WO2006011065B1 - Method of microtopographic inspection of surfaces of transparent objects by optical triangulation - Google Patents
Method of microtopographic inspection of surfaces of transparent objects by optical triangulationInfo
- Publication number
- WO2006011065B1 WO2006011065B1 PCT/IB2005/052164 IB2005052164W WO2006011065B1 WO 2006011065 B1 WO2006011065 B1 WO 2006011065B1 IB 2005052164 W IB2005052164 W IB 2005052164W WO 2006011065 B1 WO2006011065 B1 WO 2006011065B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- inspection
- optical triangulation
- layer
- microtopographic
- transparent materials
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract 4
- 230000003287 optical effect Effects 0.000 title claims abstract 3
- 238000007689 inspection Methods 0.000 title claims 3
- 239000000463 material Substances 0.000 claims abstract 4
- 239000012780 transparent material Substances 0.000 claims abstract 4
- 230000008878 coupling Effects 0.000 claims abstract 3
- 238000010168 coupling process Methods 0.000 claims abstract 3
- 238000005859 coupling reaction Methods 0.000 claims abstract 3
- 239000011521 glass Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A method that allows the use of systems based on optical triangulation in the perfilometric and microtopographical measurement of surfaces of transparent materials by the application, on the surface opposing to that one to measure, of a layer of coupling gel with refractive index approaching the one of the material to be measured, being that this layer may have non parallel faces specially when inspecting thin pieces.
Claims
AMENDED CLAIMS
[received by the International Bureau on 23 January 2006 (23.01.06); original claims 1-2 replaced by new claims 1-2 ]
Claims
[ 1 ] Method of microtopographical inspection of the surface of transparent materials by optical triangulation of surfaces of transparent materials, char¬ acterized by the reduction of the difference of the refractive indexes at the diopter of the second face of the part to be measured, by means of ap¬ plication, on the surface opposing to that one to measure, of a layer of coupling gel of refractive index similar to that of the material to measure, being that this layer will have non parallel faces whenever the thickness of the material to be measured is smaller than 500 μm.
[2] Method of microtopographical inspection of the surface of transparent materials, in accordance with claim ! , characterized by the fact that the coupling gel is homogeneous transparent stable and adheres to both glass and polymeric materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP05754181A EP1769219A1 (en) | 2004-07-20 | 2005-06-29 | Method of microtopographic inspection of surfaces of transparent objects by optical triangulation |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PT10317304 | 2004-07-20 | ||
| PT103173 | 2004-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2006011065A1 WO2006011065A1 (en) | 2006-02-02 |
| WO2006011065B1 true WO2006011065B1 (en) | 2006-04-06 |
Family
ID=35229758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/IB2005/052164 WO2006011065A1 (en) | 2004-07-20 | 2005-06-29 | Method of microtopographic inspection of surfaces of transparent objects by optical triangulation |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP1769219A1 (en) |
| WO (1) | WO2006011065A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11049720B2 (en) * | 2018-10-19 | 2021-06-29 | Kla Corporation | Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4213601A1 (en) * | 1992-04-24 | 1993-10-28 | Guenther Dausmann | Determining thickness of planar transparent body by triangulation - measuring offset of reflection point, fixed w.r.t beam source, due to refraction through body |
| US6011624A (en) * | 1998-01-06 | 2000-01-04 | Zygo Corporation | Geometrically-Desensitized interferometer with adjustable range of measurement depths |
| DE10003194A1 (en) * | 2000-01-25 | 2001-07-26 | Wolfgang Dreybrodt | Optical triangulation method for determining surface roughness of optically scattering surface, involves using incoherent light source for surface roughness measurement |
-
2005
- 2005-06-29 WO PCT/IB2005/052164 patent/WO2006011065A1/en active Application Filing
- 2005-06-29 EP EP05754181A patent/EP1769219A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006011065A1 (en) | 2006-02-02 |
| EP1769219A1 (en) | 2007-04-04 |
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