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WO2006087213A3 - Method and device for detecting and/or classifying defects - Google Patents

Method and device for detecting and/or classifying defects Download PDF

Info

Publication number
WO2006087213A3
WO2006087213A3 PCT/EP2006/001465 EP2006001465W WO2006087213A3 WO 2006087213 A3 WO2006087213 A3 WO 2006087213A3 EP 2006001465 W EP2006001465 W EP 2006001465W WO 2006087213 A3 WO2006087213 A3 WO 2006087213A3
Authority
WO
WIPO (PCT)
Prior art keywords
detecting
classifying defects
workpiece
defects
classifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2006/001465
Other languages
German (de)
French (fr)
Other versions
WO2006087213A2 (en
Inventor
Klaus Gerstner
Clemens Ottermann
Bernhard Hunzinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE200510007715 external-priority patent/DE102005007715B4/en
Application filed by Schott AG filed Critical Schott AG
Priority to KR1020077021449A priority Critical patent/KR101332786B1/en
Publication of WO2006087213A2 publication Critical patent/WO2006087213A2/en
Publication of WO2006087213A3 publication Critical patent/WO2006087213A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Textile Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The invention relates to a device for detecting defects, more particularly in the surfaces of workpieces, wherein radiation is directed at a workpiece and is at least partially influenced by the workpiece, preferably by the defect.
PCT/EP2006/001465 2005-02-18 2006-02-17 Method and device for detecting and/or classifying defects Ceased WO2006087213A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020077021449A KR101332786B1 (en) 2005-02-18 2006-02-17 Method and apparatus for detecting and/or classifying defects

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE200510007715 DE102005007715B4 (en) 2005-02-18 2005-02-18 Device for detecting defects and use of the device
DE102005007715.3 2005-02-18
DE102005062146 2005-12-22
DE102005062146.5 2005-12-22

Publications (2)

Publication Number Publication Date
WO2006087213A2 WO2006087213A2 (en) 2006-08-24
WO2006087213A3 true WO2006087213A3 (en) 2007-03-29

Family

ID=36384461

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/001465 Ceased WO2006087213A2 (en) 2005-02-18 2006-02-17 Method and device for detecting and/or classifying defects

Country Status (3)

Country Link
KR (1) KR101332786B1 (en)
TW (1) TW200636230A (en)
WO (1) WO2006087213A2 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100890647B1 (en) * 2008-06-27 2009-03-27 와이즈플래닛(주) Display inspection device using cylindrical lens array and rod lens
DE102009021136A1 (en) * 2009-05-13 2010-12-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. control device
US8315453B2 (en) * 2010-07-27 2012-11-20 Applied Materials Israel, Ltd. Defect classification with optimized purity
KR101303602B1 (en) * 2011-11-15 2013-09-11 주식회사 미르기술 Noncontact inspection apparatus for Light Emitting Diode
NL1039263C2 (en) * 2011-12-23 2013-06-26 Zevenaar Elektronica & Sensoren B V DEVICE AND METHOD FOR COUNTING AND MEASURING PARTICLES.
CN110388885A (en) * 2013-07-01 2019-10-29 萨科希瑞斯先进控制有限公司 For optically SHAPE DETECTION and/or the method and apparatus for checking object
JP6476580B2 (en) * 2014-04-21 2019-03-06 株式会社山梨技術工房 Flat plate surface condition inspection apparatus and flat plate surface condition inspection method using the same
KR101694379B1 (en) 2014-12-29 2017-01-09 강우성 Apparatus and Method for automatic sorting of optical lens
KR101678169B1 (en) * 2015-05-08 2016-11-21 주식회사 나노프로텍 Upper Surface Foreign Matter Detection Device of Ultra-Thin Transparent Substrate
KR20170133113A (en) * 2016-05-25 2017-12-05 코닝정밀소재 주식회사 Method and apparatus of detecting particles on upper surface of glass, and method of irradiating incident light
TWI604907B (en) 2016-10-11 2017-11-11 財團法人工業技術研究院 Laser homogeneous machining apparatus and method thereof
KR102575017B1 (en) 2016-11-17 2023-09-05 삼성디스플레이 주식회사 Detecting method for defect of glass substrate
US10681344B2 (en) * 2017-12-15 2020-06-09 Samsung Display Co., Ltd. System and method for mura detection on a display
TWI658266B (en) * 2018-04-03 2019-05-01 中國鋼鐵股份有限公司 Method and system for evaluating quality of surface of work roll
CN110672618B (en) * 2019-09-25 2023-03-03 上海智觉光电科技有限公司 System and method for detecting bright surface of part appearance based on multi-angle light source
KR20220110291A (en) * 2019-12-13 2022-08-05 코닝 인코포레이티드 Laser-based inclusion detection system and method
CN114088665B (en) * 2021-11-24 2024-10-29 广东医科大学 Optical measuring device capable of being used for light transmittance detection
TWI807567B (en) * 2021-12-30 2023-07-01 致茂電子股份有限公司 Multifunctional standard calibration piece and detecting method of optical detecting apparatus
WO2023199265A1 (en) * 2022-04-15 2023-10-19 3M Innovative Properties Company Systems and methods for inspecting a worksurface
KR102772754B1 (en) * 2022-08-23 2025-02-24 한국로봇융합연구원 Apparatus and method for measuring the contamination level of a laser scanner using weights
CN120044047A (en) * 2025-02-20 2025-05-27 华中科技大学 Workpiece surface defect detection device based on dark field confocal microscopic imaging

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1338611A (en) * 1970-02-16 1973-11-28 British Aircraft Corp Ltd Method and apparatus for detecting faults in sheet glass
US3814946A (en) * 1972-12-04 1974-06-04 Asahi Glass Co Ltd Method of detecting defects in transparent and semitransparent bodies
US4492477A (en) * 1981-02-25 1985-01-08 Cem Cie Electro-Mecanique Process and apparatus for the detection of flaws in transparent sheets of glass
US4775238A (en) * 1985-09-24 1988-10-04 Erwin Sick Gmbh Optik-Elektronik Optical web monitoring apparatus
EP0323564A2 (en) * 1988-01-04 1989-07-12 Erwin Sick GmbH Optik-Elektronik Optical device for the inspection of flaws
EP0345949A2 (en) * 1988-05-06 1989-12-13 Gersan Establishment Sensing a narrow frequency band of radiation and examining objects or zones
US4914309A (en) * 1987-05-27 1990-04-03 Nippon Sheet Glass Co., Ltd. Discriminating type flaw detector for light-transmitting plate materials
DE3926349A1 (en) * 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optical defect inspection arrangement for flat transparent material - passes light via mirror forming image of illumination pupil on camera lens of photoreceiver
US5598262A (en) * 1992-10-20 1997-01-28 Thomson-Csf Process and device for inspecting transparent material
WO1999064845A1 (en) * 1998-06-05 1999-12-16 Glaverbel Defect detecting unit
WO2000026647A1 (en) * 1998-10-30 2000-05-11 Image Processing Systems Inc. Glass inspection system
US20020041374A1 (en) * 2000-10-10 2002-04-11 Yoshimasa Ohshima Apparatus for detecting foreign particle and defect and the same method
US20040080740A1 (en) * 2002-03-22 2004-04-29 Applied Materials, Inc Wafer defect detection system with traveling lens multi-beam scanner
US6833913B1 (en) * 2002-02-26 2004-12-21 Kla-Tencor Technologies Corporation Apparatus and methods for optically inspecting a sample for anomalies

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10160683A (en) 1996-11-29 1998-06-19 Matsushita Electric Ind Co Ltd Foreign matter inspection method and apparatus
KR20010055184A (en) * 1999-12-09 2001-07-04 구자홍 Optics apparatus for pattern inspection of pdp glass

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1338611A (en) * 1970-02-16 1973-11-28 British Aircraft Corp Ltd Method and apparatus for detecting faults in sheet glass
US3814946A (en) * 1972-12-04 1974-06-04 Asahi Glass Co Ltd Method of detecting defects in transparent and semitransparent bodies
US4492477A (en) * 1981-02-25 1985-01-08 Cem Cie Electro-Mecanique Process and apparatus for the detection of flaws in transparent sheets of glass
US4775238A (en) * 1985-09-24 1988-10-04 Erwin Sick Gmbh Optik-Elektronik Optical web monitoring apparatus
US4914309A (en) * 1987-05-27 1990-04-03 Nippon Sheet Glass Co., Ltd. Discriminating type flaw detector for light-transmitting plate materials
EP0323564A2 (en) * 1988-01-04 1989-07-12 Erwin Sick GmbH Optik-Elektronik Optical device for the inspection of flaws
EP0345949A2 (en) * 1988-05-06 1989-12-13 Gersan Establishment Sensing a narrow frequency band of radiation and examining objects or zones
DE3926349A1 (en) * 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optical defect inspection arrangement for flat transparent material - passes light via mirror forming image of illumination pupil on camera lens of photoreceiver
US5598262A (en) * 1992-10-20 1997-01-28 Thomson-Csf Process and device for inspecting transparent material
WO1999064845A1 (en) * 1998-06-05 1999-12-16 Glaverbel Defect detecting unit
WO2000026647A1 (en) * 1998-10-30 2000-05-11 Image Processing Systems Inc. Glass inspection system
US20020041374A1 (en) * 2000-10-10 2002-04-11 Yoshimasa Ohshima Apparatus for detecting foreign particle and defect and the same method
US6833913B1 (en) * 2002-02-26 2004-12-21 Kla-Tencor Technologies Corporation Apparatus and methods for optically inspecting a sample for anomalies
US20040080740A1 (en) * 2002-03-22 2004-04-29 Applied Materials, Inc Wafer defect detection system with traveling lens multi-beam scanner

Also Published As

Publication number Publication date
TW200636230A (en) 2006-10-16
KR101332786B1 (en) 2013-11-25
WO2006087213A2 (en) 2006-08-24
KR20070107773A (en) 2007-11-07

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