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WO2006011996A3 - Methods and apparatus for the optimization of etch resistance in a plasma processing system - Google Patents

Methods and apparatus for the optimization of etch resistance in a plasma processing system Download PDF

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Publication number
WO2006011996A3
WO2006011996A3 PCT/US2005/021047 US2005021047W WO2006011996A3 WO 2006011996 A3 WO2006011996 A3 WO 2006011996A3 US 2005021047 W US2005021047 W US 2005021047W WO 2006011996 A3 WO2006011996 A3 WO 2006011996A3
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
plasma processing
gas mixture
etch resistance
processing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/021047
Other languages
French (fr)
Other versions
WO2006011996A2 (en
Inventor
Yoko Yamaguchi Adams
George Stojakovic
Alan Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Priority to KR1020077002286A priority Critical patent/KR101233453B1/en
Priority to JP2007519252A priority patent/JP5139059B2/en
Publication of WO2006011996A2 publication Critical patent/WO2006011996A2/en
Anticipated expiration legal-status Critical
Publication of WO2006011996A3 publication Critical patent/WO2006011996A3/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene
    • H01J37/32862—In situ cleaning of vessels and/or internal parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

In a plasma processing system, including a plasma processing chamber, a method of optimizing the etch resistance of a substrate material is described. The method includes flowing pre-coat gas mixture into the plasma procesing chamber, wherein the pre-coat gas mixture has an affinity for a etchant gas flow mixture; striking a first plasma from the pre-coat gas mixture; and introducing a substrate comprising the substrate material. The method also includes flowing the etchant gas mixture into the plasma processing chamber; striking a second plasma from the etchant gas mixture; and etching the substrate with the second plasma. Wherein the first plasma creates a pre-coat residual on a set of exposed surfaces in the plasma processing chamber, and the etch resistance of the substrate material is maintained.
PCT/US2005/021047 2004-06-30 2005-06-14 Methods and apparatus for the optimization of etch resistance in a plasma processing system Ceased WO2006011996A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020077002286A KR101233453B1 (en) 2004-06-30 2005-06-14 Methods and apparatus for the optimization of etch resistance in a plasma processing system
JP2007519252A JP5139059B2 (en) 2004-06-30 2005-06-14 Method for optimizing etch resistance in plasma processing systems

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/883,282 2004-06-30
US10/883,282 US7316785B2 (en) 2004-06-30 2004-06-30 Methods and apparatus for the optimization of etch resistance in a plasma processing system

Publications (2)

Publication Number Publication Date
WO2006011996A2 WO2006011996A2 (en) 2006-02-02
WO2006011996A3 true WO2006011996A3 (en) 2007-04-19

Family

ID=35512818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/021047 Ceased WO2006011996A2 (en) 2004-06-30 2005-06-14 Methods and apparatus for the optimization of etch resistance in a plasma processing system

Country Status (6)

Country Link
US (1) US7316785B2 (en)
JP (2) JP5139059B2 (en)
KR (1) KR101233453B1 (en)
CN (1) CN101263092A (en)
TW (1) TWI389196B (en)
WO (1) WO2006011996A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8546264B2 (en) * 2005-06-02 2013-10-01 The Regents Of The University Of California Etching radical controlled gas chopped deep reactive ion etching
US7906032B2 (en) * 2006-03-31 2011-03-15 Tokyo Electron Limited Method for conditioning a process chamber
US8501627B2 (en) * 2007-09-27 2013-08-06 Lam Research Corporation Profile control in dielectric etch
US8298958B2 (en) 2008-07-17 2012-10-30 Lam Research Corporation Organic line width roughness with H2 plasma treatment
CN101930921B (en) * 2009-06-25 2012-09-26 中芯国际集成电路制造(上海)有限公司 Method for improving grid size uniformity
JP5450187B2 (en) 2010-03-16 2014-03-26 株式会社日立ハイテクノロジーズ Plasma processing apparatus and plasma processing method
JP2012015343A (en) * 2010-07-01 2012-01-19 Hitachi High-Technologies Corp Plasma etching method
TWI458011B (en) * 2010-10-29 2014-10-21 Macronix Int Co Ltd Methods for etching multi-layer hardmasks
US8420947B2 (en) 2010-12-30 2013-04-16 Globalfoundries Singapore Pte. Ltd. Integrated circuit system with ultra-low k dielectric and method of manufacture thereof
JP5956933B2 (en) 2013-01-15 2016-07-27 東京エレクトロン株式会社 Plasma processing method and plasma processing apparatus
US9412606B2 (en) * 2014-02-14 2016-08-09 Taiwan Semiconductor Manufacturing Company Limited Target dimension uniformity for semiconductor wafers
JP6169666B2 (en) * 2015-10-20 2017-07-26 株式会社日立ハイテクノロジーズ Plasma processing method
JP6568457B2 (en) * 2015-11-11 2019-08-28 株式会社日立ハイテクノロジーズ Plasma processing method
US9941123B1 (en) * 2017-04-10 2018-04-10 Lam Research Corporation Post etch treatment to prevent pattern collapse
CN111373511B (en) * 2018-10-26 2023-12-26 株式会社日立高新技术 Plasma treatment method
WO2024172018A1 (en) 2023-02-13 2024-08-22 東京エレクトロン株式会社 Plasma treatment method, precoat formation method, and plasma treatment device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6325948B1 (en) * 1999-07-12 2001-12-04 Lam Research Co., Ltd. Waferless clean process of a dry etcher
US6613689B2 (en) * 2000-03-10 2003-09-02 Applied Materials, Inc Magnetically enhanced plasma oxide etch using hexafluorobutadiene

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0394597A1 (en) * 1989-04-28 1990-10-31 International Business Machines Corporation Follow-up System for Monitoring the Etching Process in an RIE Equipment and its Application to Producing High-resolution and Reproducible Patterns
JPH0828348B2 (en) * 1991-02-07 1996-03-21 ヤマハ株式会社 Dry etching method
JPH04313223A (en) * 1991-04-04 1992-11-05 Mitsubishi Electric Corp Manufacturing method of semiconductor device
US5482749A (en) * 1993-06-28 1996-01-09 Applied Materials, Inc. Pretreatment process for treating aluminum-bearing surfaces of deposition chamber prior to deposition of tungsten silicide coating on substrate therein
US5571576A (en) * 1995-02-10 1996-11-05 Watkins-Johnson Method of forming a fluorinated silicon oxide layer using plasma chemical vapor deposition
JP3067576B2 (en) * 1995-03-17 2000-07-17 株式会社日立製作所 Plasma etching method
US5647953A (en) * 1995-12-22 1997-07-15 Lam Research Corporation Plasma cleaning method for removing residues in a plasma process chamber
US6071573A (en) * 1997-12-30 2000-06-06 Lam Research Corporation Process for precoating plasma CVD reactors
US6274500B1 (en) * 1999-10-12 2001-08-14 Chartered Semiconductor Manufacturing Ltd. Single wafer in-situ dry clean and seasoning for plasma etching process
US6420274B1 (en) * 2000-05-10 2002-07-16 International Business Machines Corporation Method for conditioning process chambers
JP2002025977A (en) * 2000-07-06 2002-01-25 Hitachi Ltd Dry etching method
JP2002184754A (en) * 2000-12-13 2002-06-28 Seiko Epson Corp Seasoning method for dry etching equipment
US6626187B2 (en) * 2001-02-07 2003-09-30 Promos Technologies Inc. Method of reconditioning reaction chamber
US6455333B1 (en) * 2001-02-28 2002-09-24 Advanced Micro Devices, Inc. Method of achieving stable deep ultraviolet (DUV) resist etch rate for gate critical dimension (CD)
JP2002270584A (en) * 2001-03-08 2002-09-20 Toshiba Corp Method for manufacturing semiconductor device
JP2002319571A (en) * 2001-04-20 2002-10-31 Kawasaki Microelectronics Kk Preprocessing method for etching tank and manufacturing method for semiconductor device
JP4322484B2 (en) * 2002-08-30 2009-09-02 東京エレクトロン株式会社 Plasma processing method and plasma processing apparatus
JP4034164B2 (en) * 2002-10-28 2008-01-16 富士通株式会社 Method for manufacturing fine pattern and method for manufacturing semiconductor device
US20040110388A1 (en) * 2002-12-06 2004-06-10 International Business Machines Corporation Apparatus and method for shielding a wafer from charged particles during plasma etching
US6869542B2 (en) * 2003-03-12 2005-03-22 International Business Machines Corporation Hard mask integrated etch process for patterning of silicon oxide and other dielectric materials

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6325948B1 (en) * 1999-07-12 2001-12-04 Lam Research Co., Ltd. Waferless clean process of a dry etcher
US6613689B2 (en) * 2000-03-10 2003-09-02 Applied Materials, Inc Magnetically enhanced plasma oxide etch using hexafluorobutadiene

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ROSSNAGEL: "Handbook of Plasma Processing Technology", 1990, NOYES PUBLISHERS *
WOLF S.: "Silicon Processing for the VLSI Era", vol. 4, 2002, pages: 245, 654 *

Also Published As

Publication number Publication date
KR101233453B1 (en) 2013-02-14
JP2008505490A (en) 2008-02-21
JP5139059B2 (en) 2013-02-06
TW200614369A (en) 2006-05-01
TWI389196B (en) 2013-03-11
US20060000797A1 (en) 2006-01-05
US7316785B2 (en) 2008-01-08
WO2006011996A2 (en) 2006-02-02
JP5567084B2 (en) 2014-08-06
JP2012253386A (en) 2012-12-20
KR20070033010A (en) 2007-03-23
CN101263092A (en) 2008-09-10

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