[go: up one dir, main page]

WO2006010179A1 - Getter non evaporable - Google Patents

Getter non evaporable Download PDF

Info

Publication number
WO2006010179A1
WO2006010179A1 PCT/AT2005/000270 AT2005000270W WO2006010179A1 WO 2006010179 A1 WO2006010179 A1 WO 2006010179A1 AT 2005000270 W AT2005000270 W AT 2005000270W WO 2006010179 A1 WO2006010179 A1 WO 2006010179A1
Authority
WO
WIPO (PCT)
Prior art keywords
neg
container
container according
getter
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/AT2005/000270
Other languages
German (de)
English (en)
Inventor
Harald Londer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALVATEC ALKALI VACUUM TECHNOLOGIES GmbH
Original Assignee
ALVATEC ALKALI VACUUM TECHNOLOGIES GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALVATEC ALKALI VACUUM TECHNOLOGIES GmbH filed Critical ALVATEC ALKALI VACUUM TECHNOLOGIES GmbH
Publication of WO2006010179A1 publication Critical patent/WO2006010179A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2229/00—Details of cathode ray tubes or electron beam tubes
    • H01J2229/94—Means for obtaining or maintaining the desired pressure within the tube

Definitions

  • the present invention relates to a non-evaporating getter (hereinafter NEG) in the form of pre-evaporated getter layers in the interior of a container for introducing the same into a closed system, and to a method for its production.
  • NEG non-evaporating getter
  • the NEG container is a housing with at least one vacuum-tight opening and optionally includes internals for surface enlargement.
  • the container is provided with a gas or vacuum-tight closure. This closure can be opened mechanically or consist of a temperature-dependent metal seal. After opening the closure in a vacuum or inert system, the pre-evaporated getter layer inside the container is accessible and the NEG can develop its sorption capacity at room temperature.
  • Non-evaporating getters use different starting materials today.
  • Alkali / alkaline earth metals are powerful sources of gettering, but are difficult to handle due to their high reactivity.
  • Scientific Foundations of Vacuum Technique John Willey & Sons, New York (1962), p. 622; Della P. 5 Vacuum, 1996; 47: 771). Therefore, in the NEG environment mainly Zr, V and Fe mixtures are used which, in addition to a low sorption capacity, have only a low sticking rate (retention time) of the absorbed residual gases (see, for example, P.
  • the invention thus has the object to overcome the above-mentioned problems and difficulties of the prior art and to provide an NEG (container with pre-vaporized getter layers and opening mechanism) of the type mentioned, with the help of highly active pre-evaporated getter, in sealed systems and Applications, vacuum chambers, pressure chambers, etc., can be easily introduced in predetermined amounts at an arbitrary time and made accessible at an arbitrary time, without jeopardizing the purity of the system.
  • this container should be relatively inexpensive and can be produced without time-consuming and labor-intensive production steps.
  • the getter is layered on the inner wall of the container and / or optionally on the internals and that at least one sealed opening is closed either with a temperature-dependent seal made of metal and opened by heating can be opened or mechanically opened.
  • the NEG according to the invention Upon heating the NEG according to the invention to a certain temperature, which results depending on the material of the seal, the metal of the seal is melted and the transferred substance is released to the environment, ie in the closed system.
  • the NEG according to the invention can thus be used in the entire field of vacuum technology, in which different getter effects are required to improve the vacuum.
  • the temperature dependent seal is selected from metals of the group consisting of Ga, In, Sn, Pb and their alloys.
  • the temperature-dependent seal has a melting point in the range of 50 0 C to 350 ° C.
  • the temperature-dependent seal in the non-pressed state has an average thickness in the range of 2-5 mm.
  • a further preferred embodiment is characterized in that the container after the temperature-dependent seal comprises a further section which is provided with gas-permeable, but solids-impermeable openings, preferably slots.
  • the openings are closed with a fine-meshed network or a gas-permeable membrane.
  • the interior and its possible deposits with one or more getter materials coated by vapor deposition Preferably, the interior and its possible deposits with one or more getter materials coated by vapor deposition.
  • the pre-evaporated getter layers preferably consist of the metals barium, lithium, calcium, cesium or combinations thereof.
  • the metal layer or mass to be evaporated can be varied depending on the application.
  • NEG container is of cylindrical or cuboidal design.
  • other forms are conceivable.
  • the material of the NEG container is chosen according to the application. In the field of vacuum and overpressure applications, stainless steel, ceramic or glass containers are particularly suitable due to the low outgassing and high tightness.
  • the shape of the NEG container is not subject to any restriction as long as appropriate pressing tools guarantee the exact pressing and thus the tightness of the container.
  • the tightness and the load capacity of the temperature-dependent seal depends on the starting material, the material density in the raw state and the compression during the pressing process and the surface to be sealed or the respective inner diameter of the Freiösauslasses.
  • Preferred sealing materials are Ga, In, Sn, Pb or their alloys, such as. B. InSn.
  • the other opening of the container is closed after filling with the substance to be transferred so as to ensure that it can not open when the container is heated.
  • Different materials can be used.
  • different techniques can be used.
  • the end was e.g. mechanically pressed to 1.5 mm by means of a screw press and then welded off electrically vacuum-tight.
  • Pure metals such as Ga, In, Sn, Pb, or produced from their alloys.
  • the NEG container which has two openings - e.g. is open at both ends in a cylindrical housing -, mechanically sealed at an opening or an end with the preformed, temperature-dependent seal.
  • the getter in the container evaporator source is evaporated under vacuum by external heat, thereby coating the inside of the NEG container and the components (sheets / nets) were introduced to increase the surface area.
  • the container is either evacuated or tightly sealed with the atmosphere in the container while preventing contamination of the contents, mechanically (tight interference fit) or chemically sealed in the form of an adhesive. 5.) By directly or indirectly heating the NEG to the selectable release temperature, the seal melts and the getter layers become accessible. The opening of the seal for the development of the S orptions effect can also be assisted by a preloaded spring mechanism or an inner container.
  • getter material remains in the getter housing after melting the seal and is connected by a gas-permeable, but loose particle-containing opening with the atmosphere in the application.
  • the opening (s) is (are) located in a region of the getter housing that was not previously protected by the seal.
  • the seal 4 by a pressing device 8, which simultaneously exerts pressure on the two opposite base surfaces of the sealing cylinder, pressed (Fig. 1 b)).
  • a vacuum-tight closure of the opening 2 of the housing 1 is achieved.
  • the one-sided sealed container with the pressed seal 4 is shown in Fig. 1 c). 2 shows the infestation of the NEG housing 1, which has the seal 4, with getter material 3, that is, for example, Ba, Li, etc.
  • the reference numeral 5 schematically denotes internals in the housing, that is, for example, a folded, non-rusting thin sheet metal with holes which are about 2 mm in diameter.
  • FIG. 3 illustrates the vaporization of the getter material 3 by externally heating the housing 1 in the region in which the getter material 3 is located. That portion of the housing 1 having the pressed gasket 4 is desirably cooled.
  • FIG. 4 shows the getter material 6 vapor-deposited in layer form on the internals. After complete vapor deposition, the end 7 of the container is squeezed and electrically welded in order to close it.
  • This NEG container can be placed in the room in which the getter material is to be used.
  • FIG. 7 shows the state in which the getter material is active and can take up substances from the space in which the container is located. This is indicated in Fig. 7 with a double arrow.
  • a tubular Gettergefit stainless steel was used with a length of 100 mm, a wall thickness of 0.5 mm and an inner diameter of 7.2 mm.
  • the sealant used was a fit of pure indium (50 mg).
  • the indium fitting was positioned at the desired location (10 mm from a pipe end) and then evenly compacted from both sides by simultaneous pressing with tools. Due to the resulting material expansion of the indium at the sealing edge, there was a tight connection with the container inner wall and thus to a vacuum-tight seal.
  • the sealed tube was filled in a glove box with a getter evaporator source and the surface enlarging components.
  • the open end of the tube was sealed by means of a hose clamp, removed from the glove box and attached to a vacuum pump evacuated in the range of 10-5 mbar.
  • the getter material was evaporated by heat from the outside and has deposited on the inside of the container and the devisvidveriesrnden material.
  • the hose clamp was closed again to secure the vacuum, and the pipe end was pressed with a screw press 3 cm after the hose clamp and then electrically welded.
  • the thus sealed NEG was fixed to the inner wall of a vacuum chamber.
  • the NEG container was externally heated to 168 ° C over a period of 2 minutes by means of an industrial furnace via the heat transfer of the vacuum chamber wall.
  • the NEG was externally heated to 137 ° C via heat transfer of the vacuum chamber wall over a period of 2 minutes by means of an industrial furnace.
  • the pressed InSn seal then melted, which opened the container and made the getter layers accessible.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermally Insulated Containers For Foods (AREA)

Abstract

L'invention concerne un récipient pour getter non évaporable (NEG) servant à introduire des couches de getter dans un système fermé. Le récipient selon l'invention comprend une enveloppe (1) munie d'au moins une ouverture (2, 3) fermée de manière étanche au vide ainsi que, éventuellement, des insertions, et contient les couches de getter à introduire (5). Le récipient selon l'invention est caractérisé en ce que les couches de getter à introduire sont appliquées sur la paroi intérieure de l'enveloppe et/ou éventuellement sur les insertions et en ce que l'ouverture fermée est fermée au moyen d'un joint en métal variable avec la température et peut être ouverte par chauffage ou bien peut être ouverte mécaniquement.
PCT/AT2005/000270 2004-07-30 2005-07-13 Getter non evaporable Ceased WO2006010179A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATA1314/2004 2004-07-30
AT13142004A AT501616B1 (de) 2004-07-30 2004-07-30 Nicht evaporierender getter

Publications (1)

Publication Number Publication Date
WO2006010179A1 true WO2006010179A1 (fr) 2006-02-02

Family

ID=34972503

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AT2005/000270 Ceased WO2006010179A1 (fr) 2004-07-30 2005-07-13 Getter non evaporable

Country Status (2)

Country Link
AT (1) AT501616B1 (fr)
WO (1) WO2006010179A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010019977A1 (fr) * 2008-08-18 2010-02-25 Alvatec Alkali Vacuum Technologies Gmbh Procédé de fabrication d'un système de getter
WO2010144930A3 (fr) * 2009-06-17 2011-03-31 Alvatec Alkali Vacuum Technologies Gmbh Getter, agencement de getter et dispositif comportant ceux-ci, et procédé pour fabriquer un getter
EP4445024A1 (fr) * 2022-01-14 2024-10-16 Tokamak Energy Ltd Pompe d'évaporation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5855118A (en) * 1996-03-26 1999-01-05 Saes Pure Gas, Inc. Combination cryopump/getter pump and method for regenerating same
US6309184B1 (en) * 1998-10-19 2001-10-30 Saes Getters S.P.A. Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line
US6422824B1 (en) * 1999-09-15 2002-07-23 Industrial Technology Research Institute Getting assembly for vacuum display panels

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532330A (en) * 1978-08-30 1980-03-07 Toshiba Corp Braun tube
US4464133A (en) * 1982-04-05 1984-08-07 Gte Laboratories Incorporated Method of charging a vessel with mercury

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5855118A (en) * 1996-03-26 1999-01-05 Saes Pure Gas, Inc. Combination cryopump/getter pump and method for regenerating same
US6309184B1 (en) * 1998-10-19 2001-10-30 Saes Getters S.P.A. Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line
US6422824B1 (en) * 1999-09-15 2002-07-23 Industrial Technology Research Institute Getting assembly for vacuum display panels

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010019977A1 (fr) * 2008-08-18 2010-02-25 Alvatec Alkali Vacuum Technologies Gmbh Procédé de fabrication d'un système de getter
US20110151143A1 (en) * 2008-08-18 2011-06-23 Alvatec Alkali Vacuum Technologies Gmbh Method for producing a getter device
US8609190B2 (en) 2008-08-18 2013-12-17 Alvatec Alkali Vacuum Technologies Gmbh Method for producing a getter device
WO2010144930A3 (fr) * 2009-06-17 2011-03-31 Alvatec Alkali Vacuum Technologies Gmbh Getter, agencement de getter et dispositif comportant ceux-ci, et procédé pour fabriquer un getter
EP4445024A1 (fr) * 2022-01-14 2024-10-16 Tokamak Energy Ltd Pompe d'évaporation

Also Published As

Publication number Publication date
AT501616B1 (de) 2006-10-15
AT501616A4 (de) 2006-10-15

Similar Documents

Publication Publication Date Title
DE69606475T2 (de) Kombination von Gettermaterialen und sie enthaltende Vorrichtung
DE69735961T2 (de) Kombination von Materialien für die Niedertemperaturanregung der Aktivierung von Getter-Materialien sowie damit hergestellte Getter-Vorrichtungen
EP0017095A1 (fr) Procédé pour la fabrication d'éléments d'isolation thermique interne de récipients ou tubes à hautes pression ainsi qu'un tube obtenu par ce procédé
DE60318865T2 (de) Getterzusammensetzung die reaktivierbar ist bei niedriger temperatur nach aussetzung reaktiver gase bei höherer temperatur
DE2228444C3 (de) Heizvorrichtung mit einem Wärmespeicher
DE1940137C3 (de) Getterpumpe
DE3012968A1 (de) Gettervorrichtung fuer die sorption von wasserstoff
DE102007013584A1 (de) Verfahren zur Herstellung eines Vakuumpaneels, derartiges Vakuumpaneel sowie ein dieses verwendender Mauerstein
AT501616B1 (de) Nicht evaporierender getter
WO2017097462A1 (fr) Élément sensible doté d'une matière d'adsorption activée par laser
EP0101673A1 (fr) Méthode de fabrication d'un corps isolé thermiquement
DE2500340A1 (de) Wandgefuege fuer vakuumgefaesse
DE2902623A1 (de) Verfahren und getteranordnung zur aufrechterhaltung eines vakuums
AT501186B1 (de) Transferbehältnis
WO2010037827A2 (fr) Récipient à très basse température
EP0193795A2 (fr) Procédé d'introduction d'un agent d'adsorption
EP2883242A1 (fr) Procédé de fabrication d'un boîtier hermétiquement fermé
DE1539126A1 (de) Verfahren und Vorrichtung zum Evakuieren von elektrischen Vakuum-Entladungsgeraeten
DE2212740A1 (de) Einen evakuierten behaelter umfassende anordnung
DE102009023472A1 (de) Beschichtungsanlage und Beschichtungsverfahren
DE2510814A1 (de) Wasserdampf freigebende zusammensetzung und vorrichtung
DE3210162A1 (de) Verfahren zur herstellung einer bildwiedergaberoehre mit einer gasabsorbierenden schicht
DE60202793T2 (de) Getterlegierungen sowie vorrichtungen zum verdampfen von kalzium
DE3416089C2 (de) Aus zwei oder mehreren konzentrischen Rohren bestehendes Rohrsystem
DD214483A1 (de) Verfahren zur herstellung eines getters in flachen anzeigeeinrichtungen

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

NENP Non-entry into the national phase

Ref country code: DE

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase

Ref document number: 05761747

Country of ref document: EP

Kind code of ref document: A1