WO2006029999A2 publication Critical patent/WO2006029999A2/fr
Publication of WO2006029999A3 publication Critical patent/WO2006029999A3/fr

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/061Ion deflecting means, e.g. ion gates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/40Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

L'invention concerne un dispositif de production d'un faisceau ionique (120) composé d'ions à charge positive dans un spectromètre de masse à temps de vol évacué (10), comportant une source ionique (12), une interface (14) destinée à transférer le faisceau ionique de la pression environnante vers le spectromètre de masse (10), et un dispositif d'extraction ionique (64) comprenant une source de tension (74) destinée à produire une différence de potentiel négative entre le dispositif d'extraction ionique (64) et la source ionique. Le dispositif selon l'invention est caractérisé en ce que la différence de potentiel négative vaut au moins 1 kV et le dispositif d'extraction ionique (64) est connecté à la source de tension (74) par l'intermédiaire d'une résistance de haute valeur (72) dont la valeur est choisie de telle manière qu'il n'y a pas de décharge spontanée entre la source ionique (12) et le dispositif d'extraction ionique (64) lorsqu'une tension est appliquée.
PCT/EP2005/054525 2004-09-17 2005-09-12 Spectrometre de masse a temps de vol WO2006029999A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP05792139A EP1817788B1 (fr) 2004-09-17 2005-09-12 Spectrometre de masse a temps de vol
AT05792139T ATE517428T1 (de) 2004-09-17 2005-09-12 Flugzeit-massenspektrometer
AU2005284150A AU2005284150B2 (en) 2004-09-17 2005-09-12 Flight time mass spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004045315.2 2004-09-17
DE102004045315A DE102004045315A1 (de) 2004-09-17 2004-09-17 Flugzeit-Massenspektrometer

Publications (2)

Publication Number Publication Date
WO2006029999A2 WO2006029999A2 (fr) 2006-03-23
WO2006029999A3 true WO2006029999A3 (fr) 2007-08-02

Family

ID=35809639

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/054525 WO2006029999A2 (fr) 2004-09-17 2005-09-12 Spectrometre de masse a temps de vol

Country Status (5)

Country Link
EP (1) EP1817788B1 (fr)
AT (1) ATE517428T1 (fr)
AU (1) AU2005284150B2 (fr)
DE (1) DE102004045315A1 (fr)
WO (1) WO2006029999A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201317774D0 (en) * 2013-10-08 2013-11-20 Micromass Ltd An ion inlet assembly
US10446378B2 (en) 2013-09-20 2019-10-15 Micromass Uk Limited Ion inlet assembly

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE705691C (de) * 1939-03-25 1941-05-07 Ernst Weese Vorrichtung zum Spannen ebener Membranen
US2925774A (en) * 1955-11-08 1960-02-23 Admiral Corp Frame for a screen
US4150319A (en) * 1977-09-22 1979-04-17 The Bendix Corporation Ion gating grid
GB2080021A (en) * 1980-07-08 1982-01-27 Wollnik Hermann Time-of-flight Mass Spectrometer
JPS647467A (en) * 1987-06-29 1989-01-11 Shimadzu Corp Induction coupling plasma mass spectrometer
US5160840A (en) * 1991-10-25 1992-11-03 Vestal Marvin L Time-of-flight analyzer and method
US5621270A (en) * 1995-03-22 1997-04-15 Litton Systems, Inc. Electron window for toxic remediation device with a support grid having diverging angle holes
US6013913A (en) * 1998-02-06 2000-01-11 The University Of Northern Iowa Multi-pass reflectron time-of-flight mass spectrometer
US6032513A (en) * 1997-06-30 2000-03-07 Texas Instruments Incorporated Apparatus and method for measuring contaminants in semiconductor processing chemicals
US20010032929A1 (en) * 2000-02-29 2001-10-25 Katrin Fuhrer Mobility spectrometer
US6331702B1 (en) * 1999-01-25 2001-12-18 University Of Manitoba Spectrometer provided with pulsed ion source and transmission device to damp ion motion and method of use
US6518569B1 (en) * 1999-06-11 2003-02-11 Science & Technology Corporation @ Unm Ion mirror
DE10162267A1 (de) * 2001-12-18 2003-07-10 Bruker Daltonik Gmbh Reflektor für Flugzeitmassenspektrometer mit orthogonalem Ioneneinschuss
GB2388704A (en) * 2002-05-17 2003-11-19 * Micromass Limited A composite mass spectrum formed from mass spectral data obtained at different sensitivities
US20040144918A1 (en) * 2002-10-11 2004-07-29 Zare Richard N. Gating device and driver for modulation of charged particle beams

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE705691C (de) * 1939-03-25 1941-05-07 Ernst Weese Vorrichtung zum Spannen ebener Membranen
US2925774A (en) * 1955-11-08 1960-02-23 Admiral Corp Frame for a screen
US4150319A (en) * 1977-09-22 1979-04-17 The Bendix Corporation Ion gating grid
GB2080021A (en) * 1980-07-08 1982-01-27 Wollnik Hermann Time-of-flight Mass Spectrometer
JPS647467A (en) * 1987-06-29 1989-01-11 Shimadzu Corp Induction coupling plasma mass spectrometer
US5160840A (en) * 1991-10-25 1992-11-03 Vestal Marvin L Time-of-flight analyzer and method
US5621270A (en) * 1995-03-22 1997-04-15 Litton Systems, Inc. Electron window for toxic remediation device with a support grid having diverging angle holes
US6032513A (en) * 1997-06-30 2000-03-07 Texas Instruments Incorporated Apparatus and method for measuring contaminants in semiconductor processing chemicals
US6013913A (en) * 1998-02-06 2000-01-11 The University Of Northern Iowa Multi-pass reflectron time-of-flight mass spectrometer
US6331702B1 (en) * 1999-01-25 2001-12-18 University Of Manitoba Spectrometer provided with pulsed ion source and transmission device to damp ion motion and method of use
US6518569B1 (en) * 1999-06-11 2003-02-11 Science & Technology Corporation @ Unm Ion mirror
US20010032929A1 (en) * 2000-02-29 2001-10-25 Katrin Fuhrer Mobility spectrometer
DE10162267A1 (de) * 2001-12-18 2003-07-10 Bruker Daltonik Gmbh Reflektor für Flugzeitmassenspektrometer mit orthogonalem Ioneneinschuss
GB2388704A (en) * 2002-05-17 2003-11-19 * Micromass Limited A composite mass spectrum formed from mass spectral data obtained at different sensitivities
US20040144918A1 (en) * 2002-10-11 2004-07-29 Zare Richard N. Gating device and driver for modulation of charged particle beams

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 176 (E - 749) 25 April 1989 (1989-04-25) *
THOMAS, R.: "A beginner's guide to ICP-MS Part IV: The Interface Region", SPECTROSCOPY, vol. 16, no. 7, July 2001 (2001-07-01), pages 26 - 34, XP002409994 *

Also Published As

Publication number Publication date
AU2005284150B2 (en) 2011-05-12
WO2006029999A2 (fr) 2006-03-23
EP1817788A2 (fr) 2007-08-15
DE102004045315A1 (de) 2006-03-30
AU2005284150A1 (en) 2006-03-23
AU2005284150A8 (en) 2010-06-03
ATE517428T1 (de) 2011-08-15
EP1817788B1 (fr) 2011-07-20

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